113 13

Nanofabrication13 Cleanroom13 Safety13 Manual13

Introduction13

The13 Penn13 State13 Nanofabrication13 Cleanroom13 management13 team13 is13 committed13 to13 providing13 a13 safe13 working13 environment13 for13 its13 users13 13 The13 goal13 of13 this13 manual13 is13 to13 provide13 information13 and13 guidance13 to13 the13 certified13 users13 of13 the13 cleanroom13 on13 how13 to13 conduct13 their13 research13 in13 a13 safe13 manner13 13 13 13

This13 document13 attempts13 to13 cover13 all13 acceptable13 operating13 and13 safety13 policies13 of13 the13 cleanroom13 including13 practices13 policies13 and13 procedures13 as13 they13 relate13 to13 safety13 as13 well13 as13 details13 of13 equipment13 use13 chemical13 and13 compressed13 gas13 safety13 13 13 It13 is13 impossible13 however13 to13 define13 a13 policy13 for13 every13 conceivable13 situation13 13 13 Users13 should13 use13 a13 common13 sense13 approach13 when13 working13 in13 the13 cleanroom13 13 Safety13 is13 everyonersquos13 responsibility13 13 13 Again13 it13 is13 each13 userrsquos13 professional13 duty13 to13 be13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13 Users13 who13 fail13 to13 follow13 the13 policies13 outlined13 in13 this13 manual13 or13 fail13 to13 act13 in13 a13 professional13 safe13 and13 responsible13 manner13 while13 conducting13 research13 in13 the13 cleanroom13 risk13 having13 their13 access13 to13 the13 cleanroom13 suspended13 or13 revoked13

NOTE13 13 Users13 suggestions13 and13 feedback13 on13 any13 aspect13 of13 the13 cleanroom13 staff13 operation13 or13 equipment13 are13 welcome13 and13 highly13 encouraged13 13 Please13 feel13 free13 to13 direct13 your13 suggestions13 to13 any13 of13 the13 cleanroomrsquos13 technical13 staff13 advisors13 or13 faculty13 directors13 13 13 13

13 13

213 13

Contents13 Introduction13 13 113

General13 Information13 13 413

Safety13 Training13 and13 Cleanroom13 Orientation13 13 413

Access13 13 413

Research13 Instrument13 Management13 System13 (RIMS)13 13 413

Hours13 of13 Operation13 Off13 Hours13 Use13 13 513

Cleanroom13 Protocol13 and13 Etiquette13 13 513

Proper13 Cleanroom13 Attire13 13 513

Materials13 Restrictions13 and13 Procedures13 13 613

Restricted13 Access13 Areas13 13 713

Surveillance13 Cameras13 13 713

Eyewash13 and13 Safety13 Showers13 13 713

Cleanroom13 Alarms13 13 Evacuation13 Emergency13 Response13 13 813

Fire13 Detection13 Alarms13 13 813

Toxic13 Gas13 Detection13 13 813

Visitors13 13 913

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13 13 913

Safety13 Incident13 Reporting13 13 1013

Equipment13 Use13 and13 Safety13 13 1113

Introduction13 13 1113

Equipment13 Training13 13 1113

Equipment13 Operation13 13 1213

Equipment13 Issues13 13 1213

Chemical13 Use13 and13 Safety13 13 1313

Introduction13 13 1313

Chemical13 Supplies13 13 1413

Material13 Safety13 Data13 Sheet13 (MSDS)13 13 1513

Personal13 Protective13 Equipment13 (PPE)13 13 1613

313 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13 1713

Chemical13 Spills13 13 1713

Chemical13 Storage13 13 1813

Chemical13 Waste13 13 1813

Chemical13 Waste13 Satellite13 Accumulation13 Area13 13 2013

Compressed13 Gas13 Safety13 13 2013

Introduction13 13 2013

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13 2113

Compressed13 Gas13 Storage13 13 2113

Transportation13 of13 Compressed13 Gas13 Cylinders13 13 2113

Compressed13 Gas13 Delivery13 13 2213

Toxic13 Gas13 Monitoring13 System13 13 2313

Appendix13 A13 Fire13 Alarm13 Map13 13 2413

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13 13 2513

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13 2613

Appendix13 D13 Buddy13 Policy13 13 2713

Appendix13 E13 Equipment13 Training13 13 2813

Appendix13 F13 Emergency13 Response13 Procedures13 13 3013

Fire13 13 3013

Chemical13 Spill13 13 Gas13 Release13 13 3013

Medical13 Emergency13 13 3213

Appendix13 G13 13 Chemical13 Waste13 Labels13 13 3313

13

13 13

413 13

General13 Information13

Safety13 Training13 and13 Cleanroom13 Orientation13

All13 PSU13 cleanroom13 users13 are13 required13 to13 read13 this13 safety13 manual13 and13 complete13 the13 Penn13 State13 University13 Lab13 Safety13 Training13 Program13 and13 a13 Nanofabrication13 cleanroom13 specific13 orientation13 in13 order13 to13 use13 the13 laboratory13 13 13 The13 Lab13 Safety13 program13 provides13 an13 overview13 of13 general13 laboratory13 safety13 procedures13 proper13 chemical13 use13 and13 disposal13 procedures13 as13 well13 as13 general13 lab13 use13 and13 etiquette13 13 13 Users13 can13 complete13 this13 training13 online13 at13 the13 website13 of13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 13 (EHampS)13 (httpwwwehspsuedu)13 (Note13 a13 Penn13 State13 Access13 Account13 ID13 or13 Friends13 of13 Penn13 State13 ID13 is13 required)13 or13 by13 attending13 a13 safety13 class13 provided13 by13 the13 Penn13 State13 Materials13 Research13 Institute13 (MRI)13 Safety13 representative13 13 13 The13 Nanofabrication13 cleanroom13 orientation13 includes13 a13 lab13 walkthrough13 conducted13 by13 a13 MRI13 staff13 member13 during13 which13 important13 safety13 items13 and13 issues13 are13 identified13 for13 the13 users13 13 The13 orientation13 also13 provides13 information13 on13 research13 ethics13 and13 societal13 impact13 13 13

Access13

Access13 to13 the13 cleanroom13 is13 for13 certified13 users13 and13 technical13 staff13 only13 13 13 In13 order13 to13 become13 a13 certified13 user13 of13 the13 cleanroom13 you13 must13 have13 completed13 items13 described13 in13 the13 previous13 paragraph13 13 Upon13 completion13 of13 those13 items13 certification13 is13 granted13 for13 one13 calendar13 year13 13 At13 the13 end13 of13 each13 calendar13 year13 users13 are13 required13 to13 undergo13 safety13 recertification13 13 by13 completing13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 online13 refresher13 safety13 training13 course(httpwwwehspsuedu)13 13 13 If13 a13 user13 fails13 to13 complete13 recertification13 cleanroom13 access13 will13 be13 suspended13 until13 recertification13 is13 completed13 13 13

PLEASE13 NOTE13 access13 to13 the13 cleanroom13 in13 and13 of13 itself13 does13 not13 grant13 certified13 users13 the13 right13 to13 operate13 equipment13 13 13 In13 order13 to13 operate13 equipment13 certified13 users13 complete13 equipment13 training13 13 13 Details13 on13 equipment13 training13 can13 be13 found13 in13 the13 Equipment13 Use13 Safety13 section13 of13 this13 document13

Research13 Instrument13 Management13 System13 (RIMS)13

RIMS13 is13 the13 web-shy‐based13 software13 platform13 used13 13 for13 reserving13 equipment13 tracking13 equipment13 use13 and13 lab13 time13 and13 billing13 in13 all13 user13 facilities13 overseen13 by13 the13 Office13 of13 the13 Vice13 President13 for13 Research13 (VPR)13 at13 Penn13 State13 University13 13 13 The13 system13 was13 formerly13

513 13

designated13 as13 the13 ldquoPortalrdquo13 (prior13 to13 72010)13 and13 was13 developed13 in13 collaboration13 with13 a13 commercial13 vendor13 Versatile13 and13 customized13 for13 use13 by13 Penn13 Statersquos13 user13 facilities13 13 13 In13 order13 to13 begin13 work13 in13 the13 cleanroom13 you13 must13 setup13 an13 account13 in13 RIMS13 13 13 Details13 on13 how13 to13 obtain13 a13 RIMS13 account13 can13 be13 found13 on13 the13 MRIrsquos13 RIMS13 Launchpad13 page13 13 (httpwwwrimspsuedufaqsgetting_startedasp)13

Hours13 of13 Operation13 Off13 Hours13 Use13

The13 Penn13 State13 Nanofabrication13 clean13 room13 is13 open13 for13 use13 seven13 (7)13 days13 a13 week13 twenty13 four13 (24)13 hours13 a13 day13 13 13 If13 the13 cleanroom13 is13 closed13 for13 any13 reason13 information13 concerning13 the13 reason13 for13 shut13 down13 and13 the13 estimated13 duration13 will13 be13 posted13 on13 the13 MRIrsquos13 RIMS13 Launchpad13 page13 (httpwwwrimspsuedufaqsgetting_startedasp)13 as13 well13 as13 on13 monitors13 outside13 the13 cleanroom13 gowning13 area13 13 13

Although13 the13 cleanroom13 is13 open13 seven13 (7)13 days13 a13 week13 twenty13 four13 (24)13 hours13 a13 day13 it13 is13 only13 staffed13 Monday13 thru13 Friday13 from13 800AM13 to13 600PM13 13 To13 ensure13 a13 safe13 working13 environment13 for13 our13 users13 we13 have13 implemented13 a13 ldquoBuddyrdquo13 policy13 in13 which13 users13 working13 between13 the13 hours13 of13 600PM13 and13 800AM13 must13 work13 with13 another13 certified13 user13 of13 the13 cleanroom13 13 13 Details13 on13 the13 procedures13 of13 the13 ldquoBuddyrdquo13 policy13 can13 be13 found13 in13 the13 Appendix13 D13 of13 this13 document13 13 13

Cleanroom13 Protocol13 and13 Etiquette13 13

The13 cleanroom13 is13 designed13 to13 meet13 the13 ISO13 class13 100100013 standard13 13 13 In13 order13 to13 ensure13 the13 safety13 of13 the13 users13 and13 staff13 and13 in13 order13 to13 maintain13 the13 integrity13 of13 the13 cleanroom13 environment13 users13 are13 expected13 to13 work13 in13 a13 professional13 manner13 13 13 Professional13 conduct13 includes13 but13 is13 not13 limited13 to13 dressing13 in13 proper13 attire13 (including13 all13 pertinent13 personal13 protective13 equipment)13 at13 all13 times13 responding13 to13 and13 following13 the13 direction13 of13 cleanroom13 staff13 and13 observing13 all13 rules13 and13 regulations13 concerning13 allowable13 materials13 and13 items13 in13 the13 cleanroom13 chemical13 use13 and13 handling13 access13 to13 restricted13 areas13 and13 equipment13 use13 13 In13 addition13 as13 a13 certified13 user13 of13 the13 cleanroom13 you13 are13 required13 to13 report13 activities13 of13 other13 users13 that13 do13 not13 conform13 to13 rules13 and13 standards13 outlined13 below13 to13 the13 staff13 or13 management13 13 Safety13 is13 the13 responsibility13 of13 everyone13 13

13 Proper13 Cleanroom13 Attire13 Proper13 cleanroom13 attire13 includes13 gowning13 in13 full13 cleanroom13 suits13 including13 hairnets13 hoods13 body13 suits13 shoe13 covers13 boots13 masks13 safety13 glasses13 and13 gloves13 in13

613 13

the13 proper13 sequence13 and13 location13 and13 wearing13 proper13 Personal13 Protective13 Equipment13 (PPE)13 where13 required13 13 Details13 of13 proper13 gowning13 are13 found13 in13 PPE13 Section13 of13 this13 manual13 in13 the13 Nanofabrication13 Cleanroom13 Laboratory13 Manual13 on13 posters13 in13 the13 cleanroom13 gowning13 area13 and13 is13 also13 demonstrated13 during13 the13 Nanofabrication13 cleanroom13 Orientation13 session13 13 13 Proper13 cleanroom13 attire13 also13 includes13 what13 is13 on13 your13 body13 under13 your13 cleanroom13 attire13 13 The13 following13 rules13 apply13

bull Never13 wear13 make-shy‐up13 if13 you13 are13 working13 in13 the13 cleanroom13 bull Never13 wear13 Sandals13 when13 working13 in13 the13 cleanroom13 13 13 bull Never13 bring13 coats13 hats13 backpacks13 canvas13 bags13 etc13 13 into13 the13 cleanroom13 13 13

Users13 should13 store13 these13 items13 in13 their13 offices13 or13 the13 lockers13 outside13 the13 cleanroom13

bull Never13 wear13 dirty13 clothes13 particularly13 muddy13 boots13 or13 shoes13 into13 the13 clean13 room13 13 13 During13 the13 winter13 bring13 an13 extra13 pair13 of13 clean13 dry13 shoes13 to13 be13 worn13 the13 clean13 room13

bull Never13 unzip13 a13 cleanroom13 gown13 to13 retrieve13 an13 item13 from13 an13 underlying13 garment13 pocket13 while13 in13 the13 cleanroom13 proper13 13 Our13 cleanroom13 suits13 come13 equipped13 with13 an13 external13 pocket13 in13 which13 a13 phone13 or13 other13 cleanroom13 allowable13 item13 can13 be13 stored13 13 The13 item13 must13 of13 course13 be13 wiped13 down13 in13 the13 gowning13 area13 prior13 to13 insertion13 into13 the13 pocket13 and13 cleanroom13 entry13

A13 SPECIAL13 NOTE13 CONCERNING13 SAFETY13 GLASSES13 Users13 visitors13 and13 staff13 must13 wear13 safety13 glasses13 at13 all13 times13 when13 in13 the13 cleanroom13 13 13 All13 safety13 glasses13 must13 comply13 with13 the13 requirements13 set13 forth13 in13 the13 American13 National13 Standards13 for13 Occupational13 and13 Education13 Eye13 and13 Face13 Protection13 ANSI13 Z87113 approved13 If13 you13 wear13 glasses13 you13 can13 wear13 them13 as13 long13 as13 they13 have13 shatter13 proof13 lenses13 and13 side13 shields13 13 13 If13 you13 have13 you13 own13 safety13 glasses13 you13 may13 wear13 them13 in13 the13 cleanroom13 as13 well13 but13 they13 must13 be13 ANSI13 Z87113 approved13

13 Materials13 Restrictions13 and13 Procedures13 In13 following13 good13 cleanroom13 practice13 a13 general13 rule13 to13 live13 by13 is13 to13 NEVER13 bring13 anything13 into13 the13 cleanroom13 that13 is13 not13 absolutely13 necessary13 for13 the13 research13 you13 are13 conducting13 13 13 Any13 item13 brought13 into13 the13 cleanroom13 must13 be13 cleanroom13 compatible13 and13 thoroughly13 cleaned13 13 wiped13 down13 prior13 to13 entry13 13 13 There13 is13 a13 wipe13 down13 station13 in13 the13 gowning13 area13 with13 proper13 cleaning13 materials13 and13 instructions13 13 13 13 In13 addition13 the13 following13 specific13 restrictions13 apply13

bull Never13 bring13 pencils13 or13 erasers13 into13 the13 clean13 room13 13 13 bull Never13 bring13 cardboard13 or13 other13 packing13 material13 into13 the13 cleanroom13 13 13

713 13

bull Never13 bring13 books13 newspapers13 magazines13 and13 other13 reading13 material13 into13 the13 cleanroom13 13 Only13 clean13 room13 paper13 and13 cleanroom13 notebooks13 are13 allowed13

bull Never13 bring13 food13 into13 the13 cleanroom13 13 13

Restricted13 Access13 Areas13 As13 a13 general13 rule13 all13 cleanroom13 chase13 areas13 unless13 specifically13 labeled13 otherwise13 are13 restricted13 to13 staff13 only13 13 Users13 are13 prohibited13 from13 entering13 these13 areas13 13 If13 a13 user13 has13 a13 need13 to13 be13 in13 a13 chase13 area13 heshe13 must13 get13 permission13 from13 staff13 or13 be13 accompanied13 by13 staff13 into13 the13 area13 13 The13 Nanofabrication13 cleanroom13 sub13 fab13 is13 also13 a13 restricted13 area13 and13 the13 same13 rules13 apply13 13 In13 addition13 the13 following13 specific13 restriction13 applies13

bull Except13 in13 cases13 of13 emergency13 users13 visitors13 and13 staff13 are13 not13 to13 open13 doors13 to13 exterior13 corridors13 for13 any13 reason13 while13 in13 the13 cleanroom13 13 13

Surveillance13 Cameras13

Surveillance13 cameras13 are13 located13 throughout13 the13 cleanroom13 in13 order13 to13 monitor13 user13 and13 staff13 actions13 13 These13 cameras13 allow13 the13 staff13 to13 monitor13 the13 activities13 in13 the13 cleanroom13 from13 a13 remote13 location13 at13 all13 times13 13 13 13 The13 cameras13 are13 essential13 for13 assessing13 cleanroom13 occupancy13 during13 an13 emergency13 and13 are13 also13 used13 in13 the13 enforcement13 of13 all13 safety13 and13 etiquette13 protocols13 particularly13 in13 the13 off13 hours13

Eyewash13 and13 Safety13 Showers13

Due13 to13 the13 hazardous13 nature13 of13 many13 of13 the13 chemicals13 used13 in13 the13 cleanroom13 there13 are13 eyewash13 and13 safety13 showers13 located13 throughout13 the13 cleanroom13 and13 in13 the13 hallways13 just13 outside13 the13 cleanroom13 13 13 13 The13 location13 and13 use13 of13 this13 equipment13 are13 explained13 during13 the13 cleanroom13 orientation13 13 13 Appendix13 C13 of13 this13 document13 provides13 a13 map13 of13 the13 cleanroom13 that13 identifies13 the13 locations13 of13 all13 eyewash13 and13 safety13 showers13

13 13

813 13

Cleanroom13 Alarms13 13 Evacuation13 Emergency13 Response13

Due13 to13 the13 presence13 of13 hazardous13 materials13 and13 equipment13 in13 the13 cleanroom13 and13 its13 support13 space13 (ie13 13 Hazardous13 chemicals13 Hazardous13 gases13 High13 Voltage13 Equipment13 etchellip)13 there13 are13 multiple13 systems13 installed13 that13 monitor13 safety13 13 Each13 of13 these13 systems13 is13 equipped13 with13 visual13 and13 audible13 notification13 alarms13 including13 horns13 and13 strobe13 lights13 13 If13 there13 is13 a13 fire13 or13 a13 release13 of13 a13 Hazardous13 Process13 Material13 (HPM)13 the13 monitoring13 systems13 will13 detect13 it13 and13 set13 off13 audible13 (horns)13 and13 visual13 (strobe)13 alarms13 in13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Cleanroom13 users13 must13 be13 aware13 of13 these13 alarms13 and13 be13 able13 to13 identify13 them13 quickly13 and13 react13 accordingly13 13 13 The13 following13 are13 a13 list13 of13 alarms13 users13 may13 encounter13 in13 the13 cleanroom13

Fire13 Detection13 Alarms13 Fire13 alarms13 and13 Pull13 Stations13 are13 located13 throughout13 the13 cleanroom13 and13 the13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 white13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 fire13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 building13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

Toxic13 Gas13 Detection13 13 Toxic13 gas13 sensors13 and13 strobes13 are13 located13 throughout13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 blue13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 toxic13 gas13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

The13 operation13 and13 location13 of13 the13 fire13 and13 toxic13 gas13 detection13 systems13 are13 covered13 in13 the13 Cleanroom13 Orientation13 walkthrough13 13 13 13

Appendix13 A13 amp13 Appendix13 B13 of13 this13 document13 provides13 a13 map13 of13 the13 locations13 of13 the13 alarm13 systems13 as13 well13 as13 the13 evacuation13 paths13 for13 exiting13 the13 cleanroom13 and13 the13 building13 13 Users13 are13 expected13 to13 review13 this13 information13 prior13 to13 using13 the13 Nanofabrication13 cleanroom13

Appendix13 F13 of13 this13 manual13 contains13 the13 Universityrsquos13 Emergency13 Response13 Procedures13 to13 be13 used13 in13 case13 of13 an13 emergency13

913 13

Visitors13

Visitor13 tours13 of13 the13 cleanroom13 can13 be13 arranged13 by13 contacting13 the13 Administrative13 Staff13 (Susie13 Sherlock13 sjs10psuedu)13 13 13 Standard13 visitor13 tours13 provide13 only13 window13 access13 to13 the13 cleanroom13 13 13 Special13 tours13 that13 include13 cleanroom13 entry13 are13 extremely13 limited13 and13 by13 special13 request13 only13 13 13 Please13 note13 that13 all13 visitors13 who13 enter13 the13 cleanroom13 must13 be13 escorted13 by13 either13 a13 certified13 user13 or13 a13 member13 of13 the13 technical13 staff13 13 13 Under13 no13 circumstances13 may13 a13 visitor13 be13 allowed13 to13 operate13 equipment13 use13 chemicals13 or13 be13 left13 unattended13 in13 the13 cleanroom13

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13

Safety13 is13 the13 top13 priority13 for13 all13 activities13 carried13 out13 within13 the13 cleanroom13 13 There13 can13 be13 no13 compromises13 with13 regards13 to13 safety13 in13 completing13 a13 research13 project13 13 The13 technical13 staff13 is13 charged13 with13 providing13 a13 safe13 cleanroom13 environment13 for13 all13 users13 to13 carry13 out13 their13 research13 and13 it13 is13 the13 responsibility13 of13 each13 user13 to13 see13 that13 the13 environment13 is13 utilized13 in13 a13 safe13 manner13 13 In13 order13 to13 guide13 users13 the13 MRI13 safety13 committee13 has13 developed13 general13 safety13 policies13 in13 conjunction13 with13 and13 guided13 by13 Penn13 State13 Universityrsquos13 safety13 policies13 that13 must13 be13 followed13 by13 all13 users13 and13 staff13 13 These13 policies13 have13 been13 devised13 based13 on13 state13 and13 federal13 laws13 basic13 materials13 chemical13 and13 process13 knowledge13 and13 common13 sense13 13 13 In13 some13 cases13 the13 policies13 were13 created13 in13 response13 to13 specific13 incidents13 by13 users13 of13 the13 cleanroom13 13 13 13

13 ALL13 USERS13 AND13 STAFF13 ARE13 CHARGED13 WITH13 THE13 ENFORCEMENT13 OF13 THESE13 POLICIES13

If13 a13 user13 or13 a13 staff13 member13 observes13 another13 user13 or13 staff13 member13 in13 violation13 of13 clean13 room13 safety13 or13 etiquette13 policies13 or13 otherwise13 compromising13 his13 or13 her13 personal13 safety13 or13 the13 safety13 of13 others13 it13 is13 their13 responsibility13 to13 not13 only13 point13 it13 out13 to13 the13 user13 in13 violation13 but13 also13 to13 report13 it13 to13 another13 staff13 member13 or13 an13 MRI13 safety13 officer13 (observation13 of13 violations13 can13 also13 occur13 when13 staff13 regularly13 review13 video13 from13 lab13 surveillance13 cameras)13 13 13 At13 that13 point13 the13 user13 in13 violation13 will13 be13 asked13 to13 leave13 the13 cleanroom13 and13 their13 access13 to13 the13 cleanroom13 will13 be13 temporarily13 revoked13 13 13 13 The13 user13 in13 violation13 and13 the13 userrsquos13 PI13 will13 then13 be13 notified13 by13 email13 and13 an13 internal13 review13 of13 the13 incident13 will13 be13 conducted13 by13 Nanofabrication13 Cleanroom13 Safety13 Committee13 13 13 The13 committee13 member(s)13 will13 determine13 what13 actions13 will13 be13 taken13 in13 response13 to13 the13 safety13 violation13 13 13 Users13 should13 be13 aware13 that13 suspensions13 from13 the13 clean13 room13 may13 be13 for13 a13 day13 a13 period13 of13 several13 weeks13 months13 or13 permanently13 depending13 on13 the13 severity13 of13 the13 violation13 and13 whether13 the13 user13 has13 previous13 violations13 13 Please13 be13 aware13 that13 readmission13 to13 the13 clean13 room13 will13 be13 at13 the13 sole13 discretion13 of13 the13 committee13 13 13 13

1013 13

Ignorance13 of13 cleanroom13 safety13 policies13 lack13 of13 common13 sense13 language13 difficulties13 carelessness13 and13 haste13 are13 not13 adequate13 excuses13 for13 unsafe13 behavior13 Each13 user13 must13 remember13 that13 they13 are13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13

Safety13 Incident13 Reporting13 13

All13 safety13 related13 incidents13 are13 required13 to13 be13 reported13 to13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 13 13 The13 reporting13 requirements13 for13 different13 types13 of13 incidents13 can13 be13 found13 on13 the13 PSU13 EHampS13 site13 (httpwwwehspsuedu)13 13 13 If13 you13 have13 any13 questions13 regarding13 the13 reporting13 requirements13 please13 contact13 one13 of13 the13 cleanrooms13 Technical13 staff13 immediately13 to13 get13 clarification13 13 13

