SAP Manufacturing Days - Marcel Cayers ASML

Marcel Caeyers

IT Solution Team Manager - Manufacturing

September 2013 / SAP Manufacturing Days / Den Bosch

Shop Floor Control The Road to Integrated Manufacturing

• Introducing ASML A cornerstone of the chip industry

• Impact on Operations A lean program to streamline production processes

• Program: Shop Floor Control The IT enabler for achieving business value

• Questions

Agenda

Public

Slide 2

April 2013

Introducing ASML

A cornerstone of the chip industry

ASML - A cornerstone of the chip industry

Public

Slide 4

April 2013

ASML employees

in US:1,617

Source: VLSI Research/ASML Q4 2012

Over 55 sales and service offices located worldwide

ASML employees

in Europe: 5,068

ASML employees

in Asia: 1,812

Sales to Europe

27%

sales

to US

69%

sales

to ASIA

4%

Public

Slide 5

ASML:

World’s largest semiconductor equipment vendor April 2013

Moore’s Law holds steady for more than 40 years

• Double the computing power per chip

• At equivalent power consumption

• For half the price

• Every 1.5 to 2 years

1970 1975 1980 1985 1990 1995 2000 2005 2010

Public

Slide 6

101

102

103

104

105

106

107

108

109

1010

100

Tra

nsis

tors

per

Die

Memory

Microprocessor

This graphic of Moore’s law

shows how his prediction of

transistor shrink has been

realized over 40 years.

Source: Intel

April 2013

Overlay down to

2 nanometers

1 nm = 4 silicon atoms

The technical challenges

Stacking layers: what does that mean…

April 2013

Public

Slide 7

m/sec2

0 10 20 40 70 30 50 60 80 90 100 110 120 130 140 150

The technical challenges

Acceleration: a comparison...

A stone drops at 9.8 m/sec2

A dragster accelerates at 33 m/sec2

A jet fighter in a catapult at 44 m/sec2

An attack missile at 50 to 120 m/sec2

A TWINSCAN NXT reticle stage at 150 m/sec2

April 2013

Public

Slide 8

…resulting in the systems that conquered the market

1984:

PAS 2000 Resolution:

>1m

Overlay: 250 nm

1989:

PAS 5000 Resolution:

<500 nm

overlay: 100 nm

1990’s:

PAS 5500 steppers/ scanners

Resolution:

400 to 90 nm

overlay: 100 to 12 nm

2000’s:

Twinscan Resolution:

100 to 38 nm

overlay: 20 to 4 nm

In 30 years: From 1,200 nm to less than 20 nm resolution

From <0.5M€ per system to >60M€

2010’s:

NXE EUV

systems Resolution:

32 to <20 nm

overlay: 2 nm

Public

Slide 9

April 2013

Impact on Operations

A lean program to streamline

production processes

Or do you want to become the best factory? Does your factory look like this? Public

Slide 11

What makes the difference?

April 2013

ASML Manufacturing process Public

Slide 12

WH

Suppliers Build Operations Delivery Operations

• +/- 350 Suppliers

• Added Value >90%

• 60 Partners (80%)

• +/- 10.000 People

• 9 Modules /system

•18000 m2

• 2000 Buy in Items /system

• +/- 300 goods receipts /day

• 6-12 months Training / Engineer

• 2 shifts per day /wk, 1 shift per day /weekend

• 7x24 Test Area

• 3-8 Systems / week


April 2013

ASML Manufacturing process Public

Slide 13

WH

What makes manufacturing @ ASML special?


April 2013

Dynamic Master Data - high number of Engineering Changes (100 p/wk)

Rework, Recovery, Repair - continuously due to searching the limits of technology

Master Production Sequences - contain all possible technical dependencies

Operators - highly educated

Flow: 8 key changes April 2013

Public

Slide 14

Slide 15 |

FLOW - High level impact April 2013

Public

Slide 15

The "blueprint" is introduced

Takts Regular rebalanced to improve

cycletime and delivery

Kits are adjusted on basis of the Takts

After approval: the changes are

implemented

Support and issue resolution

are improved

Improved Transparency

Takted way of working is introduced

Program: Shop Floor Control

The IT enabler for achieving business value

Shop Floor Control program @ASML

April 2013

Public

Slide 17

Work Instructions Dynamic customized per machine configuration

Introducing SAP ME - Fair work packages per operator per shift

- Blueprinting & Sequencing tooling

- Real-time monitoring / progress tracking

Production Orders - Customized per customers order

Detailed integral planning of materials, skills, people, cabins, etc.

Alert Management Real-time logging & progress tracking

of disturbances in production

Management Reporting Based on a single source of truth

MES – Machine Interfacing Fully automated system qualification

Increased delivery &

planning reliability

Reduced customer reaction time

Reduced stock & obsolescence

Improved planning efficiency

Transparency of operations

Shop Floor Control functions mapped on ISA95

April 2013

Public

Slide 18

Machine - Level 1 & 2

MES - Level 3

ERP - Level 4

Pro

du

ction

Op

era

tor

Da

shb

oa

rd (

GU

I)

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Quintiq

Operational

Planning

Siemens

TCE

RSuite / Coach

Test Scripts

SAP MII - Manufacturing

Integration & Intelligence

April 2013

Public

Slide 19


MES - Level 3

ERP - Level 4

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Pro

du

ction

Op

era

tor

Da

shb

oa

rd (

GU

I)

