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N E M 2019 www.mne2019.org 23-26 September RODOS PALACE HOTEL Rhodes Greece 2019 Micro & Nano Engineering Advanced Patterning Nanofabrication for functionality Nanodevices-MEMS Lab-on-a-chip Going Nano in Homer’s land 45 th International Conference on Final Program Homer goes nano: e-beam lithography of the Odyssey

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  • NEM20

    19w w w. m n e 2 0 1 9 . o r g

    23-26 SeptemberRODOS PALACE HOTEL Rhodes

    Greece

    2019

    Micro & Nano Engineering

    Advanced Patterning •Nanofabrication for functionality •

    Nanodevices-MEMS •Lab-on-a-chip •

    Going Nano in Homer’s land

    45th International Conference on

    Final Program

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  • Micro & Nano EngineeringInternational Conference on 23-26 2019SeptemberRhodes, Greece

    Tab

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    Welcome Address 4

    Committees 5

    General Information 9

    Instructions to Presenters and Chairpersons 14

    Plenary Speakers 15

    Invited Speakers 18

    Rodos Palace Floor Plan 19

    Program at a Glance 20

    Scientific Program (Oral presentations) 23

    Monday 23 - 09 - 2019 24

    Tuesday 24 - 09 - 2019 25

    Wednesday 25 - 09 - 2019 35

    Thursday 26 - 09 - 2019 45

    Scientific Program (Poster Presentations) 55

    Exhibition and Poster Area Plan 86

    Exhibitors’ List 86

    Exhibitors - Sponsors 87

    Authors’ Index 90

    33

  • Micro & Nano EngineeringInternational Conference on 23-26 2019SeptemberRhodes, Greece

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    We welcome you to the Micro and Nano Engineering (MNE) 2019 and in Rhodes, Greece! It will be the 45th Conference in a series that started in Cambridge in 1975, and was held most recently in Vienna (2016), Braga (2017) and Copenhagen (2018). MNE is the core international conference focusing on: a) micro/nanofabrication and manufacturing techniques, and b) application of the fabricated micro/nanostructures, devices and microsystems into electronics, photonics, energy, environment, chemistry and the life sciences.

    This year we have chosen a 3-day conference format that includes 4 parallel sessions A, B, C, D, corresponding to the 4 thematic areas of MNE2019: One parallel session (Α) is dedicated to Nanopatterning, a second (B) is dedicated to Nanofabrication and Functional Nanostructured Surfaces, a third (C) is focusing on Nanoelectronic and other devices, Sensors, and Microsystems, and a forth (D) is focusing on Lab on a Chip with applications in Life Sciences, Chemistry, Food and Environmental safety.

    The program features 10 outstanding Plenary talks including two presentations from the Award Winning MNE2019 fellow and Young Investigator, 13 presentations from world-leading Invited speakers, oral and poster presentations (evaluated by an exceptional International Program Committee), an ancient Greek Music artist and scholar, and a Nanotechnology artist. More specifically, the conference program comprises 174 oral and 367 poster presentations (including the plenary and invited presentations). The distribution among the MNE thematic areas reflects the main interests of our community and the long-term evolution of the field. The thematic area Advanced Nanopatterning represents 21% of all submissions, Nanofabrication for functionality 23%, Nanodevices-MEMS and applications 34%, and Nanofabrication for life science applications 22%.

    MNE poster papers have equal weight to oral presentations. The MNE Committees encourage authors to submit papers (regular, accelerated publications, reviews or news and opinions) to 4 open thematically focused issues of Microelectronic Engineering (MEE by Elsevier) related to the conference topics.

    The conference includes several awards, including the MNE fellow and the Young Investigator Award (Thursday morning), the micrograph contest, and the best poster awards per topic to be presented during the Gala dinner.

    In addition, MNE 2019 offers exciting Tutorials on the fundamentals of Wetting, Nanogenerators, and Innovation Management, designed for scientists, professionals, company engineers, entrepreneurs and graduate students.

    Finally, MNE 2019 hosts 34 exhibitors and is grateful to numerous sponsors which we sincerely acknowledge as the conference is made possible through their strong support.

    Returning to Greece after 11 years, the conference takes place in a majestic island, Rhodes, one of the most popular destinations in Greece, with long multicultural history and rich natural environment. We have implemented a rich social program including welcome reception, visit and Homer singing performance in the Knights Palace on Monday, Beach Party on Tuesday, Gala dinner on Wednesday featuring art and nanotechnology, and Excursion to Lindos on Thursday.

    We warmly thank the numerous authors, delegates, exhibitors and sponsors, program and session chairs, members of the international program committee, guest editors for the Microelectronic Engineering special issues, our students and staff participating, for promising to make this conference a memorable event.

    We hope that you will enjoy the conference and have some time to spend with friends and enjoy yourself. We want to thank all of you for coming, and express our thanks and appreciation for the many exhibitors and sponsors that have helped make all this happen.