13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

213 13

Contents13 Introduction13 13 113

General13 Information13 13 413

Safety13 Training13 and13 Cleanroom13 Orientation13 13 413

Access13 13 413

Research13 Instrument13 Management13 System13 (RIMS)13 13 413

Hours13 of13 Operation13 Off13 Hours13 Use13 13 513

Cleanroom13 Protocol13 and13 Etiquette13 13 513

Proper13 Cleanroom13 Attire13 13 513

Materials13 Restrictions13 and13 Procedures13 13 613

Restricted13 Access13 Areas13 13 713

Surveillance13 Cameras13 13 713

Eyewash13 and13 Safety13 Showers13 13 713

Cleanroom13 Alarms13 13 Evacuation13 Emergency13 Response13 13 813

Fire13 Detection13 Alarms13 13 813

Toxic13 Gas13 Detection13 13 813

Visitors13 13 913

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13 13 913

Safety13 Incident13 Reporting13 13 1013

Equipment13 Use13 and13 Safety13 13 1113

Introduction13 13 1113

Equipment13 Training13 13 1113

Equipment13 Operation13 13 1213

Equipment13 Issues13 13 1213

Chemical13 Use13 and13 Safety13 13 1313

Introduction13 13 1313

Chemical13 Supplies13 13 1413

Material13 Safety13 Data13 Sheet13 (MSDS)13 13 1513

Personal13 Protective13 Equipment13 (PPE)13 13 1613

313 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13 1713

Chemical13 Spills13 13 1713

Chemical13 Storage13 13 1813

Chemical13 Waste13 13 1813

Chemical13 Waste13 Satellite13 Accumulation13 Area13 13 2013

Compressed13 Gas13 Safety13 13 2013

Introduction13 13 2013

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13 2113

Compressed13 Gas13 Storage13 13 2113

Transportation13 of13 Compressed13 Gas13 Cylinders13 13 2113

Compressed13 Gas13 Delivery13 13 2213

Toxic13 Gas13 Monitoring13 System13 13 2313

Appendix13 A13 Fire13 Alarm13 Map13 13 2413

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13 13 2513

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13 2613

Appendix13 D13 Buddy13 Policy13 13 2713

Appendix13 E13 Equipment13 Training13 13 2813

Appendix13 F13 Emergency13 Response13 Procedures13 13 3013

Fire13 13 3013

Chemical13 Spill13 13 Gas13 Release13 13 3013

Medical13 Emergency13 13 3213

Appendix13 G13 13 Chemical13 Waste13 Labels13 13 3313

13

13 13

413 13

General13 Information13

Safety13 Training13 and13 Cleanroom13 Orientation13

All13 PSU13 cleanroom13 users13 are13 required13 to13 read13 this13 safety13 manual13 and13 complete13 the13 Penn13 State13 University13 Lab13 Safety13 Training13 Program13 and13 a13 Nanofabrication13 cleanroom13 specific13 orientation13 in13 order13 to13 use13 the13 laboratory13 13 13 The13 Lab13 Safety13 program13 provides13 an13 overview13 of13 general13 laboratory13 safety13 procedures13 proper13 chemical13 use13 and13 disposal13 procedures13 as13 well13 as13 general13 lab13 use13 and13 etiquette13 13 13 Users13 can13 complete13 this13 training13 online13 at13 the13 website13 of13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 13 (EHampS)13 (httpwwwehspsuedu)13 (Note13 a13 Penn13 State13 Access13 Account13 ID13 or13 Friends13 of13 Penn13 State13 ID13 is13 required)13 or13 by13 attending13 a13 safety13 class13 provided13 by13 the13 Penn13 State13 Materials13 Research13 Institute13 (MRI)13 Safety13 representative13 13 13 The13 Nanofabrication13 cleanroom13 orientation13 includes13 a13 lab13 walkthrough13 conducted13 by13 a13 MRI13 staff13 member13 during13 which13 important13 safety13 items13 and13 issues13 are13 identified13 for13 the13 users13 13 The13 orientation13 also13 provides13 information13 on13 research13 ethics13 and13 societal13 impact13 13 13

Access13

Access13 to13 the13 cleanroom13 is13 for13 certified13 users13 and13 technical13 staff13 only13 13 13 In13 order13 to13 become13 a13 certified13 user13 of13 the13 cleanroom13 you13 must13 have13 completed13 items13 described13 in13 the13 previous13 paragraph13 13 Upon13 completion13 of13 those13 items13 certification13 is13 granted13 for13 one13 calendar13 year13 13 At13 the13 end13 of13 each13 calendar13 year13 users13 are13 required13 to13 undergo13 safety13 recertification13 13 by13 completing13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 online13 refresher13 safety13 training13 course(httpwwwehspsuedu)13 13 13 If13 a13 user13 fails13 to13 complete13 recertification13 cleanroom13 access13 will13 be13 suspended13 until13 recertification13 is13 completed13 13 13

PLEASE13 NOTE13 access13 to13 the13 cleanroom13 in13 and13 of13 itself13 does13 not13 grant13 certified13 users13 the13 right13 to13 operate13 equipment13 13 13 In13 order13 to13 operate13 equipment13 certified13 users13 complete13 equipment13 training13 13 13 Details13 on13 equipment13 training13 can13 be13 found13 in13 the13 Equipment13 Use13 Safety13 section13 of13 this13 document13

Research13 Instrument13 Management13 System13 (RIMS)13

RIMS13 is13 the13 web-shy‐based13 software13 platform13 used13 13 for13 reserving13 equipment13 tracking13 equipment13 use13 and13 lab13 time13 and13 billing13 in13 all13 user13 facilities13 overseen13 by13 the13 Office13 of13 the13 Vice13 President13 for13 Research13 (VPR)13 at13 Penn13 State13 University13 13 13 The13 system13 was13 formerly13

513 13

designated13 as13 the13 ldquoPortalrdquo13 (prior13 to13 72010)13 and13 was13 developed13 in13 collaboration13 with13 a13 commercial13 vendor13 Versatile13 and13 customized13 for13 use13 by13 Penn13 Statersquos13 user13 facilities13 13 13 In13 order13 to13 begin13 work13 in13 the13 cleanroom13 you13 must13 setup13 an13 account13 in13 RIMS13 13 13 Details13 on13 how13 to13 obtain13 a13 RIMS13 account13 can13 be13 found13 on13 the13 MRIrsquos13 RIMS13 Launchpad13 page13 13 (httpwwwrimspsuedufaqsgetting_startedasp)13

Hours13 of13 Operation13 Off13 Hours13 Use13

The13 Penn13 State13 Nanofabrication13 clean13 room13 is13 open13 for13 use13 seven13 (7)13 days13 a13 week13 twenty13 four13 (24)13 hours13 a13 day13 13 13 If13 the13 cleanroom13 is13 closed13 for13 any13 reason13 information13 concerning13 the13 reason13 for13 shut13 down13 and13 the13 estimated13 duration13 will13 be13 posted13 on13 the13 MRIrsquos13 RIMS13 Launchpad13 page13 (httpwwwrimspsuedufaqsgetting_startedasp)13 as13 well13 as13 on13 monitors13 outside13 the13 cleanroom13 gowning13 area13 13 13

Although13 the13 cleanroom13 is13 open13 seven13 (7)13 days13 a13 week13 twenty13 four13 (24)13 hours13 a13 day13 it13 is13 only13 staffed13 Monday13 thru13 Friday13 from13 800AM13 to13 600PM13 13 To13 ensure13 a13 safe13 working13 environment13 for13 our13 users13 we13 have13 implemented13 a13 ldquoBuddyrdquo13 policy13 in13 which13 users13 working13 between13 the13 hours13 of13 600PM13 and13 800AM13 must13 work13 with13 another13 certified13 user13 of13 the13 cleanroom13 13 13 Details13 on13 the13 procedures13 of13 the13 ldquoBuddyrdquo13 policy13 can13 be13 found13 in13 the13 Appendix13 D13 of13 this13 document13 13 13

Cleanroom13 Protocol13 and13 Etiquette13 13

The13 cleanroom13 is13 designed13 to13 meet13 the13 ISO13 class13 100100013 standard13 13 13 In13 order13 to13 ensure13 the13 safety13 of13 the13 users13 and13 staff13 and13 in13 order13 to13 maintain13 the13 integrity13 of13 the13 cleanroom13 environment13 users13 are13 expected13 to13 work13 in13 a13 professional13 manner13 13 13 Professional13 conduct13 includes13 but13 is13 not13 limited13 to13 dressing13 in13 proper13 attire13 (including13 all13 pertinent13 personal13 protective13 equipment)13 at13 all13 times13 responding13 to13 and13 following13 the13 direction13 of13 cleanroom13 staff13 and13 observing13 all13 rules13 and13 regulations13 concerning13 allowable13 materials13 and13 items13 in13 the13 cleanroom13 chemical13 use13 and13 handling13 access13 to13 restricted13 areas13 and13 equipment13 use13 13 In13 addition13 as13 a13 certified13 user13 of13 the13 cleanroom13 you13 are13 required13 to13 report13 activities13 of13 other13 users13 that13 do13 not13 conform13 to13 rules13 and13 standards13 outlined13 below13 to13 the13 staff13 or13 management13 13 Safety13 is13 the13 responsibility13 of13 everyone13 13

13 Proper13 Cleanroom13 Attire13 Proper13 cleanroom13 attire13 includes13 gowning13 in13 full13 cleanroom13 suits13 including13 hairnets13 hoods13 body13 suits13 shoe13 covers13 boots13 masks13 safety13 glasses13 and13 gloves13 in13

613 13

the13 proper13 sequence13 and13 location13 and13 wearing13 proper13 Personal13 Protective13 Equipment13 (PPE)13 where13 required13 13 Details13 of13 proper13 gowning13 are13 found13 in13 PPE13 Section13 of13 this13 manual13 in13 the13 Nanofabrication13 Cleanroom13 Laboratory13 Manual13 on13 posters13 in13 the13 cleanroom13 gowning13 area13 and13 is13 also13 demonstrated13 during13 the13 Nanofabrication13 cleanroom13 Orientation13 session13 13 13 Proper13 cleanroom13 attire13 also13 includes13 what13 is13 on13 your13 body13 under13 your13 cleanroom13 attire13 13 The13 following13 rules13 apply13

bull Never13 wear13 make-shy‐up13 if13 you13 are13 working13 in13 the13 cleanroom13 bull Never13 wear13 Sandals13 when13 working13 in13 the13 cleanroom13 13 13 bull Never13 bring13 coats13 hats13 backpacks13 canvas13 bags13 etc13 13 into13 the13 cleanroom13 13 13

Users13 should13 store13 these13 items13 in13 their13 offices13 or13 the13 lockers13 outside13 the13 cleanroom13

bull Never13 wear13 dirty13 clothes13 particularly13 muddy13 boots13 or13 shoes13 into13 the13 clean13 room13 13 13 During13 the13 winter13 bring13 an13 extra13 pair13 of13 clean13 dry13 shoes13 to13 be13 worn13 the13 clean13 room13

bull Never13 unzip13 a13 cleanroom13 gown13 to13 retrieve13 an13 item13 from13 an13 underlying13 garment13 pocket13 while13 in13 the13 cleanroom13 proper13 13 Our13 cleanroom13 suits13 come13 equipped13 with13 an13 external13 pocket13 in13 which13 a13 phone13 or13 other13 cleanroom13 allowable13 item13 can13 be13 stored13 13 The13 item13 must13 of13 course13 be13 wiped13 down13 in13 the13 gowning13 area13 prior13 to13 insertion13 into13 the13 pocket13 and13 cleanroom13 entry13

A13 SPECIAL13 NOTE13 CONCERNING13 SAFETY13 GLASSES13 Users13 visitors13 and13 staff13 must13 wear13 safety13 glasses13 at13 all13 times13 when13 in13 the13 cleanroom13 13 13 All13 safety13 glasses13 must13 comply13 with13 the13 requirements13 set13 forth13 in13 the13 American13 National13 Standards13 for13 Occupational13 and13 Education13 Eye13 and13 Face13 Protection13 ANSI13 Z87113 approved13 If13 you13 wear13 glasses13 you13 can13 wear13 them13 as13 long13 as13 they13 have13 shatter13 proof13 lenses13 and13 side13 shields13 13 13 If13 you13 have13 you13 own13 safety13 glasses13 you13 may13 wear13 them13 in13 the13 cleanroom13 as13 well13 but13 they13 must13 be13 ANSI13 Z87113 approved13

13 Materials13 Restrictions13 and13 Procedures13 In13 following13 good13 cleanroom13 practice13 a13 general13 rule13 to13 live13 by13 is13 to13 NEVER13 bring13 anything13 into13 the13 cleanroom13 that13 is13 not13 absolutely13 necessary13 for13 the13 research13 you13 are13 conducting13 13 13 Any13 item13 brought13 into13 the13 cleanroom13 must13 be13 cleanroom13 compatible13 and13 thoroughly13 cleaned13 13 wiped13 down13 prior13 to13 entry13 13 13 There13 is13 a13 wipe13 down13 station13 in13 the13 gowning13 area13 with13 proper13 cleaning13 materials13 and13 instructions13 13 13 13 In13 addition13 the13 following13 specific13 restrictions13 apply13

bull Never13 bring13 pencils13 or13 erasers13 into13 the13 clean13 room13 13 13 bull Never13 bring13 cardboard13 or13 other13 packing13 material13 into13 the13 cleanroom13 13 13

713 13

bull Never13 bring13 books13 newspapers13 magazines13 and13 other13 reading13 material13 into13 the13 cleanroom13 13 Only13 clean13 room13 paper13 and13 cleanroom13 notebooks13 are13 allowed13

bull Never13 bring13 food13 into13 the13 cleanroom13 13 13

Restricted13 Access13 Areas13 As13 a13 general13 rule13 all13 cleanroom13 chase13 areas13 unless13 specifically13 labeled13 otherwise13 are13 restricted13 to13 staff13 only13 13 Users13 are13 prohibited13 from13 entering13 these13 areas13 13 If13 a13 user13 has13 a13 need13 to13 be13 in13 a13 chase13 area13 heshe13 must13 get13 permission13 from13 staff13 or13 be13 accompanied13 by13 staff13 into13 the13 area13 13 The13 Nanofabrication13 cleanroom13 sub13 fab13 is13 also13 a13 restricted13 area13 and13 the13 same13 rules13 apply13 13 In13 addition13 the13 following13 specific13 restriction13 applies13

bull Except13 in13 cases13 of13 emergency13 users13 visitors13 and13 staff13 are13 not13 to13 open13 doors13 to13 exterior13 corridors13 for13 any13 reason13 while13 in13 the13 cleanroom13 13 13

Surveillance13 Cameras13

Surveillance13 cameras13 are13 located13 throughout13 the13 cleanroom13 in13 order13 to13 monitor13 user13 and13 staff13 actions13 13 These13 cameras13 allow13 the13 staff13 to13 monitor13 the13 activities13 in13 the13 cleanroom13 from13 a13 remote13 location13 at13 all13 times13 13 13 13 The13 cameras13 are13 essential13 for13 assessing13 cleanroom13 occupancy13 during13 an13 emergency13 and13 are13 also13 used13 in13 the13 enforcement13 of13 all13 safety13 and13 etiquette13 protocols13 particularly13 in13 the13 off13 hours13

Eyewash13 and13 Safety13 Showers13

Due13 to13 the13 hazardous13 nature13 of13 many13 of13 the13 chemicals13 used13 in13 the13 cleanroom13 there13 are13 eyewash13 and13 safety13 showers13 located13 throughout13 the13 cleanroom13 and13 in13 the13 hallways13 just13 outside13 the13 cleanroom13 13 13 13 The13 location13 and13 use13 of13 this13 equipment13 are13 explained13 during13 the13 cleanroom13 orientation13 13 13 Appendix13 C13 of13 this13 document13 provides13 a13 map13 of13 the13 cleanroom13 that13 identifies13 the13 locations13 of13 all13 eyewash13 and13 safety13 showers13

13 13

813 13

Cleanroom13 Alarms13 13 Evacuation13 Emergency13 Response13

Due13 to13 the13 presence13 of13 hazardous13 materials13 and13 equipment13 in13 the13 cleanroom13 and13 its13 support13 space13 (ie13 13 Hazardous13 chemicals13 Hazardous13 gases13 High13 Voltage13 Equipment13 etchellip)13 there13 are13 multiple13 systems13 installed13 that13 monitor13 safety13 13 Each13 of13 these13 systems13 is13 equipped13 with13 visual13 and13 audible13 notification13 alarms13 including13 horns13 and13 strobe13 lights13 13 If13 there13 is13 a13 fire13 or13 a13 release13 of13 a13 Hazardous13 Process13 Material13 (HPM)13 the13 monitoring13 systems13 will13 detect13 it13 and13 set13 off13 audible13 (horns)13 and13 visual13 (strobe)13 alarms13 in13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Cleanroom13 users13 must13 be13 aware13 of13 these13 alarms13 and13 be13 able13 to13 identify13 them13 quickly13 and13 react13 accordingly13 13 13 The13 following13 are13 a13 list13 of13 alarms13 users13 may13 encounter13 in13 the13 cleanroom13

Fire13 Detection13 Alarms13 Fire13 alarms13 and13 Pull13 Stations13 are13 located13 throughout13 the13 cleanroom13 and13 the13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 white13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 fire13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 building13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

Toxic13 Gas13 Detection13 13 Toxic13 gas13 sensors13 and13 strobes13 are13 located13 throughout13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 blue13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 toxic13 gas13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

The13 operation13 and13 location13 of13 the13 fire13 and13 toxic13 gas13 detection13 systems13 are13 covered13 in13 the13 Cleanroom13 Orientation13 walkthrough13 13 13 13

Appendix13 A13 amp13 Appendix13 B13 of13 this13 document13 provides13 a13 map13 of13 the13 locations13 of13 the13 alarm13 systems13 as13 well13 as13 the13 evacuation13 paths13 for13 exiting13 the13 cleanroom13 and13 the13 building13 13 Users13 are13 expected13 to13 review13 this13 information13 prior13 to13 using13 the13 Nanofabrication13 cleanroom13

Appendix13 F13 of13 this13 manual13 contains13 the13 Universityrsquos13 Emergency13 Response13 Procedures13 to13 be13 used13 in13 case13 of13 an13 emergency13

913 13

Visitors13

Visitor13 tours13 of13 the13 cleanroom13 can13 be13 arranged13 by13 contacting13 the13 Administrative13 Staff13 (Susie13 Sherlock13 sjs10psuedu)13 13 13 Standard13 visitor13 tours13 provide13 only13 window13 access13 to13 the13 cleanroom13 13 13 Special13 tours13 that13 include13 cleanroom13 entry13 are13 extremely13 limited13 and13 by13 special13 request13 only13 13 13 Please13 note13 that13 all13 visitors13 who13 enter13 the13 cleanroom13 must13 be13 escorted13 by13 either13 a13 certified13 user13 or13 a13 member13 of13 the13 technical13 staff13 13 13 Under13 no13 circumstances13 may13 a13 visitor13 be13 allowed13 to13 operate13 equipment13 use13 chemicals13 or13 be13 left13 unattended13 in13 the13 cleanroom13

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13

Safety13 is13 the13 top13 priority13 for13 all13 activities13 carried13 out13 within13 the13 cleanroom13 13 There13 can13 be13 no13 compromises13 with13 regards13 to13 safety13 in13 completing13 a13 research13 project13 13 The13 technical13 staff13 is13 charged13 with13 providing13 a13 safe13 cleanroom13 environment13 for13 all13 users13 to13 carry13 out13 their13 research13 and13 it13 is13 the13 responsibility13 of13 each13 user13 to13 see13 that13 the13 environment13 is13 utilized13 in13 a13 safe13 manner13 13 In13 order13 to13 guide13 users13 the13 MRI13 safety13 committee13 has13 developed13 general13 safety13 policies13 in13 conjunction13 with13 and13 guided13 by13 Penn13 State13 Universityrsquos13 safety13 policies13 that13 must13 be13 followed13 by13 all13 users13 and13 staff13 13 These13 policies13 have13 been13 devised13 based13 on13 state13 and13 federal13 laws13 basic13 materials13 chemical13 and13 process13 knowledge13 and13 common13 sense13 13 13 In13 some13 cases13 the13 policies13 were13 created13 in13 response13 to13 specific13 incidents13 by13 users13 of13 the13 cleanroom13 13 13 13

13 ALL13 USERS13 AND13 STAFF13 ARE13 CHARGED13 WITH13 THE13 ENFORCEMENT13 OF13 THESE13 POLICIES13

If13 a13 user13 or13 a13 staff13 member13 observes13 another13 user13 or13 staff13 member13 in13 violation13 of13 clean13 room13 safety13 or13 etiquette13 policies13 or13 otherwise13 compromising13 his13 or13 her13 personal13 safety13 or13 the13 safety13 of13 others13 it13 is13 their13 responsibility13 to13 not13 only13 point13 it13 out13 to13 the13 user13 in13 violation13 but13 also13 to13 report13 it13 to13 another13 staff13 member13 or13 an13 MRI13 safety13 officer13 (observation13 of13 violations13 can13 also13 occur13 when13 staff13 regularly13 review13 video13 from13 lab13 surveillance13 cameras)13 13 13 At13 that13 point13 the13 user13 in13 violation13 will13 be13 asked13 to13 leave13 the13 cleanroom13 and13 their13 access13 to13 the13 cleanroom13 will13 be13 temporarily13 revoked13 13 13 13 The13 user13 in13 violation13 and13 the13 userrsquos13 PI13 will13 then13 be13 notified13 by13 email13 and13 an13 internal13 review13 of13 the13 incident13 will13 be13 conducted13 by13 Nanofabrication13 Cleanroom13 Safety13 Committee13 13 13 The13 committee13 member(s)13 will13 determine13 what13 actions13 will13 be13 taken13 in13 response13 to13 the13 safety13 violation13 13 13 Users13 should13 be13 aware13 that13 suspensions13 from13 the13 clean13 room13 may13 be13 for13 a13 day13 a13 period13 of13 several13 weeks13 months13 or13 permanently13 depending13 on13 the13 severity13 of13 the13 violation13 and13 whether13 the13 user13 has13 previous13 violations13 13 Please13 be13 aware13 that13 readmission13 to13 the13 clean13 room13 will13 be13 at13 the13 sole13 discretion13 of13 the13 committee13 13 13 13

1013 13

Ignorance13 of13 cleanroom13 safety13 policies13 lack13 of13 common13 sense13 language13 difficulties13 carelessness13 and13 haste13 are13 not13 adequate13 excuses13 for13 unsafe13 behavior13 Each13 user13 must13 remember13 that13 they13 are13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13

Safety13 Incident13 Reporting13 13

All13 safety13 related13 incidents13 are13 required13 to13 be13 reported13 to13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 13 13 The13 reporting13 requirements13 for13 different13 types13 of13 incidents13 can13 be13 found13 on13 the13 PSU13 EHampS13 site13 (httpwwwehspsuedu)13 13 13 If13 you13 have13 any13 questions13 regarding13 the13 reporting13 requirements13 please13 contact13 one13 of13 the13 cleanrooms13 Technical13 staff13 immediately13 to13 get13 clarification13 13 13

13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

313 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13 1713

Chemical13 Spills13 13 1713

Chemical13 Storage13 13 1813

Chemical13 Waste13 13 1813

Chemical13 Waste13 Satellite13 Accumulation13 Area13 13 2013

Compressed13 Gas13 Safety13 13 2013

Introduction13 13 2013

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13 2113

Compressed13 Gas13 Storage13 13 2113

Transportation13 of13 Compressed13 Gas13 Cylinders13 13 2113

Compressed13 Gas13 Delivery13 13 2213

Toxic13 Gas13 Monitoring13 System13 13 2313

Appendix13 A13 Fire13 Alarm13 Map13 13 2413

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13 13 2513

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13 2613

Appendix13 D13 Buddy13 Policy13 13 2713

Appendix13 E13 Equipment13 Training13 13 2813

Appendix13 F13 Emergency13 Response13 Procedures13 13 3013

Fire13 13 3013

Chemical13 Spill13 13 Gas13 Release13 13 3013

Medical13 Emergency13 13 3213

Appendix13 G13 13 Chemical13 Waste13 Labels13 13 3313

13

13 13

413 13

General13 Information13

Safety13 Training13 and13 Cleanroom13 Orientation13

All13 PSU13 cleanroom13 users13 are13 required13 to13 read13 this13 safety13 manual13 and13 complete13 the13 Penn13 State13 University13 Lab13 Safety13 Training13 Program13 and13 a13 Nanofabrication13 cleanroom13 specific13 orientation13 in13 order13 to13 use13 the13 laboratory13 13 13 The13 Lab13 Safety13 program13 provides13 an13 overview13 of13 general13 laboratory13 safety13 procedures13 proper13 chemical13 use13 and13 disposal13 procedures13 as13 well13 as13 general13 lab13 use13 and13 etiquette13 13 13 Users13 can13 complete13 this13 training13 online13 at13 the13 website13 of13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 13 (EHampS)13 (httpwwwehspsuedu)13 (Note13 a13 Penn13 State13 Access13 Account13 ID13 or13 Friends13 of13 Penn13 State13 ID13 is13 required)13 or13 by13 attending13 a13 safety13 class13 provided13 by13 the13 Penn13 State13 Materials13 Research13 Institute13 (MRI)13 Safety13 representative13 13 13 The13 Nanofabrication13 cleanroom13 orientation13 includes13 a13 lab13 walkthrough13 conducted13 by13 a13 MRI13 staff13 member13 during13 which13 important13 safety13 items13 and13 issues13 are13 identified13 for13 the13 users13 13 The13 orientation13 also13 provides13 information13 on13 research13 ethics13 and13 societal13 impact13 13 13

Access13

Access13 to13 the13 cleanroom13 is13 for13 certified13 users13 and13 technical13 staff13 only13 13 13 In13 order13 to13 become13 a13 certified13 user13 of13 the13 cleanroom13 you13 must13 have13 completed13 items13 described13 in13 the13 previous13 paragraph13 13 Upon13 completion13 of13 those13 items13 certification13 is13 granted13 for13 one13 calendar13 year13 13 At13 the13 end13 of13 each13 calendar13 year13 users13 are13 required13 to13 undergo13 safety13 recertification13 13 by13 completing13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 online13 refresher13 safety13 training13 course(httpwwwehspsuedu)13 13 13 If13 a13 user13 fails13 to13 complete13 recertification13 cleanroom13 access13 will13 be13 suspended13 until13 recertification13 is13 completed13 13 13

PLEASE13 NOTE13 access13 to13 the13 cleanroom13 in13 and13 of13 itself13 does13 not13 grant13 certified13 users13 the13 right13 to13 operate13 equipment13 13 13 In13 order13 to13 operate13 equipment13 certified13 users13 complete13 equipment13 training13 13 13 Details13 on13 equipment13 training13 can13 be13 found13 in13 the13 Equipment13 Use13 Safety13 section13 of13 this13 document13

Research13 Instrument13 Management13 System13 (RIMS)13

RIMS13 is13 the13 web-shy‐based13 software13 platform13 used13 13 for13 reserving13 equipment13 tracking13 equipment13 use13 and13 lab13 time13 and13 billing13 in13 all13 user13 facilities13 overseen13 by13 the13 Office13 of13 the13 Vice13 President13 for13 Research13 (VPR)13 at13 Penn13 State13 University13 13 13 The13 system13 was13 formerly13

513 13

designated13 as13 the13 ldquoPortalrdquo13 (prior13 to13 72010)13 and13 was13 developed13 in13 collaboration13 with13 a13 commercial13 vendor13 Versatile13 and13 customized13 for13 use13 by13 Penn13 Statersquos13 user13 facilities13 13 13 In13 order13 to13 begin13 work13 in13 the13 cleanroom13 you13 must13 setup13 an13 account13 in13 RIMS13 13 13 Details13 on13 how13 to13 obtain13 a13 RIMS13 account13 can13 be13 found13 on13 the13 MRIrsquos13 RIMS13 Launchpad13 page13 13 (httpwwwrimspsuedufaqsgetting_startedasp)13

Hours13 of13 Operation13 Off13 Hours13 Use13

The13 Penn13 State13 Nanofabrication13 clean13 room13 is13 open13 for13 use13 seven13 (7)13 days13 a13 week13 twenty13 four13 (24)13 hours13 a13 day13 13 13 If13 the13 cleanroom13 is13 closed13 for13 any13 reason13 information13 concerning13 the13 reason13 for13 shut13 down13 and13 the13 estimated13 duration13 will13 be13 posted13 on13 the13 MRIrsquos13 RIMS13 Launchpad13 page13 (httpwwwrimspsuedufaqsgetting_startedasp)13 as13 well13 as13 on13 monitors13 outside13 the13 cleanroom13 gowning13 area13 13 13

