Article Bup Mems

7/22/2019 Article Bup Mems

1/22. 104 - #KG 2010 BGJ EA

Md%li"a#in d'$n acc%l%!m!e MEMS

Applications : dclenchement dun airbag et autres

G B!$n VELAYDTGII HJGH =NHJH

"HIIJI JKGHIG I= (") - 44600 [email protected]

RSUM

L' 57'6(1) ' *537'-%*/' ' # 5'551 2009 7 $#%%##74>#6 5>4' S 4115#6

'14'4 ' @ 4#146 '64' #4$# '6 %1'5#6'74 ' #=1 14#', ' /6#6

>8'//'6 %'66' >67' < '5 %15>4#615 64?5 5/%#64%'5 %164#6'5 #4 '

414#//' ' %'66' %#55'. L1$'6 ' %'6 #46%' '56 ' 4115'4 #7 8'#7 $#%+2 7'

>67' >>/'6#4', /#5 >#/15 75 >6#>' 7 1%61'/'6 7 #%%>>41/?64'

MEMS (174 @ M%41-E'%641-M'%*#%#-S56'/ ) 7 6' ' %'7 765>5 174 '

>%'%*'/'6 7 #4$#, 6#6 7 16 ' 87' 7 %#6'74 414'/'6 6 37' 7 %1-

61'/'6 7 5# ' /'574'. D'5 @ 56'5 1%7/'6#4'5 574 765#61 ' %'5

%1/15#65 5'416 #755 4115>'5, ' #46%7'4 174 # 5>%746> #761/1$'.

1. SYSTME DE PROTECTION DES OCCUPANTS DUNE AUTOMOBILE

1.1. Choc par lavant

KT KHJHI cJ = G cKI, H HJG HI "IGI cJG TJIG 1, HcIGGUI HTGI J cTG TIJ J KT=JI VIG TKJT =JG G HNHIU G (G GIII) J G TG-I GGHHG. TIJ H H GH HH ?J 2 IG J HI cGGVI (TGI J KT=J + I IJG) I HGIH HJG H GHH.

CHTJH GUIH :

HI IH IJG HTJGIT GI JG H GHHJG H GHH I H HTJH IGJIJH JG H- ;

H GH H GHH I JHH cTG TIJ Q HHG : GT GG IJG, N JKI G GI HJTGJG H GHH KGHcKI K J GHJ ?JG = 4.

fi JG , J HNHIU IGHT GGJI JIH IJGH, TGT G J JIT

N I O N D E S P R O F E S S E R S D E P H " S I Q E E T D E C H I M I E 3

(1) NDLR : G IMI HJ?I B.


2/22THI cJ TTGUIG E` L' B7 Z 920 (1)

IGX cGH (, J, JM`) T H 5 H (INJI)Hc HI THHG cG I H GH I/J GT-II H IJGH HTJGIT.

CH IH GT-IH J I J 50 H, HI JGT JMIH cNJM`

Fig$!e 1 : DT=I cJ G I GT-IH H IJGH HTJGIT(S174%' BOSCH) 13.

R'/#437'5 : J GUG G= IGUH H II HI GHT H = J

CEA-E" 3 ;

J I I H GIH GTHH HJG GT-IH HI HH HJG HI cJ JIG TJIG HTHT 14 ;

BC GH J TIJ TIT TJ H JKIH/KIHH/T-TGI J JIJG GH cJH cJ G 4 H JcJ G= = cG 5.

1.2. Condition de dclenchement de lairbag

DH J KT=J GTI, J HNHIU IGHT GGJ JIH IJGH, TGTG J JIT IGX cG (AC JG ^ AG IG JI _). CII AC HI JH TTIH J c ^ JIJG G _.

H IJGH cI JGHHI H GIH THKH JG TH GTI HI H TTGUIGH J H IJGH GHH. G M, J HJI

JHIG GHT IJI G cTJIG BC (2) 1 HI GHT K

GTGII HJKI (%. JG 2, -IG).


(2) GJI J IJGH E J GJ BC HI IJI cGG I HcJITH. TTGUIG INJ HI B460 1.


3/22. 104 - #KG 2010 BGJ EA

Fig$!e 2 : =T cII cJ HNHIU HTJGIT :1 : JIT IGX cG AC - 2 I 3 : TTGUIGH (=H GIJM J ITGJM) -

4 : IJGH GHH JG TGI H GIUGH(S174%' BOSCH) 1.

