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MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Product development in micro and nanomanufacturing
Leo Alting and Hans Nørgaard HansenTechnical University of Denmark
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Department of Manufacturing Engineering and Management (IPL)
MPT PVL IOB
Materials and
Process Technology
Industrial Management
Innovation and
Sustainability
Micro/Nano Manufacturing
Modelling and Simulation
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Basic research Develpm.Applied research
Indu
stry
invo
lvem
ent
Production systems
Process development
Material development
Product development
Them
es
Research programme ”Micro/Nano Manufacturing”
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Research programme ”Micro/Nano Manufacturing”
IPL
DTU Other researchinstitutes
Foreign universities
Industrial companies
PR
OJE
CT
S
• Micro electronics centre• Mechanical engineering• Polymer centre• Optics and communication
• RISØ national lab.• Technol. Institute
• MIT• Univ. Stuttgart• Univ. Karlsruhe• Cranfield
• Danfoss• Grundfos• Bang & Olufsen• Novo Nordisk• Radiometer
• Coloplast• Nunc• Oticon• PINOL• A series of other SMEs
GO
AL
:50
-100
MD
KK
ove
r a
5 ye
ars
per
iod
(6-1
2 M
US
D)
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Small dimensions
© QFM ERLANGEN 2002
macromechanic micromechanic nanotechnology1 m 100 mm 10 mm 1 mm 100 µm 10 µm 1 µm 100 nm 10 nm 1 nm 0,1 nm
microdrive 42 mm x 30 mm parts < 1 mm (IBM)
singlepart(FZK)
micro motor(FhG IZM)rotor diameter 320? m
linear actuator (FZK)min. lateral dimension 1? m
28 CO-molecules on a platinum surface„Molecule Man“ (IBM)
stents (FZK) grid thickness < 50? m
flat screen (IFW)nanotubes ? 100nm carbon tube (IFW)
? 1nm
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Productdevelopment Production Product
Micro Product
DimensionsFunctionalityIntegration
Product/components
”Micro Engineering”
Characteristics of a micro product
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Micro products / Microsystems / MEMS
Dimensions
mm? mnm
Precision EngineeringMicro and Nano Technology
• Physics• Optics• Silicon
• Materials technology• Process technology• Production systems
Micro/NanoManufacturing
IntegrationCross-disciplinary problems
Industrial productionAssembly/packaging
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Analysis
Mainfunction
Sub-functionand means
Principlestructure
Quantitativestructure
Total form Form ofelements
Product development in the ”macro world”
Functionality
Specifications
Tolerances
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
SYSTEM
DEVICE
PHYSICAL
PROCESS
Ver
ifica
tion
Sim
ulat
ion
Micro system development
Iterative process
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Considerations in product development
DESIGN
Productdevelopment
Materialdevelopment
Processdevelopment
DO
Production
QA Metrology
AssemblyHandling
USE
Functionality
Marketdemand
Technologicalpossibilities
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Materials for micro products
X
SiliconUS
E IN
MIC
RO
PP
RO
DU
CTS
LOW
HIGH
MEDIUM X
X
X
X
XPolymers Metals Ceramics
Thin films
Products
Thin films
Products
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Microsystem Technologies(MST)
Microsystem Technologies(MST)
Microengineering Technologies(MET)
Microengineering Technologies(MET)
MEMS processesMEMS processes Energy assistedprocesses
Energy assistedprocesses
Mechanicalprocesses
Mechanicalprocesses
Replicationtechniques
Replicationtechniques
Handling, assembly, quality control etc.Handling, assembly, quality control etc.
Micro ProductMicro Product
Tec
hn
olo
gie
sTechnologies for micro manufacturing
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
SIZE OFCRITICALPRODUCT FEATURE DOWN SCALING
UP SCALING
Manufacturing of micro components and products
NEW PROCESSES AND COMBINATIONS OF PROCESSES
Microsystem Technologies(MST)
Microsystem Technologies(MST)
Precision Engineering Technologies
Precision Engineering Technologies
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
The development of technologies is based on twoapproaches
Product driven approachDesign products to:• Meet customer needs • Set up cost efficient production • Integrate handling and assembly
into products
Technology driven approach• How to apply materials,
processes and production technologies to manufacture products?
DESIGN MATERIAL PROCESSING PARTS /COMPONENTS ASSEMBLY PRODUCT
SPECIFICA-TIONS
CONTROLMEASUREMENT
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Known technology Trends
Existing products Known, newproducts
Market strategiesProduct strategies
Technologypush
Marketpull
Shortterm
Medium term
Longterm
Drivers of product development
???
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Challenges when developing and designing microproducts
• Interdisciplinarity (scientific fields, higher degree of integration)
• Standard construction elements not available
• Modularisation
• Focus on device level – less focus on system level
• System/product level– Assembly (hetero integration)– Packaging (connections with macro world, encapsulation)
• Coupled/decoupled design
• Alternative materials and new combinations of materials
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Master Mouldinsert Mould Injectionmoulding
Component
• Definition and specificationof geometry
• Lithographyand etching
• Gold layer• Electroforming• Separation of
master and insert
• Mechanicalpreparationof insert
• Fabricationof mould
• Materials• Process
parameters• Replication
quality
Typical proces chain for micro injection moulding
Si
Base for electrochemical deposition
Photo resist
Metal deposition
SiO 2
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Micro injection moulding of optical nanoatructures
• Sinosoidal surface(wavelength 700 nm, amplitude 500 nm)
• Replication quality– AFM – SEM– Optical techniques
-525
-25
475
975
1475
1975
-1000 -500 0 500 1000 1500
Tools insert (SEM)
Expected part geometry
Measured part geometry(AFM)
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
TOOLPLASTIC PART
Replication quality
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Silicon dissolved in KOH
Adhesion layers (Metallic PVD coating)Oxide layer
Silicion
Photoresist Electroplated Ni
Nikkel support
Metallic cantilever – what can we achieve usingelectroforming?
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
An integrated solution: support, tip and cantilever in oneconstruction element
CantileverCantileverTipTipSupportSupport
– Cantilever• thickness = 7 µm• length = 200 µm• width = 30 µm
– Tip• Pyramid height = 10 µm
– Support
• thickness = 97 µm
–– CantileverCantilever•• thicknessthickness = 7 µm= 7 µm•• lengthlength = 200 µm= 200 µm•• widthwidth = 30 µm= 30 µm
–– TipTip•• PyramidPyramid heightheight = 10 µm= 10 µm
–– SupportSupport
•• thicknessthickness = 97 µm= 97 µm
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Atomic Force Microscopy
10 µm
Detector
Laser
Cantilever
Tip Sapmle
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Local clean room facilities at IPL
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Micro/Nano Manufacturing – on the road to sustainability
• Life Cycle Assessment (LCA) Tools– IPU/IPL has developed the EDIP methodology– New LCA Center (data, software, dissemination)– Broadly internationally accepted
• Micro/Nano Manufacturing– Design rules (CAD based)– Database (tox, ecotox)– LCA software
• LCA will be an integrated part of our program• One of the difficulties in recycling is the integration of different
materials in products
MANUFACTURINGENGINEERING ANDMANAGEMENT
TECHNICAL UNIVERSITY OF DENMARK
Concluding remarks
• Micro manufacturing is characterized by complex process chains• Many scientific disciplines involved• Need for both a product driven and a technology driven
approach:– In the product driven approach methodologies and principles
in design of micro and nano products must be developed– In the technology driven approach a continuous development
of materials and processes is promoted supporting the new design principles