Although13 the13 cleanroom13 is13 open13 seven13 (7)13 days13 a13 week13 twenty13 four13 (24)13 hours13 a13 day13 it13 is13 only13 staffed13 Monday13 thru13 Friday13 from13 800AM13 to13 600PM13 13 To13 ensure13 a13 safe13 working13 environment13 for13 our13 users13 we13 have13 implemented13 a13 ldquoBuddyrdquo13 policy13 in13 which13 users13 working13 between13 the13 hours13 of13 600PM13 and13 800AM13 must13 work13 with13 another13 certified13 user13 of13 the13 cleanroom13 13 13 Details13 on13 the13 procedures13 of13 the13 ldquoBuddyrdquo13 policy13 can13 be13 found13 in13 the13 Appendix13 D13 of13 this13 document13 13 13

Cleanroom13 Protocol13 and13 Etiquette13 13

The13 cleanroom13 is13 designed13 to13 meet13 the13 ISO13 class13 100100013 standard13 13 13 In13 order13 to13 ensure13 the13 safety13 of13 the13 users13 and13 staff13 and13 in13 order13 to13 maintain13 the13 integrity13 of13 the13 cleanroom13 environment13 users13 are13 expected13 to13 work13 in13 a13 professional13 manner13 13 13 Professional13 conduct13 includes13 but13 is13 not13 limited13 to13 dressing13 in13 proper13 attire13 (including13 all13 pertinent13 personal13 protective13 equipment)13 at13 all13 times13 responding13 to13 and13 following13 the13 direction13 of13 cleanroom13 staff13 and13 observing13 all13 rules13 and13 regulations13 concerning13 allowable13 materials13 and13 items13 in13 the13 cleanroom13 chemical13 use13 and13 handling13 access13 to13 restricted13 areas13 and13 equipment13 use13 13 In13 addition13 as13 a13 certified13 user13 of13 the13 cleanroom13 you13 are13 required13 to13 report13 activities13 of13 other13 users13 that13 do13 not13 conform13 to13 rules13 and13 standards13 outlined13 below13 to13 the13 staff13 or13 management13 13 Safety13 is13 the13 responsibility13 of13 everyone13 13

13 Proper13 Cleanroom13 Attire13 Proper13 cleanroom13 attire13 includes13 gowning13 in13 full13 cleanroom13 suits13 including13 hairnets13 hoods13 body13 suits13 shoe13 covers13 boots13 masks13 safety13 glasses13 and13 gloves13 in13

613 13

the13 proper13 sequence13 and13 location13 and13 wearing13 proper13 Personal13 Protective13 Equipment13 (PPE)13 where13 required13 13 Details13 of13 proper13 gowning13 are13 found13 in13 PPE13 Section13 of13 this13 manual13 in13 the13 Nanofabrication13 Cleanroom13 Laboratory13 Manual13 on13 posters13 in13 the13 cleanroom13 gowning13 area13 and13 is13 also13 demonstrated13 during13 the13 Nanofabrication13 cleanroom13 Orientation13 session13 13 13 Proper13 cleanroom13 attire13 also13 includes13 what13 is13 on13 your13 body13 under13 your13 cleanroom13 attire13 13 The13 following13 rules13 apply13

bull Never13 wear13 make-shy‐up13 if13 you13 are13 working13 in13 the13 cleanroom13 bull Never13 wear13 Sandals13 when13 working13 in13 the13 cleanroom13 13 13 bull Never13 bring13 coats13 hats13 backpacks13 canvas13 bags13 etc13 13 into13 the13 cleanroom13 13 13

Users13 should13 store13 these13 items13 in13 their13 offices13 or13 the13 lockers13 outside13 the13 cleanroom13

bull Never13 wear13 dirty13 clothes13 particularly13 muddy13 boots13 or13 shoes13 into13 the13 clean13 room13 13 13 During13 the13 winter13 bring13 an13 extra13 pair13 of13 clean13 dry13 shoes13 to13 be13 worn13 the13 clean13 room13

bull Never13 unzip13 a13 cleanroom13 gown13 to13 retrieve13 an13 item13 from13 an13 underlying13 garment13 pocket13 while13 in13 the13 cleanroom13 proper13 13 Our13 cleanroom13 suits13 come13 equipped13 with13 an13 external13 pocket13 in13 which13 a13 phone13 or13 other13 cleanroom13 allowable13 item13 can13 be13 stored13 13 The13 item13 must13 of13 course13 be13 wiped13 down13 in13 the13 gowning13 area13 prior13 to13 insertion13 into13 the13 pocket13 and13 cleanroom13 entry13

A13 SPECIAL13 NOTE13 CONCERNING13 SAFETY13 GLASSES13 Users13 visitors13 and13 staff13 must13 wear13 safety13 glasses13 at13 all13 times13 when13 in13 the13 cleanroom13 13 13 All13 safety13 glasses13 must13 comply13 with13 the13 requirements13 set13 forth13 in13 the13 American13 National13 Standards13 for13 Occupational13 and13 Education13 Eye13 and13 Face13 Protection13 ANSI13 Z87113 approved13 If13 you13 wear13 glasses13 you13 can13 wear13 them13 as13 long13 as13 they13 have13 shatter13 proof13 lenses13 and13 side13 shields13 13 13 If13 you13 have13 you13 own13 safety13 glasses13 you13 may13 wear13 them13 in13 the13 cleanroom13 as13 well13 but13 they13 must13 be13 ANSI13 Z87113 approved13

13 Materials13 Restrictions13 and13 Procedures13 In13 following13 good13 cleanroom13 practice13 a13 general13 rule13 to13 live13 by13 is13 to13 NEVER13 bring13 anything13 into13 the13 cleanroom13 that13 is13 not13 absolutely13 necessary13 for13 the13 research13 you13 are13 conducting13 13 13 Any13 item13 brought13 into13 the13 cleanroom13 must13 be13 cleanroom13 compatible13 and13 thoroughly13 cleaned13 13 wiped13 down13 prior13 to13 entry13 13 13 There13 is13 a13 wipe13 down13 station13 in13 the13 gowning13 area13 with13 proper13 cleaning13 materials13 and13 instructions13 13 13 13 In13 addition13 the13 following13 specific13 restrictions13 apply13

bull Never13 bring13 pencils13 or13 erasers13 into13 the13 clean13 room13 13 13 bull Never13 bring13 cardboard13 or13 other13 packing13 material13 into13 the13 cleanroom13 13 13

713 13

bull Never13 bring13 books13 newspapers13 magazines13 and13 other13 reading13 material13 into13 the13 cleanroom13 13 Only13 clean13 room13 paper13 and13 cleanroom13 notebooks13 are13 allowed13

bull Never13 bring13 food13 into13 the13 cleanroom13 13 13

Restricted13 Access13 Areas13 As13 a13 general13 rule13 all13 cleanroom13 chase13 areas13 unless13 specifically13 labeled13 otherwise13 are13 restricted13 to13 staff13 only13 13 Users13 are13 prohibited13 from13 entering13 these13 areas13 13 If13 a13 user13 has13 a13 need13 to13 be13 in13 a13 chase13 area13 heshe13 must13 get13 permission13 from13 staff13 or13 be13 accompanied13 by13 staff13 into13 the13 area13 13 The13 Nanofabrication13 cleanroom13 sub13 fab13 is13 also13 a13 restricted13 area13 and13 the13 same13 rules13 apply13 13 In13 addition13 the13 following13 specific13 restriction13 applies13

bull Except13 in13 cases13 of13 emergency13 users13 visitors13 and13 staff13 are13 not13 to13 open13 doors13 to13 exterior13 corridors13 for13 any13 reason13 while13 in13 the13 cleanroom13 13 13

Surveillance13 Cameras13

Surveillance13 cameras13 are13 located13 throughout13 the13 cleanroom13 in13 order13 to13 monitor13 user13 and13 staff13 actions13 13 These13 cameras13 allow13 the13 staff13 to13 monitor13 the13 activities13 in13 the13 cleanroom13 from13 a13 remote13 location13 at13 all13 times13 13 13 13 The13 cameras13 are13 essential13 for13 assessing13 cleanroom13 occupancy13 during13 an13 emergency13 and13 are13 also13 used13 in13 the13 enforcement13 of13 all13 safety13 and13 etiquette13 protocols13 particularly13 in13 the13 off13 hours13

Eyewash13 and13 Safety13 Showers13

Due13 to13 the13 hazardous13 nature13 of13 many13 of13 the13 chemicals13 used13 in13 the13 cleanroom13 there13 are13 eyewash13 and13 safety13 showers13 located13 throughout13 the13 cleanroom13 and13 in13 the13 hallways13 just13 outside13 the13 cleanroom13 13 13 13 The13 location13 and13 use13 of13 this13 equipment13 are13 explained13 during13 the13 cleanroom13 orientation13 13 13 Appendix13 C13 of13 this13 document13 provides13 a13 map13 of13 the13 cleanroom13 that13 identifies13 the13 locations13 of13 all13 eyewash13 and13 safety13 showers13

13 13

813 13

Cleanroom13 Alarms13 13 Evacuation13 Emergency13 Response13

Due13 to13 the13 presence13 of13 hazardous13 materials13 and13 equipment13 in13 the13 cleanroom13 and13 its13 support13 space13 (ie13 13 Hazardous13 chemicals13 Hazardous13 gases13 High13 Voltage13 Equipment13 etchellip)13 there13 are13 multiple13 systems13 installed13 that13 monitor13 safety13 13 Each13 of13 these13 systems13 is13 equipped13 with13 visual13 and13 audible13 notification13 alarms13 including13 horns13 and13 strobe13 lights13 13 If13 there13 is13 a13 fire13 or13 a13 release13 of13 a13 Hazardous13 Process13 Material13 (HPM)13 the13 monitoring13 systems13 will13 detect13 it13 and13 set13 off13 audible13 (horns)13 and13 visual13 (strobe)13 alarms13 in13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Cleanroom13 users13 must13 be13 aware13 of13 these13 alarms13 and13 be13 able13 to13 identify13 them13 quickly13 and13 react13 accordingly13 13 13 The13 following13 are13 a13 list13 of13 alarms13 users13 may13 encounter13 in13 the13 cleanroom13

Fire13 Detection13 Alarms13 Fire13 alarms13 and13 Pull13 Stations13 are13 located13 throughout13 the13 cleanroom13 and13 the13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 white13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 fire13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 building13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

Toxic13 Gas13 Detection13 13 Toxic13 gas13 sensors13 and13 strobes13 are13 located13 throughout13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 blue13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 toxic13 gas13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

The13 operation13 and13 location13 of13 the13 fire13 and13 toxic13 gas13 detection13 systems13 are13 covered13 in13 the13 Cleanroom13 Orientation13 walkthrough13 13 13 13

Appendix13 A13 amp13 Appendix13 B13 of13 this13 document13 provides13 a13 map13 of13 the13 locations13 of13 the13 alarm13 systems13 as13 well13 as13 the13 evacuation13 paths13 for13 exiting13 the13 cleanroom13 and13 the13 building13 13 Users13 are13 expected13 to13 review13 this13 information13 prior13 to13 using13 the13 Nanofabrication13 cleanroom13

Appendix13 F13 of13 this13 manual13 contains13 the13 Universityrsquos13 Emergency13 Response13 Procedures13 to13 be13 used13 in13 case13 of13 an13 emergency13

913 13

Visitors13

Visitor13 tours13 of13 the13 cleanroom13 can13 be13 arranged13 by13 contacting13 the13 Administrative13 Staff13 (Susie13 Sherlock13 sjs10psuedu)13 13 13 Standard13 visitor13 tours13 provide13 only13 window13 access13 to13 the13 cleanroom13 13 13 Special13 tours13 that13 include13 cleanroom13 entry13 are13 extremely13 limited13 and13 by13 special13 request13 only13 13 13 Please13 note13 that13 all13 visitors13 who13 enter13 the13 cleanroom13 must13 be13 escorted13 by13 either13 a13 certified13 user13 or13 a13 member13 of13 the13 technical13 staff13 13 13 Under13 no13 circumstances13 may13 a13 visitor13 be13 allowed13 to13 operate13 equipment13 use13 chemicals13 or13 be13 left13 unattended13 in13 the13 cleanroom13

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13

Safety13 is13 the13 top13 priority13 for13 all13 activities13 carried13 out13 within13 the13 cleanroom13 13 There13 can13 be13 no13 compromises13 with13 regards13 to13 safety13 in13 completing13 a13 research13 project13 13 The13 technical13 staff13 is13 charged13 with13 providing13 a13 safe13 cleanroom13 environment13 for13 all13 users13 to13 carry13 out13 their13 research13 and13 it13 is13 the13 responsibility13 of13 each13 user13 to13 see13 that13 the13 environment13 is13 utilized13 in13 a13 safe13 manner13 13 In13 order13 to13 guide13 users13 the13 MRI13 safety13 committee13 has13 developed13 general13 safety13 policies13 in13 conjunction13 with13 and13 guided13 by13 Penn13 State13 Universityrsquos13 safety13 policies13 that13 must13 be13 followed13 by13 all13 users13 and13 staff13 13 These13 policies13 have13 been13 devised13 based13 on13 state13 and13 federal13 laws13 basic13 materials13 chemical13 and13 process13 knowledge13 and13 common13 sense13 13 13 In13 some13 cases13 the13 policies13 were13 created13 in13 response13 to13 specific13 incidents13 by13 users13 of13 the13 cleanroom13 13 13 13

13 ALL13 USERS13 AND13 STAFF13 ARE13 CHARGED13 WITH13 THE13 ENFORCEMENT13 OF13 THESE13 POLICIES13

If13 a13 user13 or13 a13 staff13 member13 observes13 another13 user13 or13 staff13 member13 in13 violation13 of13 clean13 room13 safety13 or13 etiquette13 policies13 or13 otherwise13 compromising13 his13 or13 her13 personal13 safety13 or13 the13 safety13 of13 others13 it13 is13 their13 responsibility13 to13 not13 only13 point13 it13 out13 to13 the13 user13 in13 violation13 but13 also13 to13 report13 it13 to13 another13 staff13 member13 or13 an13 MRI13 safety13 officer13 (observation13 of13 violations13 can13 also13 occur13 when13 staff13 regularly13 review13 video13 from13 lab13 surveillance13 cameras)13 13 13 At13 that13 point13 the13 user13 in13 violation13 will13 be13 asked13 to13 leave13 the13 cleanroom13 and13 their13 access13 to13 the13 cleanroom13 will13 be13 temporarily13 revoked13 13 13 13 The13 user13 in13 violation13 and13 the13 userrsquos13 PI13 will13 then13 be13 notified13 by13 email13 and13 an13 internal13 review13 of13 the13 incident13 will13 be13 conducted13 by13 Nanofabrication13 Cleanroom13 Safety13 Committee13 13 13 The13 committee13 member(s)13 will13 determine13 what13 actions13 will13 be13 taken13 in13 response13 to13 the13 safety13 violation13 13 13 Users13 should13 be13 aware13 that13 suspensions13 from13 the13 clean13 room13 may13 be13 for13 a13 day13 a13 period13 of13 several13 weeks13 months13 or13 permanently13 depending13 on13 the13 severity13 of13 the13 violation13 and13 whether13 the13 user13 has13 previous13 violations13 13 Please13 be13 aware13 that13 readmission13 to13 the13 clean13 room13 will13 be13 at13 the13 sole13 discretion13 of13 the13 committee13 13 13 13

1013 13

Ignorance13 of13 cleanroom13 safety13 policies13 lack13 of13 common13 sense13 language13 difficulties13 carelessness13 and13 haste13 are13 not13 adequate13 excuses13 for13 unsafe13 behavior13 Each13 user13 must13 remember13 that13 they13 are13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13

Safety13 Incident13 Reporting13 13

All13 safety13 related13 incidents13 are13 required13 to13 be13 reported13 to13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 13 13 The13 reporting13 requirements13 for13 different13 types13 of13 incidents13 can13 be13 found13 on13 the13 PSU13 EHampS13 site13 (httpwwwehspsuedu)13 13 13 If13 you13 have13 any13 questions13 regarding13 the13 reporting13 requirements13 please13 contact13 one13 of13 the13 cleanrooms13 Technical13 staff13 immediately13 to13 get13 clarification13 13 13

13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

413 13

General13 Information13

Safety13 Training13 and13 Cleanroom13 Orientation13

All13 PSU13 cleanroom13 users13 are13 required13 to13 read13 this13 safety13 manual13 and13 complete13 the13 Penn13 State13 University13 Lab13 Safety13 Training13 Program13 and13 a13 Nanofabrication13 cleanroom13 specific13 orientation13 in13 order13 to13 use13 the13 laboratory13 13 13 The13 Lab13 Safety13 program13 provides13 an13 overview13 of13 general13 laboratory13 safety13 procedures13 proper13 chemical13 use13 and13 disposal13 procedures13 as13 well13 as13 general13 lab13 use13 and13 etiquette13 13 13 Users13 can13 complete13 this13 training13 online13 at13 the13 website13 of13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 13 (EHampS)13 (httpwwwehspsuedu)13 (Note13 a13 Penn13 State13 Access13 Account13 ID13 or13 Friends13 of13 Penn13 State13 ID13 is13 required)13 or13 by13 attending13 a13 safety13 class13 provided13 by13 the13 Penn13 State13 Materials13 Research13 Institute13 (MRI)13 Safety13 representative13 13 13 The13 Nanofabrication13 cleanroom13 orientation13 includes13 a13 lab13 walkthrough13 conducted13 by13 a13 MRI13 staff13 member13 during13 which13 important13 safety13 items13 and13 issues13 are13 identified13 for13 the13 users13 13 The13 orientation13 also13 provides13 information13 on13 research13 ethics13 and13 societal13 impact13 13 13

Access13

Access13 to13 the13 cleanroom13 is13 for13 certified13 users13 and13 technical13 staff13 only13 13 13 In13 order13 to13 become13 a13 certified13 user13 of13 the13 cleanroom13 you13 must13 have13 completed13 items13 described13 in13 the13 previous13 paragraph13 13 Upon13 completion13 of13 those13 items13 certification13 is13 granted13 for13 one13 calendar13 year13 13 At13 the13 end13 of13 each13 calendar13 year13 users13 are13 required13 to13 undergo13 safety13 recertification13 13 by13 completing13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 online13 refresher13 safety13 training13 course(httpwwwehspsuedu)13 13 13 If13 a13 user13 fails13 to13 complete13 recertification13 cleanroom13 access13 will13 be13 suspended13 until13 recertification13 is13 completed13 13 13

PLEASE13 NOTE13 access13 to13 the13 cleanroom13 in13 and13 of13 itself13 does13 not13 grant13 certified13 users13 the13 right13 to13 operate13 equipment13 13 13 In13 order13 to13 operate13 equipment13 certified13 users13 complete13 equipment13 training13 13 13 Details13 on13 equipment13 training13 can13 be13 found13 in13 the13 Equipment13 Use13 Safety13 section13 of13 this13 document13

Research13 Instrument13 Management13 System13 (RIMS)13

RIMS13 is13 the13 web-shy‐based13 software13 platform13 used13 13 for13 reserving13 equipment13 tracking13 equipment13 use13 and13 lab13 time13 and13 billing13 in13 all13 user13 facilities13 overseen13 by13 the13 Office13 of13 the13 Vice13 President13 for13 Research13 (VPR)13 at13 Penn13 State13 University13 13 13 The13 system13 was13 formerly13

513 13

designated13 as13 the13 ldquoPortalrdquo13 (prior13 to13 72010)13 and13 was13 developed13 in13 collaboration13 with13 a13 commercial13 vendor13 Versatile13 and13 customized13 for13 use13 by13 Penn13 Statersquos13 user13 facilities13 13 13 In13 order13 to13 begin13 work13 in13 the13 cleanroom13 you13 must13 setup13 an13 account13 in13 RIMS13 13 13 Details13 on13 how13 to13 obtain13 a13 RIMS13 account13 can13 be13 found13 on13 the13 MRIrsquos13 RIMS13 Launchpad13 page13 13 (httpwwwrimspsuedufaqsgetting_startedasp)13

Hours13 of13 Operation13 Off13 Hours13 Use13

The13 Penn13 State13 Nanofabrication13 clean13 room13 is13 open13 for13 use13 seven13 (7)13 days13 a13 week13 twenty13 four13 (24)13 hours13 a13 day13 13 13 If13 the13 cleanroom13 is13 closed13 for13 any13 reason13 information13 concerning13 the13 reason13 for13 shut13 down13 and13 the13 estimated13 duration13 will13 be13 posted13 on13 the13 MRIrsquos13 RIMS13 Launchpad13 page13 (httpwwwrimspsuedufaqsgetting_startedasp)13 as13 well13 as13 on13 monitors13 outside13 the13 cleanroom13 gowning13 area13 13 13

Although13 the13 cleanroom13 is13 open13 seven13 (7)13 days13 a13 week13 twenty13 four13 (24)13 hours13 a13 day13 it13 is13 only13 staffed13 Monday13 thru13 Friday13 from13 800AM13 to13 600PM13 13 To13 ensure13 a13 safe13 working13 environment13 for13 our13 users13 we13 have13 implemented13 a13 ldquoBuddyrdquo13 policy13 in13 which13 users13 working13 between13 the13 hours13 of13 600PM13 and13 800AM13 must13 work13 with13 another13 certified13 user13 of13 the13 cleanroom13 13 13 Details13 on13 the13 procedures13 of13 the13 ldquoBuddyrdquo13 policy13 can13 be13 found13 in13 the13 Appendix13 D13 of13 this13 document13 13 13

Cleanroom13 Protocol13 and13 Etiquette13 13

The13 cleanroom13 is13 designed13 to13 meet13 the13 ISO13 class13 100100013 standard13 13 13 In13 order13 to13 ensure13 the13 safety13 of13 the13 users13 and13 staff13 and13 in13 order13 to13 maintain13 the13 integrity13 of13 the13 cleanroom13 environment13 users13 are13 expected13 to13 work13 in13 a13 professional13 manner13 13 13 Professional13 conduct13 includes13 but13 is13 not13 limited13 to13 dressing13 in13 proper13 attire13 (including13 all13 pertinent13 personal13 protective13 equipment)13 at13 all13 times13 responding13 to13 and13 following13 the13 direction13 of13 cleanroom13 staff13 and13 observing13 all13 rules13 and13 regulations13 concerning13 allowable13 materials13 and13 items13 in13 the13 cleanroom13 chemical13 use13 and13 handling13 access13 to13 restricted13 areas13 and13 equipment13 use13 13 In13 addition13 as13 a13 certified13 user13 of13 the13 cleanroom13 you13 are13 required13 to13 report13 activities13 of13 other13 users13 that13 do13 not13 conform13 to13 rules13 and13 standards13 outlined13 below13 to13 the13 staff13 or13 management13 13 Safety13 is13 the13 responsibility13 of13 everyone13 13

13 Proper13 Cleanroom13 Attire13 Proper13 cleanroom13 attire13 includes13 gowning13 in13 full13 cleanroom13 suits13 including13 hairnets13 hoods13 body13 suits13 shoe13 covers13 boots13 masks13 safety13 glasses13 and13 gloves13 in13

613 13

the13 proper13 sequence13 and13 location13 and13 wearing13 proper13 Personal13 Protective13 Equipment13 (PPE)13 where13 required13 13 Details13 of13 proper13 gowning13 are13 found13 in13 PPE13 Section13 of13 this13 manual13 in13 the13 Nanofabrication13 Cleanroom13 Laboratory13 Manual13 on13 posters13 in13 the13 cleanroom13 gowning13 area13 and13 is13 also13 demonstrated13 during13 the13 Nanofabrication13 cleanroom13 Orientation13 session13 13 13 Proper13 cleanroom13 attire13 also13 includes13 what13 is13 on13 your13 body13 under13 your13 cleanroom13 attire13 13 The13 following13 rules13 apply13

bull Never13 wear13 make-shy‐up13 if13 you13 are13 working13 in13 the13 cleanroom13 bull Never13 wear13 Sandals13 when13 working13 in13 the13 cleanroom13 13 13 bull Never13 bring13 coats13 hats13 backpacks13 canvas13 bags13 etc13 13 into13 the13 cleanroom13 13 13

Users13 should13 store13 these13 items13 in13 their13 offices13 or13 the13 lockers13 outside13 the13 cleanroom13

bull Never13 wear13 dirty13 clothes13 particularly13 muddy13 boots13 or13 shoes13 into13 the13 clean13 room13 13 13 During13 the13 winter13 bring13 an13 extra13 pair13 of13 clean13 dry13 shoes13 to13 be13 worn13 the13 clean13 room13

bull Never13 unzip13 a13 cleanroom13 gown13 to13 retrieve13 an13 item13 from13 an13 underlying13 garment13 pocket13 while13 in13 the13 cleanroom13 proper13 13 Our13 cleanroom13 suits13 come13 equipped13 with13 an13 external13 pocket13 in13 which13 a13 phone13 or13 other13 cleanroom13 allowable13 item13 can13 be13 stored13 13 The13 item13 must13 of13 course13 be13 wiped13 down13 in13 the13 gowning13 area13 prior13 to13 insertion13 into13 the13 pocket13 and13 cleanroom13 entry13

A13 SPECIAL13 NOTE13 CONCERNING13 SAFETY13 GLASSES13 Users13 visitors13 and13 staff13 must13 wear13 safety13 glasses13 at13 all13 times13 when13 in13 the13 cleanroom13 13 13 All13 safety13 glasses13 must13 comply13 with13 the13 requirements13 set13 forth13 in13 the13 American13 National13 Standards13 for13 Occupational13 and13 Education13 Eye13 and13 Face13 Protection13 ANSI13 Z87113 approved13 If13 you13 wear13 glasses13 you13 can13 wear13 them13 as13 long13 as13 they13 have13 shatter13 proof13 lenses13 and13 side13 shields13 13 13 If13 you13 have13 you13 own13 safety13 glasses13 you13 may13 wear13 them13 in13 the13 cleanroom13 as13 well13 but13 they13 must13 be13 ANSI13 Z87113 approved13

13 Materials13 Restrictions13 and13 Procedures13 In13 following13 good13 cleanroom13 practice13 a13 general13 rule13 to13 live13 by13 is13 to13 NEVER13 bring13 anything13 into13 the13 cleanroom13 that13 is13 not13 absolutely13 necessary13 for13 the13 research13 you13 are13 conducting13 13 13 Any13 item13 brought13 into13 the13 cleanroom13 must13 be13 cleanroom13 compatible13 and13 thoroughly13 cleaned13 13 wiped13 down13 prior13 to13 entry13 13 13 There13 is13 a13 wipe13 down13 station13 in13 the13 gowning13 area13 with13 proper13 cleaning13 materials13 and13 instructions13 13 13 13 In13 addition13 the13 following13 specific13 restrictions13 apply13

bull Never13 bring13 pencils13 or13 erasers13 into13 the13 clean13 room13 13 13 bull Never13 bring13 cardboard13 or13 other13 packing13 material13 into13 the13 cleanroom13 13 13

