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The top documents tagged [mems class]
Documents
MEMS Class 6 Microactuators Mohammad Kilani. Actuation principles A complete shift in paradigm becomes necessary to think of actuation on a miniature
230 views
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MEMS Class 5 Micromachining Technologies Mohammad Kilani
225 views
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MEMS Class 3 Fabrication Processes for MEMS Mohammad Kilani
236 views
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MEMS Class 2 Materials for MEMS Mohammad Kilani. MEMS Materials Silicon-Compatible Material System Silicon Silicon Oxide and Nitride Thin Metal
222 views
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MEMS Class 6 Microsensors Mohammad Kilani. Sensing principles The interaction of physical parameters with each other—most notably electricity with mechanical
229 views
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MEMS Class 10 Design Realization Tools for MEMS Mohammad Kilani
228 views