Micromachining and Microfabrication Process Technology

Micromachining and Microfabrication Process Technology

Micromachining and Microfabrication Process Technology II

Micromachining and Microfabrication Process Technology III

Micromachining and Microfabrication Process Technology IV

Micromachining and Microfabrication Process Technology V

Micromachining and Microfabrication Process Technology VI

Micromachining and Microfabrication Process Technology VII

Micromachining and Microfabrication Process Technology and Devices

Micromachining and Microfabrication Process Technology Plenary Papers

Projection displays and MEMS: timely convergence for a bright future (Abstract Only) Larry J. Hornbeck, [1995]

Recent trends in silicon micromachining technology Hal Jerman, [1995]

Bulk Silicon Micromachining Technology

Batch-dissolved wafer process for low-cost sensor applications Steve T. Cho, [1995]

Fabrication of bulk silicon holding structures for mounting of optical fibers in v-grooves Carola Strandman, Ylva Baecklund, [1995]

Low-doped etch stopping for micromechanical device production David B. Murfett, Malcolm R. Haskard, Alan J. Marriage, [1995]

Tunneling tip protection for a bulk micromachined accelerometer Paul M. Zavracky, Bob McClelland, Jianchao Wang, Frank T. Hartley, [1995]

Wafer Bonding

Examination of glass-silicon and glass-glass bonding techniques for microfluidic systems Norman F. Raley, J. C. Davidson, Joseph W. Balch, [1995]

Patterned eutectic bonding with Al/Ge thin films for MEMS Paul M. Zavracky, Bao Vu, [1995]

MEMS Technology

MEMS infrastructure: the multiuser MEMS processes (MUMPs) Karen W. Markus, David A. Koester, Allen Cowen, Ramu Mahadevan, Vijayakumar R. Dhuler, D. Roberson, L. Smith, [1995]

Material and processing issues for the monolithic integration of microelectronics with surface-

micromachined polysilicon sensors and actuators James H. Smith, Stephen Montague, Jeffry J. Sniegowski, [1995]

SOI-based micromechanical process Paul Greiff, [1995]

Microchannel heat exchangers for advanced climate control Peter M. Martin, Wendy D. Bennett, John W. Johnston, [1995]

Fabrication issues in micromachined tunable optical filters James F. Klemic, J. Marcos Sirota, Mehran Mehregany, [1995]

Mechanical loss measurements of vacuum-operated, single-crystal silicon microresonatorsd Robert E. Mihailovich, Noel C. MacDonald, [1995]

Micromachining and Microfabrication Process Technology (cont.)

Infrastructure considerations for the emerging MEMS markets Steven Walsh, Walid El Nadi, Robert Boylan, Divjot S. Narang, Robert O'Neil Warrington, Alan Jung, [1995]

Out-of-plane microstructures using stress engineering of thin films Chia-Lun Tsai, Albert K. Henning, [1995]

LIGA

Deep x-ray lithography for micromechanics Todd R. Christenson, Henry Guckel, [1995]

Injection molding of LIGA and LIGA-similar microstructures using filled and unfilled thermoplastics Robert Ruprecht, Walter Bacher, Juergen H. Hausselt, Volker Piotter, [1995]

Electroplated nickel mold insert for LIGA Vikas Galhotra, Venkat Sangishetty, Evan Ma, Kevin W. Kelly, [1995]

Laser LIGA: a cost-saving process for flexible production of microstructures Michael Abraham, Johannes Arnold, Wolfgang Ehrfeld, K. Hesch, Hildegard Moebius, Thomas Paatzsch, Christian L. Schutz,

[1995]

Surface microcomponents fabricated by UV depth lithography and electroplating Bernd Loechel, Andreas Maciossek, [1995]

Novel silicon fabrication process for high-aspect-ratio micromachined parts James G. Fleming, Carole Craig Barron, [1995]

Characterization of electroformed nickel microstructures Qian Shi, Shih-Chia Chang, Michael W. Putty, David B. Hicks, [1995]

MEMS Design and Testing

Laser vibrometer system to examine the dynamic modal analysis of resonant micromechanical

structures David Wood, James S. Burdess, R. Pitcher, Alun J. Harris, Jane L. Cruickshank, [1995]

Design techniques for surface-micromachining MEMS processes John H. Comtois, Victor M. Bright, [1995]

Etching Technologies

Advanced silicon etching using high-density plasmas Jy Bhardwaj, H. Ashraf, [1995]

Dry micromachining of high-aspect-ratio Si for microsensors Stella W. Pang, [1995]

Micromachining and Microfabrication Process Technology (cont.)

Development of a deep silicon plasma etching process for sensor application Yuan-Xiong Li, Reinoud F. Wolffenbuttel, [1995]

Micromachining and focused ion beam etching of Si for accelerometers David F. Moore, S. C. Burgess, H.-S. Chiang, H. Klaubert, N. Shibaike, T. Kiriyama, [1995]

Etching technology and applications for through-the-wafer silicon etching David R. Craven, Keven Yu, Tam Pandhumsoporn, [1995]

Micromachining Processes

Microstructuring by excimer laser Erol C. Harvey, Phil T. Rumsby, Malcolm C. Gower, Jason L. Remnant, [1995]

Micromolded structures for integrated optical sensors Lothar U. Kempen, Rino E. Kunz, Michael T. Gale, [1995]

Combined TMAH and HF sacrificial layer etching technique for surface micromachined devices Thomas Lisec, Martin Kreutzer, Beatrice Wenk, Bernd Wagner, [1995]

Novel low-stress SiO2-xFx film deposited by room-temperture liquid-phase deposition method Ching-Fa Yeh, Shyue-Shyh Lin, [1995]

Study on mechanical characteristics of PZT thin film for sensors and actuators Shyuichi Wakabayashi, Hiromi Totani, Minoru Sakata, Masaaki Ikeda, Hiroshi Goto, Masashi Takeuchi, Tsuneji Yada, [1995]

Deposition of thick zinc oxide films with a high resistivity Norbert Schwesinger, Heike Bartsch, Frank Moeller, [1995]

Novel high-power Nd:YLF laser for CVD-diamond micromachining Ronald D. Schaeffer, [1995]

Micromachining and Microfabrication Process Technology II Plenary Papers

Application of micromachining technology to optical devices and systems Hiroyuki Fujita, [1996]

Commercializing MEMS--too fast or too slow? Steven Walsh, William N. Carr, Hillary Mados, Divjot S. Narang, [1996]

Etching Technology

Micromachining inertial instruments Marc S. Weinberg, Jonathan J. Bernstein, Jeffrey T. Borenstein, J. Campbell, J. Cousens, Robert K. Cunningham, R. Fields, Paul

Greiff, B. Hugh, Les Niles, Jerome B. Sohn, [1996]

Dry etching and micromachining of precision silicon components Ernst Wolfgang Kreutz, Wilhelm Pfleging, David A. Wesner, Juergen Jandeleit, G. Urbasch, [1996]

Dry etching and boron diffusion of heavily doped high-aspect ratio Si trenches Wen Han Juan, Jason W. Weigold, Stella W. Pang, [1996]

Fabrication of piezoresistive-sensed AFM cantilever probe with integrated tip Ivo W. Rangelow, Feng Shi, Peter Hudek, Teodor Gotszalk, Piotr B. Grabiec, Piotr Dumania, [1996]

Influence of gas composition and the mask materials on the etch profile of dry-etched structures in silicon Norbert Schwesinger, Ivan Hotovy, Torsten Saendig, Alexander Pelzus, [1996]

Characterization and application of deep Si trench etching James G. Fleming, Carole Craig Barron, [1996]

Release-etch modeling for complex surface-micromachined structures William P. Eaton, James H. Smith, Robert L. Jarecki, [1996]

High-etch-rate anisotropic deep silicon plasma etching for the fabrication of microsensors Tam Pandhumsoporn, Michael Feldbaum, Prashant Gadgil, Michel Puech, P. Maquin, [1996]

Micromachining Processes I

Chemical-mechanical polishing: enhancing the manufacturability of MEMS Jeffry J. Sniegowski, [1996]

Characterization of membrane curvature in micromachined silicon accelerometers and gyroscopes using optical interferometry Jeffrey T. Borenstein, Paul Greiff, Jerome B. Sohn, Marc S. Weinberg, [1996]

Characterization of residual stress in metallic films on silicon with micromechanical devices Mathilde Boutry, Alain Bosseboeuf, G. Coffignal, [1996]

Micromachining and Microfabrication Process Technology II (cont.)