713 13

bull Never13 bring13 books13 newspapers13 magazines13 and13 other13 reading13 material13 into13 the13 cleanroom13 13 Only13 clean13 room13 paper13 and13 cleanroom13 notebooks13 are13 allowed13

bull Never13 bring13 food13 into13 the13 cleanroom13 13 13

Restricted13 Access13 Areas13 As13 a13 general13 rule13 all13 cleanroom13 chase13 areas13 unless13 specifically13 labeled13 otherwise13 are13 restricted13 to13 staff13 only13 13 Users13 are13 prohibited13 from13 entering13 these13 areas13 13 If13 a13 user13 has13 a13 need13 to13 be13 in13 a13 chase13 area13 heshe13 must13 get13 permission13 from13 staff13 or13 be13 accompanied13 by13 staff13 into13 the13 area13 13 The13 Nanofabrication13 cleanroom13 sub13 fab13 is13 also13 a13 restricted13 area13 and13 the13 same13 rules13 apply13 13 In13 addition13 the13 following13 specific13 restriction13 applies13

bull Except13 in13 cases13 of13 emergency13 users13 visitors13 and13 staff13 are13 not13 to13 open13 doors13 to13 exterior13 corridors13 for13 any13 reason13 while13 in13 the13 cleanroom13 13 13

Surveillance13 Cameras13

Surveillance13 cameras13 are13 located13 throughout13 the13 cleanroom13 in13 order13 to13 monitor13 user13 and13 staff13 actions13 13 These13 cameras13 allow13 the13 staff13 to13 monitor13 the13 activities13 in13 the13 cleanroom13 from13 a13 remote13 location13 at13 all13 times13 13 13 13 The13 cameras13 are13 essential13 for13 assessing13 cleanroom13 occupancy13 during13 an13 emergency13 and13 are13 also13 used13 in13 the13 enforcement13 of13 all13 safety13 and13 etiquette13 protocols13 particularly13 in13 the13 off13 hours13

Eyewash13 and13 Safety13 Showers13

Due13 to13 the13 hazardous13 nature13 of13 many13 of13 the13 chemicals13 used13 in13 the13 cleanroom13 there13 are13 eyewash13 and13 safety13 showers13 located13 throughout13 the13 cleanroom13 and13 in13 the13 hallways13 just13 outside13 the13 cleanroom13 13 13 13 The13 location13 and13 use13 of13 this13 equipment13 are13 explained13 during13 the13 cleanroom13 orientation13 13 13 Appendix13 C13 of13 this13 document13 provides13 a13 map13 of13 the13 cleanroom13 that13 identifies13 the13 locations13 of13 all13 eyewash13 and13 safety13 showers13

13 13

813 13

Cleanroom13 Alarms13 13 Evacuation13 Emergency13 Response13

Due13 to13 the13 presence13 of13 hazardous13 materials13 and13 equipment13 in13 the13 cleanroom13 and13 its13 support13 space13 (ie13 13 Hazardous13 chemicals13 Hazardous13 gases13 High13 Voltage13 Equipment13 etchellip)13 there13 are13 multiple13 systems13 installed13 that13 monitor13 safety13 13 Each13 of13 these13 systems13 is13 equipped13 with13 visual13 and13 audible13 notification13 alarms13 including13 horns13 and13 strobe13 lights13 13 If13 there13 is13 a13 fire13 or13 a13 release13 of13 a13 Hazardous13 Process13 Material13 (HPM)13 the13 monitoring13 systems13 will13 detect13 it13 and13 set13 off13 audible13 (horns)13 and13 visual13 (strobe)13 alarms13 in13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Cleanroom13 users13 must13 be13 aware13 of13 these13 alarms13 and13 be13 able13 to13 identify13 them13 quickly13 and13 react13 accordingly13 13 13 The13 following13 are13 a13 list13 of13 alarms13 users13 may13 encounter13 in13 the13 cleanroom13

Fire13 Detection13 Alarms13 Fire13 alarms13 and13 Pull13 Stations13 are13 located13 throughout13 the13 cleanroom13 and13 the13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 white13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 fire13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 building13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

Toxic13 Gas13 Detection13 13 Toxic13 gas13 sensors13 and13 strobes13 are13 located13 throughout13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 blue13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 toxic13 gas13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

The13 operation13 and13 location13 of13 the13 fire13 and13 toxic13 gas13 detection13 systems13 are13 covered13 in13 the13 Cleanroom13 Orientation13 walkthrough13 13 13 13

Appendix13 A13 amp13 Appendix13 B13 of13 this13 document13 provides13 a13 map13 of13 the13 locations13 of13 the13 alarm13 systems13 as13 well13 as13 the13 evacuation13 paths13 for13 exiting13 the13 cleanroom13 and13 the13 building13 13 Users13 are13 expected13 to13 review13 this13 information13 prior13 to13 using13 the13 Nanofabrication13 cleanroom13

Appendix13 F13 of13 this13 manual13 contains13 the13 Universityrsquos13 Emergency13 Response13 Procedures13 to13 be13 used13 in13 case13 of13 an13 emergency13

913 13

Visitors13

Visitor13 tours13 of13 the13 cleanroom13 can13 be13 arranged13 by13 contacting13 the13 Administrative13 Staff13 (Susie13 Sherlock13 sjs10psuedu)13 13 13 Standard13 visitor13 tours13 provide13 only13 window13 access13 to13 the13 cleanroom13 13 13 Special13 tours13 that13 include13 cleanroom13 entry13 are13 extremely13 limited13 and13 by13 special13 request13 only13 13 13 Please13 note13 that13 all13 visitors13 who13 enter13 the13 cleanroom13 must13 be13 escorted13 by13 either13 a13 certified13 user13 or13 a13 member13 of13 the13 technical13 staff13 13 13 Under13 no13 circumstances13 may13 a13 visitor13 be13 allowed13 to13 operate13 equipment13 use13 chemicals13 or13 be13 left13 unattended13 in13 the13 cleanroom13

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13

Safety13 is13 the13 top13 priority13 for13 all13 activities13 carried13 out13 within13 the13 cleanroom13 13 There13 can13 be13 no13 compromises13 with13 regards13 to13 safety13 in13 completing13 a13 research13 project13 13 The13 technical13 staff13 is13 charged13 with13 providing13 a13 safe13 cleanroom13 environment13 for13 all13 users13 to13 carry13 out13 their13 research13 and13 it13 is13 the13 responsibility13 of13 each13 user13 to13 see13 that13 the13 environment13 is13 utilized13 in13 a13 safe13 manner13 13 In13 order13 to13 guide13 users13 the13 MRI13 safety13 committee13 has13 developed13 general13 safety13 policies13 in13 conjunction13 with13 and13 guided13 by13 Penn13 State13 Universityrsquos13 safety13 policies13 that13 must13 be13 followed13 by13 all13 users13 and13 staff13 13 These13 policies13 have13 been13 devised13 based13 on13 state13 and13 federal13 laws13 basic13 materials13 chemical13 and13 process13 knowledge13 and13 common13 sense13 13 13 In13 some13 cases13 the13 policies13 were13 created13 in13 response13 to13 specific13 incidents13 by13 users13 of13 the13 cleanroom13 13 13 13

13 ALL13 USERS13 AND13 STAFF13 ARE13 CHARGED13 WITH13 THE13 ENFORCEMENT13 OF13 THESE13 POLICIES13

If13 a13 user13 or13 a13 staff13 member13 observes13 another13 user13 or13 staff13 member13 in13 violation13 of13 clean13 room13 safety13 or13 etiquette13 policies13 or13 otherwise13 compromising13 his13 or13 her13 personal13 safety13 or13 the13 safety13 of13 others13 it13 is13 their13 responsibility13 to13 not13 only13 point13 it13 out13 to13 the13 user13 in13 violation13 but13 also13 to13 report13 it13 to13 another13 staff13 member13 or13 an13 MRI13 safety13 officer13 (observation13 of13 violations13 can13 also13 occur13 when13 staff13 regularly13 review13 video13 from13 lab13 surveillance13 cameras)13 13 13 At13 that13 point13 the13 user13 in13 violation13 will13 be13 asked13 to13 leave13 the13 cleanroom13 and13 their13 access13 to13 the13 cleanroom13 will13 be13 temporarily13 revoked13 13 13 13 The13 user13 in13 violation13 and13 the13 userrsquos13 PI13 will13 then13 be13 notified13 by13 email13 and13 an13 internal13 review13 of13 the13 incident13 will13 be13 conducted13 by13 Nanofabrication13 Cleanroom13 Safety13 Committee13 13 13 The13 committee13 member(s)13 will13 determine13 what13 actions13 will13 be13 taken13 in13 response13 to13 the13 safety13 violation13 13 13 Users13 should13 be13 aware13 that13 suspensions13 from13 the13 clean13 room13 may13 be13 for13 a13 day13 a13 period13 of13 several13 weeks13 months13 or13 permanently13 depending13 on13 the13 severity13 of13 the13 violation13 and13 whether13 the13 user13 has13 previous13 violations13 13 Please13 be13 aware13 that13 readmission13 to13 the13 clean13 room13 will13 be13 at13 the13 sole13 discretion13 of13 the13 committee13 13 13 13

1013 13

Ignorance13 of13 cleanroom13 safety13 policies13 lack13 of13 common13 sense13 language13 difficulties13 carelessness13 and13 haste13 are13 not13 adequate13 excuses13 for13 unsafe13 behavior13 Each13 user13 must13 remember13 that13 they13 are13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13

Safety13 Incident13 Reporting13 13

All13 safety13 related13 incidents13 are13 required13 to13 be13 reported13 to13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 13 13 The13 reporting13 requirements13 for13 different13 types13 of13 incidents13 can13 be13 found13 on13 the13 PSU13 EHampS13 site13 (httpwwwehspsuedu)13 13 13 If13 you13 have13 any13 questions13 regarding13 the13 reporting13 requirements13 please13 contact13 one13 of13 the13 cleanrooms13 Technical13 staff13 immediately13 to13 get13 clarification13 13 13

13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

513 13

designated13 as13 the13 ldquoPortalrdquo13 (prior13 to13 72010)13 and13 was13 developed13 in13 collaboration13 with13 a13 commercial13 vendor13 Versatile13 and13 customized13 for13 use13 by13 Penn13 Statersquos13 user13 facilities13 13 13 In13 order13 to13 begin13 work13 in13 the13 cleanroom13 you13 must13 setup13 an13 account13 in13 RIMS13 13 13 Details13 on13 how13 to13 obtain13 a13 RIMS13 account13 can13 be13 found13 on13 the13 MRIrsquos13 RIMS13 Launchpad13 page13 13 (httpwwwrimspsuedufaqsgetting_startedasp)13

Hours13 of13 Operation13 Off13 Hours13 Use13

The13 Penn13 State13 Nanofabrication13 clean13 room13 is13 open13 for13 use13 seven13 (7)13 days13 a13 week13 twenty13 four13 (24)13 hours13 a13 day13 13 13 If13 the13 cleanroom13 is13 closed13 for13 any13 reason13 information13 concerning13 the13 reason13 for13 shut13 down13 and13 the13 estimated13 duration13 will13 be13 posted13 on13 the13 MRIrsquos13 RIMS13 Launchpad13 page13 (httpwwwrimspsuedufaqsgetting_startedasp)13 as13 well13 as13 on13 monitors13 outside13 the13 cleanroom13 gowning13 area13 13 13

Although13 the13 cleanroom13 is13 open13 seven13 (7)13 days13 a13 week13 twenty13 four13 (24)13 hours13 a13 day13 it13 is13 only13 staffed13 Monday13 thru13 Friday13 from13 800AM13 to13 600PM13 13 To13 ensure13 a13 safe13 working13 environment13 for13 our13 users13 we13 have13 implemented13 a13 ldquoBuddyrdquo13 policy13 in13 which13 users13 working13 between13 the13 hours13 of13 600PM13 and13 800AM13 must13 work13 with13 another13 certified13 user13 of13 the13 cleanroom13 13 13 Details13 on13 the13 procedures13 of13 the13 ldquoBuddyrdquo13 policy13 can13 be13 found13 in13 the13 Appendix13 D13 of13 this13 document13 13 13

Cleanroom13 Protocol13 and13 Etiquette13 13

The13 cleanroom13 is13 designed13 to13 meet13 the13 ISO13 class13 100100013 standard13 13 13 In13 order13 to13 ensure13 the13 safety13 of13 the13 users13 and13 staff13 and13 in13 order13 to13 maintain13 the13 integrity13 of13 the13 cleanroom13 environment13 users13 are13 expected13 to13 work13 in13 a13 professional13 manner13 13 13 Professional13 conduct13 includes13 but13 is13 not13 limited13 to13 dressing13 in13 proper13 attire13 (including13 all13 pertinent13 personal13 protective13 equipment)13 at13 all13 times13 responding13 to13 and13 following13 the13 direction13 of13 cleanroom13 staff13 and13 observing13 all13 rules13 and13 regulations13 concerning13 allowable13 materials13 and13 items13 in13 the13 cleanroom13 chemical13 use13 and13 handling13 access13 to13 restricted13 areas13 and13 equipment13 use13 13 In13 addition13 as13 a13 certified13 user13 of13 the13 cleanroom13 you13 are13 required13 to13 report13 activities13 of13 other13 users13 that13 do13 not13 conform13 to13 rules13 and13 standards13 outlined13 below13 to13 the13 staff13 or13 management13 13 Safety13 is13 the13 responsibility13 of13 everyone13 13

13 Proper13 Cleanroom13 Attire13 Proper13 cleanroom13 attire13 includes13 gowning13 in13 full13 cleanroom13 suits13 including13 hairnets13 hoods13 body13 suits13 shoe13 covers13 boots13 masks13 safety13 glasses13 and13 gloves13 in13

613 13

the13 proper13 sequence13 and13 location13 and13 wearing13 proper13 Personal13 Protective13 Equipment13 (PPE)13 where13 required13 13 Details13 of13 proper13 gowning13 are13 found13 in13 PPE13 Section13 of13 this13 manual13 in13 the13 Nanofabrication13 Cleanroom13 Laboratory13 Manual13 on13 posters13 in13 the13 cleanroom13 gowning13 area13 and13 is13 also13 demonstrated13 during13 the13 Nanofabrication13 cleanroom13 Orientation13 session13 13 13 Proper13 cleanroom13 attire13 also13 includes13 what13 is13 on13 your13 body13 under13 your13 cleanroom13 attire13 13 The13 following13 rules13 apply13

bull Never13 wear13 make-shy‐up13 if13 you13 are13 working13 in13 the13 cleanroom13 bull Never13 wear13 Sandals13 when13 working13 in13 the13 cleanroom13 13 13 bull Never13 bring13 coats13 hats13 backpacks13 canvas13 bags13 etc13 13 into13 the13 cleanroom13 13 13

Users13 should13 store13 these13 items13 in13 their13 offices13 or13 the13 lockers13 outside13 the13 cleanroom13

bull Never13 wear13 dirty13 clothes13 particularly13 muddy13 boots13 or13 shoes13 into13 the13 clean13 room13 13 13 During13 the13 winter13 bring13 an13 extra13 pair13 of13 clean13 dry13 shoes13 to13 be13 worn13 the13 clean13 room13

bull Never13 unzip13 a13 cleanroom13 gown13 to13 retrieve13 an13 item13 from13 an13 underlying13 garment13 pocket13 while13 in13 the13 cleanroom13 proper13 13 Our13 cleanroom13 suits13 come13 equipped13 with13 an13 external13 pocket13 in13 which13 a13 phone13 or13 other13 cleanroom13 allowable13 item13 can13 be13 stored13 13 The13 item13 must13 of13 course13 be13 wiped13 down13 in13 the13 gowning13 area13 prior13 to13 insertion13 into13 the13 pocket13 and13 cleanroom13 entry13

A13 SPECIAL13 NOTE13 CONCERNING13 SAFETY13 GLASSES13 Users13 visitors13 and13 staff13 must13 wear13 safety13 glasses13 at13 all13 times13 when13 in13 the13 cleanroom13 13 13 All13 safety13 glasses13 must13 comply13 with13 the13 requirements13 set13 forth13 in13 the13 American13 National13 Standards13 for13 Occupational13 and13 Education13 Eye13 and13 Face13 Protection13 ANSI13 Z87113 approved13 If13 you13 wear13 glasses13 you13 can13 wear13 them13 as13 long13 as13 they13 have13 shatter13 proof13 lenses13 and13 side13 shields13 13 13 If13 you13 have13 you13 own13 safety13 glasses13 you13 may13 wear13 them13 in13 the13 cleanroom13 as13 well13 but13 they13 must13 be13 ANSI13 Z87113 approved13

13 Materials13 Restrictions13 and13 Procedures13 In13 following13 good13 cleanroom13 practice13 a13 general13 rule13 to13 live13 by13 is13 to13 NEVER13 bring13 anything13 into13 the13 cleanroom13 that13 is13 not13 absolutely13 necessary13 for13 the13 research13 you13 are13 conducting13 13 13 Any13 item13 brought13 into13 the13 cleanroom13 must13 be13 cleanroom13 compatible13 and13 thoroughly13 cleaned13 13 wiped13 down13 prior13 to13 entry13 13 13 There13 is13 a13 wipe13 down13 station13 in13 the13 gowning13 area13 with13 proper13 cleaning13 materials13 and13 instructions13 13 13 13 In13 addition13 the13 following13 specific13 restrictions13 apply13

bull Never13 bring13 pencils13 or13 erasers13 into13 the13 clean13 room13 13 13 bull Never13 bring13 cardboard13 or13 other13 packing13 material13 into13 the13 cleanroom13 13 13

713 13

bull Never13 bring13 books13 newspapers13 magazines13 and13 other13 reading13 material13 into13 the13 cleanroom13 13 Only13 clean13 room13 paper13 and13 cleanroom13 notebooks13 are13 allowed13

bull Never13 bring13 food13 into13 the13 cleanroom13 13 13

Restricted13 Access13 Areas13 As13 a13 general13 rule13 all13 cleanroom13 chase13 areas13 unless13 specifically13 labeled13 otherwise13 are13 restricted13 to13 staff13 only13 13 Users13 are13 prohibited13 from13 entering13 these13 areas13 13 If13 a13 user13 has13 a13 need13 to13 be13 in13 a13 chase13 area13 heshe13 must13 get13 permission13 from13 staff13 or13 be13 accompanied13 by13 staff13 into13 the13 area13 13 The13 Nanofabrication13 cleanroom13 sub13 fab13 is13 also13 a13 restricted13 area13 and13 the13 same13 rules13 apply13 13 In13 addition13 the13 following13 specific13 restriction13 applies13

bull Except13 in13 cases13 of13 emergency13 users13 visitors13 and13 staff13 are13 not13 to13 open13 doors13 to13 exterior13 corridors13 for13 any13 reason13 while13 in13 the13 cleanroom13 13 13

Surveillance13 Cameras13

Surveillance13 cameras13 are13 located13 throughout13 the13 cleanroom13 in13 order13 to13 monitor13 user13 and13 staff13 actions13 13 These13 cameras13 allow13 the13 staff13 to13 monitor13 the13 activities13 in13 the13 cleanroom13 from13 a13 remote13 location13 at13 all13 times13 13 13 13 The13 cameras13 are13 essential13 for13 assessing13 cleanroom13 occupancy13 during13 an13 emergency13 and13 are13 also13 used13 in13 the13 enforcement13 of13 all13 safety13 and13 etiquette13 protocols13 particularly13 in13 the13 off13 hours13

Eyewash13 and13 Safety13 Showers13

Due13 to13 the13 hazardous13 nature13 of13 many13 of13 the13 chemicals13 used13 in13 the13 cleanroom13 there13 are13 eyewash13 and13 safety13 showers13 located13 throughout13 the13 cleanroom13 and13 in13 the13 hallways13 just13 outside13 the13 cleanroom13 13 13 13 The13 location13 and13 use13 of13 this13 equipment13 are13 explained13 during13 the13 cleanroom13 orientation13 13 13 Appendix13 C13 of13 this13 document13 provides13 a13 map13 of13 the13 cleanroom13 that13 identifies13 the13 locations13 of13 all13 eyewash13 and13 safety13 showers13

13 13

813 13

Cleanroom13 Alarms13 13 Evacuation13 Emergency13 Response13

Due13 to13 the13 presence13 of13 hazardous13 materials13 and13 equipment13 in13 the13 cleanroom13 and13 its13 support13 space13 (ie13 13 Hazardous13 chemicals13 Hazardous13 gases13 High13 Voltage13 Equipment13 etchellip)13 there13 are13 multiple13 systems13 installed13 that13 monitor13 safety13 13 Each13 of13 these13 systems13 is13 equipped13 with13 visual13 and13 audible13 notification13 alarms13 including13 horns13 and13 strobe13 lights13 13 If13 there13 is13 a13 fire13 or13 a13 release13 of13 a13 Hazardous13 Process13 Material13 (HPM)13 the13 monitoring13 systems13 will13 detect13 it13 and13 set13 off13 audible13 (horns)13 and13 visual13 (strobe)13 alarms13 in13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Cleanroom13 users13 must13 be13 aware13 of13 these13 alarms13 and13 be13 able13 to13 identify13 them13 quickly13 and13 react13 accordingly13 13 13 The13 following13 are13 a13 list13 of13 alarms13 users13 may13 encounter13 in13 the13 cleanroom13

Fire13 Detection13 Alarms13 Fire13 alarms13 and13 Pull13 Stations13 are13 located13 throughout13 the13 cleanroom13 and13 the13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 white13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 fire13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 building13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

Toxic13 Gas13 Detection13 13 Toxic13 gas13 sensors13 and13 strobes13 are13 located13 throughout13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 blue13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 toxic13 gas13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

The13 operation13 and13 location13 of13 the13 fire13 and13 toxic13 gas13 detection13 systems13 are13 covered13 in13 the13 Cleanroom13 Orientation13 walkthrough13 13 13 13

Appendix13 A13 amp13 Appendix13 B13 of13 this13 document13 provides13 a13 map13 of13 the13 locations13 of13 the13 alarm13 systems13 as13 well13 as13 the13 evacuation13 paths13 for13 exiting13 the13 cleanroom13 and13 the13 building13 13 Users13 are13 expected13 to13 review13 this13 information13 prior13 to13 using13 the13 Nanofabrication13 cleanroom13

Appendix13 F13 of13 this13 manual13 contains13 the13 Universityrsquos13 Emergency13 Response13 Procedures13 to13 be13 used13 in13 case13 of13 an13 emergency13

913 13

Visitors13

Visitor13 tours13 of13 the13 cleanroom13 can13 be13 arranged13 by13 contacting13 the13 Administrative13 Staff13 (Susie13 Sherlock13 sjs10psuedu)13 13 13 Standard13 visitor13 tours13 provide13 only13 window13 access13 to13 the13 cleanroom13 13 13 Special13 tours13 that13 include13 cleanroom13 entry13 are13 extremely13 limited13 and13 by13 special13 request13 only13 13 13 Please13 note13 that13 all13 visitors13 who13 enter13 the13 cleanroom13 must13 be13 escorted13 by13 either13 a13 certified13 user13 or13 a13 member13 of13 the13 technical13 staff13 13 13 Under13 no13 circumstances13 may13 a13 visitor13 be13 allowed13 to13 operate13 equipment13 use13 chemicals13 or13 be13 left13 unattended13 in13 the13 cleanroom13

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13

Safety13 is13 the13 top13 priority13 for13 all13 activities13 carried13 out13 within13 the13 cleanroom13 13 There13 can13 be13 no13 compromises13 with13 regards13 to13 safety13 in13 completing13 a13 research13 project13 13 The13 technical13 staff13 is13 charged13 with13 providing13 a13 safe13 cleanroom13 environment13 for13 all13 users13 to13 carry13 out13 their13 research13 and13 it13 is13 the13 responsibility13 of13 each13 user13 to13 see13 that13 the13 environment13 is13 utilized13 in13 a13 safe13 manner13 13 In13 order13 to13 guide13 users13 the13 MRI13 safety13 committee13 has13 developed13 general13 safety13 policies13 in13 conjunction13 with13 and13 guided13 by13 Penn13 State13 Universityrsquos13 safety13 policies13 that13 must13 be13 followed13 by13 all13 users13 and13 staff13 13 These13 policies13 have13 been13 devised13 based13 on13 state13 and13 federal13 laws13 basic13 materials13 chemical13 and13 process13 knowledge13 and13 common13 sense13 13 13 In13 some13 cases13 the13 policies13 were13 created13 in13 response13 to13 specific13 incidents13 by13 users13 of13 the13 cleanroom13 13 13 13

13 ALL13 USERS13 AND13 STAFF13 ARE13 CHARGED13 WITH13 THE13 ENFORCEMENT13 OF13 THESE13 POLICIES13

If13 a13 user13 or13 a13 staff13 member13 observes13 another13 user13 or13 staff13 member13 in13 violation13 of13 clean13 room13 safety13 or13 etiquette13 policies13 or13 otherwise13 compromising13 his13 or13 her13 personal13 safety13 or13 the13 safety13 of13 others13 it13 is13 their13 responsibility13 to13 not13 only13 point13 it13 out13 to13 the13 user13 in13 violation13 but13 also13 to13 report13 it13 to13 another13 staff13 member13 or13 an13 MRI13 safety13 officer13 (observation13 of13 violations13 can13 also13 occur13 when13 staff13 regularly13 review13 video13 from13 lab13 surveillance13 cameras)13 13 13 At13 that13 point13 the13 user13 in13 violation13 will13 be13 asked13 to13 leave13 the13 cleanroom13 and13 their13 access13 to13 the13 cleanroom13 will13 be13 temporarily13 revoked13 13 13 13 The13 user13 in13 violation13 and13 the13 userrsquos13 PI13 will13 then13 be13 notified13 by13 email13 and13 an13 internal13 review13 of13 the13 incident13 will13 be13 conducted13 by13 Nanofabrication13 Cleanroom13 Safety13 Committee13 13 13 The13 committee13 member(s)13 will13 determine13 what13 actions13 will13 be13 taken13 in13 response13 to13 the13 safety13 violation13 13 13 Users13 should13 be13 aware13 that13 suspensions13 from13 the13 clean13 room13 may13 be13 for13 a13 day13 a13 period13 of13 several13 weeks13 months13 or13 permanently13 depending13 on13 the13 severity13 of13 the13 violation13 and13 whether13 the13 user13 has13 previous13 violations13 13 Please13 be13 aware13 that13 readmission13 to13 the13 clean13 room13 will13 be13 at13 the13 sole13 discretion13 of13 the13 committee13 13 13 13

1013 13

Ignorance13 of13 cleanroom13 safety13 policies13 lack13 of13 common13 sense13 language13 difficulties13 carelessness13 and13 haste13 are13 not13 adequate13 excuses13 for13 unsafe13 behavior13 Each13 user13 must13 remember13 that13 they13 are13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13