    Καλώς ήλθατε!

    On behalf of the MNE2019 Organizing Committee

    Evangelos Gogolides

    Conference Chair

    Angeliki Tserepi

    Program Chair4

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    MNE 2019 LOCAL ORGANIZING COMMITTEE

    Evangelos GogolidesConference Chair

    Angeliki TserepiProgram Chair

    CONFERENCE CO-CHAIRS PER TOPIC

    Lithography / Etching

    Panagiotis Argitis Vassilios Constantoudis Nikos Kehagias George Kokkoris

    Nanofabrication

    Eleni Makarona Nikos Papanikolaou Vasilis Vamvakas Kosmas Ellinas

    Nanodevices / MEMS

    Panagiotis Dimitrakis Nikos Glezos Pascal Normand Christos Tsamis Dimitris Tsoukalas

    Life Sciences Devices

    Panagiota Petrou Kostas Misiakos Katerina Tsougeni

    Exhibition Chairs

    Ioannis Raptis Kosmas Ellinas

    Educational Εvents

    Konstantinos Giannakopoulos

    Workshops

    Nikos Vourdas

    MNE INTERNATIONAL STEERING COMMITTEE

    Jean-Francois de MarneffeIMEC BELGIUM

    Michel DespontCSEM SWITZERLAND

    Zahid DurraniImperial College UK

    Massimo De VittorioUniversity of Salento / IIT ITALY

    Evangelos GogolidesNCSR Demokritos GREECE

    Gabi GrütznerMicroresist Technology GmbH GERMANY

    Yoshihiko HiraiOsaka Prefecture University JAPAN

    Alexander LiddleNIST USA

    Michael MuehlbergerProfactor GmbH AUSTRIA

    Francesc Pérez-MuranoCNM-IMB Barcelona SPAIN

    Urs Staufer (Chair)Delft University of Technology NETHERLANDS

    Stephan Sylvest KellerTechnical University of Denmark DENMARK

    Christophe VieuLAAS-CNRS Toulouse FRANCE

    MNE 2019 INTERNATIONAL ADVISORY COMMITTEE

    Alexandropoulos Dimitris (UPatras)

    Kiziroglou Michael (ATEIT)

    Beltsios Konstantinos (UOI)

    Konstantinidis George (UOC)

    Boudouvis Andreas (NTUA)

    Lee JaeJong (KIMM)

    Bousnaina Ahmed (NEU)

    Lidorikis Eleftherios (UOI)

    Chaniotakis Nikolaos (UOC)

    Logothetidis Stergios (AUTH)

    Chatzichristidi Margarita (UOA)

    Mataras Dimitrios (UPatras)

    Chen Yifang (Fudan Un)

    Nassiopoulou Androula (NCSRD)

    Choi Jin-Woo (LSU)

    Olziersky Antonis (IBM)

    Christopoulos Theodore (UPatras)

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    Panagiotou Kostas (AUTH)

    Chronis Nikos (UMICH)

    Papathanasiou Athanasios (NTUA)

    Economou Anastasios (UOA)

    Patsalas Panos (AUTH)

    Erdmann Andreas (FhG)

    Patsis George (WATU)

    Farmakis Fillippos (DUTH)

    Prodromakis Themis (SOTON)

    Farsari Maria (FORTH)

    Sarantopoulou Evangelia (NHRF)

    Gizeli Electra (FORTH)

    Sarris Theodore (DUTH)

    Kakabakos Sotirios (NCSRD)

    Skarlatos Dimitris (UPatras)

    Kaltsas Grigoris (WATU)

    Speliotis Athanasios (NCSRD)

    Kandyla Maria (NHRF)

    Stratakis Emmanuel (UOC)

    Kazazis Dimitrios (PSI)

    Tagmatarchis Nikos (NHRF)

    Kilikoglou Vassilis (NCSRD)

    Zergioti Ioanna (NTUA)

    Kitsara Maria (UPMC)

    Zuburtikudis Ioannis (TEIK & ADU)

    MNE 2019 INTERNATIONAL PROGRAM COMMITTEE

    Dimitrios Alexandropoulos, University of Patras - GreeceMaan Alkaisi, Institute of Nanoscience and Nanotechnology, University of Canterbury, New ZealandPanagiotis Argitis, NCSR Demokritos - GreeceNaoufal Bahlawane, Luxembourg Institute of Science and Technology (LIST) - LuxembourgJoan Bausells, IMB-CNM (CSIC) - SpainKonstantinos Beltsios, University of Ioannina,- GreeceGérard Benassayag, CEMES/CNRS - FranceAndre Bernard, NTB Buchs- SwitzerlandAndreas Boudouvis, National Technical University of Athens - GreeceMartin Brandl, Danube University Krems - Austria

