B y Taka Holloway

S puttering is a process that can deposit any material on any substrate

SputteringEvaporation Physical

S puttering takes place in a vacuum

It is a metallization process

S puttering is not a chemical process

It is referred to as physical vapor deposition(PV D)

1. Ensure all operators know the proper procedures for placing a tool down.

-this a llows consistent tracking of downtimes for all tools

-and provide written explanation of actual performance of tool

4. Proper procedures include familiarization of functions within the operating system

-you must make sure all tools and parts that required are present

S teps before you begin Preventive Maintenance

Preventive Maintenance Once set up properly, perform required steps as listed in

the report to cool and vent the chamber M ust be performed prior to performing a kit and or a

target change Once conditions are met prior to opening the chamber,

follow step-by-step procedure to perform a kit and or target change

Kit and Target Change1.Check for other conditions that may require maintenance activities

-regeneration of cryopumps-{this will decrease the overall down time of sputter system}

2.Once kit and or target changes have been performed

-you can proceed to allow the tool to complete the remaining steps for a proper PM -{while completing the PM process, operators should utilize this time to reassemble kits for future PM }

-also begin to clean the immediate area and return all parts and tools-

3.F inally, operators must be familiar with all of the required steps from the start to finish of the PM

-in case the final steps require operator assistance-

-this includes running paste(conditioning),particle checks, and checking thickness of film-without proper conditioning, you run risk of defect issues-full qualifications are necessary to guarantee the tool is running according to specifications

Operators becoming certified in performing PM s on sputtering systems will allow better utilization of human resources.

A s industry increases production, it is important to release maintenance technicians and engineers from having to perform routine PM S

For more detailed information on Sputtering Systems Request a copy of the material on Power Tools for

Technical Communication, Preventive Maintenance in Performing Kit and Target Changes for Sputtering Systems