Safety13 Incident13 Reporting13 13

All13 safety13 related13 incidents13 are13 required13 to13 be13 reported13 to13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 13 13 The13 reporting13 requirements13 for13 different13 types13 of13 incidents13 can13 be13 found13 on13 the13 PSU13 EHampS13 site13 (httpwwwehspsuedu)13 13 13 If13 you13 have13 any13 questions13 regarding13 the13 reporting13 requirements13 please13 contact13 one13 of13 the13 cleanrooms13 Technical13 staff13 immediately13 to13 get13 clarification13 13 13

13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

613 13

the13 proper13 sequence13 and13 location13 and13 wearing13 proper13 Personal13 Protective13 Equipment13 (PPE)13 where13 required13 13 Details13 of13 proper13 gowning13 are13 found13 in13 PPE13 Section13 of13 this13 manual13 in13 the13 Nanofabrication13 Cleanroom13 Laboratory13 Manual13 on13 posters13 in13 the13 cleanroom13 gowning13 area13 and13 is13 also13 demonstrated13 during13 the13 Nanofabrication13 cleanroom13 Orientation13 session13 13 13 Proper13 cleanroom13 attire13 also13 includes13 what13 is13 on13 your13 body13 under13 your13 cleanroom13 attire13 13 The13 following13 rules13 apply13

bull Never13 wear13 make-shy‐up13 if13 you13 are13 working13 in13 the13 cleanroom13 bull Never13 wear13 Sandals13 when13 working13 in13 the13 cleanroom13 13 13 bull Never13 bring13 coats13 hats13 backpacks13 canvas13 bags13 etc13 13 into13 the13 cleanroom13 13 13

Users13 should13 store13 these13 items13 in13 their13 offices13 or13 the13 lockers13 outside13 the13 cleanroom13

bull Never13 wear13 dirty13 clothes13 particularly13 muddy13 boots13 or13 shoes13 into13 the13 clean13 room13 13 13 During13 the13 winter13 bring13 an13 extra13 pair13 of13 clean13 dry13 shoes13 to13 be13 worn13 the13 clean13 room13

bull Never13 unzip13 a13 cleanroom13 gown13 to13 retrieve13 an13 item13 from13 an13 underlying13 garment13 pocket13 while13 in13 the13 cleanroom13 proper13 13 Our13 cleanroom13 suits13 come13 equipped13 with13 an13 external13 pocket13 in13 which13 a13 phone13 or13 other13 cleanroom13 allowable13 item13 can13 be13 stored13 13 The13 item13 must13 of13 course13 be13 wiped13 down13 in13 the13 gowning13 area13 prior13 to13 insertion13 into13 the13 pocket13 and13 cleanroom13 entry13

A13 SPECIAL13 NOTE13 CONCERNING13 SAFETY13 GLASSES13 Users13 visitors13 and13 staff13 must13 wear13 safety13 glasses13 at13 all13 times13 when13 in13 the13 cleanroom13 13 13 All13 safety13 glasses13 must13 comply13 with13 the13 requirements13 set13 forth13 in13 the13 American13 National13 Standards13 for13 Occupational13 and13 Education13 Eye13 and13 Face13 Protection13 ANSI13 Z87113 approved13 If13 you13 wear13 glasses13 you13 can13 wear13 them13 as13 long13 as13 they13 have13 shatter13 proof13 lenses13 and13 side13 shields13 13 13 If13 you13 have13 you13 own13 safety13 glasses13 you13 may13 wear13 them13 in13 the13 cleanroom13 as13 well13 but13 they13 must13 be13 ANSI13 Z87113 approved13

13 Materials13 Restrictions13 and13 Procedures13 In13 following13 good13 cleanroom13 practice13 a13 general13 rule13 to13 live13 by13 is13 to13 NEVER13 bring13 anything13 into13 the13 cleanroom13 that13 is13 not13 absolutely13 necessary13 for13 the13 research13 you13 are13 conducting13 13 13 Any13 item13 brought13 into13 the13 cleanroom13 must13 be13 cleanroom13 compatible13 and13 thoroughly13 cleaned13 13 wiped13 down13 prior13 to13 entry13 13 13 There13 is13 a13 wipe13 down13 station13 in13 the13 gowning13 area13 with13 proper13 cleaning13 materials13 and13 instructions13 13 13 13 In13 addition13 the13 following13 specific13 restrictions13 apply13

bull Never13 bring13 pencils13 or13 erasers13 into13 the13 clean13 room13 13 13 bull Never13 bring13 cardboard13 or13 other13 packing13 material13 into13 the13 cleanroom13 13 13

713 13

bull Never13 bring13 books13 newspapers13 magazines13 and13 other13 reading13 material13 into13 the13 cleanroom13 13 Only13 clean13 room13 paper13 and13 cleanroom13 notebooks13 are13 allowed13

bull Never13 bring13 food13 into13 the13 cleanroom13 13 13

Restricted13 Access13 Areas13 As13 a13 general13 rule13 all13 cleanroom13 chase13 areas13 unless13 specifically13 labeled13 otherwise13 are13 restricted13 to13 staff13 only13 13 Users13 are13 prohibited13 from13 entering13 these13 areas13 13 If13 a13 user13 has13 a13 need13 to13 be13 in13 a13 chase13 area13 heshe13 must13 get13 permission13 from13 staff13 or13 be13 accompanied13 by13 staff13 into13 the13 area13 13 The13 Nanofabrication13 cleanroom13 sub13 fab13 is13 also13 a13 restricted13 area13 and13 the13 same13 rules13 apply13 13 In13 addition13 the13 following13 specific13 restriction13 applies13

bull Except13 in13 cases13 of13 emergency13 users13 visitors13 and13 staff13 are13 not13 to13 open13 doors13 to13 exterior13 corridors13 for13 any13 reason13 while13 in13 the13 cleanroom13 13 13

Surveillance13 Cameras13

Surveillance13 cameras13 are13 located13 throughout13 the13 cleanroom13 in13 order13 to13 monitor13 user13 and13 staff13 actions13 13 These13 cameras13 allow13 the13 staff13 to13 monitor13 the13 activities13 in13 the13 cleanroom13 from13 a13 remote13 location13 at13 all13 times13 13 13 13 The13 cameras13 are13 essential13 for13 assessing13 cleanroom13 occupancy13 during13 an13 emergency13 and13 are13 also13 used13 in13 the13 enforcement13 of13 all13 safety13 and13 etiquette13 protocols13 particularly13 in13 the13 off13 hours13

Eyewash13 and13 Safety13 Showers13

Due13 to13 the13 hazardous13 nature13 of13 many13 of13 the13 chemicals13 used13 in13 the13 cleanroom13 there13 are13 eyewash13 and13 safety13 showers13 located13 throughout13 the13 cleanroom13 and13 in13 the13 hallways13 just13 outside13 the13 cleanroom13 13 13 13 The13 location13 and13 use13 of13 this13 equipment13 are13 explained13 during13 the13 cleanroom13 orientation13 13 13 Appendix13 C13 of13 this13 document13 provides13 a13 map13 of13 the13 cleanroom13 that13 identifies13 the13 locations13 of13 all13 eyewash13 and13 safety13 showers13

13 13

813 13

Cleanroom13 Alarms13 13 Evacuation13 Emergency13 Response13

Due13 to13 the13 presence13 of13 hazardous13 materials13 and13 equipment13 in13 the13 cleanroom13 and13 its13 support13 space13 (ie13 13 Hazardous13 chemicals13 Hazardous13 gases13 High13 Voltage13 Equipment13 etchellip)13 there13 are13 multiple13 systems13 installed13 that13 monitor13 safety13 13 Each13 of13 these13 systems13 is13 equipped13 with13 visual13 and13 audible13 notification13 alarms13 including13 horns13 and13 strobe13 lights13 13 If13 there13 is13 a13 fire13 or13 a13 release13 of13 a13 Hazardous13 Process13 Material13 (HPM)13 the13 monitoring13 systems13 will13 detect13 it13 and13 set13 off13 audible13 (horns)13 and13 visual13 (strobe)13 alarms13 in13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Cleanroom13 users13 must13 be13 aware13 of13 these13 alarms13 and13 be13 able13 to13 identify13 them13 quickly13 and13 react13 accordingly13 13 13 The13 following13 are13 a13 list13 of13 alarms13 users13 may13 encounter13 in13 the13 cleanroom13

Fire13 Detection13 Alarms13 Fire13 alarms13 and13 Pull13 Stations13 are13 located13 throughout13 the13 cleanroom13 and13 the13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 white13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 fire13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 building13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

Toxic13 Gas13 Detection13 13 Toxic13 gas13 sensors13 and13 strobes13 are13 located13 throughout13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 blue13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 toxic13 gas13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

The13 operation13 and13 location13 of13 the13 fire13 and13 toxic13 gas13 detection13 systems13 are13 covered13 in13 the13 Cleanroom13 Orientation13 walkthrough13 13 13 13

Appendix13 A13 amp13 Appendix13 B13 of13 this13 document13 provides13 a13 map13 of13 the13 locations13 of13 the13 alarm13 systems13 as13 well13 as13 the13 evacuation13 paths13 for13 exiting13 the13 cleanroom13 and13 the13 building13 13 Users13 are13 expected13 to13 review13 this13 information13 prior13 to13 using13 the13 Nanofabrication13 cleanroom13

Appendix13 F13 of13 this13 manual13 contains13 the13 Universityrsquos13 Emergency13 Response13 Procedures13 to13 be13 used13 in13 case13 of13 an13 emergency13

913 13

Visitors13

Visitor13 tours13 of13 the13 cleanroom13 can13 be13 arranged13 by13 contacting13 the13 Administrative13 Staff13 (Susie13 Sherlock13 sjs10psuedu)13 13 13 Standard13 visitor13 tours13 provide13 only13 window13 access13 to13 the13 cleanroom13 13 13 Special13 tours13 that13 include13 cleanroom13 entry13 are13 extremely13 limited13 and13 by13 special13 request13 only13 13 13 Please13 note13 that13 all13 visitors13 who13 enter13 the13 cleanroom13 must13 be13 escorted13 by13 either13 a13 certified13 user13 or13 a13 member13 of13 the13 technical13 staff13 13 13 Under13 no13 circumstances13 may13 a13 visitor13 be13 allowed13 to13 operate13 equipment13 use13 chemicals13 or13 be13 left13 unattended13 in13 the13 cleanroom13

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13

Safety13 is13 the13 top13 priority13 for13 all13 activities13 carried13 out13 within13 the13 cleanroom13 13 There13 can13 be13 no13 compromises13 with13 regards13 to13 safety13 in13 completing13 a13 research13 project13 13 The13 technical13 staff13 is13 charged13 with13 providing13 a13 safe13 cleanroom13 environment13 for13 all13 users13 to13 carry13 out13 their13 research13 and13 it13 is13 the13 responsibility13 of13 each13 user13 to13 see13 that13 the13 environment13 is13 utilized13 in13 a13 safe13 manner13 13 In13 order13 to13 guide13 users13 the13 MRI13 safety13 committee13 has13 developed13 general13 safety13 policies13 in13 conjunction13 with13 and13 guided13 by13 Penn13 State13 Universityrsquos13 safety13 policies13 that13 must13 be13 followed13 by13 all13 users13 and13 staff13 13 These13 policies13 have13 been13 devised13 based13 on13 state13 and13 federal13 laws13 basic13 materials13 chemical13 and13 process13 knowledge13 and13 common13 sense13 13 13 In13 some13 cases13 the13 policies13 were13 created13 in13 response13 to13 specific13 incidents13 by13 users13 of13 the13 cleanroom13 13 13 13

13 ALL13 USERS13 AND13 STAFF13 ARE13 CHARGED13 WITH13 THE13 ENFORCEMENT13 OF13 THESE13 POLICIES13

If13 a13 user13 or13 a13 staff13 member13 observes13 another13 user13 or13 staff13 member13 in13 violation13 of13 clean13 room13 safety13 or13 etiquette13 policies13 or13 otherwise13 compromising13 his13 or13 her13 personal13 safety13 or13 the13 safety13 of13 others13 it13 is13 their13 responsibility13 to13 not13 only13 point13 it13 out13 to13 the13 user13 in13 violation13 but13 also13 to13 report13 it13 to13 another13 staff13 member13 or13 an13 MRI13 safety13 officer13 (observation13 of13 violations13 can13 also13 occur13 when13 staff13 regularly13 review13 video13 from13 lab13 surveillance13 cameras)13 13 13 At13 that13 point13 the13 user13 in13 violation13 will13 be13 asked13 to13 leave13 the13 cleanroom13 and13 their13 access13 to13 the13 cleanroom13 will13 be13 temporarily13 revoked13 13 13 13 The13 user13 in13 violation13 and13 the13 userrsquos13 PI13 will13 then13 be13 notified13 by13 email13 and13 an13 internal13 review13 of13 the13 incident13 will13 be13 conducted13 by13 Nanofabrication13 Cleanroom13 Safety13 Committee13 13 13 The13 committee13 member(s)13 will13 determine13 what13 actions13 will13 be13 taken13 in13 response13 to13 the13 safety13 violation13 13 13 Users13 should13 be13 aware13 that13 suspensions13 from13 the13 clean13 room13 may13 be13 for13 a13 day13 a13 period13 of13 several13 weeks13 months13 or13 permanently13 depending13 on13 the13 severity13 of13 the13 violation13 and13 whether13 the13 user13 has13 previous13 violations13 13 Please13 be13 aware13 that13 readmission13 to13 the13 clean13 room13 will13 be13 at13 the13 sole13 discretion13 of13 the13 committee13 13 13 13

1013 13

Ignorance13 of13 cleanroom13 safety13 policies13 lack13 of13 common13 sense13 language13 difficulties13 carelessness13 and13 haste13 are13 not13 adequate13 excuses13 for13 unsafe13 behavior13 Each13 user13 must13 remember13 that13 they13 are13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13

Safety13 Incident13 Reporting13 13

All13 safety13 related13 incidents13 are13 required13 to13 be13 reported13 to13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 13 13 The13 reporting13 requirements13 for13 different13 types13 of13 incidents13 can13 be13 found13 on13 the13 PSU13 EHampS13 site13 (httpwwwehspsuedu)13 13 13 If13 you13 have13 any13 questions13 regarding13 the13 reporting13 requirements13 please13 contact13 one13 of13 the13 cleanrooms13 Technical13 staff13 immediately13 to13 get13 clarification13 13 13

13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

713 13

bull Never13 bring13 books13 newspapers13 magazines13 and13 other13 reading13 material13 into13 the13 cleanroom13 13 Only13 clean13 room13 paper13 and13 cleanroom13 notebooks13 are13 allowed13

bull Never13 bring13 food13 into13 the13 cleanroom13 13 13

Restricted13 Access13 Areas13 As13 a13 general13 rule13 all13 cleanroom13 chase13 areas13 unless13 specifically13 labeled13 otherwise13 are13 restricted13 to13 staff13 only13 13 Users13 are13 prohibited13 from13 entering13 these13 areas13 13 If13 a13 user13 has13 a13 need13 to13 be13 in13 a13 chase13 area13 heshe13 must13 get13 permission13 from13 staff13 or13 be13 accompanied13 by13 staff13 into13 the13 area13 13 The13 Nanofabrication13 cleanroom13 sub13 fab13 is13 also13 a13 restricted13 area13 and13 the13 same13 rules13 apply13 13 In13 addition13 the13 following13 specific13 restriction13 applies13

bull Except13 in13 cases13 of13 emergency13 users13 visitors13 and13 staff13 are13 not13 to13 open13 doors13 to13 exterior13 corridors13 for13 any13 reason13 while13 in13 the13 cleanroom13 13 13

Surveillance13 Cameras13

Surveillance13 cameras13 are13 located13 throughout13 the13 cleanroom13 in13 order13 to13 monitor13 user13 and13 staff13 actions13 13 These13 cameras13 allow13 the13 staff13 to13 monitor13 the13 activities13 in13 the13 cleanroom13 from13 a13 remote13 location13 at13 all13 times13 13 13 13 The13 cameras13 are13 essential13 for13 assessing13 cleanroom13 occupancy13 during13 an13 emergency13 and13 are13 also13 used13 in13 the13 enforcement13 of13 all13 safety13 and13 etiquette13 protocols13 particularly13 in13 the13 off13 hours13

Eyewash13 and13 Safety13 Showers13

Due13 to13 the13 hazardous13 nature13 of13 many13 of13 the13 chemicals13 used13 in13 the13 cleanroom13 there13 are13 eyewash13 and13 safety13 showers13 located13 throughout13 the13 cleanroom13 and13 in13 the13 hallways13 just13 outside13 the13 cleanroom13 13 13 13 The13 location13 and13 use13 of13 this13 equipment13 are13 explained13 during13 the13 cleanroom13 orientation13 13 13 Appendix13 C13 of13 this13 document13 provides13 a13 map13 of13 the13 cleanroom13 that13 identifies13 the13 locations13 of13 all13 eyewash13 and13 safety13 showers13

13 13

813 13

Cleanroom13 Alarms13 13 Evacuation13 Emergency13 Response13

Due13 to13 the13 presence13 of13 hazardous13 materials13 and13 equipment13 in13 the13 cleanroom13 and13 its13 support13 space13 (ie13 13 Hazardous13 chemicals13 Hazardous13 gases13 High13 Voltage13 Equipment13 etchellip)13 there13 are13 multiple13 systems13 installed13 that13 monitor13 safety13 13 Each13 of13 these13 systems13 is13 equipped13 with13 visual13 and13 audible13 notification13 alarms13 including13 horns13 and13 strobe13 lights13 13 If13 there13 is13 a13 fire13 or13 a13 release13 of13 a13 Hazardous13 Process13 Material13 (HPM)13 the13 monitoring13 systems13 will13 detect13 it13 and13 set13 off13 audible13 (horns)13 and13 visual13 (strobe)13 alarms13 in13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Cleanroom13 users13 must13 be13 aware13 of13 these13 alarms13 and13 be13 able13 to13 identify13 them13 quickly13 and13 react13 accordingly13 13 13 The13 following13 are13 a13 list13 of13 alarms13 users13 may13 encounter13 in13 the13 cleanroom13

Fire13 Detection13 Alarms13 Fire13 alarms13 and13 Pull13 Stations13 are13 located13 throughout13 the13 cleanroom13 and13 the13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 white13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 fire13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 building13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

Toxic13 Gas13 Detection13 13 Toxic13 gas13 sensors13 and13 strobes13 are13 located13 throughout13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 blue13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 toxic13 gas13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

The13 operation13 and13 location13 of13 the13 fire13 and13 toxic13 gas13 detection13 systems13 are13 covered13 in13 the13 Cleanroom13 Orientation13 walkthrough13 13 13 13

Appendix13 A13 amp13 Appendix13 B13 of13 this13 document13 provides13 a13 map13 of13 the13 locations13 of13 the13 alarm13 systems13 as13 well13 as13 the13 evacuation13 paths13 for13 exiting13 the13 cleanroom13 and13 the13 building13 13 Users13 are13 expected13 to13 review13 this13 information13 prior13 to13 using13 the13 Nanofabrication13 cleanroom13

Appendix13 F13 of13 this13 manual13 contains13 the13 Universityrsquos13 Emergency13 Response13 Procedures13 to13 be13 used13 in13 case13 of13 an13 emergency13

913 13

Visitors13

Visitor13 tours13 of13 the13 cleanroom13 can13 be13 arranged13 by13 contacting13 the13 Administrative13 Staff13 (Susie13 Sherlock13 sjs10psuedu)13 13 13 Standard13 visitor13 tours13 provide13 only13 window13 access13 to13 the13 cleanroom13 13 13 Special13 tours13 that13 include13 cleanroom13 entry13 are13 extremely13 limited13 and13 by13 special13 request13 only13 13 13 Please13 note13 that13 all13 visitors13 who13 enter13 the13 cleanroom13 must13 be13 escorted13 by13 either13 a13 certified13 user13 or13 a13 member13 of13 the13 technical13 staff13 13 13 Under13 no13 circumstances13 may13 a13 visitor13 be13 allowed13 to13 operate13 equipment13 use13 chemicals13 or13 be13 left13 unattended13 in13 the13 cleanroom13

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13

Safety13 is13 the13 top13 priority13 for13 all13 activities13 carried13 out13 within13 the13 cleanroom13 13 There13 can13 be13 no13 compromises13 with13 regards13 to13 safety13 in13 completing13 a13 research13 project13 13 The13 technical13 staff13 is13 charged13 with13 providing13 a13 safe13 cleanroom13 environment13 for13 all13 users13 to13 carry13 out13 their13 research13 and13 it13 is13 the13 responsibility13 of13 each13 user13 to13 see13 that13 the13 environment13 is13 utilized13 in13 a13 safe13 manner13 13 In13 order13 to13 guide13 users13 the13 MRI13 safety13 committee13 has13 developed13 general13 safety13 policies13 in13 conjunction13 with13 and13 guided13 by13 Penn13 State13 Universityrsquos13 safety13 policies13 that13 must13 be13 followed13 by13 all13 users13 and13 staff13 13 These13 policies13 have13 been13 devised13 based13 on13 state13 and13 federal13 laws13 basic13 materials13 chemical13 and13 process13 knowledge13 and13 common13 sense13 13 13 In13 some13 cases13 the13 policies13 were13 created13 in13 response13 to13 specific13 incidents13 by13 users13 of13 the13 cleanroom13 13 13 13

13 ALL13 USERS13 AND13 STAFF13 ARE13 CHARGED13 WITH13 THE13 ENFORCEMENT13 OF13 THESE13 POLICIES13

If13 a13 user13 or13 a13 staff13 member13 observes13 another13 user13 or13 staff13 member13 in13 violation13 of13 clean13 room13 safety13 or13 etiquette13 policies13 or13 otherwise13 compromising13 his13 or13 her13 personal13 safety13 or13 the13 safety13 of13 others13 it13 is13 their13 responsibility13 to13 not13 only13 point13 it13 out13 to13 the13 user13 in13 violation13 but13 also13 to13 report13 it13 to13 another13 staff13 member13 or13 an13 MRI13 safety13 officer13 (observation13 of13 violations13 can13 also13 occur13 when13 staff13 regularly13 review13 video13 from13 lab13 surveillance13 cameras)13 13 13 At13 that13 point13 the13 user13 in13 violation13 will13 be13 asked13 to13 leave13 the13 cleanroom13 and13 their13 access13 to13 the13 cleanroom13 will13 be13 temporarily13 revoked13 13 13 13 The13 user13 in13 violation13 and13 the13 userrsquos13 PI13 will13 then13 be13 notified13 by13 email13 and13 an13 internal13 review13 of13 the13 incident13 will13 be13 conducted13 by13 Nanofabrication13 Cleanroom13 Safety13 Committee13 13 13 The13 committee13 member(s)13 will13 determine13 what13 actions13 will13 be13 taken13 in13 response13 to13 the13 safety13 violation13 13 13 Users13 should13 be13 aware13 that13 suspensions13 from13 the13 clean13 room13 may13 be13 for13 a13 day13 a13 period13 of13 several13 weeks13 months13 or13 permanently13 depending13 on13 the13 severity13 of13 the13 violation13 and13 whether13 the13 user13 has13 previous13 violations13 13 Please13 be13 aware13 that13 readmission13 to13 the13 clean13 room13 will13 be13 at13 the13 sole13 discretion13 of13 the13 committee13 13 13 13

1013 13

Ignorance13 of13 cleanroom13 safety13 policies13 lack13 of13 common13 sense13 language13 difficulties13 carelessness13 and13 haste13 are13 not13 adequate13 excuses13 for13 unsafe13 behavior13 Each13 user13 must13 remember13 that13 they13 are13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13

Safety13 Incident13 Reporting13 13

All13 safety13 related13 incidents13 are13 required13 to13 be13 reported13 to13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 13 13 The13 reporting13 requirements13 for13 different13 types13 of13 incidents13 can13 be13 found13 on13 the13 PSU13 EHampS13 site13 (httpwwwehspsuedu)13 13 13 If13 you13 have13 any13 questions13 regarding13 the13 reporting13 requirements13 please13 contact13 one13 of13 the13 cleanrooms13 Technical13 staff13 immediately13 to13 get13 clarification13 13 13

13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

813 13

Cleanroom13 Alarms13 13 Evacuation13 Emergency13 Response13

Due13 to13 the13 presence13 of13 hazardous13 materials13 and13 equipment13 in13 the13 cleanroom13 and13 its13 support13 space13 (ie13 13 Hazardous13 chemicals13 Hazardous13 gases13 High13 Voltage13 Equipment13 etchellip)13 there13 are13 multiple13 systems13 installed13 that13 monitor13 safety13 13 Each13 of13 these13 systems13 is13 equipped13 with13 visual13 and13 audible13 notification13 alarms13 including13 horns13 and13 strobe13 lights13 13 If13 there13 is13 a13 fire13 or13 a13 release13 of13 a13 Hazardous13 Process13 Material13 (HPM)13 the13 monitoring13 systems13 will13 detect13 it13 and13 set13 off13 audible13 (horns)13 and13 visual13 (strobe)13 alarms13 in13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Cleanroom13 users13 must13 be13 aware13 of13 these13 alarms13 and13 be13 able13 to13 identify13 them13 quickly13 and13 react13 accordingly13 13 13 The13 following13 are13 a13 list13 of13 alarms13 users13 may13 encounter13 in13 the13 cleanroom13

Fire13 Detection13 Alarms13 Fire13 alarms13 and13 Pull13 Stations13 are13 located13 throughout13 the13 cleanroom13 and13 the13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 white13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 fire13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 building13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

Toxic13 Gas13 Detection13 13 Toxic13 gas13 sensors13 and13 strobes13 are13 located13 throughout13 the13 cleanroom13 and13 sub-shy‐fab13 13 13 Their13 visual13 and13 audible13 indicators13 are13 a13 blue13 flashing13 strobe13 and13 horn13 13 13 In13 the13 event13 the13 toxic13 gas13 alarms13 are13 activated13 users13 should13 exit13 the13 cleanroom13 via13 the13 closest13 emergency13 exit13 (DO13 NOT13 STOP13 TO13 REMOVE13 YOUR13 CLEANROOM13 GOWN)13 13 13 Once13 you13 have13 exited13 the13 cleanroom13 into13 the13 hallways13 follow13 the13 appropriate13 evacuation13 path13 indicated13 by13 wall13 signage13 to13 exit13 the13 building13

The13 operation13 and13 location13 of13 the13 fire13 and13 toxic13 gas13 detection13 systems13 are13 covered13 in13 the13 Cleanroom13 Orientation13 walkthrough13 13 13 13

Appendix13 A13 amp13 Appendix13 B13 of13 this13 document13 provides13 a13 map13 of13 the13 locations13 of13 the13 alarm13 systems13 as13 well13 as13 the13 evacuation13 paths13 for13 exiting13 the13 cleanroom13 and13 the13 building13 13 Users13 are13 expected13 to13 review13 this13 information13 prior13 to13 using13 the13 Nanofabrication13 cleanroom13

