AZ 5200-E Photoresist - MicroChemicals · AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP,

AZ 5200-E Photoresist

Data Package

AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP, Signiflow, SWG, and TARP are trademarks of AZ Electronic Materials.


Original i-line resists Various viscosity grades for a multitude of applications.

Sensitive in i-line and g-line

High thermal stability.

Can be developed in a variety of metal ion free and inorganic developers(with and without surfactants)

Can be used in a positive mode and with a special image reversal process.


AZ 5200-E Photoresisti-line Resolution at Specific Film Thickness

0.5 0.6 0.7 0.8 0.9 1.0 ~ 1.5 ~ 2Resolution (µm)

Film

Thi

ckne

ss (µ

m)

7

6

5

4

3

2

1

AZ 5218-E

AZ 5209-E

AZ 5214-E


AZ 5200-E PhotoresistSpin Speed Curves

0123456

0 1000 2000 3000 4000rpm

Film

Thi

ckne

ss, µ

m

AZ 5218-E

AZ 5209-E

AZ 5214-E



DTC Swingcurve for AZ 5214-E ResistAZ 1:1 Developer

40

45

50

55

60

65

1.14 1.18 1.22 1.26 1.3 1.34 1.38 1.42 1.46 1.5Film Thickness [µm]

mJ/

cm²

max =1.194µm

min = 1.250µm

max = 1.326µm

min = 1.381µm


AZ 5200-E PhotoresistOptical Parameters

◊ Refractive Index

Bleached 365nm 405nm 435nmn 1.6904 1.6667 1.6534k 0.0012 0.0005 0.0004

Unbleachedn 1.6990 1.6888 1.6758k 0.0175 0.0179 0.0040


AZ 5200-E Photoresist Optical Parameters

◊ Dill Parametersi-line: g-line:

A = 0.6181 (µm-1) A= NAB = 0.0314 (µm-1) B= NAC = 0.0284 (cm2/mJ) C= NA

◊ Cauchy CoefficientsA B C

Bleached 1.5908 0.011525µm² 6.70E-07µm4

Unbleached 1.6035 0.005574µm² 2.34E-03µm4


AZ 5200-E Photoresist Optical Parameters - Absorptivity

0.000

0.005

0.010

0.015

0.020

0.025

0.030

0.035

300 350 400 450 500 550 600 650

wave length, nm

abs

322 nm 385 nm


AZ 5200-E PhotoresistImage Reversal Process

1. Prepare wafers (e.g. HMDS prime)

2. Spin coat 0.6-2.6µm

3. Soft bake 90-100°C/ 45-60sec hot plate

4. Expose (g-line, i-line, broad band)

5.PEB 110-120°C/ 45 sec or two step

6. Flood exposure (365-405nm/ 1-2J/cm²)

7. Develop (MIF or IN developers)

Improved Adhesion

Oven bake 90°C/ 30min

Inducing cross linking

Under-exposure gives lift off profile

Solubilization of previouslyunexposed resist

Optimum resolution andLine-width control withmore dilute developers


AZ 5214E PhotoresistProcess Conditions

Dense LinesFT: 1.25µmSB: 100°C/ 42 sec NIKON 0.54 NA i-Line No PEBAZ 300 MIF Developer ,70 sec double puddle @ 20.0°C


D9813-S : Nominal 84 mJ/cm²Exp. latitude 81 %

D9721: Nominal 77 mJ/cm²Exp. latitude 87 %

1.70

1.80

1.90

2.00

2.10

2.20

2.30

2.40

40 50 60 70 80 90 100 110 120

Exposure Dose [mJ/cm²]

Mea

sure

d Li

newid

th [µ

m]

AZ 5214E Photoresist2.0 µm L/S Exposure Latitude on Si, FT = 1.25 µm

SB: 100°C, 42 sec; PEB: NoneNIKON 0.54 NA i-Line AZ 300 MIF Developer ,70 sec double puddle @ 20.0°C

E nominal = 84 mJ/cm², Exposure Latitude = 81%


AZ 5214E Photoresist2.0 µm L/S Exposure Latitude on Si, FT = 1.25 µm

SB: 100°C, 42 sec; PEB: NoneNIKON 0.54 NA i-Line AZ 300 MIF Developer ,70sec double puddle @ 20.0°C

E nom = 84 mJ/cm²EXP.Lat. = 81%

45mJ/cm² 55mJ/cm² 65mJ/cm² 75mJ/cm²

80mJ/cm²

85mJ/cm²95mJ/cm²105mJ/cm²115mJ/cm²


0.2

0.4

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 2.2Nominal Linewidth [µm]

Mea

sure

d Li

new

idth

[µm

]

