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SAFETY DATA SHEET AZ 1518 Photoresist 917MIF (US) · PDF file AZ 1518 Photoresist 917MIF (US) Substance No.: GHSBBG7063 Version 4.1 Revision Date 04/02/2015 Print Date 12/29/2015 2

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  • SAFETY DATA SHEET AZ 1518 Photoresist 917MIF (US) Substance No.: GHSBBG7063 Version 4.1

    Revision Date 04/02/2015 Print Date 12/29/2015

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    SECTION 1. PRODUCT AND COMPANY IDENTIFICATION

    Product name : AZ 1518 Photoresist 917MIF (US)

    Material No. : 186129

    Product Use Description : Intermediate for electronic industry

    Company : EMD Performance Materials Corp.

    An affiliate of Merck KGaA, Darmstadt Germany One International Plaza, Suite 300 Philadelphia, PA 19113

    Telephone : 1-888-367-3275

    Emergency telephone number : 1-800-424-9300 (CHEMTREC)

    SECTION 2. HAZARDS IDENTIFICATION

    Emergency Overview

    HMIS Classification : Health hazard: 2

    Flammability: 2 Reactivity: 0 PPE:X

    NFPA Classification : Health hazard: 2

    Fire Hazard: 2 Reactivity Hazard: 0 Special Hazards: NONE

    GHS Classification

    0

    2

    2

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    Hazard category, Hazard class

    : Flammable liquids, Category 3

    Hazard category, Hazard class

    Eye irritation, Category 2A

    Hazard category, Hazard class

    Specific target organ toxicity - single exposure, Category 3

    GHS-Labelling

    Symbol(s) :

    Signal word : Warning

    Hazard statements : Flammable liquid and vapour. Causes serious eye irritation. May cause respiratory irritation, and drowsiness or dizziness.

    Precautionary statements : Prevention: Keep away from heat/sparks/open flames/hot surfaces. - No smoking. Keep container tightly closed. Ground/bond container and receiving equipment. Use explosion-proof electrical/ ventilating/ lighting/ equipment. Use only non-sparking tools. Take precautionary measures against static discharge. Wash skin thoroughly after handling. Wear protective gloves/ protective clothing/ eye protection/ face protection. Response: IF ON SKIN (or hair): Remove/ Take off immediately all contaminated clothing. Rinse skin with water/ shower. IF INHALED: If breathing is difficult, remove victim to fresh air and keep at rest in a position comfortable for breathing. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/ attention. In case of fire: Use dry sand, dry chemical or alcohol-resistant foam for extinction. Storage: Store in a well-ventilated place. Keep cool. Disposal: Dispose of contents/ container to an approved waste disposal plant.

  • SAFETY DATA SHEET AZ 1518 Photoresist 917MIF (US) Substance No.: GHSBBG7063 Version 4.1

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    Special labelling of certain mixtures : The following percentage of the mixture consists of ingredient(s) with unknown acute toxicity: 23 %

    SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

    Hazardous ingredients

    Component CAS-No. Weight percent

    1-Methoxy-2-propanol acetate 108-65-6 65 - 75

    Diazonaphthoquinonesulfonic ester 68510-93-0 5 - 10

    2-Methoxy-1-propanol acetate 70657-70-4 < 0.3

    Non-hazardous ingredients

    Component CAS-No. Weight percent

    Cresol novolak resin 67829000004-5653P 20 - 25

    SECTION 4. FIRST AID MEASURES

    First aid procedures

    Inhalation : If inhaled, remove to fresh air. If breathing is difficult, give

    oxygen. If symptoms persist, call a physician. Skin contact : Wash off immediately with soap and plenty of water while

    removing all contaminated clothes and shoes. Get medical attention if irritation develops and persists.

    Eye contact : Remove contact lenses. Flush eyes with water at least 15

    minutes. Get medical attention if eye irritation develops or persists.

    Ingestion : Keep respiratory tract clear. If conscious, drink plenty of water.

    Never give anything by mouth to an unconscious person. Obtain medical attention.

