A.D.A.M. (Automated Data Archiving and Mining)

for ASML PAS5500

Design and implementation of an automated data retrieval,

analysis and monitoring software for photolithography tools

Advisor:Prof. Serafino Cicerone

Candidate:Riccardo Macioce

Tutor:Armando Rossi

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Among the

worldwide top 10

semiconductor sales

leaders

Micron's Avezzano

facility produces

CMOS image sensors

Micron Technology

Products used in mobile phones, digital and

reflex cameras, etc.

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A. D. A. M.

A.D.A.M.

Automatic alerts

Data visualization

Charts generation

Data retrieval

Archiving

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IC production process

1. Coating

2. Photolithography

3. Etching

4. Removing photoresist

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A. D. A. M.

The original release of A.D.A.M. was

developed for an U.S.A. facility (for 300

mm photolithography tools)

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Thesis tasks

U.S.A. fab uses 300 mm photolithography tools,

while Avezzano fab uses 200 mm tools (AMSL

PAS5500)

– Different performance and calibration tests

– Different report structures and parameters

Goal 1: make the original A.D.A.M. version

usable for PAS systems

Goal 2: design and build new features

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Goal 1

Code Design

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A.D.A.M. Architecture

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Parsing subsystem

Crontab:

scanning tools

every 10 minutes

Multithread

system

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Goal 2

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A new module: Air Mounts

System of shock

absorbers for

vibration isolation

between the

projection system

(“silent world”) and

the external world

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Reports structure

0.002800000 ... 0.348432056 0.000202538 0.000019308...

0.005600000 ... 0.522648084 0.000133590 0.000017341...

0.008400000 ... 0.696864111 0.000077143 0.000023498...

[...]

1.598800000 ... 99.651567944 0.000037273 0.000000088...

1.601600000 ... 99.825783972 0.000028764 0.000000072...

1.604400000 ... 100.00000000 0.000033625 0.000000075...

1.607200000 ... 1.607200000 0.000000000 0.000000000...

1.610000000 ... 1.610000000 0.000000000 0.000000000...

[...]

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Data identification

Context awareness and knowledge:

– Pink noise as input signal (low-pass filter until

100 Hz)

– Resonance frequency ≈ 2 Hz

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A.D.A.M.

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Project Management

Extreme Programming (XP) [Beck,

Cunningham]

– Whole team: Customer & Developer

– Tests definition before implementation

– Story Cards

– Story Board & time management

Risk analysis and mitigation strategies

Change management

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Numbers

Original ADAM:

– 14 modules

New ADAM:

– 9 modules fixed

– 27 new modules

About 13000 new lines of Perl code

About 65000 new lines of

PHP/Javascript/jQuery/HTML code

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Beyond numbers

Communication & interaction:

– Collaboration with people from different fields

– Trainings

Problem solving:

– Signals theory

– Optics

– Linear regression

– …