H IJGH TG=TGJH IGH HI TH HJG GI cAC :


CIJG GJGH HJGTH N

ATTGI GI(==- : > 20 )

ATTGIH JM MH (IJI ITG)

100 E

JHIT J GH=ATTGI IJ : GJG GI HIJI GH= 100 E

ATTGI (L- : < 20 )

ATTGIH JM MH (IJI KGI) : GII ^ I _ INTG / IVI Q JJ

] 5 E

JM GII( I)

JK KGI KIHH J-G JIJG cM KIJG : HIJ-I ^ IJM _

] 240 GT/H E

Tablea$ 1

R'/#437' : HI cTTGI HIJG.9,8 m sg 2$=



H IJGH TG=TGJH MIGH Q cAC HI TGITH Q cKI J KT=J(TTGUIGH HITH Q TII TGI HIGJIJG = GI)J H H GIH ITGH (TTGUIGH I IJGH GHH HITH Q TI-

I =H ITGJM).


CIJG GJGH HJGTH N

ATTGIATTGI IJ : FGIHGJG HJGG cTTGI TGI J =RH-HH KI

100 E

Tablea$ 2

H TTGUIGH HI ^ JIJHTH _ K cJIGH HNHIUH TIGJH J KT=-

J. JGH HJGH JKI VIG, G M, JIHTH JG HI J G AB, GGI IG?IG E`

2. ACCLROMTRE MEMS DE LA SRIE ADXL

CI GI HJGI IGIG H E (JG G-EIG-=-NHI) S TTG I G ; IGI JG KGHIT I= I cJH, JG =HIG I JG TKI.

IJG IGJKG HJG HI GGJ 12 H GIH JH UIH. G= GH JHH JJH IJGH TIGH, GIJG 1 I2. CII JGI HNI=UH IGJIK GTHI H IJGH Q E 18.

=M HcHI GIT HJG II HTG cTTGUIGH AD G I J HJH TH HH HJG HI J HIGJIJG A#1 D'8%'5 8 HI HJ-HI TKTH I MIH JG JKG GHG J U TIT K.H J ?GIT H KGH HH, V HTHTH, GHI JHHJKI J H MIH G I J HTGIH GUIH. CII HIH HI HII TKJI : JG GTGG J =I, HJIG H IJM

E 8 H J 15. G II H IJGH H-H HJGI VIG TT J J HI GTHIT H I GI.

JG TG, A#1 D'8%'5 HI G JGHHJG IJGH GIH I= E JG cJHIG JI, HI IH H UH

JO H (3) 16.

(3) A#1 D'8%'5 II'1 T'%*11'5 I T ?J 2009 J GI JHHT JG HJ I JK TTGI HNHIUH JG G.I'1 JG HM IH H -HIH JG G H GGH JO H.

A#1 D'8%'5 GI H I= H IJGH E. I'1 IGJG J GHI J HI(IG IJG / GIGXJG / HI cII T / IGX J GTHJ IG). JGT INJ TKI JG G GJI HI INJI JM H. CII I-G GIK JG ?I GTJG - Q HM H HJI.


5/22. 104 - #KG 2010 BGJ EA

2.1. Miniaturisation des capteurs et richesse fonctionnelle

H GGH TTGUIGH (1980) JI J

GI cKG 50 2

. DUH 1995 GI IK cJAD50 (TTGUIG G JG H IH

cG) TII GTJI Q J GGT 16 2. HIHJG J HI HT II TIJ I 2006 I J

HJI 3 2, H HIH JH GTIH.

HH II IJGH H HJGG J, JM J IGH HIH cTTGITG, H JHH J, JM, IGH HIH c-

TTGI JG. JG TIJ HJGH, H HI JTH L- JG H TTGIH

TGJGH Q KI H cTTGI HIJG I =- J-Q. AD103(L-) I AD78 (==-) HI H GGTHIIH HIH II HTG.

JKI I IJ, cJIG HTG AD" MI H HNHIUH IJI JT-GJH GGH JH H=HIJTH, JI J IGII I J IGX, c-

IGS, H JI-IHIH, HI HI, I. (4) E HJKI IGI=J, JI HTGG H IJGH ^ IIH _.

DH HTG AD, IJG E GGI I I H TIGJ -II HI ITGTH H V HI H GIJ JHJ.


Fig$!e 3 : CIJG HTGAD 8.

(4) AD"16300 J AD"355 HI H GGTHIIH HIH II HTG E. "H HJGI H HMHIH cTTGI 8. C GG HI ^ K G _ J JGH IGI ^ BHI HHGH M2008 _. I "HIGJIH HIGJ H GKGH AB"E JG MIG H IJGH HJGH ^ " DKG _.

Fig$!e 4 : =IG=H JM TTGUIGH : IJG E HI H O IG.AD202 L- JM MH (Q J=) I AD78 =- J M (Q GI)

C14*6 A#1 D'8%'5, I%. A 4*65 4'5'48'.



2.2. Ralisation du capteur

CGUII, IJG HI GTHT Q HJG cJ IG= HJ (^ LG _)

Q c I=JH HTJH, IH =II=G= I G-JH J=HH.

