NATIONAL NANOFABRICATION CENTRE

CLEANROOM ADMINISTRATIVE COMMITTEE MEETING

TUMS Murthy27 Mar 2012

TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012

Agenda

Infrastructure installation and commissioning Utilities Fab Equipment

Operations Operation procedures and protocols User Training Preventive and Breakdown Maintenance ;

Planning for Consumables, spares etc Manpower

TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012

Utilities

All the utilities have been installed and commissioned

Following utilities did not meet the specifications and need modification Dry exhaust and dry scrubber BMS

Systems that have not been tested Wet Scrubber Humidifier Sprinklers

TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012

Utilities contd.

Utilities that need upgrading or enhancement Heat and smoke detector system. System

to be upgraded to an addressable system Biometric access for staircase to Mezzanine

floor Walkie-talkies for communication among

fab and utilities staff Utilities under installation

Borewell water treatment plant

TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012

Nanofab Tools

Litho All tools installed and commissioned

E-line vibration isolation to be installed Plasma processing

All tools installed and commissioned Wet procesing

3 out of 6 benches have been installed Replacement for broken Quartz baths received.

Waiting for installation engineer from Felcon to arrive to complete installation

TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012

Nanofab Tools

Films One sputter tool working Waiting replacement spares and Tecport

Engineer’s schedule for commissioning one more sputtering system and Ebeam evap system

Furnaces LPCVD 3 tubes working Problems with other tubes and the wet

scrubber to be resolved

TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012

Operations

Operation procedures and protocols Safety related Equipment operation procedures

User Training Training schedules under preparation

Utilities maintenance the key to operations Most critical systems out of manufacturer

warranty AMC with various manufacturers or with Ellipsiz

TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012

Operations contd.

Manpower recruitment and training is a priority For second shift staffing For Nano Fab Equipment and process

maintenance Fine tuning, enhancement and preventive

maintenance of utilities Preliminary quote obtained for Employee

Medical and Accident Group Insurance

TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012

Other Issues

Electrical Distribution continues to be a worry with several unexplained incidents Latest is the burnt contactors in the

Capacitance Bank for power factor correction

Root cause of earlier incidents of MCB tripping (ref : POU 610 scrubber ) and Noise from UPS could not be found

TUMS Murthy Cleanroom Admin Committee Meeting31 Jan 2012

Capacitance Bank damage

Insulation

Burnt