Appendix13 F13 of13 this13 manual13 contains13 the13 Universityrsquos13 Emergency13 Response13 Procedures13 to13 be13 used13 in13 case13 of13 an13 emergency13

913 13

Visitors13

Visitor13 tours13 of13 the13 cleanroom13 can13 be13 arranged13 by13 contacting13 the13 Administrative13 Staff13 (Susie13 Sherlock13 sjs10psuedu)13 13 13 Standard13 visitor13 tours13 provide13 only13 window13 access13 to13 the13 cleanroom13 13 13 Special13 tours13 that13 include13 cleanroom13 entry13 are13 extremely13 limited13 and13 by13 special13 request13 only13 13 13 Please13 note13 that13 all13 visitors13 who13 enter13 the13 cleanroom13 must13 be13 escorted13 by13 either13 a13 certified13 user13 or13 a13 member13 of13 the13 technical13 staff13 13 13 Under13 no13 circumstances13 may13 a13 visitor13 be13 allowed13 to13 operate13 equipment13 use13 chemicals13 or13 be13 left13 unattended13 in13 the13 cleanroom13

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13

Safety13 is13 the13 top13 priority13 for13 all13 activities13 carried13 out13 within13 the13 cleanroom13 13 There13 can13 be13 no13 compromises13 with13 regards13 to13 safety13 in13 completing13 a13 research13 project13 13 The13 technical13 staff13 is13 charged13 with13 providing13 a13 safe13 cleanroom13 environment13 for13 all13 users13 to13 carry13 out13 their13 research13 and13 it13 is13 the13 responsibility13 of13 each13 user13 to13 see13 that13 the13 environment13 is13 utilized13 in13 a13 safe13 manner13 13 In13 order13 to13 guide13 users13 the13 MRI13 safety13 committee13 has13 developed13 general13 safety13 policies13 in13 conjunction13 with13 and13 guided13 by13 Penn13 State13 Universityrsquos13 safety13 policies13 that13 must13 be13 followed13 by13 all13 users13 and13 staff13 13 These13 policies13 have13 been13 devised13 based13 on13 state13 and13 federal13 laws13 basic13 materials13 chemical13 and13 process13 knowledge13 and13 common13 sense13 13 13 In13 some13 cases13 the13 policies13 were13 created13 in13 response13 to13 specific13 incidents13 by13 users13 of13 the13 cleanroom13 13 13 13

13 ALL13 USERS13 AND13 STAFF13 ARE13 CHARGED13 WITH13 THE13 ENFORCEMENT13 OF13 THESE13 POLICIES13

If13 a13 user13 or13 a13 staff13 member13 observes13 another13 user13 or13 staff13 member13 in13 violation13 of13 clean13 room13 safety13 or13 etiquette13 policies13 or13 otherwise13 compromising13 his13 or13 her13 personal13 safety13 or13 the13 safety13 of13 others13 it13 is13 their13 responsibility13 to13 not13 only13 point13 it13 out13 to13 the13 user13 in13 violation13 but13 also13 to13 report13 it13 to13 another13 staff13 member13 or13 an13 MRI13 safety13 officer13 (observation13 of13 violations13 can13 also13 occur13 when13 staff13 regularly13 review13 video13 from13 lab13 surveillance13 cameras)13 13 13 At13 that13 point13 the13 user13 in13 violation13 will13 be13 asked13 to13 leave13 the13 cleanroom13 and13 their13 access13 to13 the13 cleanroom13 will13 be13 temporarily13 revoked13 13 13 13 The13 user13 in13 violation13 and13 the13 userrsquos13 PI13 will13 then13 be13 notified13 by13 email13 and13 an13 internal13 review13 of13 the13 incident13 will13 be13 conducted13 by13 Nanofabrication13 Cleanroom13 Safety13 Committee13 13 13 The13 committee13 member(s)13 will13 determine13 what13 actions13 will13 be13 taken13 in13 response13 to13 the13 safety13 violation13 13 13 Users13 should13 be13 aware13 that13 suspensions13 from13 the13 clean13 room13 may13 be13 for13 a13 day13 a13 period13 of13 several13 weeks13 months13 or13 permanently13 depending13 on13 the13 severity13 of13 the13 violation13 and13 whether13 the13 user13 has13 previous13 violations13 13 Please13 be13 aware13 that13 readmission13 to13 the13 clean13 room13 will13 be13 at13 the13 sole13 discretion13 of13 the13 committee13 13 13 13

1013 13

Ignorance13 of13 cleanroom13 safety13 policies13 lack13 of13 common13 sense13 language13 difficulties13 carelessness13 and13 haste13 are13 not13 adequate13 excuses13 for13 unsafe13 behavior13 Each13 user13 must13 remember13 that13 they13 are13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13

Safety13 Incident13 Reporting13 13

All13 safety13 related13 incidents13 are13 required13 to13 be13 reported13 to13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 13 13 The13 reporting13 requirements13 for13 different13 types13 of13 incidents13 can13 be13 found13 on13 the13 PSU13 EHampS13 site13 (httpwwwehspsuedu)13 13 13 If13 you13 have13 any13 questions13 regarding13 the13 reporting13 requirements13 please13 contact13 one13 of13 the13 cleanrooms13 Technical13 staff13 immediately13 to13 get13 clarification13 13 13

13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

913 13

Visitors13

Visitor13 tours13 of13 the13 cleanroom13 can13 be13 arranged13 by13 contacting13 the13 Administrative13 Staff13 (Susie13 Sherlock13 sjs10psuedu)13 13 13 Standard13 visitor13 tours13 provide13 only13 window13 access13 to13 the13 cleanroom13 13 13 Special13 tours13 that13 include13 cleanroom13 entry13 are13 extremely13 limited13 and13 by13 special13 request13 only13 13 13 Please13 note13 that13 all13 visitors13 who13 enter13 the13 cleanroom13 must13 be13 escorted13 by13 either13 a13 certified13 user13 or13 a13 member13 of13 the13 technical13 staff13 13 13 Under13 no13 circumstances13 may13 a13 visitor13 be13 allowed13 to13 operate13 equipment13 use13 chemicals13 or13 be13 left13 unattended13 in13 the13 cleanroom13

Cleanroom13 Safety13 and13 Etiquette13 Enforcement13

Safety13 is13 the13 top13 priority13 for13 all13 activities13 carried13 out13 within13 the13 cleanroom13 13 There13 can13 be13 no13 compromises13 with13 regards13 to13 safety13 in13 completing13 a13 research13 project13 13 The13 technical13 staff13 is13 charged13 with13 providing13 a13 safe13 cleanroom13 environment13 for13 all13 users13 to13 carry13 out13 their13 research13 and13 it13 is13 the13 responsibility13 of13 each13 user13 to13 see13 that13 the13 environment13 is13 utilized13 in13 a13 safe13 manner13 13 In13 order13 to13 guide13 users13 the13 MRI13 safety13 committee13 has13 developed13 general13 safety13 policies13 in13 conjunction13 with13 and13 guided13 by13 Penn13 State13 Universityrsquos13 safety13 policies13 that13 must13 be13 followed13 by13 all13 users13 and13 staff13 13 These13 policies13 have13 been13 devised13 based13 on13 state13 and13 federal13 laws13 basic13 materials13 chemical13 and13 process13 knowledge13 and13 common13 sense13 13 13 In13 some13 cases13 the13 policies13 were13 created13 in13 response13 to13 specific13 incidents13 by13 users13 of13 the13 cleanroom13 13 13 13

13 ALL13 USERS13 AND13 STAFF13 ARE13 CHARGED13 WITH13 THE13 ENFORCEMENT13 OF13 THESE13 POLICIES13

If13 a13 user13 or13 a13 staff13 member13 observes13 another13 user13 or13 staff13 member13 in13 violation13 of13 clean13 room13 safety13 or13 etiquette13 policies13 or13 otherwise13 compromising13 his13 or13 her13 personal13 safety13 or13 the13 safety13 of13 others13 it13 is13 their13 responsibility13 to13 not13 only13 point13 it13 out13 to13 the13 user13 in13 violation13 but13 also13 to13 report13 it13 to13 another13 staff13 member13 or13 an13 MRI13 safety13 officer13 (observation13 of13 violations13 can13 also13 occur13 when13 staff13 regularly13 review13 video13 from13 lab13 surveillance13 cameras)13 13 13 At13 that13 point13 the13 user13 in13 violation13 will13 be13 asked13 to13 leave13 the13 cleanroom13 and13 their13 access13 to13 the13 cleanroom13 will13 be13 temporarily13 revoked13 13 13 13 The13 user13 in13 violation13 and13 the13 userrsquos13 PI13 will13 then13 be13 notified13 by13 email13 and13 an13 internal13 review13 of13 the13 incident13 will13 be13 conducted13 by13 Nanofabrication13 Cleanroom13 Safety13 Committee13 13 13 The13 committee13 member(s)13 will13 determine13 what13 actions13 will13 be13 taken13 in13 response13 to13 the13 safety13 violation13 13 13 Users13 should13 be13 aware13 that13 suspensions13 from13 the13 clean13 room13 may13 be13 for13 a13 day13 a13 period13 of13 several13 weeks13 months13 or13 permanently13 depending13 on13 the13 severity13 of13 the13 violation13 and13 whether13 the13 user13 has13 previous13 violations13 13 Please13 be13 aware13 that13 readmission13 to13 the13 clean13 room13 will13 be13 at13 the13 sole13 discretion13 of13 the13 committee13 13 13 13

1013 13

Ignorance13 of13 cleanroom13 safety13 policies13 lack13 of13 common13 sense13 language13 difficulties13 carelessness13 and13 haste13 are13 not13 adequate13 excuses13 for13 unsafe13 behavior13 Each13 user13 must13 remember13 that13 they13 are13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13

Safety13 Incident13 Reporting13 13

All13 safety13 related13 incidents13 are13 required13 to13 be13 reported13 to13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 13 13 The13 reporting13 requirements13 for13 different13 types13 of13 incidents13 can13 be13 found13 on13 the13 PSU13 EHampS13 site13 (httpwwwehspsuedu)13 13 13 If13 you13 have13 any13 questions13 regarding13 the13 reporting13 requirements13 please13 contact13 one13 of13 the13 cleanrooms13 Technical13 staff13 immediately13 to13 get13 clarification13 13 13

13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

1013 13

Ignorance13 of13 cleanroom13 safety13 policies13 lack13 of13 common13 sense13 language13 difficulties13 carelessness13 and13 haste13 are13 not13 adequate13 excuses13 for13 unsafe13 behavior13 Each13 user13 must13 remember13 that13 they13 are13 responsible13 for13 their13 own13 safety13 and13 the13 safety13 of13 others13 13

Safety13 Incident13 Reporting13 13

All13 safety13 related13 incidents13 are13 required13 to13 be13 reported13 to13 the13 Penn13 State13 University13 Environmental13 Health13 and13 Safety13 Organization13 (EHampS)13 13 13 The13 reporting13 requirements13 for13 different13 types13 of13 incidents13 can13 be13 found13 on13 the13 PSU13 EHampS13 site13 (httpwwwehspsuedu)13 13 13 If13 you13 have13 any13 questions13 regarding13 the13 reporting13 requirements13 please13 contact13 one13 of13 the13 cleanrooms13 Technical13 staff13 immediately13 to13 get13 clarification13 13 13

13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

1113 13

Equipment13 Use13 and13 Safety13

Introduction13

Granted13 user13 access13 to13 the13 cleanroom13 does13 not13 in13 and13 of13 itself13 allow13 users13 to13 use13 equipment13 13 Nanofabrication13 cleanroom13 safety13 policy13 requires13 that13 equipment13 in13 the13 cleanroom13 can13 only13 be13 operated13 by13 certified13 users13 who13 have13 completed13 the13 appropriate13 equipment13 training13 sessions13 13 13 To13 ensure13 that13 equipment13 is13 used13 only13 by13 trained13 certified13 users13 interlocks13 have13 been13 added13 to13 every13 major13 piece13 of13 equipment13 in13 the13 cleanroom13 13 13 These13 interlocks13 are13 controlled13 and13 managed13 through13 the13 RIMS13 software13 platform13 and13 allow13 use13 by13 only13 trained13 certified13 users13 13 13 13

Equipment13 Training13

The13 cleanroom13 technical13 staff13 is13 solely13 responsible13 for13 equipment13 training13 and13 has13 developed13 a13 comprehensive13 program13 13 13 The13 purpose13 of13 the13 program13 is13 to13 ensure13 that13 all13 certified13 users13 of13 the13 cleanroom13 who13 require13 equipment13 training13 receive13 information13 and13 hands13 on13 training13 that13 provide13 them13 a13 comprehensive13 understanding13 of13 the13 operation13 and13 capabilities13 of13 the13 tools13 they13 will13 be13 utilizing13 13 13

The13 Equipment13 Training13 Program13 consists13 of13 a13 minimum13 of13 three13 training13 sessions13 13 13 Typically13 the13 first13 session13 provides13 general13 background13 tool13 information13 and13 a13 demonstration13 of13 tool13 operation13 by13 the13 responsible13 staff13 member13 13 The13 second13 and13 third13 sessions13 are13 one-shy‐on-shy‐one13 tool13 use13 sessions13 between13 user13 and13 staff13 usually13 utilizing13 the13 user13 actual13 sample13 during13 the13 training13 13 Certification13 is13 granted13 by13 the13 staff13 at13 that13 point13 if13 they13 are13 satisfied13 that13 the13 user13 can13 competently13 operate13 the13 tool13 13 If13 this13 does13 not13 occur13 more13 sessions13 are13 required13 13 Certified13 trained13 user13 information13 is13 then13 entered13 into13 the13 RIMS13 database13 for13 the13 tool13 and13 the13 user13 is13 free13 to13 reserve13 the13 tool13 for13 use13 13 Users13 can13 find13 additional13 detailed13 information13 on13 the13 Equipment13 Training13 Program13 in13 Appendix13 E13 of13 this13 document13

NOTE13 13 Equipment13 Training13 Schedules13 can13 be13 found13 on13 the13 RIMS13 Splash13 page13 13 13 If13 the13 tool13 you13 are13 interested13 in13 being13 trained13 on13 is13 not13 found13 on13 this13 page13 please13 contact13 the13 administrative13 staff13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

1213 13

Equipment13 Operation13

There13 are13 operational13 manuals13 for13 each13 piece13 of13 equipment13 detailing13 the13 operational13 procedures13 and13 capabilities13 of13 each13 13 The13 manuals13 are13 referred13 to13 during13 the13 equipment13 training13 sessions13 and13 are13 kept13 at13 the13 tools13 for13 reference13 13 13 13

For13 some13 of13 the13 equipment13 the13 technical13 staff13 have13 written13 simplified13 instructions13 to13 cover13 the13 basic13 operational13 steps13 and13 procedures13 13 13 The13 technical13 staff13 provides13 the13 user13 with13 a13 copy13 of13 the13 simplified13 instructions13 during13 the13 equipment13 training13 sessions13 if13 applicable13 13 13 Users13 should13 maintain13 these13 instructions13 for13 future13 reference13 13 13

NOTE13 Equipment13 should13 only13 be13 used13 for13 its13 intended13 purpose13 13 13 If13 you13 are13 not13 sure13 if13 the13 tool13 can13 provide13 the13 results13 you13 require13 or13 can13 be13 used13 with13 the13 materials13 you13 have13 on13 your13 substrate13 please13 ask13 the13 appropriate13 staff13 member13 for13 guidance13

Equipment13 Issues13

Cleanroom13 safety13 policy13 requires13 that13 users13 notify13 the13 technical13 staff13 of13 any13 equipment13 damage13 or13 malfunctions13 13 13 13

Users13 should13 never13 try13 to13 fix13 an13 equipment13 problem13 unless13 instructed13 to13 do13 so13 by13 the13 technical13 staff13 13 13 The13 purpose13 of13 this13 policy13 is13 to13 prevent13 possible13 injury13 to13 the13 users13 and13 to13 prevent13 damage13 or13 further13 damage13 to13 the13 equipment13 which13 could13 result13 in13 extended13 downtime13 and13 expense13 13 13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

1313 13

Chemical13 Use13 and13 Safety13

Introduction13

A13 wide13 variety13 of13 chemicals13 are13 used13 for13 device13 processing13 in13 the13 cleanroom13 13 13 Most13 of13 these13 chemicals13 are13 dangerous13 substances13 by13 nature13 andor13 are13 hazardous13 when13 heated13 or13 mixed13 with13 other13 chemicals13 13 Without13 adequate13 knowledge13 of13 the13 hazards13 or13 in13 the13 absence13 of13 appropriate13 precautionary13 measures13 accidents13 can13 occur13 13 The13 experience13 of13 the13 staff13 and13 management13 of13 the13 cleanroom13 indicates13 that13 wet13 chemical13 spills13 and13 exposures13 are13 the13 source13 of13 the13 majority13 of13 the13 safety13 incidents13 experienced13 each13 year13 13 In13 light13 of13 this13 experience13 the13 cleanroom13 has13 developed13 and13 implemented13 conservative13 chemical13 use13 procedures13 and13 policies13 13 13 These13 policies13 may13 seem13 restrictive13 and13 unnecessary13 to13 many13 users13 but13 every13 user13 should13 realize13 that13 they13 are13 in13 place13 to13 maximize13 the13 safety13 of13 all13 users13 and13 staff13 13 In13 general13 safe13 chemical13 use13 includes13 minimizing13 exposure13 to13 chemicals13 proper13 training13 understanding13 chemical13 hazards13 proper13 labeling13 proper13 storage13 and13 segregation13 and13 proper13 transport13 13 Users13 should13 ask13 themselves13 and13 find13 answers13 to13 a13 number13 of13 key13 questions13 BEFORE13 they13 use13 chemicals13 in13 the13 cleanroom13 13 The13 key13 questions13 are13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

3 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 locate13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13 13

In13 order13 to13 help13 users13 find13 answers13 to13 these13 questions13 information13 is13 provided13 below13 in13 the13 cleanroom13 chemical13 use13 policies13 13 13

Specific13 procedural13 details13 are13 included13 in13 the13 manuals13 for13 individual13 equipment13 13 The13 information13 below13 is13 intended13 to13 supplement13 the13 information13 that13 users13 acquire13 from13 the13 required13 training13 outlined13 in13 the13 introduction13 to13 this13 manual13 13 All13 users13 including13 the13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

1413 13

cleanroom13 technical13 staff13 members13 must13 follow13 these13 policies13 and13 procedures13 as13 well13 as13 all13 Penn13 State13 University13 Chemical13 Use13 Policies13 and13 Procedures13 13 13 13

1 Do13 I13 really13 need13 to13 use13 this13 chemical13 in13 my13 process13 or13 is13 there13 some13 less13 hazardous13 material13 that13 can13 be13 substituted13 If13 not13 do13 I13 know13 procedures13 for13 getting13 the13 chemical13 and13 bringing13 it13 into13 the13 cleanroom13

13 The13 best13 way13 to13 try13 to13 determine13 if13 a13 particular13 chemical13 is13 required13 in13 your13 process13 is13 to13 consult13 with13 your13 advisor13 group13 members13 the13 technical13 staff13 and13 the13 MRI13 Safety13 Coordinator13 13 If13 they13 are13 unable13 to13 provide13 answers13 please13 contact13 the13 manufacturer13 directly13 for13 input13 13

Chemical13 Supplies13

Users13 are13 not13 allowed13 to13 bring13 their13 own13 chemical13 supplies13 into13 the13 cleanroom13 without13 prior13 approval13 from13 the13 MRI13 Safety13 Officer13 13 13 If13 chemicals13 are13 brought13 in13 with13 the13 approval13 of13 the13 MRI13 Safety13 Officer13 they13 must13 be13 in13 the13 original13 container13 complete13 with13 labeling13 13 Once13 in13 the13 cleanroom13 the13 chemicals13 are13 under13 control13 of13 the13 staff13 13 If13 not13 stored13 in13 the13 chemical13 cabinets13 in13 the13 cleanroom13 the13 user13 must13 request13 the13 chemical13 from13 the13 staff13 when13 it13 is13 to13 be13 used13 13 Users13 are13 not13 allowed13 to13 remove13 chemicals13 (including13 those13 furnished13 by13 the13 users)13 from13 the13 cleanroom13 13 13

The13 cleanroom13 stocks13 and13 supplies13 all13 the13 common13 chemicals13 used13 in13 the13 cleanroom13 13 13 The13 cleanroom13 will13 not13 distribute13 these13 chemicals13 to13 other13 labs13 or13 groups13 in13 the13 building13 or13 on13 campus13 13 13 13

The13 chemical13 supplies13 are13 kept13 in13 an13 area13 where13 only13 the13 appropriate13 MRI13 technical13 staff13 has13 access13 13 13 13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

1513 13

13

2 Do13 I13 understand13 the13 hazards13 presented13 by13 the13 chemical13 or13 chemicals13 I13 intend13 to13 use13

The13 first13 and13 primary13 source13 of13 information13 on13 any13 chemical13 is13 the13 Materials13 Safety13 Data13 Sheet13 provided13 or13 available13 from13 the13 manufacturer13 13 In13 addition13 to13 this13 the13 technical13 staff13 is13 very13 knowledgeable13 and13 may13 be13 able13 to13 provide13 additional13 information13 13 When13 in13 doubt13 ASK13 13

Material13 Safety13 Data13 Sheet13 (MSDS)13

The13 MSDS13 sheet13 provides13 basic13 information13 for13 a13 given13 material13 or13 chemical13 product13 13 13 It13 contains13 information13 on13 the13 properties13 and13 potential13 hazards13 associated13 with13 a13 given13 material13 as13 well13 as13 its13 compatibility13 with13 other13 chemicals13 13 13 It13 also13 provides13 information13 on13 how13 to13 safely13 handle13 the13 material13 and13 what13 to13 do13 if13 you13 are13 accidentally13 exposed13 to13 the13 material13 13 13 13 13 13 13 13

OSHA13 requires13 the13 Material13 Safety13 Data13 Sheet13 (MSDS)13 for13 every13 material13 that13 is13 used13 in13 the13 cleanroom13 be13 provided13 and13 available13 in13 paper13 form13 in13 the13 cleanroom13 13 Before13 working13 with13 any13 material13 whether13 it13 is13 a13 gas13 liquid13 or13 a13 solid13 in13 the13 cleanroom13 users13 must13 review13 the13 MSDS13 information13 so13 that13 they13 are13 aware13 of13 the13 potential13 hazards13 associated13 with13 using13 the13 material13 as13 well13 as13 the13 proper13 exposure13 responses13

Note13 There13 is13 an13 MSDS13 station13 in13 the13 gowning13 area13 of13 the13 cleanroom13 13 13 The13 technical13 staff13 maintains13 MSDS13 information13 on13 all13 materials13 used13 in13 the13 cleanroom13 in13 a13 binder13 at13 that13 location13 13 If13 a13 chemical13 is13 not13 currently13 used13 MSDS13 sheets13 are13 available13 from13 the13 manufacturer13 and13 can13 also13 be13 found13 by13 doing13 an13 online13 search13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

1613 13

13

3 13 Do13 I13 know13 the13 procedures13 and13 requirements13 for13 handling13 the13 chemical13 particularly13 with13 regards13 to13 personal13 protective13 equipment13 (PPE)13 that13 must13 be13 worn13 13

Personal13 Protective13 Equipment13 (PPE)13

A13 Personnel13 Protective13 Equipment13 (PPE)13 Hazard13 Assessment13 of13 the13 cleanroom13 was13 completed13 by13 the13 MRI13 Safety13 Officer13 13 The13 assessment13 results13 require13 that13 some13 or13 all13 of13 the13 following13 PPE13 be13 used13 when13 working13 with13 chemicals13 in13 the13 cleanroom13 Wet13 Chemical13 Bay13 (N-shy‐109R)13 and13 is13 dependent13 on13 particular13 chemical13 and13 bench13 use13 13 13

bull Chemical13 resistant13 gloves13 13 13 13 bull Sleeved13 aprons13 are13 to13 be13 worn13 when13 working13 with13 any13 chemical13 in13 the13 wet13 bench13

bay13 bull Goggles13

o 13 Face13 shields13 are13 to13 be13 worn13 when13 pouring13 chemicals13 13

Detailed13 information13 on13 PPE13 requirements13 and13 use13 procedures13 for13 each13 bench13 in13 the13 bay13 and13 the13 equipment13 itself13 can13 be13 found13 at13 the13 PPE13 station13 just13 outside13 the13 Wet13 Chemical13 Bay13 or13 in13 the13 manual13 for13 a13 specific13 bench13 13 13 All13 required13 PPE13 must13 be13 donned13 prior13 to13 entering13 the13 Wet13 Chemical13 Bay13 13 If13 the13 required13 PPE13 is13 not13 available13 at13 the13 PPE13 station13 for13 use13 please13 find13 a13 staff13 member13 and13 request13 the13 equipment13 13 Do13 not13 enter13 the13 wet13 chemical13 bay13 without13 it13 13 Floor13 demarcations13 indicate13 the13 area13 in13 which13 users13 must13 have13 required13 PPE13 on13 13 The13 PPE13 and13 the13 PPE13 station(s)13 are13 supplied13 and13 maintained13 by13 the13 staff13 13 13

PLEASE13 NOTE13 13 Failure13 to13 wear13 the13 proper13 PPE13 required13 for13 a13 particular13 bench13 andor13 chemical13 is13 considered13 a13 safety13 violation13 and13 will13 result13 in13 immediate13 use13 privilege13 suspension13 13 Repeated13 violation13 can13 result13 in13 the13 permanent13 suspension13 of13 user13 privileges13 for13 the13 Wet13 Chemical13 Area13 13 Also13 it13 is13 critical13 to13 note13 that13 while13 the13 user13 may13 be13 using13 comparatively13 benign13 chemicals13 their13 neighbor13 may13 be13 using13 more13 hazardous13 materials13 13 13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

1713 13

Chemical13 Transfer13 Secondary13 Container13 Labeling13 and13 Cleaning13 13

In13 most13 instances13 wet13 chemical13 use13 in13 the13 cleanroom13 requires13 that13 the13 chemical13 be13 transferred13 from13 its13 original13 container13 into13 a13 secondary13 container13 in13 which13 the13 work13 will13 actually13 be13 done13 13 13 Specific13 procedures13 concerning13 chemical13 use13 are13 found13 in13 each13 of13 the13 bench13 manuals13

NOTE13 All13 secondary13 containers13 must13 be13 labeled13 13 The13 full13 chemical13 name13 concentration13 the13 user13 name13 date13 and13 must13 be13 on13 the13 label13 13 13 Secondary13 containers13 in13 general13 are13 not13 to13 be13 left13 unattended13 in13 off13 hours13 13 13 Procedures13 for13 leaving13 chemicals13 in13 the13 benches13 for13 an13 extended13 period13 of13 time13 are13 specific13 to13 the13 benches13 and13 are13 found13 in13 the13 specific13 bench13 manual13