AGUH GTHI, HGK G GH TIGJ J HJG J -HI GTHI H G-HIGJIJGH HJ IH H G-JIGH, H GH,I. H HH INJH H TTIH H HIGJIJGH HI 1 Q 100 m.

Fig$!e 5 : J TTG J IJG E cJ TTGUIG AD50 =- J M.C14*6 A#1 D'8%'5, I%. A 4*65 4'5'48'.

Fig$!e 6 : DTIH cJ TTGUIG IN AD202 L- JM MH 12.C14*6 A#1 D'8%'5, I%. A 4*65 4'5'48'.

CH =IG=H IGI ^ HH HHJ _ ( GI IG ?JGT J^ _) I TIJ JKI I J HJI I H IH cTTG-

I Q HJGG. C- HI GT ^ J RI _ G H G-JIGH cG (^ =G _)JG J HNHIU J M J H G-GHHGIH HITH H H H JG J HNHIUJM MH. CH GIH MH JKGI JKI J .



7/22. 104 - #KG 2010 BGJ EA

Fig$!e 7 : DHGI H H HHTH Q J I cJ IJG IJ (^ H G HI _)." N JM HTGH IGI IH IN JG AD78, HI J IT II 64 F

JG J HH J 0,7 m. DcGUH 8.

HJK J TI HI HHJGT G J IJG I GHT JIJG HTGH H GG, HGH JG IT J RI I JG IT HH .D S TTG J c"D (JG "IGDI GHJG) II HIGJIJG GI-JUG G ^ H _ ITH IGTTIGTH (JH JM IH H H). JIIT H H TG TKI HHIT HJG.

Fig$!e 8 : DTIH J IJG E cJ AD50 G : (^ _), H G-GGH M HI GHHGI ( =G _) I H HTGH IGH H MH J (^ I _).

C14*6 A#1 D'8%'5, I%. A 4*65 4'5'48'.

C IGG HJI II TIJ, IJG IK J HJK J T-I GI H JG JII cHHG I TTGUIG Q J ^ H _ -HIJG I JGGI TIJG GTH J H cJ HJ GJI ^ C _ JG IGcTTGI. CcHI J IJG TGI Q GH HIJGH. I-I J H HJG KG VIG JH TGT.

E GK=, cJIGH IJGH E HI JH GHI HHH Q ^ HH _ HIJGH : cM TGI J IJG c=JIT.

2.3. tude mcanique du fonctionnement dun capteur un axe IJG TGI HI THT G J H HH HT HJG J

HJGI =GOI I JKI H TG cM H M. HI GT J




HJGI G H HNHIUH GHHGIH/GIHHJGH TGKI GII TJ HTTIH J E (GJG @, I GIII ).

Fig$!e 9 : THI JG JKI HJG cM M cJ TTI

I HI J IG HH J JKI I H H-

I J GH G GGI J HJGI (cHI-Q-G I J HJGI : KG

J H HJGI H T, cHI-Q-G H cTTGUIG H T ).

C HJI H IH cTTGI (I) J HJGI : GX HNHIUHI GIIG HJG II TTGI (I).

cNH H GH cTJI JKI J IG HH GI HJH cI H GH J J HI JTH (H U, cN H GIII IG GI =GOI J HJGI I H GI ).

*J ^ GHHGI 2 _ HI GHH (G G ), ^ GHHGI 1 _ HI

MIH (G G ) I GTGJI, K GGIIT Q cT-

I .

H GH G I HI HGH H H JM H I GGIH

Q KIHH GIK J G GGI J ^ RI _ (cHI-Q-G TGKT IG ).

cTJI J JKI GI IG TI I

cTTGI HI IJ JI G I TJ H GTTGI T J H :

E G?I HJG c=GOI (M M) :

xc xb

xb

T2

T1

F1

F2

L x xc b=

m a F c appliqu es=/

mdt

d xk x x f

dt

d x x2 2

c

c b

c b

2

2

= ^ ^h

h


Fig$!e 10


9/22. 104 - #KG 2010 BGJ EA

AK , II :

Y HI cTTGI J RI cTTGUIG G GGI J H J c

KJI HJGG.

c GTUG, JI GHG H GTTGI T J RI JK-I G GGI J H : cTIL J GHHGI HcII Q HI J G GGI J RI, KI JI J I=TGU GTHJII T-IJ H GTTGI J RI (, II I ^ G cGI cIGW-I _ b J Hc?JI JM JIGH GH =NHJH) :

II cTJI JKI TI :

cNH =GJ GI TJ J IJG H I HJG cTJIM HHT (IGHGI ). II :

K JHI GITGHIJ I GUIG cGIHHI .