    Hubert Brueckl, Danube University Krems - AustriaAndrea Cattoni, Centre de Nanosciences et de Nanotechnologies (C2N), CNRS - FranceWen-Huei Chang, Department of Applied Chemistry, National Pingtung University - TaiwanMargarita Chatzichristidi, National and Kapodistrian University of Athens - GreeceHsuen-Li Chen, Department of Materials Science and Engineering National Taiwan University Taipei - TaiwanYong Chen, Ecole Normale Supérieure/CNRS - FranceLei Chen, National Institute of Standards and Technology (NIST) - USARebecca Cheung, University of Edinburgh - United KingdomTheodoros Christopoulos, University of Patras - GreeceJin-Woo Choi, Louisiana State University - USANikos Chronis, UMIC - USAVassilios Constantoudis, Institute of Nanoscience and Nanotechnology, NCSR Demokritos - GreeceMassimo De Vittorio, IIT - ItalyEmiliano Descrovi, Politecnico di Torino - ItalyPanagiotis Dimitrakis, Institute of Nanoscience and Nanotechnology , NCSR ‘Demokritos’ - GreeceZoran Djuric, Serbian Academy of Sciences and Arts - Institute of Technical Sciences - SerbiaDemetre Economou, University of Houston - USAAnastasios Economou, UOA- GreeceKosmas Ellinas, NCSR Demokritos -GreeceAndreas Erdmann, Fraunhofer Institute for Integrated Systems and Device Technology IISB - GermanyPedro Estrela, University of Bath - United KingdomFilippos Farmakis, Electrical and Computer Engineering Dept., Democritus University of Thrace - GreeceMaria Farsari, FORTH - GreeceMonika Fleischer, University of Tuebingen - Germany

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    Susana Freitas, INESC-MN and Instituto Superior Técnico - PortugalHiroshi Fukuda, Hitachi High-Technologies Corporation - JapanStefan Gendt, Imec / KULeuven - BelgiumAnnamari Gerardino, CNR-Institute for Photonics and Nanotechnologies - ItalyGerald Gerlach, Technische Universität Dresden - GermanyKonstantinos Giannakopoulos, Institute of Nanoscience and Nanotechnology, NCSR Demokritos - GreeceEvangelos Gogolides, Institute of Nanoscience and Nanotechnologyh, NCSR Demokritos - GreeceMarkus Graf, Sensirion AG - SwitzerlandCornelis Wouter Hagen, Delft University of Technology - NetherlandsLine Hagner, Technical University of Denmark - DenmarkAnpan Han, DTU Danchip / CEN Technical Unversity of Denmark, DTU - DenmarkHarry Heinzelmann, CSEM - SwitzerlandYoshihiko Hirai, Osaka Prefecture University - JapanJörg Hübner, DTU Danchip / CEN Technical Unversity of Denmark, DTU - DenmarkToshiro Itani, EIDEC, Inc. - JapanGrigoris Kaltsas, Technological Educational Institute (T.E.I) of Athens - GreeceMaria Kandyla, NHRF - GreeceJeroen Kan, Physics department National University Singapore - SingaporeSongphol Kanjanachuchai, Chulalongkorn University - ThailandNikolaos Kehagias, Catalan Institute of Nanoscience and Nanotechnology - SpainStephan Keller, DTU Nanotech - DenmarkBeomjoon Kim, The University of Tokyo - JapanRobert Kirchner, Technische Universität Dresden - GermanyMaria Kitsara, University Pierre and Marie CURIE -FranceMichael Kiziroglou, ATEIT - GreeceArmin Knoll, IBM Research - Zurich - Switzerland

    Fu-Hsiang Ko, Institute Of Nanotechnology, National Chiao Tung University - TaiwanManfred Kohl, Institute of Nanoscience and Nanotechnology, Karlsruhe Institute of Technology - GermanyGeorge Kokkoris, NCSR Demokritos - GreeceMichael Kraft, University of Leuven - BelgiumJaejong Lee, Korea Institute of Machinery and Materials - KoreaThierry Leichle, LAAS-CNRS - FranceJames Liddle, Center for Nanoscale Science and Technology, NIST - USAEleftherios Lidorikis, University of Ioannina - GreeceChun-Hung Lin, National Cheng Kung University - TaiwanAndreu Llobera, Carl Zeiss Vision - SpainHans Loeschner, IMS Nanofabrication AG - AustriaRegina Luttge, Eindhoven University of Technology - NetherlandsEleni Makarona, Institute of Nanoscience nad Nanotechnology, NCSR Demokritos - GreeceJohn Maltabes, Rochester Institute of Technology - USAJean-Francois, imec vzw - BelgiumAdrian Martinez-Rivas, CIC-Instituto Politécnico Nacional (IPN)-Mexico - MexicoKonstantinos Megaridis, University of Illinois at Chicago - USASantos Merino, IK4-TEKNIKER - SpainAthanasios Millionis, ETH Zurich - SwitzerlandFaisal Mohd-Yasin, Queensland Micro- and Nanotechnology Center, Griffith University - AustraliaDespina Moschou, University of Bath - United KingdomXavier Munoz-Berbel, IMB-CNM-CSIC - SpainAndroula Nassiopoulou, NCSR Demokritos -GreecePascal Normand, NCSR Demokritos - GreeceJe Oh, Hanyang University - KoreaAntonis Olziersky, IBM - Switzerland