75 mJ/cm² 85 mJ/cm² 95 mJ/cm²

AZ 5214E PhotoresistLinearity on Si, FT = 1.25 µm Focus = 0.0 µm



AZ 5214E PhotoresistLinearity on Si, FT = 1.25 µm


75 mJ/cm²

1.5µm 1.2µm 1.1µm 1.0µm

0.9µm

0.8µm0.7µm0.6µm0.5µm




85 mJ/cm²

1.5µm 1.1µm 0.8µm 0.7µm

0.6µm0.55µm0.5µm0.45µm

0.65µm




95 mJ/cm²

1.0µm

0.9µm

0.8µm0.75µm0.65µm

1.1µm1.2µm1.5µm

0.7µm


1.4

1.6

1.8

2.0

2.2

2.4

-1.6 -1.2 -0.8 -0.4 0.0 0.4 0.8 1.2 1.6

Focus [µm]

Mea

sure

d Li

newid

th [µ

m]


AZ 5214E Photoresist2.0 µm L/S Focus Latitude on Si, FT = 1.25 µm





75 mJ/cm²

1.4µm 0.2µm0.6µm1.0µm

-0.2µm-0.6µm-1.4µm -1.0µm

0.0µm




85 mJ/cm²

1.4µm 0.2µm0.6µm1.0µm

-0.2µm-0.6µm-1.4µm -1.0µm

0.0µm




95 mJ/cm²

1.4µm 0.2µm0.6µm1.0µm

-0.2µm-0.6µm-1.4µm -1.0µm

0.0µm


Process conditionsFT: 4µm, SB: 110°C/90 secExp. PE 400mJ/cm² with i-Line filter, PEB: 50°C/60sec then 110°C/90secDevelop: AZ 917 MIF developer, 90sec spray @ room temperature

AZ 5218-E Photoresist3µm L/S Image Reversal Process


AZ 5214-E PhotoresistThermal Stability of Large Pad

No Bake 110°C 115°C

120°C

125°CSB: 100°C, 42 sec; PEB: NoneNIKON 0.54 NA i-Line AZ 300 MIF Developer ,70sec double puddle @ 20.0°CHard Bake: 120 sec/ hot plate


Dense LinesFT: 1.25µmSB: 100°C/ 42 sec; NIKON 0.54 NA i-LineNo PEBAZ 1:1 Developer, 60 sec Immersion @ 24.5°C

AZ 5214-E PhotoresistProcess Conditions


SB: 100°C/ 42 sec; NIKON 0.54 NA i-LineAZ 1:1 Developer 60sec immersion @ 24.5°C

AZ 5214-E PhotoresistExposure Latitude 2.0 µm L/S on Si, FT = 1.25µm


75mJ/cm²

80mJ/cm²85mJ/cm²


D9822-S: Nominal 65 mJ/cm²Exp. latitude 74 %

D9811 : Nominal 68 mJ/cm²Exp. latitude 59 %

1.70

1.80

1.90

2.00

2.10

2.20

2.30

2.40

50 60 70 80 90

Exposure Dose [mJ/cm²]

Mea

sure

d Li

new

idth

[µm

]



E nominal = 68 mJ/cm², Exposure Latitude = 59%





75mJ/cm²

80mJ/cm²85mJ/cm²

E nom = 68 mJ/cm²Exp.Lat. = 59%


0.2

0.4

0.6

0.8

1.0

1.2

1.4

1.6

1.8

2.0

2.2

0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 2.2Nominal Linewidth [µm]

Mea

sure

d Li

new

idth

[µm

]



AZ 5214-E PhotoresistLinearity on Si, FT = 1.25µm




60 mJ/cm²

1.2µm 1.0µm 0.90µm 0.80µm

0.60µm 0.65µm 0.70µm

0.75µm




65 mJ/cm²

1.2µm 1.0µm 0.90µm 0.80µm

0.60µm 0.65µm 0.70µm

0.75µm

0.55µm




75 mJ/cm²

1.2µm 1.0µm 0.90µm 0.80µm

0.60µm 0.65µm 0.70µm0.55µm

0.75µm


1.4

1.6

1.8

2.0

2.2

2.4

-1.6 -1.2 -0.8 -0.4 0.0 0.4 0.8 1.2 1.6Focus [µm]

Mea

sure

d Li

new

idth

[µm

]

65 mJ/cm²


AZ 5214-E PhotoresistFocus Latitude 2.0 µm L/S on Si, FT = 1.25µm



AZ 5214-E PhotoresistFocus Latitude 2.0 µm L/S on Si, FT = 1.25µm

65 mJ/cm²

1.4µm 1.0µm 0.60µm 0.20µm

-1.0µm -0.60µm -0.20µm-1.40µm

0.00µm

Documents

AZ 5200-E Photoresist - MicroChemicals · AZ, the AZ logo, BARLi, Aquatar, nLOF, Kwik Strip, Klebosol, and Spinfil are registered trademarks and AX, DX, HERB, HiR, MiR, NCD, PLP,