I IGHGI HI IN HH-H J H GG.

x x x x L xc c b b b= + = +^ h

mdt

d Lm

dt

d xk L f

dt

d L2 2b

2

2

2

2

+ =

( )dt

d xa tb

2

2

=

( )m a t

( )mdt

d Lk L f

dtdL

m a t2 22

2

=

( )dt

d Lmf

dtd L

mkL

a t2 2

2

2

+ + =

dtd

j" ~

( )

j L a ta

L

j j

km

21 2

20

2 2

0

0 0

2"~ ~ n~ ~

n~

~

~

~+ = =

+ +

^ bh l

mk2

0

2

~ =k m

f

2

2

n =

a

L


HJGG TIL H H J IJG TGI GKI Q HJGGcTTGI J HJGI, JGKJ Jc HI HII J II KG (cHI-

Q-G K ). , GT TI :0

%~ ~

( )Lk

ma t

2.

H JH TH H JM IJGH GH MH JI J^ GTH TJ _ Q 55 @O JG AD103 I 24 @O JG AD78, J



JI J GIHHI HJH-GIJ. H IJGH KGI HJKG HH GU HKGIH Q H GTJH TGJGH cJ T.

2.4. tude du conditionnement lectronique du capteur


Fig$!e 11 : =T- H TTGUIGH AD103 I AD78 8.C14*6 A#1 D'8%'5, I%. A 4*65 4'5'48'.

Fig$!e 12 : =T cIGGTII TIT H =G TH AD103 8.

HI HI IT S HNTIGJ IG 0 I + 5 : H IHH

IGKI H II J GJI KGI VIG HIKH.

2.4.1. Transduction du dplacement par un pont capacitifen modulation

C IG H=T THI I, HI HG cJ JKI H TG IG H H 1 I 2.

H GH H GG THHI JM HIJGH I ITH

TI ( GTIT, H =IG=H GH TIGJ IGI JcHcI HTGH G-H).

cHIJG TUG J H GGT c=G Q J GTJ , GGTHIT G

C1

C2

fh


11/22. 104 - #KG 2010 BGJ EA

IH . DcG JTGJ, HI HI. D KJ =JI I KJ H 0 ,

J N T Q . IH HI IJ G KGH J, J

GKI Q TG cJ -TG.

HJH JH J HJH H IH J GG =GJ HGI IH, HGI J :

I .

KGG I JH J GUG TI HI J IG HH-H J TIJIH H HIH JHI HJTGJG J T Q e. H JIGH =GJH GI J H IGH GGIH J HGI TTH H J.

I GT G H JM ITH HI H IT G JM IHH I HGIH KGH HI HI =H.

Fig$!e 13 : CII I J IJG TGI HI.

HJH J JGI cIGT J JIJG cI KHI T

J I cJ GI T cIGT, HI .

H JM GTHHIH R GI J I GHI I I JG ?I cTIG

J IH J THHIT G c cJ II HNT-IGJ.

A JG IH HHJ J I, J H aJH HJG H

G=H :

II I .

G I GG :

v1

( )v t1 Vs

V

2

s v2

( )sinv V

V t2

s1 1

~= + ( )sinv V

V t2

s2 1

~=

0i Ae =

V

2S

v3

0Cdtd

v v Cdtd

v vR

v VR

v 0S1 3 1 2 3 2

3 3+ + + =^ ^h h

0i Ae =

( ) ( )sin sinC Cdt

dv

R v C

dt

d VV t C

dt

d VV t

R

V22 2

S S S

1 2

3

3 1 1 2 1~ ~+ + = + + +^ b bh l l




E THHI HII IH , KI :

HJI HI G :

GG IG HI GTH G cTJI HH H G. H JMJIGH IGH HI J HJI GIJUG. I=TGU HJGHI GI G=G=G II HJI HIJI =J H IGH GSI.

JG IG GSI HII, HJI HIIG HI TKI .

HJI GIJUG =GJ HcII GII J M :

HI

IH GTI HJ=IT JG J HNHIU HTJGIT JI HI JTQ 5 H. " HI INJI HIT G J IH IT Q 5 %, HI JG J GGGG :

H GTJH JI HI INJI I @O (140 @O JGAD103 I 400 @O JG AD78).

HII J J JH I J S TTG .

