Microsystems Technology Office

William C. Tang, Ph. D.MEMS Program Manager

Microsystems Technology OfficeDefense Advanced Research Projects Agency

(703) 696-2254wtang@darpa.mil

http://www.darpa.mil/MTO/MEMS

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Overview of MEMS Programs Overview of MEMS Programs at DARPA and Applications in at DARPA and Applications in

Space Space

First Canadian Workshop on MEMS technology for aerospace First Canadian Workshop on MEMS technology for aerospace applications, the National Research Council Canada, April 12, 2001applications, the National Research Council Canada, April 12, 2001

[MEMS at DARPA and Space App Sent.ppt] Slide 2Microsystems Technology Office

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DARPA MissionDARPA Mission

Defense Defense ScienceScience

Information Information SystemsSystems

MicrosystemMicrosystems s

TechnologyTechnology

Information Information TechnologyTechnology

Special Special ProjectsProjects

Advanced Advanced TechnologyTechnology

Tactical Tactical TechnologyTechnology

Radical Innovation in

Support of National Security

[MEMS at DARPA and Space App Sent.ppt] Slide 3Microsystems Technology Office

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MEMS Application DomainsMEMS Application DomainsMEMS Exploder for TorpedoesMEMS Exploder for Torpedoes

Shear-Stress Sensor for Jet Fighter (Caltech)Shear-Stress Sensor for Jet Fighter (Caltech)

Pico SatellitesPico SatellitesMEMS Sensors for MunitionsMEMS Sensors for Munitions

M E M SM E M S

DARPADARPA

[MEMS at DARPA and Space App Sent.ppt] Slide 4Microsystems Technology Office

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Pico Satellite Potential Pico Satellite Potential ApplicationsApplications

Cooperative constellations Sparse aperture antennas Inspect and service missions Extremely agile launch-on-demand, short-

term, survivable and robust communications and surveillance space systems

[MEMS at DARPA and Space App Sent.ppt] Slide 5Microsystems Technology Office

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PicoSAT Aboard Stanford OPAL PicoSAT Aboard Stanford OPAL SatelliteSatellite

First demonstration: Launched by first flight of Minotaur 26 Jan 2000 (sponsored

by Air Force and Missile System Center) Two PICOSAT linked by 30-m-long tether jettisoned from a

mother ship, OPAL (Stanford), 7 Feb 2000 Operate MEMS RF switches in space

30-m-long tether for tracking & communication demonstration

[MEMS at DARPA and Space App Sent.ppt] Slide 6Microsystems Technology Office

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Pico Satellite Data Hopping Demo

MEMS in Pico SatellitesMEMS in Pico Satellites

Picosat 1

Picosat 2

Picosat 3MEMS RF switch

(Rockwell)

2.5 x 7.5 x 10 cm 250 gmPico Satellite(Aerospace Corp)

[MEMS at DARPA and Space App Sent.ppt] Slide 7Microsystems Technology Office

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MEMS-Replaceable Transceiver MEMS-Replaceable Transceiver ComponentsComponents

Off-chippassive

elements

ReceiverAnt 1 Ant 2

AntennaSwitch T/R

SwitchBandpass

Filter(Ceramic)

I

Q

Transmitter

Current research: Replace all off-chip passive elements with

MEMS resonators & filters chip-scale integration & improved performance

XstalTank

VCO

IF PLLChannel

Select PLL

ADC

ADCIF Mixer

IF LNA

AGC

RF LNAMixer

Image RejectFilter

(Ceramic)

IF Filter(Ceramic)

90°

XstalTank

VCOTransmit PLL

90°

DAC

DAC

ModulatorPower Amplifier

I

Q

Current Cell Phone BoardOff-chip C & L = 80% of area

[MEMS at DARPA and Space App Sent.ppt] Slide 8Microsystems Technology Office

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92 MHz Free-Free Beam µ-92 MHz Free-Free Beam µ-ResonatorResonator

Free-free beam µ-mechanical resonator with non-intrusive supports reduce anchor dissipation higher Q

[MEMS at DARPA and Space App Sent.ppt] Slide 9Microsystems Technology Office

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MEMS Actuators for Data StorageMEMS Actuators for Data Storage

Areal density: 1-100 Gb/cm2

Transfer Rates: 0.1-10 Mb/sSize: 0.5 cm3

Power consumption: <1W

Parallel atomic force imaging with MEMS to exceed densities of conventional magnetic and optical storage

[MEMS at DARPA and Space App Sent.ppt] Slide 10Microsystems Technology Office

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High-Energy-Density MEMS PowerHigh-Energy-Density MEMS Power

Honeywell Knock Engine Concept (New Start)

MIT Thermoelectric Generator Concept (New Start)

Ene

rgy

Den

sity

(W

-hr/

Kg)

MethaneTolueneTNTLithiumIon

125

4,000

12,000

15,000

CatalystPropane + Air

Sealing Plate

ThermopilesResistive Start-upHeater

Thin insulatingmembrane

Q

Q Q

[MEMS at DARPA and Space App Sent.ppt] Slide 11Microsystems Technology Office

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Integrated Fuel Cell and Fuel Integrated Fuel Cell and Fuel Processor (CWRU & Battelle)Processor (CWRU & Battelle)

Objectives Demonstrate a 10 milliwatt fuel processor operating with clean

liquid fuels (24 months) Demonstrate a 10 milliwatt fuel cell (24 months) Demonstrate a 50 milliwatt fuel processor operating with logistics

fuels (36 months)

Alumina wafer

Anode catalyst

Cathode catalyst

Polymer Membrane

Carbon Fuel Distributor

Current Collector

laser milled gas channels

Glassy insulation

Fuel Manifold

Concept – Fuel ProcessorConcept – Fuel Cell

[MEMS at DARPA and Space App Sent.ppt] Slide 12Microsystems Technology Office

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Swiss Roll Combustor (USC)Swiss Roll Combustor (USC)

P roducts

R eactan ts

C om bustionvo lum e

1600 1200 400 300 K500

1400 600 5007001600

(a ) (b )

~ 5 mm

3-D toroidal Swiss roll microcombustor/generator