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    SECTION 5. FIREFIGHTING MEASURES

    Flammable properties

    Flash point : 112 °F (44 °C) Method: closed cup

    Fire fighting

    Suitable extinguishing media : Use water spray, alcohol-resistant foam, dry chemical or carbon dioxide.

    Further information : In the event of fire, wear self-contained breathing apparatus. Use personal protective equipment. Cool containers/tanks with water spray.

    Protective equipment and precautions for firefighters

    Specific hazards during firefighting

    : As the product contains combustible organic components, fire will produce dense black smoke containing hazardous products of combustion (see section 10).

    SECTION 6. ACCIDENTAL RELEASE MEASURES

    Environmental precautions : Do not allow entry to drains,water courses or soil Prevent spreading by use of suitable barriers. Local authorities should be advised if significant spillages cannot be contained.

    Methods for containment / Methods for cleaning up

    : Wearing appropriate personal protective equipment, contain spill, ventilate area of spill or leak, remove all sparking devices or ignition sources, collect onto inert absorbent, and place in a suitable container.

    SECTION 7. HANDLING AND STORAGE

    Handling

    Handling : Do not breathe vapours or spray mist. Do not get on skin or clothing. For personal protection see section 8.

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    Use only in area provided with appropriate exhaust ventilation.

    Advice on protection against fire and explosion

    : Keep away from heat and sources of ignition. Take measures to prevent the build up of electrostatic charge. Avoid shock and friction.

    Storage

    Further information on storage conditions

    : Keep container tightly closed in a dry and well-ventilated place. May liberate combustible solvent vapors. Store at appropriate temperature. See label for details.

    SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

    Exposure Guidelines

    Components with workplace control parameters

    Components CAS-No. Control parameters Basis

    1-Methoxy-2-propanol acetate 108-65-6 TWA: 50 ppm US WEEL

    Engineering measures

    Engineering measures : Handle only in a place equipped with local exhaust (or other appropriate exhaust).

    Personal protective equipment

    Eye protection : Safety eyewear to protect against splashes.

    Hand protection : Solvent-resistant gloves

    Skin and body protection : Clothing suitable to prevent skin contact.

    Respiratory protection : In the case of vapour formation use a respirator with an approved filter. Respirator with filter for organic vapour Use NIOSH approved respiratory protection.

    Hygiene measures : Observe the usual precautions when handling chemicals.

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    SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

    Appearance

    Form : Liquid Color : Clear,amber-red

    Odor : Strong, characteristic odor.

    Safety data

    Flash point : 112 °F (44 °C) Method: closed cup

    Auto-ignition temperature : no data

    Starts to boil : from 293 °F (145 °C)

    Vapour pressure : 3.2 Torr at 68 °F (20 °C) Method: calculated

    Density : 1.05 g/cm3 at 68 °F (20 °C)

    Water solubility : The solvent is partially water soluble but the product forms two layers.

    Viscosity, dynamic : approx.35 mPas at 68 °F (20 °C)

    VOC : 745 g/l (Calculated value)

    Loss on drying : > 70 %

    SECTION 10. STABILITY AND REACTIVITY

    Conditions to avoid : Avoid contact with oxidizing agents. Avoid contact with strong acids. Avoid contact with alkaline materials.

    Hazardous decomposition : Hazardous decomposition products due to incomplete

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    products combustion Carbon monoxide, carbon dioxide and unburned hydrocarbons (smoke).

    Hazardous reactions : Hazardous polymerisation does not occur.

    Chemical stability : Stable under normal conditions.

    SECTION 11. TOXICOLOGICAL INFORMATION

    Data for AZ 1518 Photoresist 917MIF (US) Further information : No toxicological testing was carried out on the preparation.

    Data for 1-Methoxy-2-propanol acetate (108-65-6)

    Acute oral toxicity : LD50: 8,532 mg/kg

    Species: rat

    Acute inhalation toxicity : LC50: > 23.8 mg/l

    Exposure time: 6 h Species: rat

    Acute d

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