Overview of Nano Manufacturing Technology and …web.mit.edu/nanosymposium/www/Presentations/gweon.pdf · Overview of Nano manufacturing Technology Nanotechnology development step

Overview of Nano manufacturing TechnologyOverview of Nano manufacturing Technology

Overview of Nano Manufacturing Technology and Nano Manufacturing-Related R&D Activities in Korea

27 April 2003DaeGab Gweon, KAIST, Korea


Contents

Overview of Nano Manufacturing

• Importance of Nano Manufacturing• Characteristic features of Nano Manufacturing• Configuration of Nano Manufacturing System

Nanotechnology research activities in Korea

• Nanotechnology research activities in Korea• Nanotechnology research activities in KAIST


Nanotechnology development step

Categories of Nanotechnology development Categories of Nanotechnology development

Basic researchBasic research

Technical innovationTechnical innovation

CommercializationCommercialization

Fundamental research related to nano-scale phenomena

Technical innovation using basic research results

Commercialization of innovative technology

Using Nano Manufacturing TechnologyImportance of each categoryImportance of each category

100%

Importance

Emerging period(1990’s)

Growth period(2000’s)

Maturity period(2010’s)

Commercialization

Technology innovation

Basic research


100nm 10nm

Application fields of Nano Manufacturing

100um 1um

Micro structure (300nm)

Nano chip (10nm)

Micro optics (80 )MEMS (200 )

Micro chip (1 )Micro parts (100 )Semiconductor (60nm)

CNT component (10nm)

Optical Pickup (200 )

Slider(100 )

Optical communication(2 )

VCSEL module(10 )

CNT TR (10nm)

Probe type pickup(100nm)

Circuit component

(1 )

Gold particle(20nm)

Plant cell (20 )

Sperm (10 )

Yeast (2 )

Animal Cell (100 ) Flagellate (1 )

Chromosome (500nm)

Virus (20nm)

Ribosome (100nm)

DNA (2nm)

Nano Bio Sensor (10nm)

Nuclear transfer(100 )

BT

IT/NT


Importance from technical viewpoint

Manufacturing speed

Manufacturing accuracy

several um

several 100um

Several Hz

Limit of Manual Manufacturing

AutomatedNano manufacturing

is necessary

Technology innovation results

to be manufactured

Technology innovation results

to be manufactured

Miniatu

rizati

on

Increa

sing d

eman

d

Low accuracySmall volume production

High accuracyMass production


Importance from industrial viewpoint

Commercializationof innovation results

Nano ManufacturingSystem

High precision mass production

High precision handling

High pr

ecisio

n mas

s prod

uctio

n

Technical innovationin IT/NT/BT

Speed up of technical innovation


Key Technologies in Nano Manufacturing System

Key technologies in Nano Manufacturing System

are Nano measurement, Nano manipulation, Nano processingto produce nm-to-um scale functional components in IT, NT, BT fields

Nano Manufacturing


Nano Manufacturing Processes are coupled !

Processing

Measurement Manipu

lation

Most Nano Manufacturing tasks need multiple

processes

Single-process system : Nano Manufacturing system in which only one key process is carried outMulti-process system : Nano Manufacturing system in which 2~3 key processes are carried out together


Manufacturing time reduced in multi-process system

processingmeasurementmanipulation

Workpiecesetting

100%

Manufacturingtime

Single-process system Multi-process system

Single-process system : Processing?Measurement?Change of processing condition?Processing : long process timeMulti-process system : Processing+Measurement+Manipulation can be processed simultaneously : short process time


Configuration of Nano Manufacturing SystemMeasurement system

Manipulation system

Processing system

Control System

Nano Interface


Illustrative details for each key technology

• PZT actuator• Voice Coil Motor• Linear Motor• Multi- DOF nano manipulation

system• Flexure hinge mechanism• Nano precision guide mechanism• Nano precision displacement

sensor• Flexure motion mechanism• Beam deflecting actuator• Inchworm mechanism

• E-beam lithography• Ion-beam lithography• Imprinting• Thin film deposition• Nano dispenser• Wafer repairing tool• CNT handling tool• Optical tweezers• Optical scissors• DNA/protein handling tool• Nano welding tool• MEMS device driven nano

component capturer• Material removal processing• Scanning probe processing• Optical probe processing