D :

I

HJI KI GUH HI (5) :

HII A GHIGI Q TIGG Q GIG I I HJG . H

( )sin

dt

dv

R C C v

C CC C

dtd

V tR C C

V2 S3

1 2

31 2

1 2

1

1 2

~++

=+

++^ ^ ^h h h

R C C2 1 2

x = +^ h

( )cos

dt

dv v

C CC C

V t V

2S3 3

1 2

1 2

1x ~ ~

x+ =

+ +

( ) ( )exp sinv t A t

B t V

2S

3 x ~ {= + + +b l

V

2S

( )expj v

vj

C CC C

V j t33

1 2

1 2

1~

x ~ ~+ =

+ 1

( )expvj

jC CC C

V j t3

1 2

1 2

1~x

~x~=

+ +

,t 3 5 1 5ms ms%r5 ". .x x=

t 1300.~ 1&~x

j

j

1 1"

~x

~x

+ ( )arg arctan

j

j

1 2 0"

~x

~x r~x

+ =e o

( )

( )exp sinv t A t

C CC C

V t V

2S

31 2

1 2

1x ~= +

+ +b l

v3


(5) J MI _ 19 : K .( )

( ) ( )cos sinv tV

C C

C CV t

2S

31 2

1 2

1 { ~ {= +

+ + ( )tan

1{

~x=


13/22. 104 - #KG 2010 BGJ EA

c I H cGI, G GUH J JH 5 H, IGHIG HI IGTJHJ IG MI TGWI GI KGH 0 : HI GH GT G-

I IA HI TT J J.

JI GH MGG IH IGHIG, H JG HJI

J II HGI I :

2.4.2. Relation entre les capacits et le dplacement L

AJ KJ =IG= H H, HJH J H HIJGH I

JKI VIG HHTH Q H HIJGH H :

K I ;

cY : I .

DcY cMGHH I J TI :

2.4.3. Conditionnement du pont capacitif

JG HJI cTIJ J II J H, JI GGJG JcMIGG H G J I=J GGHHI GGI cGI HJG H L,

J cTTGI. JIH J HJI JH J GTHGK cGI H.

TJI HN=G 3 J H HHJ J I HHI J JI-I G H JI I I, HJK cJ IG HH-H TJI.

I HHJ JII G , K IJG JII $

( ) :

v3

v3

( )

( )sinv t V

C CC C

V t2

S3

1 2

1 2

1 ~= +

+

C2

C1

e d L2 =e d L1 = +C eS

. f

C

d LS

2

f=C

d LS

1

f=

+

( ) ( )

( ) ( )

C CC C

d L

S

d L

Sd L

Sd L

S

d L d Ld L d L

dL

dL

22

1 2

1 2

f f

f f

+ =

+ +

+=

+ +

+= =

v3

( ) ( )sinv t V

dL

V t2

S3 1

~=

v1

v3

v4

V1

( ) ( ) ( )sin sinv t K v v K V

d

LV t

VV t

2 2

S S4 3 1 1 1

#~ ~= = +

b bl l( ) ( ) ( ) ( )sin sin sinv t K

V V

d

LV t

VV t

d

LV t

2 2 2S S S

4

2

1 1 1

2 2

~ ~ ~= +bb l l




G I GWIG J H IG HII.

IH JI H IIG HJH G cJ IG HII I cJIG HI HI.

D JH, HGI cTTGUIG I VIG JGG J IHIT HJ-HI Q H =G. " KI G HGI J IJG ^ I _ c-

I JG TGG H Q IGG. TIG IH :

JG GG H HII, GHI G Q TG IG HI G JIG HH-H K.

IG HH-H TJI HN=G HI HHJGT G J I

J G J J J GG GG I GTJ JJG HI :

JG (6).

I J IH GITGHIJ .

G M, JG AD103, H GGHI J IG e J

GTJ 140 @O, cHI-Q-G H JH J GTJ

JJG .

TH I . . H

HI GTHJ J IG HI T GUH KH G 355.

IG HH-H T GI KG J H, TI

eI ; I, HI SJ JG MIGG N IH . D :

HNHIU I IJG cTTGI, G ; cY :

( ) ( )sin cost t21

1 22

~ ~= " ,

v4

Kl

( ) ( ) ( )sin cosv t K v KK V

dL

V KK V

dL

V td

LV t

2 2 2 1

2 2S S

5 4

2

1

2

1 1

2

~ ~= = + +l l lbb bbl l l l

Rfilt

Cx

,400f

R C21

2 32 10 0 110

1Hz

cfilt x

3 6# #

.r r

= =

12,5C nFx =

0,4R C msfilt x .

/140 10 400 3503

=

fc

( ) ,log 350 2 5410 = ,2 54 20 dB/dec 51 dB# = 10 355/51 20

=

v5

v v KK V

KKd

LV

2 2outS

5

2

1

2

= = l lb l

Lk

ma

2=


(6) JG AD103 G , HI J HHI GH IG 0,5 @O I 2,5 O. GTJ GTH TJ HI 5,5 @O. DH IJH H H HNHIU HI I Q HJGG JTTGI HII J II KG. CH IJGH, GH JTH ^ cGIH _, HI IHQ HJGG H IH HIIJH HIJG.