Bipolar compatible epitaxial poly for surface-micromachined smart sensors Paul T. J. Gennissen, Patrick J. French, Marian Bartek, Pasqualina M. Sarro, A. van der Boogaard, C. Visser, [1996]

Polysilicon microswitch for planar antenna phase shifters Sandrine Lucas, King Kis-Sion, Jacques Pinel, Olivier Bonnaud, [1996]

LIGA and Deep-Resist

Micromolding: a powerful tool for large-scale production of precise microstructures Lutz Weber, Wolfgang Ehrfeld, Herbert Freimuth, Manfred Lacher, Heinz Lehr, Bernhard Pech, [1996]

Fabrication of LIGA mold inserts using a modified procedure Vikas Galhotra, Christophe Marques, Yohannes M. Desta, Kevin W. Kelly, Mircea S. Despa, Ajit Pendse, John R. Collier, [1996]

Influence of resist-baking on the pattern quality of thick photoresists Bernd Loechel, Martina Rothe, Simone Fehlberg, Gabi Gruetzner, Gerhard Bleidiessel, [1996]

Chemically amplified deep UV resists for micromachining Peter Hudek, Ivo W. Rangelow, Ivan Kostic, Piotr B. Grabiec, Feng Shi, [1996]

Simple technology for fabricating micromechanical 3D structures using electroplating without

photoresist mold Bahram Ghodsian, Ash M. Parameswaran, Marek Syrzycki, [1996]

Micromachining Processes II

Silicon micromachining technologies: future needs and challenges Khalil Najafi, [1996]

Silicon-micromachined poppet valve with an octagonal diaphragm James W Siekkinen, K. J. Haltiner, Dan W. Chilcott, L. X. Huang, Steve E. Staller, [1996]

Supercritical carbon dioxide solvent extraction from surface-micromachined micromechanical

structures Christopher W. Dyck, James H. Smith, Samuel L. Miller, E. M. Russick, C. L. J. Adkins, [1996]

Fully self-aligned nickel wobble micromotors fabricated at low temperature Minyao Mao, Xiaodong Wang, Jianfang Xie, Weiyuan Wang, [1996]

Aluminum passivation in saturated TMAHW solutions for IC-compatible microstructures and

device isolation Pasqualina M. Sarro, S. Brida, W. van der Vlist, [1996]

Micromachining Processes III

Invar electrodeposition for MEMS application Toshiki Hirano, Long-Sheng Fan, [1996]

Micromachining and Microfabrication Process Technology II (cont.)

Selective SiO2-xFx growth with liquid-phase deposition for MEMS technology Ching-Fa Yeh, Yueh-Chuan Lee, Jwinn-Lein Su, [1996]

Test structures for nondestructive in-situ control of the anodic bonding quality Jose A. Plaza, Jaume Esteve, Emilio Lora-Tamayo, [1996]

Electrodeposition of 3D microstructures without molds Andreas Maciossek, [1996]

Assembly and interconnection technology for micromechanical structures using anisotropic conductive film In-Byeong Kang, Malcolm R. Haskard, Byeong-Kwon Ju, [1996]

Eutectic bonds on wafer scale by thin film multilayers Carsten Christensen, Siebe Bouwstra, [1996]

Angular alignment for wafer bonding Yuan-Fang Chou, Ming-Hsun Hsieh, [1996]

MEMS Technology

Fabrication and performance of MARS optical modulators for fiber-to-the-home systems James A. Walker, Keith W. Goossen, [1996]

Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS James H. Smith, Stephen Montague, Jeffry J. Sniegowski, James R. Murray, Ronald P. Manginell, Paul J. McWhorter, Robert J.

Huber, [1996]

Collective fabrication of gallium-arsenide-based microsystems Jean-Michel Karam, Bernard Courtois, M. Holjo, Jean Louis Leclercq, P. Viktorovitch, [1996]

Micromachine scanning tunneling microscope for nanoscale characterization and fabrication Yasuo Wada, M. Lutwyche, M. Ishibashi, [1996]

Microelectro discharge machining as a technology in micromachining Wolfgang Ehrfeld, Heinz Lehr, Frank Michel, Andrej Wolf, Hans-Peter Gruber, Axel Bertholds, [1996]

Application of porous Si micromachining technology in the calorimetric sensor Zongsheng Lai, Xinjun Wan, Pingsong Zhou, Yunzhen Wang, [1996]

Development of metal-forming machine for fabricating micromechanical components Isamu Aoki, Toshinori Takahsashi, [1996]

Approach for semicustom integrated-sensor system manufacturing in a commercial CMOS

technology Juan Bausells, [1996]

Micromaching and Microfabrication Process Technology III Etching Technology

Microfabrication technologies for microsystems Nico F. de Rooij, [1997]

SAMPLE (Sandia agile MEMS prototyping, layout tools, and education) Carole Craig Barron, Brady R. Davies, Jeffry J. Sniegowski, M. Steven Rodgers, John H. Comtois, M. Adrian Michalicek, [1997]

IC-compatible fabrication of through-wafer conductive vias Jean Gobet, Jean-Phillipe Thiebaud, Francois Crevoisier, Jean-Marc Moret, [1997]

Fabrication techniques and their application to produce novel micromachined structures and

devices using excimer laser projection Erol C. Harvey, Phil T. Rumsby, [1997]

Micromachining of metals and ceramics by nano- and picosecond laser radiation Juergen Jandeleit, A. Horn, Ernst Wolfgang Kreutz, Reinhart Poprawe, [1997]

MEMS Technology I

Precise micronanomachining for advanced sensors Masayoshi Esashi, Takahito Ono, Kazuyuki Minami, [1997]

Wide-bandwidth silicon nitride membrane microphones Brian T. Cunningham, Jonathan J. Bernstein, [1997]

Development of a silicon microprobe for NO detection Marcelo B. A. Fontes, Jorge J. Santiago-Aviles, Rogerio Furlan, [1997]

Wet chemical isotropic etching procedures of silicon: a possibility for the production of deep-

structured microcomponents Norbert Schwesinger, Arne Albrecht, [1997]

LIGA and Related Technology

Microcomposite electroforming for MEMS technology Shinn-Horng Yeh, Chun-Ying Liue, Ji-Weng Wang, Min-Chieh Chou, Shu-Ling Hou, [1997]

New developments of process technologies for microfabrication Volker Piotter, Thomas Hanemann, Robert Ruprecht, Andreas Thies, Juergen H. Hausselt, [1997]

Growth and crystallinity of electroformed nickel structures Shih-Chia Chang, John Edens, [1997]

High-aspect-ratio etching in polymer for microactuator applications Wen Y. Lee, J. Gao, Toshiki Hirano, S. Chan, Long-Sheng Fan, [1997]

Micromachining and Microfabrication Process Technology III (cont.)

MEMS Materials

Optical applications of silicon micromachining technology Gary R. Trott, Long Yang, Kent Carey, Richard P. Ratowsky, Jeffrey S. Kallman, [1997]

Comprehensive study of processing parameters influencing the stress and stress gradient of

thick polysilicon layers Matthias Fuertsch, Michael Offenberg, Horst Muenzel, Juan Ramon Morante, [1997]

Optical interferometric characterization of membrane curvature in boron-doped Si microstructures Jason W. Weigold, Wen Han Juan, Stella W. Pang, Jeffrey T. Borenstein, [1997]

Strain effects in multilayers Colin M. A. Ashruf, Patrick J. French, Charles de Boer, Pasqualina M. Sarro, [1997]

Ion sputter deposition of shape memory alloy films for microactuators Sam T. Davies, Kazuyoshi Tsuchiya, [1997]

Ultraprecision microelectroforming of metals and metal alloys Holger Loewe, Wolfgang Ehrfeld, Joerg Diebel, [1997]

MEMS Technology II

Microfabrication by through-mask electrochemical micromachining Madhav Datta, [1997]

Single-sided multilevel structure for silicon pressure transducers by masked-maskless etching

technology Heng Yang, Jianjun Ren, Minhang Bao, Shaoqun Shen, [1997]

Macroporous silicon formation for micromachining Hiroshi Ohji, Sami Lahteenmaki, Patrick J. French, [1997]

Focused ion-beam system for automated MEMS prototyping and processing Gregory J. Athas, Kathryn E. Noll, Russell Mello, Raymond Hill, Don E. Yansen, Frank F. Wenners, James P. Nadeau, Tuan Ngo,

Michael Siebers, [1997]

10-µm thin GaAs membrane manufactured by nonselective etching Alexandru Mueller, Ioana Petrini, V. Avramescu, S. Iordanescu, Romolo Marcelli, Vittorio Fogllieti, M. Dragoman, [1997]

MEMS Technology and Devices

Automotive applications for micromachining Douglas R. Sparks, Shih-Chia Chang, [1997]

Assembly of hybrid microsystems in a large-chamber scanning electron microscope by use of

mechanical grippers Manfred Weck, Joachim Huemmler, Bernd Petersen, [1997]

Micromachining and Microfabrication Process Technology III (cont.)