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  • Micro & Nano EngineeringInternational Conference on 23-26 2019SeptemberRhodes, Greece

    Heidi Ottevaere, Vrije Universiteit Brussel - BelgiumLeonidas Palilis, University of Patras - GreeceNikos Papanikolaou, NCSR Demokritos - GreeceAthanasios Papathanasiou, NTUA - GreeceAntonio Pasquale, SNS - ItalyTung-Ming Pan, Chang Gung University - TaiwanInkyu Park, KAIST - KoreaFrancesc Perez-Murano, IMB-CNM (CSIC) - SpainPanagiota Petrou, NCSR Demokritos - GreeceDavid Peyrade, LTM - CNRS UGA c/o CEA - LETI - MINATEC - FranceFerruccio Pisanello, Istituto Italiano di Tecnologia - ItalyPhilip Prewett, Oxford Scientific Consultants Ltd - NetherlandsChristelle Prinz, Lund University - SwedenIris Prinz, Stratec Consumables GmbH - AustriaJose-Manuel Quero, University of Seville -SpainMuhammad Rafiq, Pakistan Institute of Engineering and Applied Sciences Islamabad Pakistan - PakistanJohn Randall, Zyvex Labs - USAIoannis Raptis, NCSR Demokritos - GreeceMoh’d Rezeq, Khalifa University of Science and Technology - Abu DhabiGemma Rius, IMB-CNM (CSIC) - SpainAlex Robinson, University of Birmingham - United KingdomKurt Ronse, Imec - BelgiumFrancois Rossi, European Commission - ItalyEvangelia Sarantopoulou, NHRF -GreeceSteven Schofield, University College London - United KingdomJian Shi, Ecole Normale Supérieure de Paris - FranceAlejandro Silhanek, Université de Liège - BelgiumUrs Staufer, Delft University of Technology - Netherlands

    Andris Sternberg, Institute of Solid State Physics, University of Latvia - LatviaRafael Taboryski, DTU Nanotech - DenmarkNikos Tagmatarchis, NHRF -GreeceChristos Tsamis, NCSR Demokritos- Insti. of Nanoscience and Nanotechnology - GreeceAngeliki Tserepi, NCSR Demokritos - GreeceKaterina Tsougeni, NCSR Demokritos - GreeceDimitris Tsoukalas, National Technical University of Athens - GreeceYoshi Tsuchiya, University of Southampton - United KingdomVasilis Vamvakas, NCSR Demokritos - GreeceChristophe Vieu, Université de Toulouse, LAAS-CNRS - FranceNikos Vourdas, NCSR Demokritos - GreeceKatia Vutova, Professor, Dr.Sc., PhD, Institute of electronics, Bulgarian Academy of Sciences - BulgariaRemco Wiegerink, MESA+ Institute for Nanotechnology, University of Twente - NetherlandsSandra Wolff, TU Kaiserslautern, Nano Structuring Center - GermanyIoanna Zergioti, NTUA - GreeceCui Zheng, ChinaCezar Zota, IBM Research - SwitzerlandIoannis Zoubourtikoudis, TEIK - Greece

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    CONFERENCE INFORMATION

    MNE 2019 is organized around 4 main topics. Topic A (Advanced Nanopatterning (lithgraphy & etching), Topic B (Nanofabrication / Manufacturing for Functional Structures / Surfaces), Topic C (Micro-Nano Devices and Systems (MEMS/NEMS) for physical applications, electronics, photonics and energy), and topic D (Micro & Nano Devices and Systems for Life Sciences, Chemistry, and Agrofood Sectors). MNE 2019 has attracted approximately 700 participants. The MNE Committees encourage authors to submit papers (regular, accelerated publications, reviews or news and opinions) to 4 open thematically focused issues of Microelectronic Engineering (MEE by Elsevier) related to the conference topics. MEE also sponsors the annual Young Investigator Award, which will be presented at the conference. MNE has two related conferences (EIPBN) in the USA, and (MNC) in Japan.

    STRUCTURE

    The MNE scientific program begins on Tuesday, September 24th, and ends in the afternoon of September 26th. Prior to the Scientific Program, on Monday, September 23rd, there will be three Tutorials for those registered, followed by the Welcome Reception and Opening of the Conference and Exhibition, as well as a visit to the Old Town of Rhodes. The Program features 4 parallel sessions, plenary talks, invited presentations, oral and poster presentations (evaluated by the International Program Committee), and a commercial exhibition. MNE poster papers have equal weight to oral presentations. Two Poster sessions (I, II) will be held respectively on the 24th and the 25th of September.