C2 10nF Fx1 1

n


15/22. 104 - #KG 2010 BGJ EA

2.5. Tension de sortie et donnes numriques

D S HNI=TIJ, IH HGI H I HJH G TTG :

IH HGI cTTGUIG H GTHI ^ HHJI _ HJH J G

Y HI IH ^ GH _ GHJ cTTGI Q HJGG HI J I SHI

HHIT cTTGUIG .

HI HHIT ^ / _ (K TKI ).

2.5.1. Exemple dacclrateur Low-g : ADXL103

AD103 HI J TTGUIG L- HIT, HTJGIT JI, Q GIGJ IGX NJ J KT=J DC, J GG HI HIIT E,J IGX TIGJ J G AB, I.

H HTIH MIGIH H JH TH 8 GTHI (JG ) :

b IH GH G H KI : 2,5 IN (2,4 Q 2,6 ) ;

b HHIT J IJG HI 1 / HIKIN : 1000 / IN (960 Q 1040) ;

b cTIJ HJG HI b 1,7 ; + 1,7 GH G IH HGIM 4,5 HJGI G : ] 1,7 ; JIJI HL == : 4,5 IN(M 4,8 );

b J -TGIT ] 0,2 % T=, INJI ;

b TTGI M HJGIT : 3500 ;

b HHI HI GH IG 0 O I J T J =M .

JG J IT IG , U GI JG :

CH GTHJIIH HI TKI IH K H HTIH AD103JcQ I J H JIH GUIGH J U GIII cIG

I .

( )v KK V

KKk dm

V a t2 4out

S2

1

2

= +l lb l

v V S aout 0 #= +

V0

V m s 1 2

$ $

/S S g=l ,g 9 8 m s2

$=

5V Vs =

2,5V V0 =

Sl

fc Cx

12,5C nFx =

0 (0) 2,5a v KK V

2 Vout

s2

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, ( , ) , , , , ,a v KK V

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V1 7 1 72 4

1 7 2 5 1 1 7 4 2 4 5g V Vouts

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2.5.2. Exemple dacclrateur High-g

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GI (G-GH=) I J T=I cG, HI AD78(7)

. GHT 2005, HI JHH J G JIGU TTGI H IJGH E.

H GITGHIJH HI H HJKIH : TIJ HJG ] 70 , HHIT 27 /,HI 1,3 A JG 5 , JI Q 400 @O, IG Q 400 O G IG BHH Q JM XH, J TJ GII H GTH TJ Q 24 @O." HJGI ?JHJcQ 4000 .

H HHJ cJ I JI IG H HIH GIH IJH IGTJH TKTH. CH HIH II I J cGIH JIH I HI

GTJIH G IG HGI. CH HIJGIH JKI IGKG IJI I J GJIHH JG JII VG TII cTKTI I. JI IG J II GHI TG ?JHJcQ KG =JI H KJG T=, HIJ V 560 .

H=T TIGJ II HJI I G HJGTGI, H K J TGI HIK T ^ HNHIU OTG G _.

G HI cJG HNHIU HJGH TI H J J GTIGI. " TG H cGGJG HIT Q HHGKG cMII HJG =J H

TIGH MH GI I cJIG cTIG I cTTGIGSJ G IJG, cKG J G TIGHIIJ IJ?JGH G= OTG HJGcTIG . C GI IG H GGJGH -TGIT TKII HIGJIH G J G TIGHIIJ J GGI .

2.5.3. Amlioration des performances nergtiques

?I GGIG HI J HH HH HI TIGJ.AD103 H 700 mA J GH ; cHI J 350 mA JG AD327 JG JIH cII 3 . AD346 J HI J HI Q HGI JTGJ, J

HI G JH , HI 145 mA JG 3 (IJH JM HGII JGI 2009). JGT cTIHHI IH cII J HI HI HTT

G ^ LG JN JG- _. H JH TH AD103 JI 20 H. IJI G= TTGI cTTGUIGH GT INJI JO Q KI HJH KI ! G M, AD327 J ^ JG- _ 1 H HJI ; cHI1,4 H JG AD346.

H HIH H JH KTH I J II TJ JHHI Q cTIG IH cII JcJ I J H HJG I Q


(7) JG J HGI JTGJ : = GG, BLI= AGIG AD001 ( ] 70 Q] 500 ; HGI JGI 2009). DH HTG E : GG =- DI "I HG GG AD"16204 (] 70 ; 2007).


17/22. 104 - #KG 2010 BGJ EA

JG IJI HJI GUH. TH H HJG JGI GH cII.

3. AUTRES UTILISATIONS DE CES ACCLROMTRES3.1.1. La manette de jeu vido Wiimote

GI GTI J BC 6 IGI I MIG cTTGUIG I ( II H ?J N6'1). C- JJ G HHH IN BJII= H GIH HJG JKI J ?JJG.

E MI J TTGUIG 3D AD330 =OA#1 D'8%'5 8 J JGIIGH IHH (JTGHTH) H H IGH HIH cTTGI.