SAP MII

Quintiq

Operational

Planning

Siemens

TCE

Indicenter /

Coach

Test Scripts

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Quintiq

Operational

Planning

Siemens

TCE

RSuite / Coach

Test Scripts



Work Preparation – Create and Release Routing in ECC

Work Preparation - Create sub-routings in GRE

April 2013

Public

Slide 20


MES - Level 3

ERP - Level 4

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Pro

du

ction

Op

era

tor

Da

shb

oa

rd (

GU

I)

SAP MII

Quintiq

Operational

Planning

Siemens

TCE

Indicenter /

Coach

Test Scripts

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Quintiq

Operational

Planning

Siemens

TCE

Indicenter /

Coach

Test Scripts



Work preparation: Routing Sub-routing Work package per operator

July 2012

Public

Slide 21

1 2 3 8 9

4 5

6 7

10 20 30 Main routing in SAP-ECC

Sub-routing in Graphical Routing Editor

Optimized Work Package in SAP-ME 1 4 5 8 9

2 3 6 7

Operator A

Operator B

April 2013

Public

Slide 22


MES - Level 3

ERP - Level 4

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Pro

du

ction

Op

era

tor

Da

shb

oa

rd (

GU

I)

SAP MII

Quintiq

Operational

Planning

Siemens

TCE

Indicenter /

Coach

Test Scripts

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Quintiq

Operational

Planning

Siemens

TCE

RSuite / Coach

Test Scripts



Work Preparation - Create optimal sequence per operator

April 2013

Public

Slide 23


MES - Level 3

ERP - Level 4

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Pro

du

ction

Op

era

tor

Da

shb

oa

rd (

GU

I)

SAP MII

Quintiq

Operational

Planning

Siemens

TCE

Indicenter /

Coach

Test Scripts

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Quintiq

Operational

Planning

Siemens

TCE

RSuite / Coach

Test Scripts



Work Preparation – Release routing to SAP ME,

report to SAP ECC

April 2013

Public

Slide 24


MES - Level 3

ERP - Level 4

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Pro

du

ction

Op

era

tor

Da

shb

oa

rd (

GU

I)

SAP MII

Quintiq

Operational

Planning

Siemens

TCE

Indicenter /

Coach

Test Scripts

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Quintiq

Operational

Planning

Siemens

TCE

RSuite / Coach

Test Scripts



Manufacturing Execution: Create Production Order in ECC

Manufacturing Execution: Release Order to SAP ME

April 2013

Public

Slide 25


MES - Level 3

ERP - Level 4

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Pro

du

ction

Op

era

tor

Da

shb

oa

rd (

GU

I)

SAP MII

Quintiq

Operational

Planning

Siemens

TCE

Indicenter /

Coach

Test Scripts

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Quintiq

Operational

Planning

Siemens

TCE

RSuite / Coach

Test Scripts



April 2013

Public

Slide 26


MES - Level 3

ERP - Level 4

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Pro

du

ction

Op

era

tor

Da

shb

oa

rd (

GU

I)

SAP MII

Quintiq

Operational

Planning

Siemens

TCE

Indicenter /

Coach

Test Scripts

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Quintiq

Operational

Planning

Siemens

TCE

RSuite / Coach

Test Scripts



Manufacturing Execution: Schedule Routing Steps in time

April 2013

Public

Slide 27


MES - Level 3

ERP - Level 4

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Pro

du

ction

Op

era

tor

Da

shb

oa

rd (

GU

I)

SAP MII

Quintiq

Operational

Planning

Siemens

TCE

Indicenter /

Coach

Test Scripts

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Quintiq

Operational

Planning

Siemens

TCE

RSuite / Coach

Test Scripts



Manufacturing Execution: Start 1st Routing Step in the

Production Operator Dashboard

April 2013

Public

Slide 28

April 2013

Public

Slide 29


MES - Level 3

ERP - Level 4

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Pro

du

ction

Op

era

tor

Da

shb

oa

rd (

GU

I)

SAP MII

Quintiq

Operational

Planning

Siemens

TCE

Indicenter /

Coach

Test Scripts

SA

P B

usin

ess O

bje

cts

(R

epo

rts/D

ashb

oa

rds)

SAP

Manufacturing

Execution

SAP ECC

Graphical Routing

Editor

Quintiq

Shift Planning

Quintiq

Operational

Planning

Siemens

TCE

RSuite / Coach

Test Scripts



Manufacturing Execution: POD accesses dashboards,

reports, work instructions, etc.

Public

Slide 30

April 2013

Public

Slide 31

April 2013

Shop Floor Control impact on FLOW improvement

• Graphical Routing Editor to define blueprint

• Calculate optimal sequence (in 2 min. instead of 5 days)

• Fair Work Packages per operator, per shift

• Dynamic sequencing

• Real-time progress tracking (even available for operator during shift)

• Monitoring and reporting

• Escalate disturbance notifications

• Assure production progress

• Trigger the just-in-time delivery of kit carts

• Dynamic Work instructions • Operator assignments

• Execute Work Packages in takts

• Disturbance resolution process

April 2013

Public

Slide 32

What’s next ?

This week : Start of Work preparation in PRD

Next week : Final UAT

Sept. 30 : Start Roll-out to 1st workcenters

Till end Q1 : Roll-out in ASML Netherlands

To be planned / follow-up projects:

- Potential enhancements after pilot in EUV factory;

- MES – Machine interfacing;

- World-Wide roll-out:

USA - Wilton

USA - San Diego

Taiwan - Linkou

- Next step for disturbance resolution (QIM ??)

- Workplace efficiency – Use of Mobile / iPad

July 2012

Public

Slide 33

Questions

Technology

SAP Manufacturing Days - Marcel Cayers ASML