Welcome to the webinar

'Equipment for efficient production of integrated photonics’

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Welcome to the webinar

'Equipment for efficient production of integrated photonics’

• The webinar will take around 1hr and 15 minutes• You can ask your questions anytime • Please use the public chat for questions• Our moderators make sure the presenter gets the

questions• The webinar will be recorded

Announcements

• Introduction PhotonDelta & Integrated photonics business and market opportunities

• Main conclusions report• Next steps: follow-up in smaller groups per subdomain• Q&A

Agenda

PhotonDeltaThe Integrated Photonics Industry Builder and Accelerator

Giuseppe Coppola

Chief Strategy and Business Development Officer

PhotonDelta

Integrated Photonics: A highly promising key enabling technology…

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Integration of multiple photonics functions on a Photonic Integrated Circuit (PIC) fabricated using automated wafer-scale generic integration technology over e.g. silicon, silica or InP substrates

Significant reduction* of size and weight, manufacturing costs

Improved* thermal/vibration stability, reliability

*compared to assembling and packaging of discrete photonics components and (bulk) optics

October 15, 2020PhotonDelta confidential, G.Coppola,

…with a very promising future !

Single application/market (optical transceivers for datacenters) dominated by very few players with a full in-house verticalized supply-chain

Relatively limited number of scale-ups addressing different products and markets

TodayFully established de-verticalized industry1

Large number of fabless components2 suppliers with diverse and competitive offerings across many applications and market

a supply chain with a relatively limited number of specialized (e.g. per material/process technology) key players in the front and back-end manufacturing (and related production equipment)

2030+ vision

1Drivers: LowerCoO for new customers, higher reliability, capacity, performances through critical mass and focus 2PICs and/or PICs-based modules/sub-systems

PhotonDelta confidential, G.Coppola, October 15, 20207

A large number of disruptive high-impact solutions across multiple markets !

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Optical transceivers for ultra-high data transfer for short-haul/metro telecom fiber-based access networks/datacenters

Optical transceivers and components for high-throughput, secure, (long-haul) free-space communications links

Optical-domain RF beamforming and optical phased arrays modules for satellite, mobile and wireless communications

Optical modules and components for low-cost (portable) Optical Coherence Tomography (OCT) devices for point-of-care/home diagnostics and monitoring

Low cost label-free biosensing disposables/readers for point-of-care diagnostics

(Fiber-based) Sensor systems and components for multi-point multi-parameter guidance and monitoring

Optical front-end modules and key components (e.g. tunablelasers, optical phased arrays) for coherent solid-state LIDARs in decision support/ autonomous control systems

(Fiber-based) Sensor systems for real-time accurate distributed structural health monitoring in (large)/high-duty objects and structures

NIR spectral sensing modules and components for analysis of fruit and vegetables nutrients, taste and structure insights

VIS/UV absorption and Raman spectroscopy sensing modules for e.g. nitrate/phosphate monitoring in water and soil

Continuum-of-Care Infrastructure& Transportation Food and Agriculture

SENSING

Datacom and Telecom

COMMUNICATIONS

Highest Volume Markets in the Long-term

PhotonDelta confidential, G.Coppola, October 15, 2020

Opportunity is now !

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Integrated Photonics manufacturing industry has been maturing and has recently attracted investments to further maturing its process and scale-up its capacity by leveraging traction from a limited number of pioneering fabless component vendors

Going forward a far wider (and increasing over time) number of fabless components* vendors is expected to appear on the scene to further leverage the established supply chain and address the wide number of opportunities !* PICs and/or PICs-based modules/sub-systems

October 15, 2020PhotonDelta confidential, G.Coppola,

PhotonDeltaThe Integrated Photonics Industry Builder and Accelerator

10 PhotonDelta confidential, G.Coppola, October 15, 2020

A lean organization staffed with experienced and passionate professionals committed to drive this industry growth- designing a multi-faceted industry growth strategy- orchestrating its execution leveraging a high number of partners and a wide (global) network- leveraging 60MEur funds (from Dutch Public investors) for equity/loan investments in start-ups/scale-ups/SMEs

We build and accelerate new integrated photonics businesses through a pragmatic

program tailored to their needs

Our mission

Develop and build by 2026 > 25 companies collectively generating > 1 BEur Turnover

and employing > 4000 FTEs

Our goal

Value addProgram lines

Access to Market Build/Accelerateconnection to early adopters

Access to Integrated

Photonics Supply Chain and R&D

Build/Accelerate/de-risk TTM/scalability of MVPs

Access to Strategy Build/Accelerate/de-risk/validatepropositions

Access to Funds Execute/Accelerate plans

The PhotonDelta supply chain and component vendors partners footprint built till now…