Material structure and processes required for the manufacture of micromechanical devices Kenneth J. Skrobis, J. Christenson, Steve E. Staller, J. Freeman, Prashant Gadgil, [1997]

Micromechanical structures and microelectronics for acceleration sensing Brady R. Davies, Stephen Montague, James H. Smith, Mark Lemkin, [1997]

Influence of processes and selective bonding technology Jiwei Jiao, Axel Berthold, Michael J. Vellekoop, Patrick J. French, [1997]

Laser-micromachined microchannel solvent separator Dean W. Matson, Peter M. Martin, Wendy D. Bennett, Donald C. Stewart, John W. Johnston, [1997]

Poster Session

Design of bulk micromachined suspensions Weileun Fang, [1997]

Anneal treatment studies of heavily boron-doped silicon Denise M. Bruce, [1997]

Yield enhancement in micromechanical sensor fabrication using statistical process control Jeffrey T. Borenstein, Douglas M. Preble, [1997]

Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer Qiang Zou, Deren Lu, Baoqing Li, Xingguo Xiong, Bin Xiong, Weiyuan Wang, [1997]

Balance approach for mechanical properties test of microfabricated structures Xingguo Xiong, Qiang Zou, Deren Lu, Weiyuan Wang, [1997]

Micromachining technology development in SIOFM Runwen Wang, Beijun Shen, Hao Ding, [1997]

Micromachining and Microfabrication Process Technology IV Plenary Papers

Microassembly technologies for MEMS Michael Cohn, Karl Boehringer, J. Mark Noworolski, Angad Singh, Chris Keller, Kenneth Goldberg, Roger Howe, [1998]

Finding markets for microstructures James Knutti, [1998]

Micromachining technologies for miniaturized communication devices Clark Nguyen, [1998]

Keynote Address

Converting MEMS technology into profits Janusz Bryzek, [1998]

Direct Write

Microstructures fabricated by laser-induced polymerization Xinming Huang, Robert Warrington, Craig Friedrich, [1998]

NC-controlled production of smooth 3D surfaces in brittle materials with 193-nm excimer laser Hans Toenshoff, Christoph Graumann, Hanno Hesener, Marcus Rinke, [1998]

Fabrication of binary microlens array by excimer laser micromachining Frank Lin, J. Huang, Eric Chou, Chii-Rong Yang, Bruce Chou, Roger Luo, Wen-Kai Kuo, Jer-Wei Chang, Mao-Hong Lu, Wen-

Hsiung Huang, Chien-Jen Chen, [1998]

New Processes

Fabrication of ordered nanostructure based on anodic porous alumina Hideki Masuda, Masashi Nakao, Toshiaki Tamamura, Hidetaka Asoh, [1998]

Galvanic etching of silicon Colin Ashruf, Patrick French, Pasqualina Sarro, John Kelly, [1998]

Diffusion-induced dislocations in highly boron-doped silicon layers used for bulk micromachining applications Florin Gaiseanu, Jaume Esteve, Gudrun Kissinger, D. Kruger, [1998]

Advanced silicon trench etching in MEMS applications Karl Kuehl, Steffan Vogel, Ulrich Schaber, Rainer Schafflik, Bernhard Hillerich, [1998]

Antistiction and Assembly

Antistiction coatings for surface micromachines Roya Maboudian, [1998]

Micromachining and Microfabrication Process Technology IV (cont.)

Thin Teflon-like films for MEMS: film properties and reliability studies Bradley Smith, Craig Brown, Glen LaVigne, Jeffry Sniegowski, [1998]

High-yield assembly of hinged 3D optical MEMS devices using magnetic actuation Yong Yi, Chang Liu, [1998]

Automatic microassembly of radar sensors for automotive applications Matthias Nienhaus, Wolfgang Ehrfeld, Frank Michel, V. Graeff, Andrej Wolf, [1998]

Silicon surface micromachining by anhydrous HF gas-phase etching with methanol Won-Ick Jang, Chang-Auck Choi, Chang Lee, Yoonshik Hong, Jong-Hyun Lee, Jong Baek, Bo Woo Kim, [1998]

New Technologies

Silicon microlenses for IR image sensors Nuggehalli Ravindra, Fei Ming Tong, Dhiren Pattnaik, Dentcho Ivanov, Roland Levy, K. Aryusook, Vipulkumar Patel, [1998]

Combining the best of bulk and surface micromachining using Si (111) substrates James Fleming, [1998]

Fabrication of polycrystalline diamond film resonators Xiaodong Wang, Yirong Yang, Jianfang Xie, Weiyuan Wang, Zongxin Ren, [1998]

Growth and characterization of shape memory alloy thin films for micropositioning and microactuation Sam Davies, Kazuyoshi Tsuchiya, [1998]

Novel fabrication of comb actuator using RIE of polysilicon and (110) Si anisotropic bulk etching in KOH Hyung-Taek Lim, Yong-Kweon Kim, [1998]

Plating

Advances in LIGA-based post mold fabrication Todd Christenson, [1998]

Fabrication of miniaturized biotechnical devices Monika Niggemann, Wolfgang Ehrfeld, Lutz Weber, [1998]

Uniform and simultaneous fabrication of high-precision and high-density orifice, channel, and

reservoirs for ink-jet printheads Jun-Bo Yoon, Jae-Duk Lee, Chul-Hi Han, Euisik Yoon, Choong-Ki Kim, [1998]

Fabrication of freestanding microstructures using UV lithography and double-electroplating

technique Chang-Wook Baek, Yong-Kweon Kim, [1998]


Novel and high-yield fabrication of electroplated 3D microcoils for MEMS and microelectronics Jun-Bo Yoon, Chul-Hi Han, Euisik Yoon, Choong-Ki Kim, [1998]

High-Aspect-Ratio Silicon

High-aspect-ratio single-crystal Si microelectromechanical systems Jason Weigold, Stella Pang, [1998]

Selective deep-Si-trench etching with dimensional control Randy Shul, Christi Willison, Lei Zhang, [1998]

Microfabricated silicon gas chromatographic microchannels: fabrication and performance Carolyn Matzke, Richard Kottenstette, Stephen Casalnuovo, Gregory Frye-Mason, Mary Hudson, Darryl Sasaki, Ronald

Manginell, C. Channy Wong, [1998]

Microfabrication of membrane-based devices by HARSE and combined HARSE/wet etching Ronald Manginell, Gregory Frye-Mason, W. Schubert, Randy Shul, Christi Willison, [1998]

CMOS compatibiltity of high-aspect-ratio micromachining (HARM) in bonded silicon-on-

insulator (BSOI) Mark McNie, David King, [1998]

Poster Session

Design criteria of buckling microbridges Weileun Fang, Hsin-Hwa Hu, Chun-Hsien Lee, [1998]

Planarization and trench filling on severe surface topography with thick photoresist for MEMS Jun-Bo Yoon, Gilbert Oh, Chul-Hi Han, Euisik Yoon, Choong-Ki Kim, [1998]

Optical properties of micromachined polysilicon reflective surfaces with etching holes Jun Zou, Colin Byrne, Chang Liu, David Brady, [1998]

Control and modeling of stress in multistacked polysilicon films considering oxidation effect Chang Lee, Won-Ick Jang, Chang-Auck Choi, Yoonshik Hong, Jong-Hyun Lee, Kwangsoo No, Dang Wee, [1998]

MEMS assembly apparatus with a suction glass needle Dunwu Lu, Huijie Huang, Beijun Shen, Liangmin Yang, Zengshui Liu, Longlong Du, [1998]

Development of a microforming system using mold technology and cutting technology Isamu Aoki, Toshinori Takahashi, [1998]

