Associated with the new company IONFLY Vacuum and ......2017/01/24 · e-mail: [email protected] Secondary Scientific Division Area ex-CAV TO-MI - Località BARAGGIN - Chivasso

Gianfranco Sabbatella R&D Engineer

Aniello Vitulano CEO (Chief Executive Officer) and LEAR (Legal Entity Appointed Rappresentative)

Headquarters & Laboratories Viale Anchise, 24/25 (Loc. Colli di Enea) 00040 Pomezia – Roma, Italy

Tel (+39) 06 91384427 Fax (+39) 06 91250033 e-mail: [email protected]

Secondary Scientific Division

Area ex-CAV TO-MI - Località BARAGGIN - Chivasso 10034 (TO), Italy Tel (+39) 011 9103740 Fax. (+39) 011 9143761

Associated with the new company

IONFLY Vacuum and Plasma Technology

IONVAC PROCESS designs, develops and fabricates Ultra High Vacuum Equipments, Plasma Systems, Thin Film and Coating Technology, UAV Flight exemplars for Research and Science Applications

Physical Vapour Deposition (PVD) Pulsed Laser Deposition (PLD)

RF Magnetron and DC sputtering

Electron Beam Evaporation

Chemical Vapour Deposition (CVD) and Plasma Technologies MicroWave CVD

Plasma Enhanced CVD (PECVD)

R.I.E. (Reactive Ion Etching)

Plasma Technology

Pumping systems for HV and UHV Materials Treatments and Characterization systems High power Electronics Areonautical Applications

Know-how & Experience The company “know-how” allows the production of many customized system to satisfy

different needs and requirements of semiconductors industry and research organizations

24/01/2017 Madrid, AMADEUS Kick-off Meeting

Some produced equipment

Our systems are equipped with up-to-date commercial or customized monitoring systems to guarantee the best process control needed for requested application

DC/RF Sputtering Magnetron source Set Up for plasma testing

Microwave CVD for diamond deposition

PE-CVD for food sterilization

Three chamber plasma sputtering load lock PE-CVD

Know-how & Experience

Microwave CVD and PECVD with load lock


Gas scrabber systems Mass flow control systems

Radiative Heater Joule Heater

Solar test platform


• DC and RF Bias Voltage Substrates • Cryogenic Systems • Sun tracking system • Heaters

• Gas Processing • High Purity Techonology • Mass spectrometry for residual gas

analysis

Inductive high temperature Heater


Process computer interface

MO-CVD for Ge doping

Electron beam and Joule source

• Hardware and Software Automatic Management for safety systems and processes (LabView or PLC Siemens)

• High power electronics systems • Absolute and RelativeVacuum Sensors and Gauges • Characterization of Fluxes in sonic and supersonic

regime


Cavitation chamber e-beam evaporation systems


IONVAC PROCESS systems are developed in house by means of up to date Computer Aided Design (CAD) software like Autodesk Inventor® and Simulation platforms like Comsol Multiphysics® The expertise of design and project application oriented vacuum systems leads to a strong relationship with the final user During experimental research and industrial development projects, simulation activities play a lead role concerning investigation of suitable materials and techniques needings. Mechanical and temperature induced stress is typically simulated during the design phases

From CAD to Simulation to Fabrication


IONVAC collaborated with many groups in the technology contest. Many financed projects involved IONVAC. Some of these collaborations are still ongoing: CNR, INFN, Politecnico di Torino, Tor Vergata Roma Tre and La Sapienza Rome Universities, Padova University, Lecce University , ENEA. IONVAC PROCESS Srl gives a strong effort in partecipating succesfully to research projects and collaborations. In the last decade, the company shares its interests, as a partner or subcontractor, in many projects: ELECTRONCHROMICS (financed by FinPiemonte) with Politecnico di Torino (2010)

ELECTROFLEX (financed by Filas SpA) with La Sapienza University (2011)

DIAMETRO (financed by Filas SpA) with RomaTre University (2012)

Ephetsus with CNR (2013)

ProME3ThE2US2 European project (FET FP7, GA 308975) with CNR (2013)

Research and Technological Partnerships

We strongly believe in collaboration as a great tool for know how increasing!


IONVAC ROLE IN AMADEUS

IONVAC will contribute to the project activities by : • Developing the technology of microspacers for

establishing inter-electrode gaps <2 μm

• Upgrading the VTEC system useful for thermionic characterization

• Design and development of precision components

and mechanics equipments for the proof-of-concept fabrication and demonstration


Fabrication of deposition system for thermal insulating materials

A customized and specific deposition system was realized and it is now fully functional.

WP3 Deposition of thermal and electrical insulating microspacers

Monitoring tools:

Mass spectrometry for residual gas analysis Langmuir probe Quartz microbalance Bias voltage control Optical analysis


Preliminary tests on flat surfaces: silicon Photolithographic technique: Application of the mask:

columns with 5 μm diameter, 25 μm distance

Patterning BEFORE lift-off process

WP3 Integration of inter-electrode spacers on anode (in collaboration with CNR)

Patterning AFTER lift-off process

Array of alumina Microstructure SEM

Single alumina Microstructures SEM

Array of alumina Microstructure AFM

Zirconium and Aluminium Oxides Thin films

Electrical Resistivity measurements: >1014 Ohm∙cm


Once optimized, they will be directly placed on the defined collector developed by CNR and UPM

WP3 Integration of inter-electrode spacers on anode

Microspacer made of alumina and/or zirconia will be developed and optimized on test substrates (graphene/quartz, alkali metal coated refractory metal

and ITO) and then characterized thermally and mechanically


The VTEC useful for thermionic characterization up to 1000 °C, will be upgraded to reach emitter temperatures of up to 2000 °C under high-vacuum conditions.

A possible strategy for the enhanced heating system: using a continous-wave laser

WP3/WP4 Thermionic characterization

Final experiments of TPV cells under high temperature emitter illumination will be carried out in the Vacuum Temperature Emitter Characterization (VTEC)

External (left) and internal (right) view of the VTEC setup.


WP4 Fabrication of High-Temperature Conversion Modules

Fabrication of an innovative vacuum enclosure and ancapsulation for a Concentrated Solar Converter based on Thermionic/Thermoelectric stages, able to work in a static vacuum condition.

1. Design and fabrication technology equipment employable for the fabrication and testing of the vacuum enclosure of the finalized device

2. Development of Precision mechanics equipment for the fabrication of mechanical and vacuum components for the

thermionic-photovoltaic proof-of-concept demonstration

Previous equipment for testing final devices: Versatile systems that take into account all the possible issues to overcome during the experiments


To find the best experimental condition: optimal distance between anode and cathode in thermionic devices

Simulation of the device developed in Prometheus


Thank you for the Attention

Documents

Associated with the new company IONFLY Vacuum and ......2017/01/24 · e-mail: [email protected] Secondary Scientific Division Area ex-CAV TO-MI - Località BARAGGIN - Chivasso