State of the art in Microfabrication

1-Dec-2010 Jurriaan Schmitz - VLSI Photonics Workshop

1

State of the art in MicrofabricationJurriaan Schmitz

[email protected] -- www.utwente.nl/ewi/sc

mailto:[email protected]

http://www.utwente.nl/ewi/sc

TIPP 2014, Amsterdam

Contents

Microelectronics: Moore’s Law today

Technology advances inside the microchip

Other microfabricated devices

Prospects for radiation imaging


The beginning: 1960s

1961 Fairchild4T5R flip-flop

1962 RCA16T logic chip

1965 Fairchildopamp

Images:Computer history museum

1958 Fairchild

First planar transistor

1968 Fairchild

2kT SRAM chip


Gordon Moore 1965

Transistors keep getting cheaper!

Smaller components

Bigger chips & wafers

Better skills

“Moore’s Law”:

The number of components on a chip doubles every year


Moore’s Law – chips, accelerators, fusion…

5

“technology driven progress”

+Brilliance of synchrotron sources, # channels in trackers…


How is Moore’s Law keeping up?

1950 1960 1970 1980 1990 2000 2010 20201E+00

1E+01

1E+02

1E+03

1E+04

1E+05

1E+06

1E+07

1E+08

1E+09

1E+10Chart Title

Co

mp

one

nts

per

chi

p

Year

Dou

blin

g pe

r yea

rDoublin

g per 2 years

GPU’s beat CPU’s


Moore’s Law: perspective

Transistor gate length scaling is slowing down (10% per generation)

300 → 450 mm transition is delayed to 2020

ITRS roadmap: multiple breakthroughs required by 2018

… what happens next?


Microchips keep getting better

Design gap

Multicore processors

Transistor performance boosters


Contents






The CMOS chip

Complexity is more than transistors alone:

A cm2 chip may contain~20 km wires~1010 contacts


Transistor evolution1970-2000: “the happy scaling era”

Keep everything the same, only miniaturize it: 1/√2 per generation

Poly Sigate

Inte

lSilicon

SiO2


Transistor evolution (2)2000-present: new technologies to boost performance

Intel


Another performance booster:Permanent strain → active strain modulation

Switch strain on and off

Use piezoelectric material (e.g. PZT)

High on-current & low off-current

T. Van Hemert et al.., IEEE Trans. El. Dev. 2013

B. Kaleli et al., IEEE Trans. El. Dev. 2014


The art of microchips today

1-nm precision manufacturing

Atomary sharp interfaces

High-purity materials

Best mastered:

Aluminum, copper, tungsten

Silicon; SiGe alloys SiO2, HfO2, Si3N4

Conventional wisdom:

“If you can do it in CMOS, do it in CMOS”

“If you can do it in silicon, do it in silicon”

https://lh3.googleusercontent.com/-Xgsf2i715Vw/TYdf1WAWoVI/AAAAAAAAAHY/9YFXlsqIGnw/s1600/Intel+32nm+NMOS_branded.png


Emerging technologies in microelectronics:Replacing good old silicon

AIS

T

LET

I

IBM

Selective GaN on Si Ultra-thin semi-on-insulator

Ge PMOS InGaAs NMOS


Emerging technologies in microelectronics:Replacing FLASH memory

Competitors:• Resistive RAM• Phase-change RAM• STT Magnetic RAM


But meanwhile, FLASH is going 3D


Contents






Microtechnology: more than chips

Flat Panel Displays

PhotovoltaicsLight Emitting Diodes Semiconductor lasers

Microfluidics Sensors



Flat Panel Displays



Steep market growthGaN-based technologyHetero-epitaxy

Haitz’ Law



Flat Panel Displays



High potential:Point-of-care medicineInternet-of-thingsUses mainstream technology


…and sensors for radiation imaging!

Microfabricated sensors in particle physics:

Silicon detectors

Charge-coupled devices

Silicon photomultipliers

CMOS-APS based detectors

…

Focus on semiconductors for signal generation.

Scintillators? Gas?


InGrid: a radiation imaging detector

Standard CMOS

SU-8 post

Al electrode

Ima

ges:

Nik

hef

TimePix


Semiconductors on top of CMOS

“TFA detector”, Andrea Franco et al., IEEE Trans. Nucl. Sci. 2012


Or vice versa?

Stack thin-film transistors on your sensor

Monocrystalline: 3D electronics as developed e.g. by LETI (Batude et al.)

Polycrystalline: e.g. I. Brunets et al., IEEE Trans. El. Dev. 2009

Low temp fabrication (~400 °C)

High interconnect density >> TSV’s

LETIU.Twente


Advances in microfabrication:Consequences for Particle Physics

Miniaturized detector systems may boast

Improved resolution and speed

Reduced power consumption Less X0, lower mass

Onboard intelligence

“The interconnect benefit”

IC Future: new materials & lower-power circuits

New semiconductor materials: GaN, InGaAs, Ge, …

Performance in radiation imaging?


Thank you:

My coworkers at the University of Twente

Nikhef Detector R&D group

TIPP organizers

Dutch Technology Foundation STW, Min. Economic Affairs, FOM and EU

1-Dec-2010 Jurriaan Schmitz - VLSI Photonics Workshop

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Questions?


Semiconductor market: arguably the largest industry

http://www.google.nl/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&docid=RTAK25wOQyqRzM&tbnid=a7UIx7UVjrpZ3M:&ved=0CAUQjRw&url=http://techon.nikkeibp.co.jp/english/handbook/analog/marketoutlook.html&ei=Nj2DUtPEEurD0QWdkIG4DA&bvm=bv.56343320,d.d2k&psig=AFQjCNGriB3jNwd9wYioHXg5EBYxH49OPg&ust=1384418975438084

http://www.google.nl/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&docid=RTAK25wOQyqRzM&tbnid=a7UIx7UVjrpZ3M:&ved=0CAUQjRw&url=http://techon.nikkeibp.co.jp/english/handbook/analog/marketoutlook.html&ei=Nj2DUtPEEurD0QWdkIG4DA&bvm=bv.56343320,d.d2k&psig=AFQjCNGriB3jNwd9wYioHXg5EBYxH49OPg&ust=1384418975438084


CPU clock frequency

The transistor count on a microprocessor has not increased since 2005.

The clock frequency “ “ “ “

The transistor gate length has hardly reduced since 2005.

Chipworks: only 9% per generation lately, not 30%

90, 65, 45, 32, 22, 15 nm CMOS

RC bottleneck in the chip’s wiring

wikipedia


Trends like Moore’s “Law” are not forever

Passenger airplanes

But airplanes got much better since 1960!


Inside a TriGate chip

H5N1 virus(same scale)

chip

wor

ks

http://www.google.nl/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&docid=QlbCz9jfbAY1QM&tbnid=meErqzRLAsKFwM:&ved=0CAUQjRw&url=http://chipworksrealchips.blogspot.com/2012/04/intels-22-nm-trigate-transistors.html&ei=i2WDUqrhFIGQ0AWD0YGQDA&bvm=bv.56343320,d.d2k&psig=AFQjCNGRT64FuAT9Inh_HhzSsvU3Wp7tTw&ust=1384428683197679

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State of the art in Microfabrication