Fig$!e 14 : J J IGXJG I 9.J H GITGHIJH I=JH I I H TTGUIG 6.

3.1.2. Air mouse : la souris-tlcommande qui sait aussi cliqueren lair

HJGH, cHI ^ HHJ _ JG J ^ HH- _, HHU J JIGU JI

HJTIG J GI cIKG ^ 3D _ I Hc HGKG H cHHH Jc HI J II cJ JJ HJGI. TGG GTG.

H IJGH ITGTH GTJUGI H HIH cTTGI GII JG JKI ^ I _ (JKI ^ JI-BH _) I ^ I _ (JKI^ DGI-J= _). HNHIU GI cIGGTIG H JM INH JKI TG IJG HJG cTG.

HJGH HI JG K J TIIJG-GTIJG B 2,4 O Q G=G HJG C.BGKI G4#61, JH M18'# (90 KG). JG JH TIH 10.

3.1.3. SMS pour Sudden Motion Sensor

GJGJ GTI J BC 7 GI GTH H H GIJGH




GIH cJ TTGUIG HIT Q GII IVI IJG J HJ JG.CH HIH HI V IJG.

G M AD320 J AD346 (HGI JGI 2009) 8, HI JH GIJ-UGI SJH JG TIIG G =H (I- II-HH). JH TIH H II I I=J 17.

3.1.4. Hot Hand motion sensing system : be the Lordof the ring !

Fig$!e 15 : IJG ^H16 H#\ _ HIJI J I J JIGHI 11.

CII J Q NJ cI TIT GTT JG GIIG J JIGHI G KGG IJG H HH GJIH IH GT.

JH HJKI, GTIG JIHT JG cHIGJI HI IJ IGIIG TGIH GTGTH HIIJH WIGH TTH, J N JHHGH ITHK .

E I J IJG Q TTGUIG ITGT A#1 D'8%'5 I J N IGII H IH GT G D, JIGHI J cI JT H

cTTGI . T THIGI I TIH I=JH 11. " MHIJHH J KGH K IGHHH =GIO ^ HH _ ?JHJcQ 30 IG JI WIG.

CONCLUSION

CH TTGUIGH E H GTKUI KG J GII ^ GHI _GT=H I III aJKG J =NHJ ^ IJ G _ Q GIT cJTIJI GG N HJTGJG. =I J JG GM HI HI (f 6 Q 25 IN-

JI Q cJIT 15) I J JG MTGI HI HT G J GI -IT G cITGI cTIGJ HJG, N GI Q GG JcH JGGI GJHH H ^ JM ?JGH _ JGH HHH`



19/22. 104 - #KG 2010 BGJ EA

REMERCIEMENTS

G G Q UJ FGSH AE K J ?c SJ JcHI ^ CIJGH & IJGH _ TGII HJGH =NHJH, QI-OG. CI GI J I JJ.

G Q BGJ #EC, TT *PA I =GGN A JG JG GIJG I JGHHJHIH H, H JcQ G FA$ (B15%*), H CE" I PG"DE" (A#1 D'8%'5).

NETOGRAPHIE


A "IGI I GI http://www.mpsn.hbg.fr/udppc/mems (HH JHHJH http://tinyurl.com/velay-b) GH cUH GI JM HIH G H H

JH. CH H "IGI HI KH Q I GTI I GI ; GH J UH GI Q H H GIH =GH JTH G A JG

GTKG J GJIJG G H (8). N IGJK JHH H H IH-GJH IJG H JKGH G=.

B J?I =NHJ-= HHH 2009 J JGTI HTG , MG 3 A.

1 PJIG BC :http://rb-k.bosch.de/en/safety_comfort/occupant_protection/index.html

KG GIJG J TIT TK Q J= cTG.

DHGI H HIH :http://www.semiconductors.bosch.de/en/20/sensors/accel.asp

=II=UJ I GIH JG GHHhttp://www.bosch-presse.de/TBWebDB/en-US/index.cfm

HI GSH http://rb-kwin.bosch.com/fr-FR/start/safety.html cHI H JHHI.

2 HTJGIT HHK ( GJG =K) Ahttp://www.ac-nancy-metz.fr/enseign/autocompetences/

2_ressources_pedagogiques/6_confort_et.../securite_airbags-ceintures.pdf3 "IGJI Q cG A

http://defis.cea.fr/defis/118/CEA_DEFIS118_P16_17.pdf

DH BC : 4, 5, 6 I 7http://udppc.asso.fr/bupdoc/consultation/selections.php

I-T : G J II.