4 In13 case13 of13 a13 spill13 or13 exposure13 do13 I13 know13 where13 all13 the13 chemical13 safety13 equipment13 is13 located13 in13 the13 cleanroom13 and13 how13 to13 use13 it13

During13 the13 cleanroom13 orientation13 walkthrough13 the13 locations13 of13 all13 safety13 equipment13 will13 be13 pointed13 out13 13 All13 users13 should13 be13 aware13 that13 even13 though13 they13 may13 not13 be13 using13 especially13 hazardous13 chemicals13 it13 is13 possible13 to13 become13 exposed13 to13 hazardous13 chemicals13 due13 to13 their13 presence13 in13 the13 cleanroom13 13 All13 users13 need13 to13 be13 alert13 and13 careful13 while13 working13 in13 the13 cleanroom13 and13 must13 be13 aware13 of13 safety13 procedures13

Chemical13 Spills13

Accidental13 chemical13 spills13 no13 matter13 the13 volume13 must13 be13 reported13 to13 the13 staff13 immediately13 13 13 13 Any13 material13 used13 in13 the13 clean13 up13 a13 chemical13 spill13 must13 also13 be13 treated13 as13 hazardous13 waste13 and13 disposed13 of13 accordingly13 13 13 Refer13 to13 Appendix13 F13 for13 the13 details13 on13 proper13 chemical13 spill13 cleanup13

13

If13 a13 user13 comes13 into13 contact13 with13 a13 hazardous13 chemical13 Call13 for13 help13 immediately13 13 13

a If13 the13 chemical13 comes13 into13 contact13 with13 the13 eye13 the13 eye13 wash13 should13 be13 used13 13 The13 user13 will13 need13 to13 hold13 open13 their13 eyes13 using13 their13 thumb13 and13 fingers13 and13 rinse13 for13 several13 minutes13 13 13

b If13 the13 chemical13 reaches13 other13 parts13 of13 the13 body13 remove13 contaminated13 clothing13 andor13 rinse13 with13 a13 lot13 of13 water13 using13 the13 eye13 wash13 a13 sink13 or13 the13 safety13 shower13 13 In13 such13 a13 situation13 the13 userrsquos13 health13 is13 more13 important13 than13 modesty13 13 13

13 USERS13 SHOULD13 IMMEDIATELY13 NOTIFY13 A13 STAFF13 MEMBER13 IF13 A13 CHEMICAL13 SPILL13 OCCURS13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

1813 13

5 Do13 I13 know13 how13 and13 where13 to13 properly13 store13 unused13 quantities13 of13 the13 chemical13 and13 how13 to13 transport13 it13

Chemical13 Storage13

There13 are13 chemical13 storage13 cabinets13 separated13 by13 chemical13 classification13 in13 the13 wet13 chemical13 bay13 where13 the13 ldquoin-shy‐userdquo13 chemicals13 and13 chemical13 waste13 are13 located13 13 13 Each13 of13 the13 cabinets13 is13 designated13 for13 a13 different13 class13 of13 chemical13 and13 is13 clearly13 identified13 on13 the13 outside13 of13 the13 cabinet13 13 13 13

The13 staff13 will13 stock13 these13 cabinets13 every13 morning13 and13 afternoon13 13 13 If13 during13 the13 day13 a13 user13 finds13 we13 are13 out13 of13 a13 particular13 chemical13 they13 need13 to13 contact13 a13 staff13 member13 and13 have13 them13 replenish13 the13 chemical13

Users13 must13 not13 open13 a13 new13 bottle13 until13 the13 old13 one13 is13 empty13 13 When13 you13 empty13 a13 chemical13 bottle13 you13 must13 thoroughly13 wash13 and13 rinse13 it13 13 (Rinse13 water13 may13 be13 safely13 disposed13 down13 the13 drain)13 13 13 13 The13 cleanroom13 uses13 these13 empty13 chemical13 bottles13 for13 waste13 collection13

We13 have13 very13 limited13 chemical13 storage13 so13 users13 should13 not13 store13 user13 specific13 chemicals13 in13 the13 cabinets13 without13 receiving13 staff13 approval13 first13 13 13 13

13

6 Do13 I13 know13 how13 to13 properly13 and13 safely13 dispose13 of13 the13 used13 chemical13 after13 use13

Chemical13 Waste13

Chemical13 waste13 generated13 in13 the13 cleanroom13 must13 be13 stored13 in13 a13 properly13 labeled13 container13 and13 then13 placed13 in13 the13 proper13 waste13 cabinets13 13 13 Pre-shy‐Printed13 chemical13 labels13 are13 provided13 by13 the13 technical13 staff13 for13 most13 commonly13 used13 chemicals13 13 13 These13 labels13 have13 all13 the13 chemicals13 and13 chemical13 mixtures13 that13 are13 compatible13 with13 each13 other13 13 13 13

The13 Technical13 staff13 has13 tried13 to13 consolidate13 as13 many13 chemicals13 as13 possible13 to13 minimize13 the13 number13 of13 waste13 containers13 generated13 in13 the13 cleanroom13 13 13 However13 some13 chemicals13 13 chemical13 mixtures13 used13 in13 the13 cleanroom13 should13 not13 be13 mixed13 with13 other13 any13 other13 chemical13 and13 therefore13 do13 not13 have13 pre-shy‐printed13 labels13 13 13 In13 lieu13 of13 pre-shy‐printed13 labels13 the13 Technical13 staff13 provides13 blank13 waste13 labels13 13 13 The13 users13 are13 responsible13 for13 filling13 these13 labels13 out13 with13 all13 the13 correct13 chemical13 information13 for13 the13 waste13 being13 discarded13 in13 the13 waste13 container13 13 13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

1913 13

Prior13 to13 disposing13 of13 your13 chemical13 into13 chemical13 waste13 bottle13 users13 should13 adhere13 to13 the13 following13 guidelines13

13 bull Place13 the13 waste13 receptacle13 into13 a13 deepsink13 so13 that13 if13 a13 spill13 occurs13 it13 will13 be13

contained13 13 bull Always13 use13 a13 funnel13 when13 pouring13 a13 chemical13 solution13 into13 a13 waste13 bottle13 13 Users13

should13 hold13 pour13 with13 two13 hands13 13

bull Do13 not13 overfill13 waste13 bottles13 13 13 Bottles13 should13 only13 be13 filled13 approximately13 frac3413 of13 the13 way13 to13 the13 top13 13 13 This13 is13 to13 allow13 for13 thermal13 expansion13 of13 the13 chemicals13 13 13 If13 a13 bottle13 is13 overfilled13 it13 can13 lead13 to13 overflow13 or13 rupture13 13 13 Do13 not13 over13 tighten13 the13 cap13 on13 a13 waste13 bottle13 13 13

bull Only13 use13 vented13 caps13 to13 seal13 chemical13 waste13 bottles13 13 The13 caps13 are13 located13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 If13 none13 are13 available13 please13 contact13 the13 Technical13 staff13 and13 they13 will13 replenish13 the13 inventory13 13 13 13 13

bull Empty13 Chemical13 waste13 bottles13 are13 stored13 on13 racks13 just13 outside13 the13 Wet13 Chemical13 Bay13 area13 13 The13 rack13 shelf13 will13 be13 prominently13 labeled13 as13 ldquoChemical13 Waste13 Bottlesrdquo13 These13 waste13 bottles13 are13 recycled13 plastic13 chemical13 bottles13 13 13 Prior13 to13 pouring13 any13 chemical13 into13 a13 waste13 bottle13 users13 should13 rinse13 the13 bottles13 a13 minimum13 of13 313 times13 13 13 13 Never13 assume13 the13 empty13 chemical13 bottle13 has13 been13 properly13 rinsed13 unless13 you13 have13 done13 it13 yourself13 13 13

bull Always13 properly13 label13 the13 waste13 bottle13 prior13 to13 use13 13 13 13 Preprinted13 and13 blank13 Chemical13 waste13 labels13 are13 located13 in13 the13 wet13 chemical13 bay13 and13 are13 to13 be13 placed13 on13 the13 EMPTY13 chemical13 waste13 bottle13 13 13 13

bull Chemical13 waste13 should13 never13 be13 intentionally13 poured13 down13 the13 drain13 13 13 13

bull Users13 should13 never13 modify13 an13 existing13 pre-shy‐made13 waste13 label13 13 If13 a13 pre-shy‐printed13 label13 for13 your13 chemical13 mixtures13 is13 not13 available13 then13 use13 a13 blank13 chemical13 waste13 label13 to13 create13 one13 13 13 When13 filling13 out13 the13 blank13 label13 you13 must13 fill13 out13 all13 the13 information13 (Chemical13 Name13 Percent13 Composition13 if13 a13 Mixture13 User13 Name13 and13 Date)13 on13 the13 label13 13 13 13 13

bull Chlorinated13 solvents13 (eg13 13 Methylene13 Chloride13 and13 Chlorobenzene)13 do13 not13 rinse13 well13 from13 bottles13 and13 other13 glassware13 13 These13 items13 must13 be13 rinsed13 in13 isopropyl13 alcohol13 first13 followed13 by13 DI13 water13 to13 remove13 any13 residue13 13 13 The13 empty13 bottles13 for13 these13 chemicals13 should13 never13 be13 used13 as13 waste13 bottles13 13 13

13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

2013 13

bull HF13 is13 only13 to13 be13 used13 and13 disposed13 of13 in13 the13 plastic13 labware13 and13 chemical13 waste13 bottles13 13 This13 is13 due13 to13 the13 fact13 that13 HF13 etches13 glass13 (SiO2)13 very13 well13 13 13

13 bull It13 is13 essential13 that13 solvents13 and13 acids13 be13 kept13 separate13

13 13 13 13

13 Chemical13 Waste13 bottles13 should13 always13 be13 placed13 in13 the13 approved13 chemical13 waste13 cabinet13 13 If13 the13 waste13 cabinet13 is13 full13 please13 contact13 a13 staff13 member13 to13 assist13 you13 13 They13 will13 dispose13 of13 excess13 containers13

Chemical13 Waste13 Satellite13 Accumulation13 Area13

The13 Nanofabrication13 cleanroom13 has13 a13 satellite13 accumulation13 area13 in13 the13 sub-shy‐fab13 where13 all13 chemical13 waste13 material13 is13 stored13 prior13 to13 being13 sent13 out13 for13 processing13 13 13 All13 containers13 located13 in13 the13 satellite13 accumulation13 area13 must13 have13 the13 appropriate13 red13 waste13 tag13 13 These13 red13 waste13 tags13 are13 supplied13 by13 EHampS13 and13 must13 be13 properly13 filled13 out13 13 The13 MRI13 Technical13 staff13 performs13 weekly13 required13 inspections13 of13 this13 area13 13 13 The13 Satellite13 accumulation13 area13 is13 a13 restricted13 access13 area13 accessed13 by13 authorized13 MRI13 Technical13 staff13 only13 13 13 13 13

13

Compressed13 Gas13 Safety13

Introduction13 13

Compressed13 gases13 and13 their13 containers13 (cylinders)13 are13 used13 in13 many13 Nanofabrication13 cleanroom13 processes13 and13 instruments13 13 Compressed13 gases13 and13 cylinders13 can13 expose13 users13 to13 both13 chemical13 and13 physical13 hazards13 13 Gases13 contained13 within13 compressed13 gas13 cylinders13 can13 be13 toxic13 flammable13 oxidizing13 corrosive13 inert13 or13 some13 combination13 thereof13 13 In13 the13 event13 of13 a13 leak13 inert13 gases13 can13 quickly13 displace13 air13 in13 a13 large13 area13 creating13 an13 oxygen-shy‐deficient13 atmosphere13 toxic13 gases13 can13 create13 poison13 atmospheres13 and13 flammable13 or13 reactive13 gases13 can13 result13 in13 fire13 and13 exploding13 cylinders13 13 Compressed13 gas13 can13 also13 be13 injected13 into13 the13 body13 through13 the13 skin13 if13 the13 gas13 is13 blown13 against13 the13 skin13 with13 sufficient13 pressure13 13 In13 addition13 to13 the13 hazards13 presented13 by13 the13 gases13 themselves13 there13 are13 hazards13 from13 the13 pressure13 of13 the13 gas13 and13 the13 physical13 weight13 of13 the13 cylinder13 13 A13 gas13 cylinder13 falling13 over13 can13 break13 chemical13 containers13 and13 crush13 feet13 13 The13 cylinder13 can13 itself13 become13 a13 high13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

2113 13

energy13 projectile13 if13 the13 cylinder13 valve13 is13 broken13 off13 13 Appropriate13 care13 in13 the13 handling13 and13 storage13 of13 compressed13 gas13 cylinders13 is13 essential13

Hazardous13 and13 Non-shy‐Hazardous13 Gases13 13

Many13 highly13 toxic13 and13 corrosive13 gases13 are13 used13 in13 the13 equipment13 located13 in13 the13 Nanofabrication13 cleanroom13 13 13 These13 gases13 are13 stored13 in13 the13 facilities13 sub-shy‐fab13 and13 are13 piped13 to13 the13 appropriate13 end13 use13 equipment13 13 13 13 Only13 Authorized13 MRI13 staff13 and13 the13 appropriate13 EHampS13 representatives13 who13 have13 been13 trained13 in13 the13 proper13 safety13 protocols13 for13 the13 handling13 of13 compressed13 gas13 cylinders13 are13 allowed13 to13 handle13 gas13 cylinders13 for13 the13 cleanroom13 13 13 13 13 13

Compressed13 Gas13 Storage13

All13 Nanofabrication13 cleanroom13 compressed13 gas13 cylinders13 not13 in13 use13 are13 stored13 in13 the13 designated13 chemical13 storage13 cage13 located13 at13 the13 Shipping13 and13 Receiving13 area13 of13 the13 Millennium13 Science13 Complex13 (MSC)13 building13 13 13 This13 MSC13 storage13 area13 is13 posted13 with13 the13 names13 of13 all13 the13 gases13 being13 stored13

13 13 13 The13 cylinders13 stored13 in13 this13 area13 must13 meet13 the13 following13 criteria13

bull Cylinders13 must13 be13 properly13 secure13 in13 an13 upright13 position13 with13 the13 proper13 valve13 protection13 caps13 in13 place13

bull Full13 and13 Empty13 Cylinders13 must13 be13 stored13 separately13 and13 clearly13 marked13 bull All13 cylinders13 must13 be13 secured13 to13 a13 solid13 support13 using13 the13 proper13 cylinder13 clamps13

and13 chains13 bull Flammable13 materials13 must13 be13 kept13 a13 minimum13 of13 2013 feet13 from13 an13 oxidizers13 bull Oxygen13 cylinders13 are13 to13 be13 kept13 free13 from13 oil13 or13 grease13 to13 prevent13 the13 possibility13 of13

explosion13

Transportation13 of13 Compressed13 Gas13 Cylinders13

All13 compressed13 gas13 cylinders13 used13 for13 the13 cleanroom13 are13 to13 be13 transported13 to13 the13 cleanroom13 sub-shy‐fab13 via13 the13 Hazardous13 Process13 Material13 Tunnel13 located13 in13 the13 Basement13 of13 the13 MSC13 building13 13 13 During13 the13 transport13 of13 the13 cylinders13 between13 the13 sub-shy‐fab13 and13 the13 MSC13 gas13 storage13 lockers13 the13 following13 criteria13 must13 be13 followed13

bull All13 cylinders13 (empty13 or13 full)13 must13 have13 the13 proper13 valve13 protection13 cap13 in13 place13 and13 properly13 secured13 13 13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

2213 13

bull Cylinders13 may13 never13 be13 transported13 with13 a13 regulator13 attached13 bull All13 cylinders13 will13 be13 transported13 using13 the13 proper13 sized13 gas13 cart13 for13 the13 cylinder13

being13 transferred13 13 13 13 Any13 and13 all13 safety13 fasteners13 will13 also13 be13 in13 place13 and13 properly13 secured13

Compressed13 Gas13 Delivery13

The13 Nanofabrication13 cleanroom13 uses13 a13 gas13 distribution13 system13 for13 the13 delivery13 of13 compressed13 gases13 from13 the13 sub-shy‐fab13 to13 the13 appropriate13 equipment13 above13 13 13 The13 gas13 distribution13 system13 is13 designed13 to13 deliver13 both13 Hazardous13 Process13 Materials13 (HPM)13 and13 Non-shy‐Hazardous13 Process13 materials13 to13 the13 cleanroom13 equipment13

Any13 cylinder13 that13 contains13 a13 gas13 classified13 as13 an13 HPM13 is13 located13 in13 a13 special13 HPM13 room13 in13 the13 sub-shy‐fab13 to13 minimize13 any13 damage13 caused13 by13 a13 catastrophic13 release13 of13 the13 HMP13 gas13 13 13 All13 gases13 located13 in13 the13 HPM13 room13 are13 housed13 in13 automated13 gas13 cabinets13 designated13 for13 the13 delivery13 of13 a13 specific13 HPM13 material13 and13 monitored13 by13 a13 Toxic13 Gas13 Monitoring13 System13 (see13 details13 below)13 13 13 13

The13 Non13 HPM13 materials13 are13 located13 in13 cylinders13 outside13 the13 HPM13 room13 in13 the13 sub-shy‐fab13 and13 may13 or13 may13 not13 be13 housed13 in13 a13 gas13 cabinet13 depending13 on13 the13 classification13 and13 hazards13 associated13 with13 the13 gas13 13 13

All13 gas13 cylinders13 connected13 to13 a13 gas13 delivery13 manifold13 and13 not13 housed13 in13 a13 gas13 cabinet13 are13 changed13 manually13 13 Special13 procedures13 followed13 by13 trained13 staff13 only13 must13 be13 followed13 when13 switching13 out13 these13 compressed13 gas13 cylinders13

The13 following13 criteria13 for13 the13 delivery13 of13 all13 compressed13 gasses13 in13 the13 gas13 distribution13 system13 must13 meet13 the13 following13 criteria13

bull All13 lines13 installed13 as13 part13 of13 the13 gas13 distribution13 system13 are13 to13 be13 made13 of13 stainless13 steel13

bull All13 lines13 are13 to13 be13 clearly13 marked13 as13 to13 what13 gas13 they13 are13 delivering13 bull The13 proper13 regulators13 are13 always13 to13 be13 used13 bull Any13 additional13 gas13 added13 to13 the13 gas13 distribution13 system13 will13 have13 the13 appropriate13

gas13 sensors13 added13 to13 the13 Toxic13 gas13 monitoring13 system13 13 13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

2313 13

Toxic13 Gas13 Monitoring13 System13

Due13 to13 the13 dangers13 associated13 with13 several13 of13 the13 gases13 used13 in13 the13 cleanroom13 a13 Toxic13 Gas13 Monitoring13 System13 is13 integrated13 into13 the13 cleanroom13 gas13 distribution13 system13 13 13 The13 system13 has13 detection13 points13 in13 the13 sub-shy‐fab13 and13 in13 the13 cleanroom13 space13 at13 critical13 delivery13 points13 13 This13 system13 also13 contains13 additional13 detectors13 (ie13 Low13 O213 sensor13 High13 Explosive13 Level13 sensors13 etc)13 to13 ensure13 the13 safety13 of13 all13 users13 of13 the13 cleanroom13 and13 staff13 13 The13 TGMS13 is13 maintained13 by13 the13 Nanofabrication13 staff13 and13 the13 detection13 signals13 and13 alarms13 are13 part13 of13 and13 monitored13 by13 the13 Building13 Management13 system13 13 13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

2413 13

APPENDIX13

Appendix13 A13 Fire13 Alarm13 Map13

13

13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

2513 13

Appendix13 B13 Toxic13 Gas13 Monitoring13 Alarm13 Map13

13

13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

2613 13

Appendix13 C13 Safety13 Eye13 Wash13 and13 Shower13 Map13 13

13

13

13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

2713 13

Appendix13 D13 Buddy13 Policy13 In13 order13 to13 meet13 the13 requirements13 of13 the13 Buddy13 Policy13 certified13 cleanroom13 users13 who13 are13 working13 outside13 the13 normal13 business13 hours13 of13 8AM-shy‐6PM13 must13 identify13 another13 certified13 user13 of13 the13 cleanroom13 who13 will13 be13 responsible13 for13 checking13 in13 on13 the13 user13 working13 in13 the13 cleanroom13 13 13 That13 second13 certified13 user13 is13 required13 to13 check13 on13 their13 ldquoBuddyrdquo13 every13 1513 minutes13 to13 ensure13 they13 are13 safe13 or13 to13 call13 for13 assistance13 if13 there13 is13 an13 emergency13

Users13 and13 their13 Buddies13 must13 sign13 into13 the13 logbook13 after13 normal13 working13 hours13 (between13 6PM13 13 and13 8AM13 weekdays13 and13 all13 day13 on13 weekends13 and13 holidays)13

An13 additional13 requirement13 of13 our13 buddy13 program13 is13 that13 when13 a13 certified13 user13 is13 working13 in13 the13 wet13 chemical13 bay13 their13 ldquobuddyrdquo13 must13 also13 be13 in13 the13 clean13 room13 aware13 of13 their13 situation13 and13 close13 enough13 to13 be13 of13 assistance13 in13 case13 of13 an13 accident13 13 13 The13 individual13 acting13 as13 your13 buddy13 does13 not13 need13 to13 be13 at13 your13 side13 constantly13 just13 available13 and13 aware13 13 13 13 13

Use13 of13 the13 standard13 lithography13 chemicals13 (ie13 13 resists13 developers13 and13 solvent13 based13 resist13 strippers)13 in13 the13 Lithography13 area13 without13 a13 buddy13 present13 inside13 the13 clean13 room13 is13 acceptable13

13 13

2813 13

Appendix13 E13 Equipment13 Training13 The13 following13 is13 a13 description13 of13 how13 each13 session13 in13 our13 equipment13 training13 program13 is13 setup13 as13 well13 as13 any13 additional13 requirements13 for13 users13 13 13 13

Session13 One13 (scheduled13 through13 the13 Administrative13 Staff)13

This13 training13 session13 offers13 a13 General13 Overview13 of13 the13 equipment13 13 13 This13 session13 is13 instructed13 by13 one13 of13 the13 Technical13 staff13 responsible13 for13 the13 operation13 and13 oversight13 of13 the13 equipment13 13 13 The13 session13 will13 cover13 the13 equipment13 capabilities13 and13 demonstrate13 the13 operation13 13 13 To13 ensure13 users13 get13 the13 most13 out13 of13 these13 sessions13 the13 number13 of13 attendees13 will13 be13 limited13 to13 3-shy‐513 certified13 users13 depending13 on13 the13 equipment13

The13 Session13 One13 trainings13 are13 offered13 on13 a13 weekly13 basis13 for13 most13 of13 the13 equipment13 in13 the13 cleanroom13 13 13 13 There13 are13 a13 couple13 of13 exceptions13 of13 this13 due13 to13 the13 complexity13 of13 the13 equipment13 13 13 The13 information13 on13 the13 Equipment13 Training13 can13 be13 found13 on13 the13 RIMS13 splash13 page13 or13 by13 contacting13 the13 Administrative13 Staff13

13

Session13 Two13 (scheduled13 directly13 with13 the13 Technical13 staff13 in13 charge13 of13 the13 equipment)13

The13 second13 training13 sessions13 users13 will13 schedule13 directly13 with13 the13 Technical13 staff13 responsible13 for13 the13 equipment13 operation13 and13 oversight13 13 13 This13 is13 a13 one13 on13 one13 training13 session13 between13 the13 user13 and13 the13 technical13 staff13 13 13 In13 this13 session13 the13 certified13 user13 will13 operate13 the13 tool13 under13 the13 guidance13 of13 the13 Process13 Engineer13 13 13 Users13 must13 bring13 a13 sample13 for13 their13 research13 to13 the13 training13 session13 for13 processing13 13 13 This13 allows13 the13 Technical13 staff13 an13 opportunity13 to13 better13 understand13 what13 the13 user13 is13 trying13 to13 accomplish13 and13 to13 provide13 any13 necessary13 feedback13 on13 how13 to13 process13 their13 sample13

13

Session13 Three13 (scheduled13 directly13 with13 the13 Technical13 staff13 in13 charge13 of13 the13 equipment)13

This13 session13 is13 again13 a13 one13 on13 one13 training13 session13 with13 the13 Technical13 staff13 responsible13 for13 the13 equipment13 operation13 and13 oversight13 13 13 This13 is13 considered13 the13 ldquoCompetence13 Training13 Sessionrdquo13 13 13 The13 user13 will13 operate13 the13 tool13 with13 limited13 to13 no13 guidance13 from13 the13 Technical13 staff13 13 13 The13 Technical13 staff13 will13 ask13 questions13 regarding13 operation13 and13 fundamental13 techniques13 to13 ensure13 the13 user13 fully13 understands13 the13 operation13 of13 the13 tool13 13 13 At13 the13 end13 of13 the13 session13 if13 the13 Technical13 staff13 in13 charge13 of13 the13 tool13 deems13 the13 user13 competent13 to13 operate13 the13 tool13 without13 further13 assistance13 the13 user13 will13 be13 added13 to13 the13 list13 of13 certified13 users13 of13 the13 equipment13 13 13 13

2913 13

If13 for13 any13 reason13 the13 Technical13 staff13 does13 not13 feel13 comfortable13 allowing13 the13 user13 to13 operate13 the13 tool13 independently13 then13 another13 training13 session13 will13 be13 scheduled13 13 13 13 This13 will13 occur13 until13 the13 Technical13 staff13 feel13 the13 user13 has13 an13 adequate13 grasp13 on13 the13 operation13 of13 the13 equipment13 13 13

Users13 must13 bring13 also13 bring13 a13 sample13 related13 to13 their13 research13 for13 the13 training13 session13 as13 well13 as13 any13 results13 from13 the13 previously13 processed13 sample13 13 13 Again13 this13 is13 to13 allow13 the13 Technical13 staff13 an13 opportunity13 to13 better13 understand13 guide13 the13 users13 and13 ensure13 they13 are13 on13 the13 correct13 path13 and13 that13 the13 tool13 is13 operating13 properly13

Most13 equipment13 trainings13 are13 held13 on13 a13 regular13 weekly13 schedule13 13 13 The13 training13 schedule13 is13 available13 on13 RIMS13 in13 the13 ldquoMessage13 of13 the13 Dayrdquo13 13 Please13 sign13 up13 for13 training13 at13 least13 413 business13 days13 prior13 to13 scheduled13 session13 13 13 Training13 sessions13 will13 be13 cancelled13 if13 there13 are13 no13 attendees13 scheduled13 413 days13 in13 advance13