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Integrated PhotonicsComponents

suppliers

Catalogue/custom components

Integrated PhotonicsDesign & Development

services

IP/Know-how

System Integrators/

Solution Providers

PICs fabricationservices unpackaged

PICs

PICsPackaging, Assembly,

Testing manufacturing services

Components

PICsAssembling/PackagingProcess technology/

R&AD services

PICsAssembling/Packaging

Equipment Manufacturers

PICs fabricationprocess technology/R&AD

services

Production Equipment

PICsFabrication

Equipment Manufacturers

Integrated PhotonicsR&AD services

Production Equipment

IP/Know-how

IP/Know-how

IP/Know-how

October 15, 2020PhotonDelta confidential, G.Coppola,

1PICs and/or PICs-based modules/sub-systems

… and our key focus going forward !

12

Integrated PhotonicsComponents

suppliers

Catalogue/custom components

Integrated PhotonicsDesign & Development

services

IP/Know-how

System Integrators/

Solution Providers

PICs fabricationservices unpackaged

PICs

PICsPackaging, Assembly,

Testing manufacturing services

Components

PICsAssembling/PackagingProcess technology/

R&AD services

PICsAssembling/Packaging

Equipment Manufacturers

PICs fabricationprocess technology/R&AD

services

Production Equipment

PICsFabrication

Equipment Manufacturers

Integrated PhotonicsR&AD services

Production Equipment

IP/Know-how

IP/Know-how

IP/Know-how

October 15, 2020PhotonDelta confidential, G.Coppola,

grow the number of fabless Integrated Photonics components supplies leveraging our supply chain

PhotonDelta supply chain partners technology leadershipMonolithically integrated InP and (hybrid) SiN-based technology platforms…

InP excels at light generation, amplification, modulation and detection in the IR region

SiN excels at passive light processing in the visible, NIR and IR range thanks to a.o. its very low channel attenuation, adjustable polarization, small bend radii

High performance low-cost photonics System-on-Chip devices in this range via effective monolithicintegration of multiple passive components

High performance photonics Systems-in-Packagedevices in this range via scalable (wafer-scale) hybridintegration with active components (e.g. InP, GaNi, GaAs based PICs)

High performance low-cost photonics System-on-Chip devices in this range via effective monolithicintegration of multiple active and passivecomponents

PhotonDelta supply chain partners technology leadership...matured in state-of-the-art front/back-end volume manufacturing capabilities

PICs volume fabrication InP: Standardized industrial generic integration process at 1550nm

and (partly) at 1310nm SiN/TriPleXTM: Applications in visible light, IR, NIR, very low

waveguide and coupling loss, high optical power Both accessible via dedicated or Multi Project Wafer (MPW) runs Photonic Design Kits (PDK) in 3rd parties design/simulation software Design on functional level by using building block approach

PICs/Modules Testing, Assembling and Packaging volume manufacturing Generic and custom (hybrid) integration/packaging for InP, SoI and

SiN PICs and modules Semi & fully automated packaging equipment Dedicated and experienced teams

Need for dedicated integrated photonics manufacturing equipment

Both for front-end and back-end manufacturing

PhotonDelta confidential, G.Coppola, October 15, 202015

Complementing, augmenting, automating current production capabilities e.g. handling, testing, assembling, packaging

Leading to improved outcomes e.g. quality (reliability/yield), unit production duration (TAKT time)

30 Sep 2020

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Giuseppe CoppolaChief Strategy and Business Development OfficerPhotonDeltaHigh Tech Campus 415656AE, Eindhoven, the NetherlandsMobile: +31 6 12371923eMail: giuseppe@photondelta.comWeb: www.photondelta.comLinkedIn: https://www.linkedin.com/in/giuseppecoppola/

Survey on production technology forintegrated photonics

Report and next stepsAugust 20th 2020

Ton PeijnenburgBen van der Zon

• TU/e HTSC has been considering equipment for integrated photonics;• It all really started with the workshop on production technology for integrated

photonics on December 3rd 2019 in Papendal during the Photon Delta day.• The purpose was to involve the Dutch equipment designers and builders in the

creation of accurate, reliable, productive, and efficient production equipment for integrated photonics to gear up for the future success of integrated photonics;

• Pitches from EFFECT Photonics, Smart Photonics and LyoniX presented their (future) needs and wishes on production equipment;

• Discussions in small groups created the awareness with the equipment providers;

• In-depth interviews with representatives from the photonics world led to a concise report on the equipment needs and sketches a way forward.