Anisotropic etching of (111)-oriented silicon and applications Bruce Chou, Chun-Nan Chen, Jin-Shown Shie, Wen-Hsiung Huang, Chien-Jen Chen, [1998]

PMMA microstructure as KrF excimer-laser LIGA material Chii-Rong Yang, Bruce Chou, Hsiao-Yu Chou, Frank Lin, Wen-Kai Kuo, Roger Luo, Jer-Wei Chang, Z. Wei, [1998]


Composite cantilever beam-mass structure gyroscope by a novel etching technology Xinxin Li, Minhang Bao, Heng Yang, Shaoqun Shen, Weiyuan Wang, [1998]

High-aspect-ratio fine-line metallization Chienliu Chang, Peizen Chang, Kaihsiang Yen, Sheyshi Lu, [1998]

Transport limitations in electrodeposition for LIGA microdevice fabrication Stewart Griffiths, Robert Nilson, R. Bradshaw, Aili Ting, William Bonivert, John Hachman, Jill Hruby, [1998]

Microarray collimators for x rays and neutrons Alberto Cimmino, Brendan Allman, Anthony Klein, William Hamilton, Ian Anderson, Bernard Hamelin, Peter Hoghoj, Pierre

Bastie, [1998]

Photographic method for the fabrication of surface-relief diffractive optical elements Enrique Navarrete-Garcia, Sergio Calixto-Carrera, [1998]

Square microchannel arrays for focusing neutrons and x rays Alberto Cimmino, Brendan Allman, Steven Brumby, Thomas Irving, Anthony Klein, Keith Nugent, Ian Anderson, Peter Hoghoj,

Andrew Peele, [1998]

Micromachining and Microfabrication Process Technology V Plenary Papers

Electrokinetic microfluidic systems Luc Bousse, [1999]

3D silicon photonic lattices: cornerstone of an emerging photonics revolution James Fleming, Shawn-Yu Lin, [1999]

Keynote Address

Breaking the barriers to commercialization of MEMS: a firm's search for competitive advantage Steven Walsh, Jonathan Linton, [1999]

LIGA/Plating/Molding/Casting

LIGA: metals, plastics, and ceramics Jill Hruby, Stewart Griffiths, Linda Domeier, Alfredo Morales, Dale Boehme, Michelle Bankert, William Bonivert, John Hachman,

Dawn Skala, Aili Ting, [1999]

Fabrication of plastic microparts on wafer level Lutz Weber, Wolfgang Ehrfeld, Marc Begemann, Udo Berg, Frank Michel, [1999]

Innovations in molding technologies for microfabrication Tobias Benzler, Volker Piotter, Thomas Hanemann, K. Mueller, Prachai Norajitra, Robert Ruprecht, Juergen Hausselt, [1999]

Laser Processing

Submicron patterning of aluminum films by laser ablation David Doerr, Dennis Alexander, [1999]

Femtosecond-pulse laser ablation and surface microstructuring of aluminum alloy 2024 Kai Dou, Robert Parkhill, Edward Knobbe, [1999]

Pulsed-laser-deposited coatings for stiction and wear reduction in MEMS devices Jamey Pelt, M. Ramsey, R. Magana, E. Poindexter, Maarten de Boer, David LaVan, Michael Dugger, James Smith, Steven Durbin,

[1999]

Excimer laser micromachining of structures using SU-8 Muralihar Ghantasala, Erol Harvey, Dinesh Sood, [1999]

SSM/Bulk

Materials characterization for MEMS: a comparison of uniaxial and bending tests George Johnson, Peter Jones, Roger Howe, [1999]

Reproducibility data on SUMMiT Siv Limary, Harold Stewart, Lloyd Irwin, John McBrayer, Jeffry Sniegowski, Stephen Montague, James Smith, Maarten de Boer,

Jerome Jakubczak, [1999]

Micromachining and Microfabrication Process Technology V (cont.)

Processing variables for the reduction of stiction on MEMS devices Heidi Denton, Mike Davison, [1999]

Standard postprocessing technique for fabrication of large microsuspended structures in CMOS Bahram Ghodsian, Veljko Milanovic, Orlando Villavicencio, [1999]

Which etchant used and whether an etching mask exists: how they make differences on convex-corner undercutting configuration and compensation criteria Xinxin Li, Rongming Lin, Jianmin Miao, Minhang Bao, [1999]

Other

Fabrication of counter electrodes for scanning atomic probe Andrew Campitelli, Hocine Ziad, Frank Rogge, Wilfried Vandervorst, Christiaan Baert, Min Huang, Alfred Cerezo, [1999]

W-coating for MEMS Sita Mani, James Fleming, Jeffry Sniegowski, [1999]

Laser welding: providing alignment precision and accuracy to substrate-level packaging Joe Brown, Nikolaus Maier, Kim Lee, Lorenz Ziegltrum, Jim St Leger, [1999]

Ion beam sputter deposition of TiNi shape memory alloy thin films Sam Davies, Kazuyoshi Tsuchiya, [1999]

Mixed Technologies/Integration

Integration issues for pressure sensors Bishnu Gogoi, David Monk, Theresa Maudie, Todd Miller, Jose Torres, [1999]

Novel fabrication and simple hybridization of exotic material MEMS Slobodan Rajic, Panos Datskos, Irene Datskou, [1999]

High Aspect Ratio

Mechanical properties of boron-doped single-crystal silicon microstructures Michael Putty, Shih-Chia Chang, [1999]

New sensor for real-time trench depth monitoring in micromachining applications Pascal Amary, Ramdane Benferhat, Kevin Liddane, Alain Ostrovsky, [1999]

Deep anisotropic ICP plasma etching designed for high-volume MEMS manufacturing Keven Yu, Michael Feldbaum, Tam Pandhumsoporn, Prashant Gadgil, [1999]

High-speed laser chemical vapor deposition of amorphous carbon fibers, stacked conductive

coils, and folded helical springs James Maxwell, Mats Boman, Kirk Williams, Kajsa Larsson, N. Jaikumar, G. Saiprasanna, [1999]


EFAB: low-cost automated electrochemical batch fabrication of arbitrary 3D microstructures Adam Cohen, Uri Frodis, Fan-Gang Tseng, Gang Zhang, Florian Mansfeld, Peter Will, [1999]

SCALPEL mask blank fabrication Thomas Saunders, Myrtle Blakey, Carlos Caminos, Gregory Bogart, Reginald Farrow, Chester Knurek, Avi Kornblit, James

Liddle, Anthony Novembre, Milton Peabody, [1999]

Other

Porous silicon process for encapsulated single-crystal surface-micromachined microstructures James Seefeldt, Yogesh Gianchandani, Michael Mattes, Larry Reimer, [1999]

Various uses of ion chromatography in the manufacture of MEMS Beverly Newton, [1999]

Effects of metal impuritites on the etch rate selectivity of (110)/(111) in (110) Si anisotropic

etching Yoshiaki Hirata, Masahiro Tsugai, Koji Tanimoto, Teruo Usami, Yasuo Yamaguchi, Hiroshi Otani, Kunihiro Nakamura, [1999]

Fabrication and reliability testing of Ti/TiN heaters Piet De Moor, Ann Witvrouw, Veerle Simons, Ingrid De Wolf, [1999]

Lithography

Resolution enhancement techniques for submicron deep trench processes Lijun Tong, Joyce Hsiang, Kuanchih Lin, Gary Newman, [1999]

Economic fabrication of microscale features in thick resists using scanning projection lithography Marvin Kilgo, Charles Williams, Dan Constantinide, [1999]

Development behavior of irradiated foils and microstructures Pascal Meyer, Aida El-Kholi, Juergen Mohr, Clifford Cremers, Faycal Bouamrane, Stephan Megtert, [1999]

New fabrication methodology for fine-feature high-aspect-ratio structures made from high-Z

materials Upendra Desai, Larry Orwig, David Clark, Michael Appleby, [1999]

Thick photoresist imaging using a three-wavelength exposure stepper Bradley Todd, Warren Flack, Sylvia White, [1999]

High-aspect-ratio two-dimensional silicon subwavelength gratings fabricated by fast atom beam etching Yoshiaki Kanamori, Minoru Sasaki, Kazuhiro Hane, [1999]


Poster Session

New electromagnetic micromotor with a large torque Jingqiu Liang, Jingshong Yao, [1999]

Micropattern fabrication by a specially designed microtool Isamu Aoki, Toshinori Takahashi, [1999]

