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Advanced motion control for high-precision motion systems Preactuation perfect tracking control for system with unstable zeros Table Linear motor Linear encoder Air guide Carriage Linear encoder (b) FRF and 8 th order model Simulation results without modeling errors or disturbances Experimental results using 8 th order feedforward (a) High-precision stage (d) Discrete pz-map Unstable intrinsic zero × 2 Unstable discretization zero × 1 (c) Continuous pz-map Unstable zero × 2 Modeling results using frequency domain identification -95.4% -98.2% [W. Ohnishi, T. Beauduin, and H. Fujimoto, IEEE/ASME Trans. Mechatronics, 2019.] Preactuation Preactuation High-precision motion control by pneumatically actuated stage [W. Ohnishi et al., IEEJ J. Ind. Appl., 2018] Unstable zeros problem Unstable poles in inversion system Undershoot in step response Example: High-precision stage, boost converter, airplane… Solution Stable inversion by Time axis reversal & Imaginary axis flipping Multirate feedforward Stage Pneumatic Cylinder Time delay compensation by modified Smith predictor Position Tracking error Tracking error (magnified) Acoustic wave equation based modeling and vibration cancellation Pressure FB bandwidth Conv9.4 Hz (Gm:13dB, Pm 35deg) Prop31Hz (Gm:6.4dB, Pm:35deg) Position FB bandwidth Conv5.3 Hz (Gm:7dB, Pm 22deg) Prop11Hz (Gm:9.6dB, Pm:26deg) Precise modeling by damping considered wave equation Resonance cancellation by wave equation based SINGLE filter Precise pressure control achieved Resonance cancellation Position dependent resonances Time delay Wataru Ohnishi, [email protected] Pneumatic actuation Advantages High power to weight ratio Low heat generation Low cost Disadvantages Time delay Position-dependent resonances Valve & air dynamics nonlinearity -84%

Genigraphics Research Poster Template 48x36...Title Genigraphics Research Poster Template 48x36 Author Jay Larson Created Date 5/15/2019 11:11:53 PM

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Page 1: Genigraphics Research Poster Template 48x36...Title Genigraphics Research Poster Template 48x36 Author Jay Larson Created Date 5/15/2019 11:11:53 PM

Advanced motion control for high-precision motion systems

Preactuation perfect tracking control for system with unstable zeros

Table

Linear motor

Linear encoder

Air guide

Carriage

Linear encoder

(b) FRF and 8th order model

Simulation results without modeling errors or disturbances

Experimental results using 8th order feedforward

(a) High-precision stage

(d) Discrete pz-mapUnstable intrinsic zero × 2Unstable discretization zero × 1

(c) Continuous pz-mapUnstable zero × 2

Modeling results using frequency domain identification

-95.4%

-98.2%

[W. Ohnishi, T. Beauduin, and H. Fujimoto, IEEE/ASME Trans. Mechatronics, 2019.]

Preactuation

Preactuation

High-precision motion control by pneumatically actuated stage

[W. Ohnishi et al., IEEJ J. Ind. Appl., 2018]

Unstable zeros problem• Unstable poles in inversion system• Undershoot in step responseExample: High-precision stage, boost converter, airplane…

SolutionStable inversion by • Time axis reversal &

Imaginary axis flipping• Multirate feedforward

Stage

PneumaticCylinder

Time delay compensation by modified Smith predictor

Position Tracking error Tracking error (magnified)

Acoustic wave equation based modeling and vibration cancellation

Pressure FB bandwidthConv:9.4 Hz (Gm:13dB, Pm 35deg)Prop:31Hz (Gm:6.4dB, Pm:35deg)

Position FB bandwidthConv:5.3 Hz (Gm:7dB, Pm 22deg)Prop:11Hz (Gm:9.6dB, Pm:26deg)

Precise modeling by damping considered wave equation

Resonance cancellation by wave equation based SINGLE filter

Precise pressure control achieved

Resonance cancellation

Position dependent resonancesTime delay

Wataru Ohnishi, [email protected]

Pneumatic actuationAdvantages

• High power to weight ratio• Low heat generation• Low cost

Disadvantages• Time delay• Position-dependent resonances• Valve & air dynamics nonlinearity

-84%