    CONFERENCE VENUE

    RODOS PALACE HOTEL Iraklidon Avenue (Trianton), Ixia, 85100 Rhodes, Greece, T: +30 22410 97222www.rodos-palace.gr

    REGISTRATION & HOSPITALITY DESK - OPENING HOURS

    The Registration and the Hospitality Desk will be open the following hours:

    Monday, 23rd September 2019 12:00 - 17:00

    Tuesday, 24th September 2019 08:00 - 19:00

    Wednesday, 25th September 2019 08:00 - 18:00

    Thursday, 26th September 2019 08:00 - 18.00

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  • Micro & Nano EngineeringInternational Conference on 23-26 2019SeptemberRhodes, Greece

    ON SITE REGISTRATION FEES

    Standard Attendees € 850

    Student Attendees € 500

    1 day registration * € 450

    Accompanying persons € 285

    Cost of 1 Ttutorial € 100

    Cost of 2 Tutorials € 150

    Registration Fees Include

    Admission to all technical sessions, poster exhibition and industry exhibition

    Conference Material

    Lunch breaks during the conference

    Coffee breaks during the conference

    Welcome reception

    Conference dinner

    * 1 Day pass does not include Conference Dinner

    Accompanying person’s registration fee includes all social events (Welcome reception, Conference dinner and Excursion to Lindos)

    EXHIBITION

    The MNE2019 Commercial Exhibition will commence on Monday, September 23rd, and will be open throughout all Conference days. The Commercial exhibition runs throughout the foyer of Jupiter Hall, Salon De Roses Hall and also the Atrium Lobby. The list of companies can be found in page 87. Detailed information about the companies can be found on the mne2019 conference website by clicking on the logo of each company.The list of companies can be found in page https://www.mne2019.org/confirmed-exhibitors Detailed information about the companies can be found on the mne2019 conference website by clicking on the logo of each company.

    MICROGRAPH CONTEST

    A micrograph contest is organized by the MNE Organizing Committee. Winners will be awarded During the gala dinner. Participants are kindly asked to submit their micrograph until Wednesday at the following web page https://www.zyvexlabs.com/contests/2019-3/. You can vote for the best micrograph using the mobile application. The awards are sponsored by the Micro&Nano Society of Greece (http://micro-nano.gr/)

    POSTER PRESENTATIONS

    There are two poster sessions on Tuesday 24th and Wednesday 25th.Each poster will be displayed during the whole conference from Tuesday 24th until morning of Thursday 26th.The posters are grouped according to the thematic areas A, B, C, and D in the program.Each poster board will have a poster identification number. Please leave them on display and do not block them in order to provide a means for orientation for visitors of the poster session.Posters will be placed on the panels with double sided tape to be supplied by the Congress Secretariat. It is the Presenter’s obligation to put up and also remove the poster from the panel. Posters left after the end of the congress will be destroyed. The Congress Secretariat bares no responsibility for posters left behind.

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    POSTER SESSION I Even Numbers

    Please be at your Poster area, ready for a presentation on Tuesday, September 24th, 14:15 - 16:15

    POSTER SESSION II Odd numbers

    Please be at your Poster area, ready for a presentation on Wednesday, September 25th, 14:15 - 16:15

    BEST POSTER AWARDS

    The MNE conference gives much weight and importance to the poster session. Contributions selected for poster presentation do not have less scientific quality than contributions selected for oral presentation, but their contents are expected to be more suitable for communication in poster form. To highlight the importance of the poster session, awards are given to the best posters.The posters will be evaluated per topic and four Best Poster Awards will be given out, one for each topic:

    Advanced Nanopatterning,

    Nanofabrication for functionality,

    Nanodevices - MEMS and their applications, and

    Lab-on-a-chip /Nanofabrication for life science applications.

    The evaluation will be based on the assessment of the abstract reviewers and by the poster examination from the jury during the conference.Winner announcement: The Best Poster Award Winners will be announced during the conference dinner on September 25th. Poster Awards are sponsored by Raith.

    REHEARSAL AND PRESENTATION LOADING ROOM / TECHNICAL SECRETARIAT / SPEAKER’S READY ROOM

    All speakers are advised to rehearse their presentations prior to presenting them so as to avoid technical difficulties. A Speaker’s Ready room will be available for you opposite to the Congress Secretariat, equipped with all necessary audiovisual aids. You are advised to present your material to the Technical Secretariat at least 2 hours prior to your presentation.

    PUBLICATION OF THE MNE2019 SPECIAL ISSUES

    The MNE2019 Organizing Committee invites MNE2019 participants to submit papers to four (4) OPEN to all and FOCUSED THEMATICALLY special issues of Micro and Nano Engineering Journal (Gold open access mirror journal of Microelectronic Engineering, Elsevier) entitled:

    Nanopatterning 2019

    Nanofabrication 2019

    Devices-MEMS 2019

    Lab-on-Chip 2019

    Please refer to the specific special issue to see the thematic areas and select the issue appropriate for you. Each special issue call is an ‘open call’. This means that, while including selected papers presented at MNE2019, it is also open to other authors of the related scientific community.