Multidimensional calculation of coupled flow and electrodeposition in microscopic trenches Chunmei Xia, Jayathi Murthy, Minking Chyu, Yao Cheng, [1999]

New design methodologies in <111>-oriented silicon wafers R. Oosterbroek, J. Berenschot, A. Nijdam, Gregory Pandraud, Miko Elwenspoek, Albert van den Berg, [1999]

Evidence of dislocations for the control of roughness of highly thermal boron-doped diffused

silicon layers Elena Manea, Ralu Divan, Ileana Cernica, [1999]

Etch-stop in germanium induced by ion implantation for bulk micromachining applications in

the IR domain Ralu Divan, Ileana Cernica, Elena Manea, [1999]

Doping and structural properties for the phosphorous-doped polysilicon layers used for micromechanical applications Florin Gaiseanu, Jaume Esteve, Carles Cane, Alejandro Perez-Rodriguez, Juan Morante, Christoph Serre, [1999]

Fabrication of pop-up detector arrays on Si wafers Mary Li, Christine Allen, Scott Gordon, Jonathan Kuhn, David Mott, Caroline Stahle, Liqin Wang, [1999]

Micromachining and Microfabrication Process Technology VI Plenary Session

MEMS/MOEMS for lightwave networks: Can little machines make it big? David Bishop, Vladimir Aksyuk, Cristian Bolle, C. Randy Giles, Flavio Pardo, Jim Walker, [2000]

Bulk micromachining for sensors and actuators Masayoshi Esashi, [2000]

Microsystems for diverse applications using recently developed microfabrication techniques Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier Guenat, Benedikt Guldimann, Philippe

Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico de Rooij, [2000]

LIGA/Plating/Molding

Localized electrochemical deposition: the growth behavior of nickel microcolumns SweeHock Yeo, Jian Choo, Kwan Yip, [2000]

Large-area MEMS fabrication with thick SU-8 photoresist applied to an x-ray image sensor

array Jurgen Daniel, Brent Krusor, Raj Apte, Robert Street, Adela Goredema, Jason McCallum, Daniele Boils-Boissier, Peter Kazmaier,

[2000]

Producing LIGA-competitive microcomponents Wayne Hung, Mohammad Ali, Shu Yuan, [2000]

Microfabrication of a metal fuel injector nozzle array Tracy Morris, Michael Murphy, Sumanta Acharya, [2000]

Acoustic agitation for enhanced development of LIGA PMMA resists Robert Nilson, Stewart Griffiths, [2000]

Anisotropically etched Si molds for fabricating fine optical components Yigui Li, Takehiro Fujii, Minoru Sasaki, Kazuhiro Hane, [2000]

High Aspect Ratio

High-aspect-ratio microstructure fabrication using SU-8 resist Jun Zhu, Xiaolin Zhao, Zhiping Ni, [2000]

Loading effects in deep silicon etching Jani Karttunen, Jyrki Kiihamaeki, Sami Franssila, [2000]

HARM processing techniques for MEMS and MOEMS devices using bonded SOI substrates

and DRIE Colin Gormley, Anne Boyle, Viji Srigengan, Scott Blackstone, [2000]

Characterization of deep Si etch profiles formed by atmospheric downstream plasma Igor Bagriy, Oleg Siniaguine, [2000]

Micromachining and Microfabrication Process Technology VI (cont.)

Overcritical damped laterally moving microstructures by ADRIE using SOI-substrates for automotive applications Oliver Krampitz, Michael Wycisk, Volker Biefeld, Josef Binder, [2000]

Bulk and Surface Micromachining

Comparison between wet HF etching and vapor HF etching for sacrificial oxide removal Ann Witvrouw, Bert Du Bois, Piet De Moor, Agnes Verbist, Chris Van Hoof, Hugo Bender, Christiaan Baert, [2000]

Development of TMAH anisotropic etching manufacturing process for MEMS Jiunn-Jye Tsaur, Shih-I Yang, Chen-Hsun Du, Zhongshen Lin, Cheng-Tang Huang, Cheng-Kuo Lee, [2000]

Low-temperature piezoelectric aluminum nitride thin film Laurie Valbin, Laure Sevely, Serge Spirkovitch, [2000]

Silicon surface micromachining of a deep vacuum cavity structure and its application to a microflow sensor Chi-Hoon Jun, Chang-Auck Choi, Won-Ick Jang, Youn Tae Kim, [2000]

Thick porous silicon sacrificial layer formation using implanted mask technology Alexandra Splinter, Olaf Bartels, Wolfgang Benecke, [2000]

Access Means to MEMS Technology : CAD and Foundries

Flexible machining system to produce micro-prototypes Hans Toenshoff, Andreas Ostendorf, Klaus Koerber, Axel Beil, [2000]

SOI micromachining technologies for MEMS Stephane Renard, [2000]

Design rules for non-Manhattan shapes Zein Juneidi, Kholdoun Torki, Ridha Hamza, [2000]

Toward determining cost, quality, and turn-around time of MEMS devices fabricated in a distributed prototyping environment William Benard, Kaigham Gabriel, Michael Huff, [2000]

General MEMS process physics simulation and its applications Nora Finch, Yie He, James Marchetti, [2000]

New EUROPRACTICE microsystem design and foundry services Patric Salomon, Dirk Beernaert, Rob Turner, [2000]

Laser Processing

Laser microwelding in electronics: limitations and solutions for a further miniaturization Michael Schmidt, Andreas Otto, [2000]


Production of silicon diaphragms by precision grinding Andrzej Prochaska, Paul Baine, S. J. Mitchell, Harold Gamble, [2000]

Flexible processing of large scale LCD panels using scanner-deflected UV-laser radiation Andreas Ostendorf, Klaus Koerber, Thorsten Temme, Bob Bann, Paul Apte, Heinz Haberzettl, Tatjana Budischewski, [2000]

Release etch modeling analysis and the use of laser scanning microscopy for etch time prediction of micromachined structures George Matamis, Bishnu Gogoi, David Monk, Andrew McNeil, Veronica Burrows, [2000]

Repair of stiction-failed surface-micromachined polycrystalline silicon cantilevers using pulsed lasers Leslie Phinney, James Rogers, [2000]

MEMS Film Deposition Processes and Devices

Novel process for deposition of aluminum onto sidewalls of silicon trenches Harald Sehr, Alan Evans, Arthur Brunnschweiler, Graham Ensell, [2000]

Process development and fabrication of application-specific microvalves Bai Xu, James Castracane, Robert Geer, Yahong Yao, Bruce Altemus, [2000]

Formation of low-stress multilayered thick polysilicon films for fabrication of microsystems Chang-Auck Choi, Won-Ick Jang, Myung-Lae Lee, Youn Tae Kim, [2000]

Application of a silicon-enriched nitride diaphragm to a condenser microphone Norisato Shimizu, Akihisa Yoshida, Masaharu Ikeda, Shinichiro Aoki, [2000]

Analysis/Characterization/Test

Dynamic actuation behavior of NiTi/Si diaphragm micropump Dong Xu, Li Wang, Guifu Ding, Yong Zhou, Aibin Yu, Xiulan Cheng, Jian Chen, Bingchu Cai, [2000]

Experimental study of micro-EDM machining performances on silicon wafer Xiaozhong Song, Wim Meeusen, Dominiek Reynaerts, Hendrik Van Brussel, [2000]

Control of internal stress in SMA/Si bimorph microactuators Li Wang, Dong Xu, Bingchu Cai, Xiulan Cheng, [2000]

Improvement of structural stability and IR-detecting characteristics of microbolometer HoKwan Kang, W. Ha, C. Park, Byung-Kap Kim, Sung Moon, ToHoon Kim, [2000]

Packaging/Wafer Bonding

Micromachining technologies for capillary electrophoresis utilizing Pyrex glass etching and bonding Jian Zhang, Thomas Haiqing Gong, [2000]


Novel low-temperature pressure-assisted bonding technology Abdeljlail Sayah, Dominique Solignac, Martin Gijs, [2000]

Wafer-level chip size package with an air cavity above the active surface for micromechanical

applications Avner Badihi, [2000]

Packaging for a rotational accelerometer: Is a standard plastic SOIC an industrial solution? Valter Motta, Giovanni Frezza, Mariapia Riva, Kritivasan Sivakumar, [2000]

Novel MEMS Fabrication and Integration Processes

IC-compatible process for pattern transfer in deep wells for integration of RF components Nga Pham, Pasqualina Sarro, Joachim Burghartz, [2000]

