W. et al. Tikka Kato et al. Unterberger Park et al. Carley Matsubara et al. Lee Bradley et al. Park et al. Schmidhammer et al. Ginsburg et al. Korden et al. Mikulin et al. Bouche et

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  • USOO9385684B2

    (12) United States Patent (10) Patent No.: US 9,385,684 B2 Nikkel et al. (45) Date of Patent: Jul. 5, 2016

    (54) ACOUSTIC RESONATOR HAVING GUARD 4,933,743 A 6, 1990 Thomas et al. RING 5,006,478 A 4/1991 Kobayashi et al.

    5,087,959 A 2f1992 Omori et al. 5,587,620 A 12/1996 Ruby et al.

    (71) Applicant: Avago Technologies General IP 5,698,928 A 12, 1997 R. et al. (Singapore) Pte. Ltd., Singapore (SG) 5,817.446 A 10/1998 Lammert

    5,825,092 A 10/1998 Eelgado et al. (72) Inventors: Phil Nikkel, Loveland, CO (US); Chris 5,873,153 A 2/1999 Ruby et al.

    Feng, Fort Collins, CO (US); Dariusz 6,107,721 A ck 8, 2000 Lakin Burak, Fort Collins, CO (US); John 6.424,237 B1 * 7/2002 Ruby et al. .................... 333,187

    s s s 6,507.983 B1 1/2003 Ruby et al. Choy, Westminster, CO (US) 6,607.934 B2 8/2003 Chang et al.

    7,199,683 B2 4/2007 Thalhammer et al. (73) Assignee: Avago Technologies General IP 7,280,007 B2 10/2007 Feng et al.

    (Singapore) Pte. Ltd., Singapore (SG) 7,345,410 B2 3/2008 Grannen et al. 7,358,831 B2 4/2008 Larson, III et al.

    (*) Notice: Subject to any disclaimer, the term of this (Continued) patent is extended or adjusted under 35 U.S.C. 154(b) by 637 days. FOREIGN PATENT DOCUMENTS

    (21) Appl. No.: 13/658,024 CN 1.0117O303 4/2008 EP O88O227 11, 1998

    (22) Filed: Oct. 23, 2012 (Continued)

    (65) Prior Publication Data OTHER PUBLICATIONS

    US 2014/0111288A1 Apr. 24, 2014 Co-pending U.S. Appl. No. 13/101,376, filed May 5, 2011. (Continued)

    (51) Int. Cl. HO3H 9/02 (2006.01) HO3H 9/17 (2006.01) Primary Examiner Benny Lee

    (52) U.S. Cl. Assistant Examiner Jorge Salazar, Jr. CPC ....... H03H 9/02118 (2013.01); H03H 9/02157

    (2013.01); H03H 9/173 (2013.01) (57) ABSTRACT (58) Field of Classification Search

    CPC HO3H 9/02118: HO3H 9/173; HO3H 9/02157 A bulk acoustic wave (BAW) resonator structure comprises a USPC ........... 333/133, 186-191; 310/324, 365, 312 first electrode disposed over a substrate, a piezoelectric layer See application file for complete search history. disposed over the first electrode, a second electrode disposed

    over the first piezoelectric layer, and a guard ring structure (56) References Cited formed around a perimeter of an active region corresponding

    to an overlap of the first electrode, the first piezoelectric layer, U.S. PATENT DOCUMENTS and the second electrode.

    4,633,285 A 12/1986 Hunsinger et al. 4,916,520 A 4, 1990 Kurashima 45 Claims, 16 Drawing Sheets

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    (56)

    7,377,168 7.388,454 7,629,865 7,642,693 7,889,024 8,507.919

    2001/0026951 2003/O132493 2003/O155574 2004.0056735 2004/0092234 2004.00998.98 2004/O124952 2004/0129079 2004/O15O293 2004/O15O296 2004O166603 2004/O195937 2004/0212458 2004/O246O75 2004/O257171 2004/O257172 2004/0263287 2005, OO12570 2005, OO12716 2005/0023931 2005/OO3O126 2005.0036604 2005/OO571 17 2005/0057324 2005.0068124 2005/0O82626 2005/0093396 2005/0093.653 2005/0093.654 2005/OO93655 2005/0093.657 2005/OO93658 2005/OO93659 2005, 0104690 2005, 0110598 2005/O128030 2005, 0140466 2005/O167795 2005/O193507 2005/0206271 2005/0206483 2005/0275486 2006/0081048 2006/0O871.99 2006/0103492 2006/01 19453 2006, O121686 2006/O125489 2006, O132262 2006.0160353

    References Cited

    U.S. PATENT DOCUMENTS

    B2 B2 B2 B2 B2 B2 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1 A1

    5/2008 6, 2008

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    12, 2005 4, 2006 4, 2006 5, 2006 6, 2006 6, 2006 6, 2006 6, 2006 T/2006

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    JP 10173479 6, 1998 JP 2003-017964 1, 2003 KR 2002-0050729 6, 2002 KR 10200300489.17 6, 2003 WO WO-9937023 7, 1999 WO WO2005/043752 5, 2005

    OTHER PUBLICATIONS

    Co-pending U.S. Appl. No. 13/161.946, filed Jun. 16, 2011. Co-pending U.S. Appl. No. 13/286,038, filed Oct. 31, 2011. Lynch, A.C. Precise Measurements on Dielectric and Magnetic Materials', IEEE Transactions on Instrumentation and Measure ment, vol. IM-23, No. 4, Dec. 1974, p. 425-431. Machine translation of JP2003-017964.

    * cited by examiner

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  • US 9,385,684 B2 1.

    ACOUSTC RESONATOR HAVING GUARD RING

    BACKGROUND

    Acoustic resonators can be used to implement signal pro cessing functions in various electronic applications. For example, Some cellular phones and other communication devices use acoustic resonators to implement frequency fil ters for transmitted and/or received signals.

    Several different types of acoustic resonators can be used according to different applications. For example, different applications may use bulk acoustic wave (BAW) resonators such as thin film bulk acoustic resonators (FBARs) or double bulk acoustic resonators (DBARs), or they may use solid mounted resonators (SMRs).

    FIG. 1A is a cross-sectional view of an example acoustic resonator 100, and FIG.1B is a top view of acoustic resonator 100. In FIG. 1B, a line A-A indicates the location of the cross-sectional view shown in FIG. 1A. As illustrated in FIG. 1A, acoustic resonator 100 comprises

    a piezoelectric layer 110 located between a bottom electrode 105 and a top electrode 115. The designations top electrode and bottom electrode are for convenience of explanation, and