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  • Micro & Nano EngineeringInternational Conference on 23-26 2019SeptemberRhodes, Greece

    Manuscript submission deadline: October 21st 2019

    Your paper and associated supplementary information should comprise a complete, novel and full description of your work. Manuscripts of the special issue will be submitted and reviewed via the online Elsevier Editorial System (EES). At submission, you are presented with a choice between the MEE and MNE journals. You will then receive a confirmation letter on the choice you have made. You will also have a chance to change your choice at revision. To be part of MNE2019 special issues you need to choose MNE journal. Articles will then be processed and published with the standard Elsevier publishing timeline for each individual manuscript following acceptance. Accepted papers will be freely available on ScienceDirect as OPEN ACCESS papers WITHOUT any article processing charges. This is a SPECIAL agreement between MNE2019 conference and MNE journal.

    If you choose MEE instead of MNE journal at submission, your manuscript will be treated as a regular paper and will no longer be part of MNE special Issues, although it will still be handled by the same guest editors with the same procedure. Accepted papers in MEE will be published under subscription model only.

    SOCIAL EVENTS PROGRAM

    WELCOME RECEPTION The Conference Welcome Reception will take place on Monday, September 23rd, at 16:30 throughout all Exhibition Halls.

    WELCOME VISIT TO THE OLD TOWN Following the Welcome Reception, a Welcome visit to the Old Town of Rhodes and to the Knight’s Palace, is a must. Within this medieval town you will be impressed by the Cultural welcome event: The sound of Homer’s singing.

    BEACH PARTY ON TUESDAY, SEPTEMBER 24th The Organizing Committee will host a Beach Party on the Beach area in front of Rodos Palace. Please contact the Congress Secretariat for further information.

    GALA DINNER ON WEDNESDAY, SEPTEMBER 25th The Conference Official Gala Dinner will be hosted at the SUPER DOME POOL BAR in Rodos Palace Hotel on Wednesday, September 25th, at 19:30. Dress: informal

    EXCURSION TO LINDOS ON THURSDAY, SEPTEMBER 26th The buses will depart right after the end of the Scientific Program just outside the Reception Area of Rodos Palace Hotel. Lindos is an archaeological site, a fishing village and a former municipality on the island of Rhodes. It lies on the east coast of the island. It is about 50 km south of the town of Rhodes and its fine beaches make it a popular tourist and holiday destination. Lindos is situated in a large bay and faces the fishing village and small resort of Charaki. Be fast to be able to see the sunset at Lindos. Please declare your participation in the event at the registration desk in order to arrange for the number of buses.

    OFFICIAL LANGUAGE

    English will be the official language of the Conference and no simultaneous translation will be provided.

    CERTIFICATE OF ATTENDANCE

    Certificates will be provided after the completion of the Scientific Program.

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    BADGE

    Please wear your name badge at all times. Entrance to the Conference area will only be permitted to guests wearing their name badge.

    CURRENCY

    Greece’s monetary unit is the Euro. No other currency is accepted and it is best to exchange dollars or other currency at a bank. The exchange rates are all the same throughout the country and you exchange money at a bank or official exchange shop where you will get the best running rates. Banks are open from 08:00 AM until 2:00 PM.

    INSURANCE

    We cannot accept responsibility for any personal loss, accidents or damages to participants and/or accompanying persons. Participants are strongly advised to obtain personal insurance to cover any eventuality that may occur during the Congress.

    TRANSPORTATION

    Rhodes is only a 40min flight from Athens International Airport. Rhodes International Airport, “Diagoras”, is located, 15 km away (20min by taxi from the town center and the convention center. Public transportation is very well organized with frequent bus service. There are regular international flights as well as charter flights from most major cities worldwide.

    WEATHER

    Rhodes in September is still very pleasant and warm, although the temperatures are starting to cool down a bit. The average daily temperature is 25°C. September enjoys an average of 11 hours of sunshine per day.

    PASSPORTS - VISAS

    You will need valid, up-to-date passport and a Schengen visa, depending on your nationality. Regarding Schengen visa requirements, please visit the website of the Hellenic Ministry of Foreign Affairs at the following link: https:// www.mfa.gr/en/visas/visas-for-foreignerstraveling-togreece/countries-requiring-or-notrequiring-visa.html in order to find out whether you need a Schengen visa to visit Greece.