Novel porous silicon formation without external contact Alexandra Splinter, Joerg Stuermann, Wolfgang Benecke, [2000]

Single-crystal micromachining using multiple fusion-bonded layers Alan Brown, Garry O'Neill, Scott Blackstone, [2000]

Manufacturing of microcomponents in a research institute under DIN EN ISO 9001 Dieter Maas, Bernhard Karl, Volker Saile, Joachim Schulz, [2000]

Development of polysilicon films for MEMS integration with submicrometer CMOS process Brian McCarson, Benjamin Yip, Chris Reno, Jonathan Gorrell, Bishnu Gogoi, [2000]

Development of a low-stress silicon-rich silicon nitride film for micromachined sensor applications Mark Williams, Jeff Smith, Judy Mark, George Matamis, Bishnu Gogoi, [2000]

Poster Session

Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-

phase etching with 2-propanol Won-Ick Jang, Chang-Auck Choi, Myung-Lae Lee, Chi-Hoon Jun, Youn Tae Kim, [2000]

Patterning of diamond films by RIE and its MEMS applications Guifu Ding, Jinyuan Yao, Aibin Yu, Xiaolin Zhao, Li Wang, Tianhui Shen, [2000]

Precise mask alignment design to crystal orientation of (100) silicon wafer using wet anisotropic etching Ping-Hei Chen, Chang-Ming Hsieh, Hsin-Yah Peng, Minking Chyu, [2000]

Powder blasting as a three-dimensional microstucturing technology for MEMS applications Eric Belloy, I. Zalunardo, Abdeljlail Sayah, Martin Gijs, [2000]


Elimination of wafer edge die yield loss for accelerometers Zhenjun Zhang, Kim Eskes, [2000]

Bulk micromachining of SOI wafers using double-sided lithography and anisotropic wet etching Henrik Roedjegard, Gert Andersson, [2000]

Fabrication of horn-shaped antenna array using SU-8 and application to the bolometer Taeseok Sim, Sung Moon, Sung Hwang, Kyoung-Soo Chae, Myung-Hwan Oh, [2000]

Design and fabrication of a micromechanical inverter Kyoung-Soo Chae, Seungoh Han, Minseok Song, Sung Moon, James Jungho Pak, [2000]

Heat- and oxygen-RIE-resistant polysiloxane resist with three-dimensional structure for high-

aspect-ratio microfabrication Keiji Watanabe, Miwa Igarashi, Shoich Suda, [2000]

Micromachining and Microfabrication Process Technology VII Plenary Session

Progress and profit through microtechnologies: commercial applications of MEMS/MOEMS Wolfgang Ehrfeld, Ursula Ehrfeld, [2001]

MEMS/MOEMS application to optical communication Hiroyuki Fujita, [2001]

Bulk and Surface Micromachining

Etching rate control of mask material for XeF2 etching using UV exposure Koji Sugano, Osamu Tabata, [2001]

Patterning of diamond microstructures by bulk and surface micromachining for MEMS devices Yongqing Fu, Hejun Du, [2001]

Fabrication of the refined MEMS-based compound grating (MCG) based on silicon micromachining Yahong Yao, Bai Xu, James Castracane, [2001]

Toward the micromachined vibrating gyroscope using (111) silicon wafer process Jerwei Hsieh, Wen-Chih Chen, Weileun Fang, [2001]

Planarization of deep trenches Cristina Rusu, Gerard Klaasse, Sherif Sedky, Heleen Esch, Brigitte Parmentier, Agnes Verbist, Ann Witvrouw, [2001]

Stiction-free release etch with anhydrous HF/water vapor processes Ron Hanestad, Jeffery Butterbaugh, Abdselem ben-Hamida, Ilaria Gelmi, [2001]

LIGA /Plating/Molding/High Aspect Ratio

Multilevel microstructures and mold inserts fabricated with planar and oblique x-ray lithography of SU-8 negative photoresist Linke Jian, Yohannes Desta, Jost Goettert, [2001]

Process strategies for ultradeep x-ray lithography at the Advanced Photon Source Derrick Mancini, Nicolai Moldovan, Ralu Divan, Francesco De Carlo, Judith Yaeger, [2001]

Stacked ultradeep x-ray lithography exposures: preliminary results Georg Aigeldinger, Yohannes Desta, Jost Goettert, Franz Pantenburg, [2001]

Lamb waves generated by laser Yihui Wu, Hongguang Jia, Hui Ju, [2001]

Micromachining and Microfabrication Process Technology VII (cont.)

Laser Processing

Laser microchemical etching of waveguides and quasi-optical components Christian Drouet d'Aubigny, Christopher Walker, Bryan Jones, [2001]

Novel process for high reflectivity of Al sidewalls of optical mirrors using KrF excimer laser

annealing Moon-Youn Jung, Hojun Ryu, Myung-Lae Lee, Chi-Hoon Jun, Youn Tae Kim, [2001]

Excimer laser surface micromachining of LiNbO3 for realization of optimized optical modulator electrode structures Han-Woo Chong, Arnan Mitchell, Jason Hayes, Michael Austin, [2001]

Fabrication of axisymmetric ceramic microparts using pulsed laser ablation Karl Boehlen, Phil Rumsby, Alfred Cerezo, Min Huang, [2001]

Prediction of particulate characteristics in an expanding laser plume Dustin Blair, Mark Tillack, Mofreh Zaghloul, [2001]

Packaging/Wafer Bonding I

Mechanical gripper system for handling and assembly in MEMS Dragan Petrovic, Gordana Popovic, Elias Chatzitheodoridis, Oscar Del Medico, Ana Almansa, Helmut Detter, Werner Brenner,

[2001]

Parallel micromanipulation method for microassembly Jeongsik Sin, Harry Stephanou, [2001]

Method of bond strength evaluation for silicon direct wafer bonding Alexander Spivak, Avag Avagyan, Brady Davies, [2001]

Wafer dicing by laser-induced thermal shock process Kaidong Ye, Chengwu An, Ming Hui Hong, Yongfeng Lu, [2001]

Packaging/Wafer Bonding II

Integrated cavity wafer level chip size package for MEMS applications Danny Weiss, Doron Teomim, Avner Badihi, Gil Zilber, [2001]

Ultraprecision manufacturing of self-assembled microsystems Andre Sharon, Axel Bilsing, Gordon Lewis, [2001]

Silicon grisms fabricated by anisotropic wet etching and direct silicon bonding for high-

resolution IR spectroscopy Elena Cianci, Vittorio Foglietti, Fabrizio Vitali, Dario Lorenzetti, [2001]

Gold damascene interconnect technology for millimeter-wave photonics on silicon Hiromu Ishii, Shouji Yagi, Tadashi Minotani, Yakov Royter, Kazuhisa Kudou, Masaki Yano, Tadao Nagatsuma, Katsuyuki

Machida, Hakaru Kyuragi, [2001]


Micromachining of packaging materials for MEMS using lasers Vijay Kancharla, Kira Hendricks, Shaochen Chen, [2001]

Analysis/Characterization/Test I

Young's modulus measurement of aluminum thin film with cantilever structure ByoungChan Lee, SangHun Lee, Hwasu Lee, Hyungjae Shin, [2001]

Fluid flow in a microchannel: a stochastic approach Hilda Black, Raja Nassar, Weizhong Dai, [2001]

Micromachined silicon slits for beam diagnostics in particle accelerators Elena Cianci, Andrea Notargiacomo, Alessandro Cianchi, Vittorio Foglietti, [2001]

Modeling of the comb actuator deformed by microloading effect in deep reactive ion etching June-Young Lee, Seong-Hyok Kim, Hyung-Taek Lim, Che-Heung Kim, Yong-Kweon Kim, [2001]

Real-time in-situ microscopic observation of bubbles and roughening in KOH etching of silicon Alvimar Louro, Jose Senna, [2001]

Analysis/Characterization/Test II

Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-

processing surface micromachining Hoa Pham, Charles de Boer, Kees Kwakernaak, Wim Sloof, Pasqualina Sarro, [2001]

Novel bonding method for polymer-based microfluidic platforms Siyi Lai, Yeny Hudiono, Ly Lee, Sylvia Daunert, Marc Madou, [2001]

Material and Equipment I

Micromachining of ultrananocrystalline diamond Nicolai Moldovan, Orlando Auciello, Anirudha Sumant, John Carlisle, Ralu Divan, Dieter Gruen, Alan Krauss, Derrick Mancini,