4 U HT GH=-IHI G . APE.

5 A" A. ^ H JKJM GH _.B7. . P41. P*5. C*/., TG 2004,

K. 98, Z 869, . 1745-1749 ( GG HG H 2010).(8) cH H JIH HI JHH H HJG HGKJG cC HJH G cJ =G

OT 09200003.O



6 "dE F.-. I EA D. ^ IHI 'J II ?J KT JG HMTGH TJ _.B7. . P41. P*5. C*/., GH 2008, K. 102, Z 902,. 427-434.

7 " . ^ DH HJGH I H GH` _. B7. . P41. P*5. C*/., 2009,K. 103, Z 914, . 599-600.

8 HI J GIA#1 D'8%'5 :http://www.analog.com

IHG J IJG G=G= K H IH-TH : M103 J M78 + I A.

9 IH HJG L :http://wiibrew.org/wiki/Wiimote

http://fr.wikipedia.org/wiki/Wii

10 KJ S%'%' & !' M%41, KG 2008, . 74 I HI J GI :http://www.gyration.com/index.php/fr/produits/souris-3d-et-claviers.html

11 I J GI ^ I = _ :http://www.sourceaudio.net/

TH THIGI :http://www.youtube.com/watch?v=JbYsD7cX9E0 Jhttp://www.youtube.com/watch?v=gpCl7xRjZcs

AGI N'5 ''%641%5 1 C#/75 (HJG 2008) MIGI cJ JI GI HIGJT GIJII A.

12 GTHII H E :http://www.esiee.fr/~francaio/intromems/intromems.html

GTHII IGJIK HI H H J GJM JIH IJ GI I=TIJ I.

13 I GHIK : GIGhttp://www.semiconductors.bosch.de/pdf/prospekt_SMB05x_06x_100.pdf ( JT).

14 PJIG : A" :http://www.autoliv.com/wps/wcm/connect/autoliv/Home/What+We+Do

15 EM GM (?J 2009) :A7341 / 3 MH-2 Q 6 / J AD278 / 2 MH-50 Q 25 /=O http://fr.farnell.com

A66'61 : JG J MTGII HT, # 414 =HG J HI QHGIH JH. H JIHIJGH G-IGXJG GTTGGI J IGSJTGJ IN A7456 / 3 MH-L Q 7 /. J G AD202AE /2 MH-2 Q 20 / =O http://radiospares-fr.rs-online.comPKI H GM HHI G JIIT : HJG HI AD, H HIH H JHGTIH HI KG Q 2,1 / G I 1000` AD103 HI G H

J GM 5,5 / H G 1000 UH.E GTHJT, GIUGH =M : IN HGI, G cMH, TIJ HJG,HHIT, GM Q cJIT.



21/22. 104 - #KG 2010 BGJ EA

16 AIJIT http://www.edn.com/article/CA6666239.html

17 GII H IVIH IJG HJH JGH : I I=J AD320 Ahttp://www.analog.com/en/mems/high-g-accelerometers/products/technical-

articles/resources/index.html

18 "IGI E HHGH G JHIG IG A. JGI HNI=UH IGJ-IK :http://www.analog.com/static/imported-files/tech_articles/EPNJan07iSensor.pdf

19 JI ^ MI _ J J H HJG A :

http://www.mpsn.hbg.fr/udppc/mems/vout_solution_exacte.pdf

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G [ 13.2 JG H IJGH IH, GIJG J c=JIT. =IG 18 HI HGT JM ITGJM H IJGH, [ 18.3 TGI JH GTHT-I H I=H GI H E. D S JH TTG, KGHI J GTTG JG HH H IJGH, HJGIJI HcH HI GTIH.

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vout


Bruno VELAY

Professeur agrg

Dpartement Mesures physiques

Institut universitaire de technologie (IUT)Saint-Nazaire (Loire-Atlantique)http://tinyurl.com/velay-b


22/22

AnnexeCapteur MEMS dhumidit assimilable un condensateur

E I, cJIGH IJGH E HI JH GHI HHH Q ^ HH _ HIJGH, JH GTHTI Q J GTHJ C. AH 1 TGI J IJGc=JIT I GTHT G JM H IGITH HJG J= .

Fig$!e 16 : CIJG E c=JIT, cGUH 1.

J= H (THHJG 3 ) HI THT HJG J HJHIGI HJ.DJM TIGH (THHJG 2 Q 5 ) IH cJJ J =G HI THTH

K J I H. DJM GTHHIH TIGH HI HITH Q -HI ITGIJG. cH HI GJKGI cJ J= HI (THHJG 0,3Q 4 ) H.

cH HI TH G J IT IG-TIGH GU HJG JGTHHI TGKI GTHHI HIGJT HJG J Q GTH cJ J= cJ.

GHJ c=JIT JI II GTHHI J GH J IT TJK-I JI. HJK II KGI HI TTGI GTHT JI IJGH J HIJG I TIJI H KGIH GTJ.


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