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    CONFERENCE SECRETARIAT

    Valestra 2 Str., kallithea, Athens Greece

    T: +30 210 3250260, F: +30 2310 247746

    E: [email protected], W: www.globalevents.gr

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  • Micro & Nano EngineeringInternational Conference on 23-26 2019SeptemberRhodes, Greece

    OPENING HOURS SPEAKERS’ PREVIEW CENTER

    Monday, 23rd September 2019 12:00 - 18:30

    Tuesday, 24th September 2019 08:00 – 19:00

    Wednesday, 25th September 2019 08:00 – 19:00

    Thursday, 26th September 2019 08:00 - 17:00

    IF YOU ARE A CHAIRPERSON

    Please locate your session room in due time. Please be at your session room at least 15 minutes prior to the start of the session. We may remind you that speakers need to strictly observe the time schedule. Before the session starts, please check that all presenters are present. Before each presentation, please introduce the presenter by stating his/her name and affiliation.

    INSTRUCTIONS FOR ORAL PRESENTATIONS

    Plenary speakers have 35 minutes plus 5-10 minutes of questions

    Iinvited speakers have 25 minutes plus 5 minutes of questions

    Contributed talks have 15 minutes. This includes approximately 2-3 min for questions. Therefore, time your presentation to 12-13 minutes.

    Please prepare your presentation with aspect ratio 16:9.

    Computers ARE AVAILABLE at the conference rooms, with the following technical characteristics:Hardware: Processor: i3 or i5 4gen or 8gen, RAM 4-8 GB, Hard Disk: SSD 240GB TFT 15 -̈17¨PC Remote ControlMAC: Retina, early 2015, i5 2,7GHz, RAM 8GBF or those having a Macintosh, a technician will help you to connect and use your laptop.Software: Windows 10, Office 365

    Bring your presentation in a memory stick. You do NOT need to bring a laptop. If you do, you should go in the conference room and with the help of the technician see how to connect your laptop. Try it the previous day if possible. Rehearsal and presentation loading room: You are advised to try your presentation and load it with the help of the technicians in the computer room located at the Convention Pre Function Area of the Rodos Palace Hotel. Presentations should be loaded until the previous session, or as early as possible. Please allow enough time before your session, especially if you have videos in your presentation.

    INSTRUCTIONS FOR POSTER PRESENTATIONS

    Recommended Poster Size is 120 cm high x 80 cm wide. (The poster board is 200 cm x 95 cm).Posters will be hanged using double sided tapes, to be supplied by the Congress Secretariat.Even Poster Numbers: Poster Session time: Tuesday September 24th at 14:15 - 16:15Odd Poster Numbers: Poster Session time: Wednesday September 25th at 14:15 - 16:15Set up time: Monday 23/09 from 16:00 to 18:30 or Tuesday September 25th, from 08:30 to 13:00 Take down time: Thursday 26/9 from 12:00 until 16:00Be in front of your poster session on the appropriate day based on your poster number shown in the conference program.*Posters left on the poster boards after the take down time, will be removed by the conference personnel.Inst

    ruct

    ions

    to P

    rese

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    nd

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    rpers

    ons

    14

  • NEM20

    19International Conference on

    Ple

    nar

    y S

    pea

    kers

    Tuesday, 24th September 2019Dimos PoulikakosHead of Energy Science Center (ESC), ETH Zurich, Institut für Energietechnik, Switzerland

    How to arrest and transport biological nano-objects one at a time: Nanovalving of individual Viruses and Macromolecules in liquids

    09:30- 10:15 Jupiter Hall

    Tuesday, 24th September 2019Shoji TakeuchiTokyo University, Japan

    Emerging Technologies for Biohybrid Devices

    16:15- 17:00 Jupiter Hall

    Tuesday, 24th September 2019Fotis FilippopoulosCurious Inc. and International Hellenic Univ., Greece

    Innovation Mindset: The top 10 critical insights every technology entrepreneur should know

    17:00- 17:45 Jupiter Hall

    Tuesday, 24th September 2019

    Yan BorodovskyFormer Intel Senior Fellow, USA

    Moore’s Law - Past, Present and Future

    08:45-09:30 Jupiter Hall

    15

  • Micro & Nano EngineeringInternational Conference on 23-26 2019SeptemberRhodes, Greece

    Ple

    nar

    y S

    pea

    kers

    Wednesday, 25th September 2019

    Emmanuel DelamarcheIBM Research Zurich, Switzerland

    Intelligent and precise flow control for next-generation microfluidic POC diagnostics

    08:45- 09:30 Jupiter Hall

    Wednesday, 25th September 2019

    Michal LipsonEugene Higgins Professor, Columbia University, USA

    The Revolution of Silicon Photonics

    09:30- 10:15 Jupiter Hall

    Wednesday, 25th September 2019

    Zhong Lin WangHightower Chair, Georgia Tech, USA

    Nanogenerators for self-powered systems and sensors

    16:15- 17:00 Jupiter Hall

    16

  • NEM20

    19International Conference on

    Thursday, 26th September 2019

    The MNE/MEE Elsevier Journal Young Investigator Award 2019Yuksel TemizΙΒΜ Research-Zurich

    The Young Investigator Award is sponsored by Elsevier for the Journals MNE (open access) and MEE (subscription journal)

