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SCME’s Microsystems and MEMS
Educational Resources
Made possible through a grant from the National
Science Foundation DUE 1205138
Dr. Matthias Pleil
University of New Mexico, Albuquerque, NM
MEMS in STEM
The Southwest Center for Microsystems
Education (SCME) strives to increase the
educational capacity to produce technologists
skilled in assisting microsystem research,
design, and commercialization activities.
What are MEMS?
• MEMS = Micro-electro-mechanical-systems
• Microsystems is all encompassing
– MEMS
– Micro-optics
– Microfluidics
– Biomolecular
– Semiconductors
MEMS3-axes accelerometer
with electronic
interface, used for
airbag deployment[Courtesy of Sandia National
Laboratories]
Microfluidics Channels and chambers
[Courtesy of Luke Lee @ UC-Berkeley]
Waveguides for RF and microwaves,
optics and fluids[Courtesy of Sandia National Laboratories]
What are MEMS?
Micro-Optics:
Digital Mirror Device (DMD)Digital projection, optical metrology, and
optical networking [Images courtesy of
Texas Instruments]
Microfluidics:
Cell Culture Environments
A microenvironment for growing cells in vitro
and in parallel, allowing for the analysis of
multiple cell growth conditions. [Developed by and courtesy of BioPOETS Lab, UC-Berkeley]
See the MEMS Applications Overview Learning Module
Why Do We Care?
Industry Tech Demand
New Hires/Positions projected
• Large scale enterprises: 10%
• Medium scale enterprises: 20-50%
• Small scale (startups): 100%
Supports evolving STEM programs to
include MEMS elements.
Heat Map of MNT Industries
How are MEMS made?
• In a “Clean Room”
– Cleaner than an operating room!
– With High Tech Equipment!
– Requiring all kinds of STEM skills!
How are MEMS Made?
Biochip slide for testing protein arrays
[Image courtesy of Argonne National
Laboratories]
• Three major methods:
– Surface Micro Machining
– Bulk Micromachining
– LIGA
• Additional technologies
– Laser machining
– Plastic injection molding
– Micro machining
What do you need to
know?
SCME used a reverse engineering approach:
What does a MEMS Technologist need to
know to fabricate a MEMS device and
understand how it works?
We leveraged the fabrication process of a
simple micro-pressure sensor as a guide to
constructing a series of educational modules!
Picked a classic device!
• Pressure Sensor – “Classic”
• Theory of operation – Wheatstone
Bridge, strain, pressure
– Electronics, Physics, Materials…
• Surface & Bulk Fabrication
MEMS Blood Pressure Sensors on the
head of a pin. [Photo courtesy of
Lucas NovaSensor, Fremont, CA]
SCME Pressure Sensor
Pressure Sensor
• Used to construct a series of educational
modules to teach MEMS fabrication
technologies and applied electronics
(Wheatstone Bridge)
• Simple two-mask process includes:
– Thin Film Deposition
– Photolithography & Etch
– Liftoff
– Evaporation
– DRIE and Anisotropic Wet Etch
Fabrication Topics
Understanding the fabrication of a pressure sensor requires
these learning modules:
Safety
• Hazardous Materials
• Chemical Lab Safety
• Material Safety Data Sheet
• Interpreting Labels
• Personal Protective
Equipment
• MTTC Safety Course
Cleanroom Fabrication Process
• Photolithography
• Dry and Wet Etch
• Thin Film Deposition & Oxidation
• Materials
Electronics
• Wheatstone Bridge
• Transducer principals
Some Additional Topics
What are MEMS and where are they used?
– Application Overview
– BioMEMS Overview
How do they Work?
– Micro-Cantilever & Pressure Sensor
– Micro-pumps
What is the history of microsystems?
– History of MEMS
SCME’s Approach
Learning Modules made up of SCO’s
“Classic” Education Materials
We create Educational Materials in a modular format
to facilitate scaling, loosely based on a SCORM
concept.
• Learning Modules consist of Instructor and
Student guides.
– Primary Knowledge SCO’s – “PK’s”
• Reading materials
– Activity SCO’s
• Worksheets, homework, …
– Assessment SCO’s
• Quizes….
KITS
The kits were developed initially to bring the
cleanroom concepts into the classroom and
give students as much “hands-on”
experiences as possible.
Application: Anisotropic Etching
It’s a Kit!
To Understand this,
you need to
understand
Crystallography!
Science of Thin Films:
Rainbow Wafer
Oxide Growth
Thin Film Etch
Etch Rate, Graphing
Thin Film Interference
PS Process
• Pressure sensor process from bare
silicon to a finished device!
• Die from 10 steps for students to
match to the documentation
Other Kits
• Gene Chip
• Cantilever Kit
– Frequency Vs L, W, T & Materials
– Data Acquisition & Analysis
– Writing, Team work
• LIGA - Lithography & Electroplating
• MEMS Innovators
Professional Development
• HOLA - Online Short Courses!
