Instrumentation and Metrology for Nanofabrication

Haris Doumanidis Mechanical & Manufacturing Engineering – University of Cyprus

Tel: (357) 22892265 - Fax: (357) 22892254 - cdoumani@ucy.ac.cy

The NSF Nanomanufacturing Program Portfolio

FIB, Laser, CNT Emission and OpticalSurface Technologies

*Nanofabrication using sub- wavelength near-field nano- optical laser processing (S. Das, Univ. of Michigan)

* Staggered probes for integrating nanomachining and metrology (R. Vallance, Univ. of Kentucky)

* Novel low-cost nanolithography technique using nanometric high- transmission optical antenna (X. Xu, Purdue Univ.)

* FIB micromachining and advanced characterization of carbon nanotube-metal junctions (K. Dovidenko,

SUNY Albany)

Actuators and Controls For Nanofabrication

* Motion control platform for accurate measurement and manufacturing of nanostructures (S. Smith, UNC)

* NanoXerography: the use of electrostatic forces to pattern nanoparticles (H. Jacobs, Univ. of Minnesota)

* Advanced control algorithms for active materials actuators used in nanoscale positioning (S. Seelecke - N.C. State Univ.)

* Nanorobotics (A. Requicha, Univ. of S. California)

Sensors and Actuatorsfor Nanofabrication

* Torque spectroscopy for nanosystem characterization and fabrication (D. Cole, Duke Univ.)

* Manipulation and 3D organization of nanoparticles by dielectrophoresis (P. Alexandridis, SUNY Buffalo)

* Spatially resolved characterization of nano-porous SiC layers (S. Ostapenko - Univ. of South Florida)

* Protein-based nanomotors and nanorobots (C. Mavroidis, Rutgers Univ.)

Nanofabrication Research Issues in Instrumentation and Metrology

* Lab-on-a-chip MEMS instruments* Positioning, registration, alignment* 2D surface mapping and 3D imaging real-time sensors & off-line metrology* Simultaneous fabrication & in-process sensing integrated into machine* Decoupling of transduced information* Model-based software observation

* Scanning probe, near-field microscopy* Electron (SEM, TEM), ion beam,* Laser tweezing, X-ray spectroscopy, NMR* Synchrotron, neutron, photon sources

Parallel probe arrays and scanned systems Improved resolution and bandwidth for control Multi-scale integration: macro-MEMS-NEMS Multi-energetic domain measurement

.

Research Fields for Metrology at Nanoscale

* Nanomaterials* Nanomechanics* Nanofluidics* Nanoenergetics* Nanoinformatics* Nanocognition* Nanocontrols

•Virtual nanoenvironments•Neuron on silicon, remote AP•Nanoscale transportation•Transcription, transduction•Designer molecular blocks•Quantum manipulation/sensing•In-situ hardware control

Bioinstrumentation at Nanoscale

•Learning from Nature -Biomimetic instruments -Bioinspired measurement

•Working with Nature -Hybrid bio/abiotic structures -Biological metrology* Material/structural diversity* Multi-functionality* Redundancy* Synergy, symbiosis* Autonomous sustainability* Adaptation to environs* Evolution and learning* Self-repair* Self-replication* End-of-life cycle

Nanoinstrumentation Education and Training of Workforce

* Nanotechnology highlights in K-12 education :Center visits, guest expert lectures, curriculum etc.

* Introductory nanotechnology preview minicourses* Renewed physical & biological science courses, integrated to

engineering and inspired by nanotechnology context* New and revised curriculum spanning across departments* Nanoscience/nanotechnology minors (future majors?)* Nanotechnology research experiences for undergraduates and teachers* Internships in nanotechnology industry and federal laboratories* Development of course modules and multimedia materials

* Orientation workshops for prospective graduate students* Interdisciplinary grad/postdoc fellowships/traineeships* Nanotechnology education combined to research* Integration to business and entrepreneurial leadership * Continuing and professional education courses in nanometrology, distance learning via internet.

National Nanotechnology InfrastructureNetwork (NNIN)

Nano-Technology

Research

Nano-Technology

Research

NNUNNNUNNSECNSEC

Building blocksCoatings and

surfaces

Consolidates and composites

BiochemicalDispersions &

structures

Processing and integration

System architectures Modeling tools instruments

Electronic-magneticsystems

Photonics-Optics

Biodevicesand systems

Environmental, energy,health & safety systems

MRSECs,STCs, ERCs,

IUCRCs

* From discovery to prototype* New instrumentation & machines* 3-D Manufacturing tools* System integration and scale-up* Metrology, sensors and control* Teleoperation and simulation* Geographical distribution* Integration with Education* Involvement of Social Sciences* Broadening participation of public* International collaborations

Nanofabrication Processes Microelectronics Optics and Optoelectronics Materials Science Solid State Physics Nanostructure Science Micromechanics Microfluidics Quantum Structures Biophysics Chemical Sensors Polymers

Penn StateStanford

U.C. Santa Barbara

Howard

Cornell