13 13

3013 13

Appendix13 F13 Emergency13 Response13 Procedures13 Police13 Services13 maintains13 the13 Universitys13 Emergency13 Response13 Plan13 and13 an13 Operation13 Plan13 for13 emergencies13 13 The13 Emergency13 Response13 Plan13 formalizes13 responses13 to13 all13 classes13 of13 emergencies13 from13 small13 events13 to13 catastrophes13 13 In13 emergency13 situations13 the13 role13 of13 University13 Police13 (UP)13 is13 to13 investigate13 the13 situation13 provide13 site13 security13 implement13 the13 emergency13 plan13 and13 establish13 communications13 13 EHS13 will13 advise13 and13 assist13 with13 hazardous-shy‐material13 spill13 control13 and13 cleanup13 13 When13 the13 ability13 to13 respond13 adequately13 to13 an13 emergency13 is13 beyond13 the13 capability13 of13 University13 personnel13 UP13 will13 call13 the13 local13 fire13 department13 or13 local13 hazardous13 materials13 response13 team13

For13 any13 Life13 threating13 emergency13 call13 91113 immediately13

If13 you13 have13 a13 chemical13 biological13 or13 radiological13 incident13 that13 DOES13 NOT13 pose13 a13 life-shy‐threatening13 emergency13 you13 should13

o Call13 (814)13 865-shy‐639113 (EHampS)13 Monday13 -shy‐13 Friday13 813 AM13 -shy‐13 513 PM13 13 o Call13 (814)13 863-shy‐111113 (University13 Police)13 on13 holidays13 or13 after13 normal13 working13

hours13 (5PM-shy‐8AM)13 13 13

Fire13

In13 case13 of13 a13 fire13 evacuate13 the13 cleanroom13 immediately13 and13 pull13 one13 of13 the13 fire13 alarms13 on13 the13 way13 out13 13 13 Once13 out13 of13 the13 cleanroom13 users13 should13 follow13 the13 designated13 building13 evacuation13 routes13 13 13 The13 building13 evacuation13 routes13 can13 be13 found13 on13 plaques13 in13 the13 hallways13 throughout13 the13 building13 13 13 Users13 should13 familiarize13 themselves13 with13 these13 routes13 on13 a13 regular13 basis13 13 13 Once13 emergency13 personnel13 have13 arrived13 on13 scene13 the13 user13 who13 initiated13 the13 alarm13 should13 provide13 the13 following13 information13 to13 the13 emergency13 responders13

bull Name13 and13 title13 of13 person13 reporting13 incident13 13 bull Date13 time13 and13 location13 of13 incident13 13 bull Phone13 number13 where13 the13 reporting13 person13 can13 be13 reached13 13 bull A13 brief13 description13 of13 incident13 13

13

Chemical13 Spill13 13 Gas13 Release13

Users13 are13 to13 report13 all13 chemicals13 spills13 to13 EHampS13 that13 meet13 the13 following13 requirements13

3113 13

bull All13 chemical13 exposures13 or13 explosions13 requiring13 medical13 attention13 must13 be13 immediately13 reported13 to13 EHS13 after13 emergency13 procedures13 have13 been13 implemented13 13

bull All13 spillsreleases13 that13 result13 in13 bodily13 injury13 enter13 surface13 water13 are13 highly13 hazardous13 or13 larger13 than13 113 gallon13 must13 be13 reported13 to13 EHS13 immediately13 after13 emergency13 procedures13 have13 been13 taken13 13 This13 includes13 highly13 hazardous13 materials13 chemicals13 such13 as13 hydrofluoric13 acid13 chlorine13 gas13 bromine13 sulfuric13 acid13 etc13 13 If13 you13 are13 not13 sure13 call13 EHS13 13 For13 spills13 to13 paved13 surfaces13 or13 floors13 that13 have13 been13 cleaned-shy‐up13 please13 report13 within13 2413 hours13 13 13 13

Users13 should13 follow13 the13 emergency13 procedures13 listed13 below13 in13 case13 of13 a13 chemical13 spill13 13 gas13 release13 requiring13 emergency13 personnel13 to13 respond13

bull Cease13 All13 activities13 bull Evacuate13 the13 immediate13 spill13 13 release13 area13 bull Call13 91113 bull Seek13 immediate13 medical13 attention13 if13 necessary13 bull Keep13 people13 outside13 the13 spill13 area13 until13 the13 appropriate13 emergency13 responders13

determine13 that13 the13 area13 is13 safe13 for13 human13 occupancy13

The13 following13 information13 is13 to13 be13 provided13 to13 EHS13 emergency13 responders13 initially13 and13 then13 followed13 up13 in13 writing13 within13 4813 hours13 13

bull Name13 and13 title13 of13 person13 reporting13 incident13 13

bull Date13 time13 and13 location13 of13 incident13 13

bull Phone13 number13 where13 the13 person13 reporting13 the13 incident13 can13 be13 reached13 13

bull Brief13 description13 of13 the13 incident13 13

bull Extent13 of13 contamination13 of13 land13 water13 or13 air13 if13 known13 (eg13 bodies13 of13 water)13 13

13

Small13 spills13 are13 to13 be13 cleaned-shy‐up13 by13 the13 facilities13 technical13 staff13 13 13 13 EHS13 will13 provide13 technical13 advice13 if13 requested13 13 13 Any13 absorbent13 materials13 used13 to13 clean13 up13 the13 chemical13 spill13 are13 to13 be13 disposed13 through13 the13 Chemical13 Waste13 Management13 Program13 13 13 The13 following13 procedures13 should13 be13 followed13 when13 cleaning13 up13 a13 small13 chemical13 spill13

3213 13

bull Spills13 should13 be13 neutralized13 if13 possible13 using13 the13 appropriate13 chemical13 neutralization13 solution13 13 13

bull Use13 a13 chemical13 absorbent13 material13 to13 cover13 the13 spill13 area13 in13 order13 to13 minimize13 the13 affected13 area13

bull Collect13 all13 solid13 waste13 materials13 in13 a13 chemical13 waste13 containment13 bag13 (located13 in13 the13 chemical13 spill13 cabinet13 13 cart)13 13

bull Properly13 label13 the13 bag13 with13 the13 materials13 generated13 in13 the13 cleanup13 bull Contact13 a13 Technical13 staff13 member13 so13 they13 can13 submit13 a13 pickup13 request13 to13 EHampS13

13

Medical13 Emergency13

Medical13 emergencies13 such13 as13 chemical13 burns13 inhalation13 injuries13 falls13 heart13 attacks13 etc13 13 require13 you13 to13 call13 91113 immediately13

13 13

3313 13

Appendix13 G13 13 Chemical13 Waste13 Labels13 The13 following13 are13 examples13 of13 the13 chemical13 waste13 labels13 used13 in13 the13 cleanroom13

13

13

13

13

3413 13

13

13 13

3513 13

Appendix13 H13 13 Personal13 Protective13 Equipment13

2913 13

If13 for13 any13 reason13 the13 Technical13 staff13 does13 not13 feel13 comfortable13 allowing13 the13 user13 to13 operate13 the13 tool13 independently13 then13 another13 training13 session13 will13 be13 scheduled13 13 13 13 This13 will13 occur13 until13 the13 Technical13 staff13 feel13 the13 user13 has13 an13 adequate13 grasp13 on13 the13 operation13 of13 the13 equipment13 13 13

Users13 must13 bring13 also13 bring13 a13 sample13 related13 to13 their13 research13 for13 the13 training13 session13 as13 well13 as13 any13 results13 from13 the13 previously13 processed13 sample13 13 13 Again13 this13 is13 to13 allow13 the13 Technical13 staff13 an13 opportunity13 to13 better13 understand13 guide13 the13 users13 and13 ensure13 they13 are13 on13 the13 correct13 path13 and13 that13 the13 tool13 is13 operating13 properly13

Most13 equipment13 trainings13 are13 held13 on13 a13 regular13 weekly13 schedule13 13 13 The13 training13 schedule13 is13 available13 on13 RIMS13 in13 the13 ldquoMessage13 of13 the13 Dayrdquo13 13 Please13 sign13 up13 for13 training13 at13 least13 413 business13 days13 prior13 to13 scheduled13 session13 13 13 Training13 sessions13 will13 be13 cancelled13 if13 there13 are13 no13 attendees13 scheduled13 413 days13 in13 advance13

13 13

3013 13

Appendix13 F13 Emergency13 Response13 Procedures13 Police13 Services13 maintains13 the13 Universitys13 Emergency13 Response13 Plan13 and13 an13 Operation13 Plan13 for13 emergencies13 13 The13 Emergency13 Response13 Plan13 formalizes13 responses13 to13 all13 classes13 of13 emergencies13 from13 small13 events13 to13 catastrophes13 13 In13 emergency13 situations13 the13 role13 of13 University13 Police13 (UP)13 is13 to13 investigate13 the13 situation13 provide13 site13 security13 implement13 the13 emergency13 plan13 and13 establish13 communications13 13 EHS13 will13 advise13 and13 assist13 with13 hazardous-shy‐material13 spill13 control13 and13 cleanup13 13 When13 the13 ability13 to13 respond13 adequately13 to13 an13 emergency13 is13 beyond13 the13 capability13 of13 University13 personnel13 UP13 will13 call13 the13 local13 fire13 department13 or13 local13 hazardous13 materials13 response13 team13

For13 any13 Life13 threating13 emergency13 call13 91113 immediately13

If13 you13 have13 a13 chemical13 biological13 or13 radiological13 incident13 that13 DOES13 NOT13 pose13 a13 life-shy‐threatening13 emergency13 you13 should13

o Call13 (814)13 865-shy‐639113 (EHampS)13 Monday13 -shy‐13 Friday13 813 AM13 -shy‐13 513 PM13 13 o Call13 (814)13 863-shy‐111113 (University13 Police)13 on13 holidays13 or13 after13 normal13 working13

hours13 (5PM-shy‐8AM)13 13 13

Fire13

In13 case13 of13 a13 fire13 evacuate13 the13 cleanroom13 immediately13 and13 pull13 one13 of13 the13 fire13 alarms13 on13 the13 way13 out13 13 13 Once13 out13 of13 the13 cleanroom13 users13 should13 follow13 the13 designated13 building13 evacuation13 routes13 13 13 The13 building13 evacuation13 routes13 can13 be13 found13 on13 plaques13 in13 the13 hallways13 throughout13 the13 building13 13 13 Users13 should13 familiarize13 themselves13 with13 these13 routes13 on13 a13 regular13 basis13 13 13 Once13 emergency13 personnel13 have13 arrived13 on13 scene13 the13 user13 who13 initiated13 the13 alarm13 should13 provide13 the13 following13 information13 to13 the13 emergency13 responders13

bull Name13 and13 title13 of13 person13 reporting13 incident13 13 bull Date13 time13 and13 location13 of13 incident13 13 bull Phone13 number13 where13 the13 reporting13 person13 can13 be13 reached13 13 bull A13 brief13 description13 of13 incident13 13

13

Chemical13 Spill13 13 Gas13 Release13

Users13 are13 to13 report13 all13 chemicals13 spills13 to13 EHampS13 that13 meet13 the13 following13 requirements13

3113 13

bull All13 chemical13 exposures13 or13 explosions13 requiring13 medical13 attention13 must13 be13 immediately13 reported13 to13 EHS13 after13 emergency13 procedures13 have13 been13 implemented13 13

bull All13 spillsreleases13 that13 result13 in13 bodily13 injury13 enter13 surface13 water13 are13 highly13 hazardous13 or13 larger13 than13 113 gallon13 must13 be13 reported13 to13 EHS13 immediately13 after13 emergency13 procedures13 have13 been13 taken13 13 This13 includes13 highly13 hazardous13 materials13 chemicals13 such13 as13 hydrofluoric13 acid13 chlorine13 gas13 bromine13 sulfuric13 acid13 etc13 13 If13 you13 are13 not13 sure13 call13 EHS13 13 For13 spills13 to13 paved13 surfaces13 or13 floors13 that13 have13 been13 cleaned-shy‐up13 please13 report13 within13 2413 hours13 13 13 13

Users13 should13 follow13 the13 emergency13 procedures13 listed13 below13 in13 case13 of13 a13 chemical13 spill13 13 gas13 release13 requiring13 emergency13 personnel13 to13 respond13

bull Cease13 All13 activities13 bull Evacuate13 the13 immediate13 spill13 13 release13 area13 bull Call13 91113 bull Seek13 immediate13 medical13 attention13 if13 necessary13 bull Keep13 people13 outside13 the13 spill13 area13 until13 the13 appropriate13 emergency13 responders13

determine13 that13 the13 area13 is13 safe13 for13 human13 occupancy13

The13 following13 information13 is13 to13 be13 provided13 to13 EHS13 emergency13 responders13 initially13 and13 then13 followed13 up13 in13 writing13 within13 4813 hours13 13

bull Name13 and13 title13 of13 person13 reporting13 incident13 13

bull Date13 time13 and13 location13 of13 incident13 13

bull Phone13 number13 where13 the13 person13 reporting13 the13 incident13 can13 be13 reached13 13

bull Brief13 description13 of13 the13 incident13 13

bull Extent13 of13 contamination13 of13 land13 water13 or13 air13 if13 known13 (eg13 bodies13 of13 water)13 13

13

Small13 spills13 are13 to13 be13 cleaned-shy‐up13 by13 the13 facilities13 technical13 staff13 13 13 13 EHS13 will13 provide13 technical13 advice13 if13 requested13 13 13 Any13 absorbent13 materials13 used13 to13 clean13 up13 the13 chemical13 spill13 are13 to13 be13 disposed13 through13 the13 Chemical13 Waste13 Management13 Program13 13 13 The13 following13 procedures13 should13 be13 followed13 when13 cleaning13 up13 a13 small13 chemical13 spill13

3213 13

bull Spills13 should13 be13 neutralized13 if13 possible13 using13 the13 appropriate13 chemical13 neutralization13 solution13 13 13

bull Use13 a13 chemical13 absorbent13 material13 to13 cover13 the13 spill13 area13 in13 order13 to13 minimize13 the13 affected13 area13

bull Collect13 all13 solid13 waste13 materials13 in13 a13 chemical13 waste13 containment13 bag13 (located13 in13 the13 chemical13 spill13 cabinet13 13 cart)13 13

bull Properly13 label13 the13 bag13 with13 the13 materials13 generated13 in13 the13 cleanup13 bull Contact13 a13 Technical13 staff13 member13 so13 they13 can13 submit13 a13 pickup13 request13 to13 EHampS13

13

Medical13 Emergency13

Medical13 emergencies13 such13 as13 chemical13 burns13 inhalation13 injuries13 falls13 heart13 attacks13 etc13 13 require13 you13 to13 call13 91113 immediately13

13 13

3313 13

Appendix13 G13 13 Chemical13 Waste13 Labels13 The13 following13 are13 examples13 of13 the13 chemical13 waste13 labels13 used13 in13 the13 cleanroom13

13

13

13

13

3413 13

13

13 13

3513 13

Appendix13 H13 13 Personal13 Protective13 Equipment13

3013 13

Appendix13 F13 Emergency13 Response13 Procedures13 Police13 Services13 maintains13 the13 Universitys13 Emergency13 Response13 Plan13 and13 an13 Operation13 Plan13 for13 emergencies13 13 The13 Emergency13 Response13 Plan13 formalizes13 responses13 to13 all13 classes13 of13 emergencies13 from13 small13 events13 to13 catastrophes13 13 In13 emergency13 situations13 the13 role13 of13 University13 Police13 (UP)13 is13 to13 investigate13 the13 situation13 provide13 site13 security13 implement13 the13 emergency13 plan13 and13 establish13 communications13 13 EHS13 will13 advise13 and13 assist13 with13 hazardous-shy‐material13 spill13 control13 and13 cleanup13 13 When13 the13 ability13 to13 respond13 adequately13 to13 an13 emergency13 is13 beyond13 the13 capability13 of13 University13 personnel13 UP13 will13 call13 the13 local13 fire13 department13 or13 local13 hazardous13 materials13 response13 team13

For13 any13 Life13 threating13 emergency13 call13 91113 immediately13

If13 you13 have13 a13 chemical13 biological13 or13 radiological13 incident13 that13 DOES13 NOT13 pose13 a13 life-shy‐threatening13 emergency13 you13 should13

o Call13 (814)13 865-shy‐639113 (EHampS)13 Monday13 -shy‐13 Friday13 813 AM13 -shy‐13 513 PM13 13 o Call13 (814)13 863-shy‐111113 (University13 Police)13 on13 holidays13 or13 after13 normal13 working13

hours13 (5PM-shy‐8AM)13 13 13

Fire13

In13 case13 of13 a13 fire13 evacuate13 the13 cleanroom13 immediately13 and13 pull13 one13 of13 the13 fire13 alarms13 on13 the13 way13 out13 13 13 Once13 out13 of13 the13 cleanroom13 users13 should13 follow13 the13 designated13 building13 evacuation13 routes13 13 13 The13 building13 evacuation13 routes13 can13 be13 found13 on13 plaques13 in13 the13 hallways13 throughout13 the13 building13 13 13 Users13 should13 familiarize13 themselves13 with13 these13 routes13 on13 a13 regular13 basis13 13 13 Once13 emergency13 personnel13 have13 arrived13 on13 scene13 the13 user13 who13 initiated13 the13 alarm13 should13 provide13 the13 following13 information13 to13 the13 emergency13 responders13

bull Name13 and13 title13 of13 person13 reporting13 incident13 13 bull Date13 time13 and13 location13 of13 incident13 13 bull Phone13 number13 where13 the13 reporting13 person13 can13 be13 reached13 13 bull A13 brief13 description13 of13 incident13 13

13

Chemical13 Spill13 13 Gas13 Release13

Users13 are13 to13 report13 all13 chemicals13 spills13 to13 EHampS13 that13 meet13 the13 following13 requirements13

3113 13

bull All13 chemical13 exposures13 or13 explosions13 requiring13 medical13 attention13 must13 be13 immediately13 reported13 to13 EHS13 after13 emergency13 procedures13 have13 been13 implemented13 13

bull All13 spillsreleases13 that13 result13 in13 bodily13 injury13 enter13 surface13 water13 are13 highly13 hazardous13 or13 larger13 than13 113 gallon13 must13 be13 reported13 to13 EHS13 immediately13 after13 emergency13 procedures13 have13 been13 taken13 13 This13 includes13 highly13 hazardous13 materials13 chemicals13 such13 as13 hydrofluoric13 acid13 chlorine13 gas13 bromine13 sulfuric13 acid13 etc13 13 If13 you13 are13 not13 sure13 call13 EHS13 13 For13 spills13 to13 paved13 surfaces13 or13 floors13 that13 have13 been13 cleaned-shy‐up13 please13 report13 within13 2413 hours13 13 13 13

Users13 should13 follow13 the13 emergency13 procedures13 listed13 below13 in13 case13 of13 a13 chemical13 spill13 13 gas13 release13 requiring13 emergency13 personnel13 to13 respond13

bull Cease13 All13 activities13 bull Evacuate13 the13 immediate13 spill13 13 release13 area13 bull Call13 91113 bull Seek13 immediate13 medical13 attention13 if13 necessary13 bull Keep13 people13 outside13 the13 spill13 area13 until13 the13 appropriate13 emergency13 responders13

determine13 that13 the13 area13 is13 safe13 for13 human13 occupancy13

The13 following13 information13 is13 to13 be13 provided13 to13 EHS13 emergency13 responders13 initially13 and13 then13 followed13 up13 in13 writing13 within13 4813 hours13 13

bull Name13 and13 title13 of13 person13 reporting13 incident13 13

bull Date13 time13 and13 location13 of13 incident13 13

bull Phone13 number13 where13 the13 person13 reporting13 the13 incident13 can13 be13 reached13 13

bull Brief13 description13 of13 the13 incident13 13

bull Extent13 of13 contamination13 of13 land13 water13 or13 air13 if13 known13 (eg13 bodies13 of13 water)13 13

13

Small13 spills13 are13 to13 be13 cleaned-shy‐up13 by13 the13 facilities13 technical13 staff13 13 13 13 EHS13 will13 provide13 technical13 advice13 if13 requested13 13 13 Any13 absorbent13 materials13 used13 to13 clean13 up13 the13 chemical13 spill13 are13 to13 be13 disposed13 through13 the13 Chemical13 Waste13 Management13 Program13 13 13 The13 following13 procedures13 should13 be13 followed13 when13 cleaning13 up13 a13 small13 chemical13 spill13

3213 13

bull Spills13 should13 be13 neutralized13 if13 possible13 using13 the13 appropriate13 chemical13 neutralization13 solution13 13 13

bull Use13 a13 chemical13 absorbent13 material13 to13 cover13 the13 spill13 area13 in13 order13 to13 minimize13 the13 affected13 area13

bull Collect13 all13 solid13 waste13 materials13 in13 a13 chemical13 waste13 containment13 bag13 (located13 in13 the13 chemical13 spill13 cabinet13 13 cart)13 13

bull Properly13 label13 the13 bag13 with13 the13 materials13 generated13 in13 the13 cleanup13 bull Contact13 a13 Technical13 staff13 member13 so13 they13 can13 submit13 a13 pickup13 request13 to13 EHampS13

13

Medical13 Emergency13

Medical13 emergencies13 such13 as13 chemical13 burns13 inhalation13 injuries13 falls13 heart13 attacks13 etc13 13 require13 you13 to13 call13 91113 immediately13

13 13

3313 13

Appendix13 G13 13 Chemical13 Waste13 Labels13 The13 following13 are13 examples13 of13 the13 chemical13 waste13 labels13 used13 in13 the13 cleanroom13

13

13

13

13

3413 13

13

13 13

3513 13

Appendix13 H13 13 Personal13 Protective13 Equipment13

3113 13

bull All13 chemical13 exposures13 or13 explosions13 requiring13 medical13 attention13 must13 be13 immediately13 reported13 to13 EHS13 after13 emergency13 procedures13 have13 been13 implemented13 13

bull All13 spillsreleases13 that13 result13 in13 bodily13 injury13 enter13 surface13 water13 are13 highly13 hazardous13 or13 larger13 than13 113 gallon13 must13 be13 reported13 to13 EHS13 immediately13 after13 emergency13 procedures13 have13 been13 taken13 13 This13 includes13 highly13 hazardous13 materials13 chemicals13 such13 as13 hydrofluoric13 acid13 chlorine13 gas13 bromine13 sulfuric13 acid13 etc13 13 If13 you13 are13 not13 sure13 call13 EHS13 13 For13 spills13 to13 paved13 surfaces13 or13 floors13 that13 have13 been13 cleaned-shy‐up13 please13 report13 within13 2413 hours13 13 13 13

Users13 should13 follow13 the13 emergency13 procedures13 listed13 below13 in13 case13 of13 a13 chemical13 spill13 13 gas13 release13 requiring13 emergency13 personnel13 to13 respond13

bull Cease13 All13 activities13 bull Evacuate13 the13 immediate13 spill13 13 release13 area13 bull Call13 91113 bull Seek13 immediate13 medical13 attention13 if13 necessary13 bull Keep13 people13 outside13 the13 spill13 area13 until13 the13 appropriate13 emergency13 responders13

determine13 that13 the13 area13 is13 safe13 for13 human13 occupancy13

The13 following13 information13 is13 to13 be13 provided13 to13 EHS13 emergency13 responders13 initially13 and13 then13 followed13 up13 in13 writing13 within13 4813 hours13 13

bull Name13 and13 title13 of13 person13 reporting13 incident13 13

bull Date13 time13 and13 location13 of13 incident13 13

bull Phone13 number13 where13 the13 person13 reporting13 the13 incident13 can13 be13 reached13 13

bull Brief13 description13 of13 the13 incident13 13

bull Extent13 of13 contamination13 of13 land13 water13 or13 air13 if13 known13 (eg13 bodies13 of13 water)13 13

13

Small13 spills13 are13 to13 be13 cleaned-shy‐up13 by13 the13 facilities13 technical13 staff13 13 13 13 EHS13 will13 provide13 technical13 advice13 if13 requested13 13 13 Any13 absorbent13 materials13 used13 to13 clean13 up13 the13 chemical13 spill13 are13 to13 be13 disposed13 through13 the13 Chemical13 Waste13 Management13 Program13 13 13 The13 following13 procedures13 should13 be13 followed13 when13 cleaning13 up13 a13 small13 chemical13 spill13

3213 13

bull Spills13 should13 be13 neutralized13 if13 possible13 using13 the13 appropriate13 chemical13 neutralization13 solution13 13 13

bull Use13 a13 chemical13 absorbent13 material13 to13 cover13 the13 spill13 area13 in13 order13 to13 minimize13 the13 affected13 area13

bull Collect13 all13 solid13 waste13 materials13 in13 a13 chemical13 waste13 containment13 bag13 (located13 in13 the13 chemical13 spill13 cabinet13 13 cart)13 13

bull Properly13 label13 the13 bag13 with13 the13 materials13 generated13 in13 the13 cleanup13 bull Contact13 a13 Technical13 staff13 member13 so13 they13 can13 submit13 a13 pickup13 request13 to13 EHampS13

13

Medical13 Emergency13

Medical13 emergencies13 such13 as13 chemical13 burns13 inhalation13 injuries13 falls13 heart13 attacks13 etc13 13 require13 you13 to13 call13 91113 immediately13

13 13

3313 13

Appendix13 G13 13 Chemical13 Waste13 Labels13 The13 following13 are13 examples13 of13 the13 chemical13 waste13 labels13 used13 in13 the13 cleanroom13

13

13

13

13

3413 13

13

13 13

3513 13

Appendix13 H13 13 Personal13 Protective13 Equipment13

3213 13

bull Spills13 should13 be13 neutralized13 if13 possible13 using13 the13 appropriate13 chemical13 neutralization13 solution13 13 13

bull Use13 a13 chemical13 absorbent13 material13 to13 cover13 the13 spill13 area13 in13 order13 to13 minimize13 the13 affected13 area13

bull Collect13 all13 solid13 waste13 materials13 in13 a13 chemical13 waste13 containment13 bag13 (located13 in13 the13 chemical13 spill13 cabinet13 13 cart)13 13

bull Properly13 label13 the13 bag13 with13 the13 materials13 generated13 in13 the13 cleanup13 bull Contact13 a13 Technical13 staff13 member13 so13 they13 can13 submit13 a13 pickup13 request13 to13 EHampS13

13

Medical13 Emergency13

Medical13 emergencies13 such13 as13 chemical13 burns13 inhalation13 injuries13 falls13 heart13 attacks13 etc13 13 require13 you13 to13 call13 91113 immediately13

13 13

3313 13

Appendix13 G13 13 Chemical13 Waste13 Labels13 The13 following13 are13 examples13 of13 the13 chemical13 waste13 labels13 used13 in13 the13 cleanroom13

13

13

13

13

3413 13

13

13 13

3513 13

Appendix13 H13 13 Personal13 Protective13 Equipment13

3313 13

Appendix13 G13 13 Chemical13 Waste13 Labels13 The13 following13 are13 examples13 of13 the13 chemical13 waste13 labels13 used13 in13 the13 cleanroom13

13

13

13

13

3413 13

13

13 13

3513 13

Appendix13 H13 13 Personal13 Protective13 Equipment13

3413 13

13

13 13

3513 13

Appendix13 H13 13 Personal13 Protective13 Equipment13

3513 13

Appendix13 H13 13 Personal13 Protective13 Equipment13