    09:30- 10:00 Jupiter Hall

    Ple

    nar

    y S

    pea

    kers

    Thursday, 26th September 2019

    George MalliarasPrince Philip Professor of Technology, University of Cambridge, UK

    New Materials and Devices for Interfacing with the Brain

    16:35- 17:20 Jupiter Hall

    Thursday, 26th September 2019

    MNE Fellow 2019Hella-Christin ScheerUniversity of Wuppertal, Germany

    More than nanoimprint - replication and combination

    08:45- 09:30 Jupiter Hall

    17

  • Micro & Nano EngineeringInternational Conference on 23-26 2019SeptemberRhodes, Greece

    Invi

    ted

    Sp

    eake

    rs

    Tuesday, 24th September 2019 10:45- 11:15, Jupiter Hall

    Thomas Anthopoulos, King Abdullah University of Science and Technology (KAUST) and KAUST Solar Centre, Saudi Arabia

    Flexible nano-electronics via large-area manufacturing paradigms

    Tuesday, 24th September 2019 11:15- 11:45, Athena Hall

    Nicolas Voelcker, Monash University, Melbourne Center for Nanofabrication, Australia

    Nanomedicine with Silicon Nanostructures

    Tuesday, 24th September 2019 13:00- 13:30, Delphi Hall

    Alidad Amirfazli, York University, Canada

    What can and cannot be done with Superhydrophobic, or Omniphobic surfaces?

    Tuesday, 24th September 2019 13:30- 14:00, Nefeli Hall

    Michal Danek, Lam Research Corporation, USA

    Applications of Atomic Layer Deposition (ALD) and Atomic Layer Etch (ALE) in Advanced Semiconductor Manufacturing

    Tuesday, 24th September 2019 18:00- 18:30, Jupiter Hall

    Zheng Cui, Suzhou Institute of Nanotechnology, Chinese Academy of Sciences, China

    Printed flexible electronics for wearable applications Semiconductor Manufacturing

    Wednesday, 25th September 2019 10:45- 11:15, Delphi Hall

    Constantine Megaridis, University of Illinois, Chicago, United States

    Wettability-Patterned Surfaces for Pumpless Handling of Fluid Microvolumes: Lab-on-Chip and Heat Transfer Applications

    Monday, 23th September 2019

    Chrēstos Terzēs, Ancient Music ArtistReconstructing the sound of Homeric singing (Cultural welcome event to be presented at the Knight’s palace)

    Wednesday, 25th September 2019 11:30- 12:00, Nefeli Hall

    Maria Farsari, Foundation for Research & Technology Hellas, Greece

    Laser-based 3D printing at the nanoscale

    Wednesday, 25th September 2019 11:30- 12:00, Athena Hall

    Thomas Laurell, Lund University, Sweden

    Acoustofluidics - A sound approach to liquid biopsies

    Wednesday, 25th September 2019 13:00- 13:30, Delphi Hall

    Tekla Tammelin, VTT Technical Research Center, Finland

    Patterned Structures and Nanolaminate Hybrid Architectures from Plant-sourced Nanocellulose for Optoelectronics

    Wednesday, 25th September 2019 13:30- 14:00, Athena Hall

    José Antonio Plaza, Instituto de Microelectrónica de Barcelona-CNM, Spain

    From Cells-on-Chip to Chips-in-Cell: our fantastic “voyage”

    Wednesday, 25th September 2019

    Ioannis Michaloudis, Nanotechnology Artist

    “ - Sky am”: mythologies & methodologies of a nanoartist (to be presented during the conference dinner)

    Thursday, 26th September 2019 10:30- 11:00, Jupiter Hall

    Thomas Ernst, CEA-LETI, Grenoble, France

    Merging Computing and Sensing for Low power and Sustainable Edge Applications

    Thursday, 26th September 2019 11:15- 11:45, Athena Hall

    Sunggook Park, Louisiana State University, USA

    Design and Fabrication of Plastic Nanofluidic Devices for Single Molecule Detection

    Thursday, 26th September 2019 12:45- 13:15, Nefeli Hall

    John Maltabes, Applied Materials, Germany

    The path to Roll to Roll Imprint Technology, an Enabling Technology

    Thursday, 26th September 2019 11:00- 11:30, Delphi Hall

    Martin Lopez, International Iberian Nanotechnology Laboratory-INL, Portugal

    Biomimetics of photosynthetic photonic structures. How natural light harvesting could become an inspiration for nanotechnology

    18

  • NEM20

    19International Conference on

    Rod

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    19

  • Micro & Nano EngineeringInternational Conference on 23-26 2019SeptemberRhodes, Greece

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    20

  • NEM20

    19International Conference on

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  • Micro & Nano EngineeringInternational Conference on 23-26 2019SeptemberRhodes, Greece

    22

  • EM

    2019

    International Conference on

    N

    ScientificProgram

    Note: Papers are listed by Topic and by session.

    Short abstracts are available on the mobile application of the conference.

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  • Mic

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