• Confocal scanning microscope• Near field scanning optical

microscope• X-ray microscope• Atomic force microscope• Scanning tunneling microscope• Scanning electron microscope• Transmission electron

microscope• Vision based hybrid measuring

system

Measurement Processing Manipulation


Characteristic features from industrial viewpoint

Strong technical impact

• Expansion of IT/NT/BT infra-structures

• Contribution to IT/NT innovation

• Contribution to BT innovation

Highly profitable industry

Large market volumeEmerging technology/market

Nano actuator industry

Nano sensor industry

Nano production industry

Optical communication assembly industry

High precision instrument industry

Bio manipulation industryNano manipulation

industry

Nano measurement industry

CNT market

Cell manipulationmarket Data storage market

Optical communication market

MEMS componentmarket

LCD market

Optical component market

Semiconductor market

DNA manipulation

market


Characteristic features from technical viewpoint

Hybrid positioning system

Long range(cm) High resolution(nm)positioning (10 -7 uncertainty)

Hybrid measurement system

Long range (cm3) High resolution(nm3)measurement (10 -7 uncertainty)

Real-time, high precision, inner structure inspection/manipulation

Real-time transparent inner structure inspection

Complex multidisciplinary technology integration

Multidisciplinary technology

UHV, high performance anti-temperature/humidity/vibration design

Robustness against the disturbance(temperature,humidity,pressure

variation)

High technology


Characteristic features from technical viewpoint

Mechanical Engineering

Physics Computer Engineering

Biology

Electrical Engineering

Nano Manufacturing

Multi-Facet Technology



Large PDP, LCD displayCircuit manufacturing

Digital controlHigh density storage

Center for next-generation display technology

(2002~2012)FY 180 million $(Hanyang Univ.)

Nanostructured Materials Nanostructured Optical

MaterialsNano tube mass production

Center for NanostructuredMaterials Technology

(2002~2012)FY 107 million $

(KIST)

Nano ElectronicsSpintronics

Molecular ElectronicsNano Lithography

Tera-level Nanodevices(1999~2009)

FY 142.4 million $(SAIT)

Nano PatterningNano Probing

Nano AssemblyNano-manufacturing

Nano Control

Center for NanoscaleMechatronics & Manufacturing

(1999~2009)FY 142.4 million $

(KIMM)

Activities in Research Institutes



Large capacity StorageScanning Probe Microscope

Near Field Recording

Development of Next Generation Large Capacity Information Storage Device

(1999~2002)FY 8 million $

(ETRI)

Nanocomposites Nanopowders

Bulk NanomaterialsNanodevices

High Performance Nanocomposites Program

(1999~2002)FY 6 million $

(KIST)

System IC ManufacturingLithography

CMPProcessor

A Collaborative Project for Excellence in Basic System

IC Technology(1998~)

FY 30 million $/year(COSAR)

Nano CompositeNano fabricationNano PatterningNano MachineNEMS/MEMS/

Ultra precision measurement and Control

Creative Research Initiative Groups(1997~ )

FY 24 million$/year(KIST, KAIST, and etc)

Activities in Research Institutes



Activities in industry

• PET Nanocomposite for characteristic improvement of Gas barrier

• Nano material for CMP• Paste for cigarette filter and cosmetics

Others

• MRAM using nano structured ITO, SET-memory, spin array of magnetic material

• Reliability study of flash memory using discrete charge-storage

• Tera-bit CNT memory device• High-density, low-power consuming, high speed single

electron memory device using quantum phenomena in nano structuring

• Nano data storage system• Tera-bit data storage device• Tera-bit CNT memory device• Hybrid nano particle• Display technology using CNT• MR component and individual process for MRAM• Circuit using single electron

Semiconductor industry

(Samsung, LG, Hynix)


Nanotechnology research activities in KAIST

?Vision for NT of KAIST

?Need and Objective

?The Nanotechnology is one of key technologies in 21 century along with BT, IT, ET, CT.?There are sufficient demands for Nanotechnology research and education.?KAIST has various research groups and facilities for Nanotechnology. ?KAIST fosters creative and interdisciplinary scientists(engineers) who will lead Nanotechnology advancement.?KAIST sets a goal of developing several creative technologies and educating professionals in Nanotechnology field.