A. Jayatissa, John Tucek, [2001]

Progress on 300-mm wafer lithography equipment and processes Karl Mautz, John Maltabes, [2001]

Direct spray coating of photoresist for MEMS applications Nga Pham, Tom Scholtes, Ruud Klerk, Bernhard Wieder, Pasqualina Sarro, Joachim Burghartz, [2001]

Engineering in- and out-of-plane stress in PECVD silicon nitride for CMOS-compatible surface micromachining Rhodri Davies, Mark McNie, Kevin Brunson, David Combes, [2001]


Material and Equipment II

Conformal deposition of LPCVD TEOS Paul McCann, Kumar Somasundram, Stephen Byrne, Andrew Nevin, [2001]

Applications of shape memory alloys: advantages, disadvantages, and limitations A. David Johnson, Valery Martynov, Vikas Gupta, [2001]

Photochemical selective surface modification using micromirror array for biochip fabrication Kook-Nyung Lee, Dong-Sik Shin, Woo-Jae Chung, Yoon-Sik Lee, Yong-Kweon Kim, [2001]

Heterogeneous catalysis in a microscale reactor fabricated from a biologically active polymer Bill Elmore, Ronald Besser, Zonghuan Lu, Andrea Forrest, Rui Jiang, Francis Jones, [2001]

Poster Session

Comparative analysis of silicon wafers micromachining versus nonconventional technology Dumitru Ulieru, [2001]

Binary optic diffuser design Adam Fedor, [2001]

New structure and fabrication process for thermal-type microsensors Han Ji-song, Tadashi Kadowaki, Kazuo Sato, Mitsuhiro Shikida, [2001]

Fabrication of electromagnetic micromirror array YunHo Jang, Yong-Kweon Kim, [2001]

Micromachined thermal actuated microlegs for an insectlike microrobot Agnes Bonvilain, Jean-Rene Coudevylle, Pascal Blind, Nicolas Chaillet, [2001]

Fabrication of highly sensitive thermal microflow sensor with surface-micromachined vacuum

platform for gas and liquid applications Chi-Hoon Jun, Chang-Auck Choi, Won-Ick Jang, Youn Tae Kim, [2001]

Integrated microreactor and its components for dehydrogenation of cyclohexane to benzene Adam Reppond, Yu Liang, Ji Fang, Tianhong Cui, [2001]

Method to achieve large displacements using comb drive actuators Guangya Zhou, Duongsin Low, Philip Dowd, [2001]

Properties of (311) planes anisotropically etched in (100) silicon by TMAH Drago Resnik, Danilo Vrtacnik, Uros Aljancic, Matej Mozek, Slavko Amon, [2001]

Improved microwave performance on low-resistivity Si substrates by introducing an oxidized

porous Si interlayer Ziqiang Zhu, Yanling Shi, Yongfu Long, Peisheng Xin, Zongsheng Lai, [2001]


Optimization of EDP solutions for feature-size-independent silicon etching Kunchinadka Bhat, Chandana Yellempalle, Nandita DasGupta, Amitava DasGupta, Parimi Rao, [2001]

Orthogonal method for processing of SU-8 resist in UV-LIGA Jingquan Liu, Jun Zhu, Guipu Ding, Xiaolin Zhao, Bingchu Cai, [2001]

Anodic alumina as a basis for various-purpose micro-electro-mechanical devices Georgy Efremov, Nikolay Mukhurov, [2001]

Mechanism of enzyme-etching dichromated gelatin and swelling of gelatin Hongbo Li, Xiaoyang Huang, [2001]

Design and fabrication of micromachined microwave transmission lines Yanling Shi, Zongsheng Lai, Peisheng Xin, Li Shao, Ziqiang Zhu, [2001]

Micromachining and Microfabrication Process Technology and Devices Keynote Paper

Nanofluidics: enabling processes for biotech Umberto Ulmanella, Chih-Ming Ho, [2001]

RF Applications

Micromachined tunable rf capacitor with comb structure Yufeng Jin, Haixia Zhang, Min Miao, Kun Tang, Zhihong Li, [2001]

Surface-acoustic-wave device-based wireless measurement platform for sensors Han Tao, Wenkang Shi, [2001]

Micromachined variable capacitors with laterally positioned suspended plates Qingquan Liu, Qing-An Huang, [2001]

Sensors I

Surface-micromachined double-sided touch mode capacitive pressure sensor Gaopan Xu, Guangwen Chen, Guoqing Hu, [2001]

Phase detection scheme of vibratory gyroscope by 2D driving operation Heng Yang, Minhang Bao, Hao Yin, Shaoqun Shen, Bin Xiong, [2001]

Novel silicon-micromachined gyroscope with high Q at atmosphere Bin Xiong, Yuelin Wang, Lufeng Che, Weiyuan Wang, [2001]

Capacitive humidity sensor in CMOS technology Xian-Wei Yan, Ming Qin, Qing-An Huang, [2001]

Integrated pressure-sensing microsystem by CMOS IC technology for barometal applications Minxin Zhou, Qing-An Huang, [2001]

Bulk micromachined vibrating wheel rate gyroscope Rong Zhang, Zhongyu Gao, Zhiyong Chen, [2001]

Micromachining I

Effect of annealing on mechanical and optical properties of in-situ doped SiC thin films Hoa Pham, Charles de Boer, Cassan Visser, Pasqualina Sarro, [2001]

Comparison of the silicon three main crystal planes' surface roughness after etching in aqueous potassium hydroxide solutions Yanfeng Jiang, Qingan Huang, Qing-An Huang, [2001]

Atomic force microscope using a diamond tip: a tool for micro/nanomachining on single-

crystal silicon surface Qingliang Zhao, Tao Sun, Ying-Chun Liang, Shen Dong, Mingjun Chen, [2001]

Micromachining and Microfabrication Process Technology and Devices (cont.)

Design, simulation, and evaluation of novel corrugated diaphragms based on backside sacrificial layer etching technique Jing Chen, Li-Tian Liu, Zhijian Li, [2001]

Gray-scale mask fabrication system for diffractive micro-optics Shengyi Li, Zhe-hui Lin, Bing Luo, Yi-fan Dai, [2001]

Optical Devices

Magnetically actuated MEMS variable optical attenuator Wenjun Li, Xiaolin Zhao, Bingchu Cai, Guangya Zhou, Mingsheng Zhang, [2001]

MEMS-based variable optical attenuator Xuhan Dai, Xiaolin Zhao, Wenjun Li, Bingchu Cai, [2001]

Phase-shifting profilometer for measurement of the physical parameters of the fiber connector

endface Feng Qian, Xiangzhao Wang, Xuefeng Wang, [2001]

All-fiber sinusoidal phase-modulating laser diode interferometer insensitive to the intensity change of the light source Xuefeng Wang, Xiangzhao Wang, Caini Zhang, Danyang Yu, Gaoting Chen, [2001]

Fiber-optic choline biosensor Xiaojian Cao, Ke Jia, Xueting Chai, Hua Lu, Zuhong Lu, [2001]

LD array end-pumped Nd:YVO4 laser with an optical isolator Yuanqing Huang, Yongming Chen, Limiao Zhu, Jinghua Zeng, [2001]

Actuation

Design of thin-film-based microgrippers Weiming Huang, Xiangyang Gao, Jun Tan, [2001]

Hydrogen-induced actuation: a new active mechanism for MEMS Yi Zhang, Guifu Ding, Chunsheng Yang, Aibin Yu, Bingchu Cai, [2001]

Characterization and MEMS application of sputtered TiNi shape memory alloy thin films Hejun Du, Yongqing Fu, [2001]

Effect of microstructure of TiNi/Si diaphragm on thermal-actuating performance Xiulan Cheng, Dong Xu, Jian Chen, Bingchu Cai, Guifu Ding, [2001]

Structural optimization of NiTi/Si diaphragm used in micropumps Li Wang, Jian Chen, Dong Xu, Bingchu Cai, [2001]

Driving property of twist-roller friction mechanism in ultraprecision positioning system Bing Luo, Zhe-hui Lin, Shengyi Li, Yi-fan Dai, [2001]


Modeling

Experiments and a new model on damping in rare air Hao Yin, Minhang Bao, Heng Yang, Shaoqun Shen, Bin Xiong, [2001]

