SAFETY DATA SHEET
AZ 1518 Photoresist 917MIF (US)
Substance No.: GHSBBG7063
Version 4.1
Revision Date 04/02/2015
Print Date 12/29/2015
1 / 14
SECTION 1. PRODUCT AND COMPANY IDENTIFICATION
Product name : AZ 1518 Photoresist 917MIF (US)
Material No. : 186129
Product Use Description : Intermediate for electronic industry
Company : EMD Performance Materials Corp.
An affiliate of Merck KGaA, Darmstadt Germany
One International Plaza, Suite 300
Philadelphia, PA 19113
Telephone : 1-888-367-3275
Emergency telephone number : 1-800-424-9300 (CHEMTREC)
SECTION 2. HAZARDS IDENTIFICATION
Emergency Overview
HMIS Classification : Health hazard: 2
Flammability: 2
Reactivity: 0
PPE:X
NFPA Classification : Health hazard: 2
Fire Hazard: 2
Reactivity Hazard: 0
Special Hazards: NONE
GHS Classification
0
2
2
SAFETY DATA SHEET
AZ 1518 Photoresist 917MIF (US)
Substance No.: GHSBBG7063
Version 4.1
Revision Date 04/02/2015
Print Date 12/29/2015
2 / 14
Hazard category, Hazard
class
: Flammable liquids, Category 3
Hazard category, Hazard
class
Eye irritation, Category 2A
Hazard category, Hazard
class
Specific target organ toxicity - single exposure, Category 3
GHS-Labelling
Symbol(s) :
Signal word : Warning
Hazard statements : Flammable liquid and vapour.
Causes serious eye irritation.
May cause respiratory irritation, and drowsiness or dizziness.
Precautionary statements : Prevention:
Keep away from heat/sparks/open flames/hot surfaces. - No
smoking.
Keep container tightly closed.
Ground/bond container and receiving equipment.
Use explosion-proof electrical/ ventilating/ lighting/ equipment.
Use only non-sparking tools.
Take precautionary measures against static discharge.
Wash skin thoroughly after handling.
Wear protective gloves/ protective clothing/ eye protection/
face protection.
Response:
IF ON SKIN (or hair): Remove/ Take off immediately all
contaminated clothing. Rinse skin with water/ shower.
IF INHALED: If breathing is difficult, remove victim to fresh air
and keep at rest in a position comfortable for breathing.
IF IN EYES: Rinse cautiously with water for several minutes.
Remove contact lenses, if present and easy to do. Continue
rinsing.
If eye irritation persists: Get medical advice/ attention.
In case of fire: Use dry sand, dry chemical or alcohol-resistant
foam for extinction.
Storage:
Store in a well-ventilated place. Keep cool.
Disposal:
Dispose of contents/ container to an approved waste disposal
plant.
SAFETY DATA SHEET
AZ 1518 Photoresist 917MIF (US)
Substance No.: GHSBBG7063
Version 4.1
Revision Date 04/02/2015
Print Date 12/29/2015
3 / 14
Special labelling of certain mixtures :
The following percentage of the mixture consists of ingredient(s) with unknown acute toxicity: 23 %
SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS
Hazardous ingredients
Component CAS-No. Weight percent
1-Methoxy-2-propanol acetate 108-65-6 65 - 75
Diazonaphthoquinonesulfonic ester 68510-93-0 5 - 10
2-Methoxy-1-propanol acetate 70657-70-4 < 0.3
Non-hazardous ingredients
Component CAS-No. Weight percent
Cresol novolak resin 67829000004-5653P 20 - 25
SECTION 4. FIRST AID MEASURES
First aid procedures
Inhalation : If inhaled, remove to fresh air. If breathing is difficult, give
oxygen. If symptoms persist, call a physician.
Skin contact : Wash off immediately with soap and plenty of water while
removing all contaminated clothes and shoes. Get medical
attention if irritation develops and persists.
Eye contact : Remove contact lenses. Flush eyes with water at least 15
minutes. Get medical attention if eye irritation develops or
persists.
Ingestion : Keep respiratory tract clear. If conscious, drink plenty of water.
Never give anything by mouth to an unconscious person.
Obtain medical attention.
SAFETY DATA SHEET
AZ 1518 Photoresist 917MIF (US)
Substance No.: GHSBBG7063
Version 4.1
Revision Date 04/02/2015
Print Date 12/29/2015
4 / 14
SECTION 5. FIREFIGHTING MEASURES
Flammable properties
Flash point : 112 °F (44 °C)
Method: closed cup
Fire fighting
Suitable extinguishing media : Use water spray, alcohol-resistant foam, dry chemical or
carbon dioxide.