Recap

A crisp overview of the need in production technology and equipment needed for a profitable future photonic business,

based on:

• the inputs from the 3 December 2020 workshop, and

• in-depth interviews with Boudewijn Docter(Effect Photonics), Pim Kat (Technobis), René Heideman (LioniX), Albert Hasper (PHIX), Wilhelm Claussen (Smart Photonics) and Carol de Vries (Photon Delta).

The report

Perceived needs – front-end• On chip test structures• Material/wafer/die handling• Standardisation of transport/storage means• Defect mechanism determination and mitigation (extensive

process knowledge) for InP chip production • Optimised photolithography tools (lower costs lower volume)• Novel thin film technologies (thick oxide layers, anti-reflective

coatings and barrier coatings)

Perceived needs – back-end• Fibre alignment and assembly• Active (multi-fibre) alignment• Chip design for fibre connection• Thermally stable fibre fixation• Sub-micron die placement• Product handling

Perceived needs – metrology• On-chip/wafer electrical and optical probing• Defect mechanism determination and mitigation (extensive

process knowledge) for InP chip production • On-chip test structures• Automated binning support

Perceived needs – industry 4.0• Material/wafer/die handling• Standardisation of transport/storage means• Production chain logistics (like IDRS Factory Integration and

Industry 4.0 initiatives)

• Volume manufacturing at high yield and constant quality

• Key application to drive volume need

• Critical process steps challenges• Front-end – patterning e.g. waveguide roughness• Back-end – laser mirrors, packaging multi-chip hybrids,

fiber interconnect

• Product independency

Key aspects and drivers• Monitored precision positioning and

manipulation• Precision mechanics and -mechatronics• Specific environments for thin film

processes• Various inspection technologies• Precision opto-mechanics and opto-

mechatronics• Clean

• Presently, business cases are too thin for semicon OEMs to justify major equipment development efforts for high volume production;

• 1st and 2nd tier equipment developers and suppliers typically do not invest in their own product development;

while on the other hand…

• A large national and global market is expected for OEMs, 1st and 2nd tier suppliers in production equipment for integrated photonics;

• So: supplemental financing needs to be secured for innovative equipment development projects initiated under the current initiative consortia

(in kind model, institutional, regional, national, and European funding possibilities)

Business case and financing

Equipment requirements

Carol de Vries

• The market for photonics is emerging, global and more thanonly integrated photonics• Ficontec alone claims to have sold 200 machines in 2029• Our ecosystem is advanced and accessible, this supports market entry

• Requirements differ, we propose follow up in clusters• Front end processing (wafer level)• Back end ( packaging & assembly) and hybrids• Metrology ( front and backend)• Industry 4.0 , interfaces , data exchange

Equipment requirements; follow up

• Front end (wafer level)• Same tools, different wafers, different processes (exception MOCVD)• Wafer sizes 75mm to 200mm , general trend up, breakage issues• Even with fast growth, no need for 200 wph, more like 20 • Need for “slower” lower cost tools to enable growth

• Back end ( represents up to 80% of cost)• Complex multi die assembly, no standard packages • Multiple technologies, temperature control• Very accurate placement (X-Y-Z),up to 0.1 micron• Fiber/optical coupling and edge emitters are challenges• High frequencies drive new assembly needs ( e.g. bumping)

Key tool requirements Photonics

Source Technobis)

• Metrology ( front and back end)• Key for process control and yield improvement• Edge emitters make testing more complicated• Combined measurement of electrical and optical parameters• Tests can be very time consuming, need to speed up, automate

• Industry 4.0• Prepare for automation requirements• Interface and data exchange standards ( in production, with

customers)

Key tool requirements photonics

• We want to bring together equipment manufacturers , industry experts and users in 4 workshops

• We see serious interest in all 4 themes• Due to Covid-19 it will be hard to organize physical meetings• We will plan virtual workshops now, invitations will be sent

out coming week, to be held next 2-3 weeks • Each session will be interactive and moderated

Next steps

Thank you for participating

Please pre-register for our follow up workshops via:

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