• 4 & 5-day cleanroom workshops
• 2-day workshops
• 1-day workshop
• Conference Presentations and workshops
• Created hubs at other colleges to teach workshops
• Webinars
• Mentoring
SCME Hands-online Academy
(HOLA)
HOLA is a venue to train and develop a broader learning community
2016 Hands-online course offerings
• Career Pathways for MicroTechnology
• Crystallography w/Bulk Micromachining
• Microcantilevers
• BioMEMS Applications
• Micro Pressure Sensors
• Science of Thin Films
• More to come in 2017!
http://scme-nm.org
Face-to-Face Professional Development
vs. HOLA
29
1
53
83
36
62
22
120
0
20
40
60
80
100
120
140
2 Year Instructors 4 year Instructors Secondary Instructors Total
Face-to-Face Instruction HOLA Instruction
Hands-online Academy
HOLA
• All six courses are asynchronous
• 24/7 access to any of the open courses
• Courses are free of charge
• Participants are provided with educational materials needed to teach STEM concepts using microsystems applications
• 5 of the 6 courses utilize a SCME kit
• Participants can request a kit for free
• The course provides training on how to perform the kit activity
• SCME provides coaching on implementing the kit activity in the STEM classroom
• Moodle Distance Learning Platform
http://scme-nm.org/moodle
Who is using Hands-online Academy?
• HOLA has over 650 registered participants– 33 states
– 12 countries outside US: Canada, Mexico, Germany, Ireland, Norway, Slovakia, India, Singapore, Korea, & Malaysia, Spain, Vietnam
– 483 registered in 2 or more courses
– 192 unique individuals registered in HOLA courses
• 171 unique US registrants
• 21 unique International registrants
Who is using Hands-online Academy?
1
PS Cleanroom Workshop
Educators 4-5 Day
Workshop
– Cleanroom Safety
and Protocol
– Processing
– Kits to bring to the
classroom
Cleanroom Sites:
UNM’s MTTC
CVTC
USF NREC
NDSCS
UM – LNF
SLCC (UofU)
“Art Wafer”
Simple ½ day activity
- Make a mask
- Pattern/etch an oxide wafer
- Cleanroom Protocol and Safety
- Basic processing
What can SCME do for you?
• 150+ Shareable Content Objects (SCOs)– Informational Units / lessons
– Supporting activities
– Supporting assessments
• 40+ Learning Modules– Safety
– Microsystems Introduction
– Microsystems Applications
– Bio MEMS
– Microsystems Fabrication
• 12 Instructional Kits + refills
• All are available @ scme-nm.org
Main Website
www.scme-nm.org
- Educational Materials
- Kits
- Events
- Main Menu
- Industry Mapping &
Career Links
- Social Media links
- Other Links – Centers,
Industry, YouTube…
SCME Resources
SCME Website
Hands-on Kit Store
Industry Maps
Educational Materials
Career Links
Events Calendar
UA MEMS DesignCompetition
Online Mentoring& Education
Online Meetings
Webinars on Demand
Moodle Courses
Workshops
Social Media
Duncan's Blog
Matt's Twitter
MEMS HSFacebook
Matt's Blog
Matt's LinkedIn
Video
SCME YouTube
Matt's YouTube
NEW: Hands-online
MNT Conference
ATMAE - MNTFocus Group
Hands-on Kits
Learning Modules
BioMEMS
Applications
Concepts Series
Therapuetics
Diagnostics
Overview
Bioterrorism Apps
CleanoomSafety &Protocol
MSDS
Hazerdous Materials
PPE
MEMS Fabrication
Photolithography
Etch
LIGA
Problem Solving
Deposition
Crystallography
Introductory
MEMSApplications/History
Units of Weights& Measures
Sensors/Actuators
Making Micro Machines
Pressure SensorFabrication
SCME - Not “just” a Website
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MonthlyDownload
SCMEDocumentDownloadsbyMonthCorrectedforRepeatedDownloads
ThroughOctober2016-246kUniqueDownloadsTotal
Educational Materials
DownloadsOver 250 documents
• 38 Learning Modules
• 12 Kits
For a complete listing, see Learning Modules Catalogue
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Who’s Downloading?
IP Heat Map
~6k Downloads/month
40k Unique IP addresses
http://www.openheatmap.com/embed.html?map=OeaxBikedClatonia
YouTube Views
• #2 search engine on the planet
https://www.youtube.com/user/SCME2012
Matt’s YouTube
https://www.youtube.com/channel/UCyAvnKdlKo3WKkQOragW2EA
1650 Subscribers
Industry Clickable Map
http://scme-nm.org/index.php?option=com_content&view=article&id=403&Itemid=370
Take a Tour!
• www.scme-nm.org
Questions?
Matthias W. Pleil
(505) 272-7157
www.scme-nm.org
Find me on LinkedIn too!