Further information : In the event of fire, wear self-contained breathing apparatus.
Use personal protective equipment.
Cool containers/tanks with water spray.
Protective equipment and precautions for firefighters
Specific hazards during
firefighting
: As the product contains combustible organic components, fire
will produce dense black smoke containing hazardous
products of combustion (see section 10).
SECTION 6. ACCIDENTAL RELEASE MEASURES
Environmental precautions : Do not allow entry to drains,water courses or soil
Prevent spreading by use of suitable barriers.
Local authorities should be advised if significant spillages
cannot be contained.
Methods for containment /
Methods for cleaning up
: Wearing appropriate personal protective equipment, contain
spill, ventilate area of spill or leak, remove all sparking devices
or ignition sources, collect onto inert absorbent, and place in a
suitable container.
SECTION 7. HANDLING AND STORAGE
Handling
Handling : Do not breathe vapours or spray mist.
Do not get on skin or clothing.
For personal protection see section 8.
SAFETY DATA SHEET
AZ 1518 Photoresist 917MIF (US)
Substance No.: GHSBBG7063
Version 4.1
Revision Date 04/02/2015
Print Date 12/29/2015
5 / 14
Use only in area provided with appropriate exhaust ventilation.
Advice on protection against
fire and explosion
: Keep away from heat and sources of ignition.
Take measures to prevent the build up of electrostatic charge.
Avoid shock and friction.
Storage
Further information on
storage conditions
: Keep container tightly closed in a dry and well-ventilated
place.
May liberate combustible solvent vapors.
Store at appropriate temperature. See label for details.
SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION
Exposure Guidelines
Components with workplace control parameters
Components CAS-No. Control parameters Basis
1-Methoxy-2-propanol acetate 108-65-6 TWA: 50 ppm US WEEL
Engineering measures
Engineering measures : Handle only in a place equipped with local exhaust (or other
appropriate exhaust).
Personal protective equipment
Eye protection : Safety eyewear to protect against splashes.
Hand protection : Solvent-resistant gloves
Skin and body protection : Clothing suitable to prevent skin contact.
Respiratory protection : In the case of vapour formation use a respirator with an
approved filter.
Respirator with filter for organic vapour
Use NIOSH approved respiratory protection.
Hygiene measures : Observe the usual precautions when handling chemicals.
SAFETY DATA SHEET
AZ 1518 Photoresist 917MIF (US)
Substance No.: GHSBBG7063
Version 4.1
Revision Date 04/02/2015
Print Date 12/29/2015
6 / 14
SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES
Appearance
Form : Liquid
Color : Clear,amber-red
Odor : Strong, characteristic odor.
Safety data
Flash point : 112 °F (44 °C)
Method: closed cup
Auto-ignition temperature : no data
Starts to boil : from 293 °F (145 °C)
Vapour pressure : 3.2 Torr
at 68 °F (20 °C)
Method: calculated
Density : 1.05 g/cm3
at 68 °F (20 °C)
Water solubility : The solvent is partially water soluble but the product forms two
layers.
Viscosity, dynamic : approx.35 mPas
at 68 °F (20 °C)
VOC : 745 g/l (Calculated value)
Loss on drying : > 70 %
SECTION 10. STABILITY AND REACTIVITY
Conditions to avoid : Avoid contact with oxidizing agents.
Avoid contact with strong acids.
Avoid contact with alkaline materials.
Hazardous decomposition : Hazardous decomposition products due to incomplete
SAFETY DATA SHEET
AZ 1518 Photoresist 917MIF (US)
Substance No.: GHSBBG7063
Version 4.1
Revision Date 04/02/2015
Print Date 12/29/2015
7 / 14
products combustion
Carbon monoxide, carbon dioxide and unburned
hydrocarbons (smoke).
Hazardous reactions : Hazardous polymerisation does not occur.
Chemical stability : Stable under normal conditions.
SECTION 11. TOXICOLOGICAL INFORMATION
Data for AZ 1518 Photoresist 917MIF (US)
Further information : No toxicological testing was carried out on the preparation.
Data for 1-Methoxy-2-propanol acetate (108-65-6)
Acute oral toxicity : LD50: 8,532 mg/kg
Species: rat
Acute inhalation toxicity : LC50: > 23.8 mg/l
Exposure time: 6 h
Species: rat
Acute d