Numerical modeling of a SiN beam resonant pressure sensor Deyong Chen, Dafu Cui, Li Wang, Zhongyao Yu, [2001]

Study of signal process of gas sensor array with nonlinear principal component analysis Guangfen Wei, Zhenan Tang, Jun Yu, Philip Chan, [2001]

Adaptive modeling of MEMS system-level simulation based on evolutionary computation Daoheng Sun, Chengzhi Wang, Wenwang Li, [2001]

Analysis of a novel MEMS electrostatic comb actuator for optical switching Pei-dong Yu, Guozhong Wang, Minghua Chen, Shizhong Xie, [2001]

Micromachining II

Polymer and glass etching by ArF and XeCl excimer lasers Qihong Lou, Lin Zhang, [2001]

Fabrication of high-aspect-ratio microstructure on metallic substrate using SU-8 resist Jingquan Liu, Bingchu Cai, Jun Zhu, Guipu Ding, Xiaolin Zhao, Chunsheng Yang, Di Chen, [2001]

DEM microfabrication technique and its applications in bioscience and microfluidic systems Di Chen, Fan Yang, Min Tang, Yigui Li, Jun Zhu, Dacheng Zhang, [2001]

Study of the Novel technique of laser shocking fine partial forming of metal sheet Yongkang Zhang, Ming Zhou, Lan Cai, Youyi Xu, [2001]

Synchrotron light source and microlithography in Hefei National Synchrotron Radiation Laboratory Congliang Guo, Siyuan Huang, Yingui Zhou, Shinan Qian, [2001]

Sensors II

Position sensor in micro-electro-mechanical systems using a self-mixing laser diode Ming Wang, Shouping Nie, [2001]

Metallic oxide semiconductor field effect-transistor array-compound-type gas chemical microsensor Huang-ping Yan, Jun Guo, Yong-jian Feng, [2001]

Measurement of heat capacity of SnO2 thin films using micro-hotplate Jun Yu, Zhenan Tang, Guangfen Wei, Philip Chan, [2001]

Novel micromachined thermal anemometer based on lateral polysilicon diode flow sensor Ming Qin, Qing-An Huang, Zhao-Yong Zhang, Xianwei Yan, [2001]


Novel CMOS two-dimensional integrated gas flow sensor Zhao-Yong Zhang, Ming Qin, Qing-An Huang, [2001]

Absorption and emission properties of F-center-OH- defect pairs in cesium halides Chunyang Kong, Y. Ma, M. Dong, Wanlu Wang, Kejun Liao, J. Xu, [2001]

Label-free DNA hybridization detection with molecular beacon immobilized in photopolymerized acrylamide gel microarray Hong Wang, Jiong Li, Quanjun Liu, Heping Liu, Zuhong Lu, [2001]

Poster Session

Preparation and photoluminescence of nanowire array and films of cadmium sulfide by electrodepositing in organic solvent Xin Ju, Liangqiang Peng, [2001]

Mechanics characteristics of an electrostatic optical switch Yuan Luo, Yi Zhang, Shanglian Huang, [2001]

Modeling and fabrication of micro 3K-2-type planetary gear reducer utilizing SU-8 photoresist as alternative LIGA technology Weiping Zhang, Wenyuan Chen, Di Chen, Xiaomei Chen, Xiaosheng Wu, Zhengfu Xu, [2001]

High-aspect-ratio PMMA microstructures fabricated by RIE Aibin Yu, Guifu Ding, Chunsheng Yang, Changmin Li, Haiping Mao, Zhiping Ni, [2001]

Preparation and performance of silicon microchannel plate Qingduo Duanmu, Jingquan Tian, Ye Li, Tangren Dan, Yaohua Lu, Delong Jiang, Lichen Fu, [2001]

Application of liquid crystal display for binary optics Huijuan Zhang, Zhaoqi Wang, Hongli Liu, [2001]

Design and simulation of a multifinger micromechanical silicon accelerometer Jing-Xin Dong, Jun-Hua Qin, [2001]

Numerical analysis of a composite diaphragm microactuator Jian Chen, Bingchu Cai, Li Wang, Dong Xu, Xiulan Cheng, [2001]

Electrochemical studies of electrodeposition of nickel for LIGA microstructures Guifu Ding, Yi Zhang, Jingquan Liu, Xiaolin Zhao, Bingchu Cai, Tianhui Shen, [2001]

Electrochemical microactuator based on hydrogen-absorbing film: the principle and first results Guifu Ding, Yi Zhang, Chunsheng Yang, Xiaolin Zhao, Aibin Yu, Tianhui Shen, [2001]

Development of microflowmeters and microlenses using a new 3D microfabrication-DEM technique Di Chen, Min Tang, Zhimin Wang, Changmin Li, Zhiping Ni, Di Zhou, [2001]


Forces balance of micromachined accelerometer Yulie Wu, Xuezhong Wu, Shengyi Li, [2001]

Parallel manipulator for micro-assembly and micromachining Xuezhong Wu, Yulie Wu, Shengyi Li, [2001]

Capacitance-coupling micromechanical filter Binking Zhang, Qing-An Huang, [2001]

Surface relief of TiNiCu thin films Xiulan Cheng, Dong Xu, Bingchu Cai, Li Wang, Jian Chen, Gang Li, Shi Xu, [2001]

Design, fabrication, and characteristics of microheaters with low consumption power using SDB SOI membrane and trench structures Gwiy-Sang Chung, Sung-Kyu Choi, Hoy-Duck Nam, [2001]

Micromachined optical switch with a vertical SU-8 mirror Suyan Liu, Minqiang Bu, Xiongying Ye, Zhaoying Zhou, Dacheng Zhang, Ting Li, Yilong Hao, Zhimin Tan, [2001]

Fabrication of InGaAs/InGaAsP microcylinder by wet chemical etching Yuzhai Pan, Yongqiang Ning, Li Qin, Hui Suo, Yun Liu, Lijun Wang, [2001]

Angular-dependent magnetoresistance characteristics in Si(001)/NiO(300 A)/NiFe(t) bilayer

system Won Jae Lee, Jae Sung Song, Bok Min, Gwiy-Sang Chung, [2001]

Wheastone-bridge-type MR sensors of Si(001)/NiO(300 A)/NiFe bilayer system Jae Sung Song, Won Jae Lee, Bok Min, Gwiy-Sang Chung, [2001]

Microsensors and actuator arrays based on Pb(Zr,Ti)O3 thin film for AFM data-storage Jiaru Chu, Junfeng Lu, Yicheng Wu, Wenhao Huang, Ryutaro Maeda, Toshihiro Itoh, Tadatomo Suga, [2001]

Fabrication of a micromold using negative PMER Young Kwon, Kyoung-Soo Chae, Dae Jeoung, Jong Kim, Sung Moon, [2001]

Optimization of two-photon excitation for 3D optical data storage DeQiang Chen, YongJun Zhou, Wenhao Huang, Andong Xia, [2001]

Earthworm-based miniature robot for intestinal inspection Dongxiang Chi, Guozheng Yan, [2001]

Fabrication of microstamps used for oligonucleotide array synthesis Pengfeng Xiao, Nongyao He, Zhengchun Liu, Quanguo He, Jiqing Xu, Zuhong Lu, [2001]

Hydrophilic surface formation on PDMS stamp by microwave plasma-induced grafting Quanguo He, Zhengchun Liu, Nongyao He, Pengfeng Xiao, Zuhong Lu, [2001]


Fabrication of polyurethane molecular stamps for the synthesis of DNA microarray Zhengchun Liu, Quanguo He, Pengfeng Xiao, Nongyao He, Zuhong Lu, Liang Bo, [2001]

Peptide nucleic acid (PNA) biosensors for DNA recognition Jiong Li, Hong Wang, Lu Cheng, Yujie Zhao, Heping Liu, Nongyao He, Zuhong Lu, [2001]

High-sensitivity stress-sensitive differential amplifier with gain control and temperature compensation Jingjing Li, Ruifeng Yue, Li-Tian Liu, [2001]

Design and fabrication of a novel micromechanical variable optical attenuator Cong-Shun Wang, Hongju Li, Jing Fang, Dacheng Zhang, Sheng Chang, [2001]

Polysilicon micromachined switch Zhengyuan Zhang, Zhiyu Wen, Shilu Xu, Kaicheng Li, Zhengfan Zhang, Shanglian Huang, [2001]

Documents

Micromachining and Microfabrication Process Technology