?Establishment of Nano Fab. Center (under construction)?Establishment of KAIST Nano Research Institute. (2001.11)?Nano-Soc (system on chip) (under construction) ?Nanotechnology Interdisciplinary Program has been established in 2002 and total 9 departments are involved.?Participation in “National Nano Technology Development Plan” which is mainly concentrating on the development of semi conductor-related nanodevices and nanomaterials.

?Plan



?Total 89 Labs in 13 departments are involved.

- 4 Creative Research Centers :Center for Nanospinics of Spintronics MaterialsDigital Nanolocomotion CenterCenter for Functional NanomaterialsCenter for Billionth Uncertainty Precision Engineering

- 2 Engineering Research Center :Center for Advanced Functional PolymersCenter for Ultramicrochemical Process Systems

- 8 National Research Laboratories :Semiconductor Thin Film, Electon Microscopy, Protein Microscopy,Nano Laser, Quantum Computation, Environmental Catalysis, Biomolecular Eng., Carbon-Metal Hybrid Nano Materials.



Nanomaterials(43)

Nanodevices(23)

Nanocharacterization(8)

Nanotheory(15)

?Nanomaterial

?Nanodevices

?Nanocharacterization

?Nanotheory

Nanomagnetic material, Self assembleed nanomaterials, Nanocomposites, Nanobiomaterials, Nanopaticles, Hybrid-nanomaterials, Nanoporus materials, etc.

Quantum Computer, Nanophotonics, Nanoelectronics, SET, Nanobiochip, Nanolocomotion, Nanopositiong devices, MEMS/NEMS, etc.

Electrochemical, Neutron/Proton, Nanocontact chracterization

Nanoelectronics structure, NanosimulationTotal 89 Labs


Nano Fab. Center in KAIST

Research Development

?Provide repeatable and stable processing service.?Manufacturing prototype service.?8 inch wafer processing.

Nano PI Lab. Nano Device Lab

Maximize synergy effect by collaborating with satellite Labs

?Establish fundamental technology.?Processing services for atomic manipulation, biochemical bonding& MEMS.?Specimen processing

Contribution to NT advancementContribution to

NT advancement

Fundamentalidea

Commercialization

One-Stop Service


Satellite institutes of KAIST Nano Fab. Center

Korea Research Institute ofBioscience and biotechnology

Korea Institute ofEnergy Research

Korea Research Institute ofChemical Technology

Korea Institute ofMachinery and Materials

Electronics and TelecommunicationsResearch Institute

Korea AerospaceResearch Institute

Korea Institute ofGeoscience and Mineral Resources

Hoseo University

Korea BasicScience Institute

Korea Research Institute ofStandards and Science

Korea Atomic EnergyResearch Institute

Korea Electric PowerResearch Institute

Nano Fab Center

All the institutes are located within 10 minutes


Nano Fab. Center in KAIST

NanoFab Center 1. class 1 : Nano Patterning Lab. / Characterization2. class 1,000 : Nano Device Lab.(8”) with SMIF3. class 10,000 : Nano Pi Lab. (= 6”) with flexibility

“Nano Fab. is a new field which applies nanotechnology to existing sciences and technologies and is a fusion of various studies integrated together.”


International Conference on Nano Manufacturing To Be Organized

? Sponsoring Organizations : KSME, KSPE, ICASE

? Purpose?To provide an international focus for exchanging technical information?To identify and resolve technical issues having to do with Nano Manufacturing Technology?To enable and promote commercialization of Nanotechnology-based products through

science and engineering of manufacturing

? Key Conference Scope?Theory, modeling and simulation?Nanomaterials?Fabrication/Processing?Instrumentation and Characterization?Nanodevices and Systems

? Highlights of Conference?Technical program

- Plenary Talks - Invited Sessions- Panel Sessions - Poster Sessions- Forums - Tutorials/ Workshops

?Technical Tour- To Nanotechnology-related industries and research institutes

? Organized by KAIST

Documents

Overview of Nano Manufacturing Technology and …web.mit.edu/nanosymposium/www/Presentations/gweon.pdf · Overview of Nano manufacturing Technology Nanotechnology development step