Master sourceSCombine High Performances with Low Cost
The Master Source benefits from MS technology which
consists of a specific crucible design combining high per-
formances with low operating and maintenance costs. the
ultra-pure beam of stable flux is a result of the MS crucible
concept.
The MS crucible is designed in two parts : the reservoir
containing the material, and the effusion nozzle screwed
in the reservoir. the removable nozzle of the MS crucible is
shaped in such a way that it gives better uniformity and an
optimal utilization of the material on the wafer. the cylindri-
cal reservoir shape maximizes the capacity of the crucible
and allows the loading of a single shaped piece of material.
The use of a shaped charge helps to reduce surface conta-
minations and results in high layer performance. The nozzle
shape defines the spatial distribution of the flux. the innova-
tive design permits a narrow or wide flux beam, governing
material consumption and defining uniformity criteria for the
geometry of each system. the surface of the effusion nozzle
for the MS crucible is lower than the evaporation surface
in the crucible leading to a KNUDSEN effect. Thanks to the
KNUDSEN effect, the depletion observed in an open cruci-
ble is strongly decreased and even eliminated.
Crucibles are made of Pyrolytic Graphite that is not wetted
by Ga or In which guarantees a very low defect density. The
nominal capacity of the Master Source varies from 25 cc to
5800 cc, for research applications to production. The Master
Source is the optimal cell technology for the evaporation of
materials with low and medium vapor pressure. It is used for
elements III, but also allows the evaporation of more exotic
materials like Ag, LiF, CdTe, etc.
n high loading capacity: from 26cc to 5800cc
n excellent flux stability
n outstanding uniformity
n high reliability, durability and low maintenance
n cost effective solution: made to last
n re-usable crucibles
s P e c i f i c a t i o n s
cell Model s40 Ms140
s40 Ms240
s63 Ms440
s80 Ms540
s100 Ms1640
s150 Ms4000
s250 Ms2200
Filament Two
Heating filaments (Tantalum) Wire Flat
Thermocouple Double C type
Mounting flange (min) CF 40 CF 40 CF 63 CF 100 CF 100 CF 150 CF 250
Typical operating temperature 100°C - 1150°C
Maximum continuous operating temperature
1150°C
Maximum outgassing temperature
1350°C
Temperature stability ± 0.2°C
Water / gas / electrical
Power consumption 200W 250W 400W 850W 900W 3600W 10KW
Power supply recommended 2x(60V-12.5A) 2x(60V-25A) 2x(80V-19A) 2x(100V-33A)300V-33A /300V-17A
Power output connector Sock- Ø5 Sock-Ø3 Sock- Ø5 WTL Ø6
Thermocouple connector HMPW-C-M
Water connection* SWGØ3 N.A.
Pneumatic connection* Ø4 mm fitting N.A.
OPTions*
Integrated water panel N.A. Yes N.A.
Integrated shutter & water panel
N.A. Yes N.A.
Nipple shutter Yes N.A.
*N.A. : Non applicable
*Integrate shutter and/or water spanel option require the next upsize flange.
characteristics
scheMatic of the disasseMBled vieW
CrucibleRservoir + Nozzle
Cap
Heater
Flange
Electrical and thermocouple connectors
r e s u l t s
gaas deposition rate versus crucible bottom temperature.
The results have been obtained on a C12 using an MS240.
Measurement of the flux transient of the Ms source during the opening of the shutter.
The three graphs are obtained for three different tip-bottom
temperature gradients. No flux overshoot is observed.
The results were obtained on a C12 using an MS240.
o P e r a t i n g t h e s o u r c e
Process control system
Bottom filament T/C cable (6)
Cell (1)
Bottom filament power cable (2)
Top filament power cable (2)
Top filament T/C cable (6)
Communication assembly (8)Bottom filament command cable (4)
Bottom filament PID controller (5)
Power supplies (3)
Top filament PID controller (5)
Communication strap RS 422 (7)Top filament command cable (4)
c o M Pa c t 2 1 s e r i e so r d e r i n g i n f o r M a t i o n
cell Model P. n. h2o flange i.v.l. o.l. o.d.
S40 MS 140 26 R235 087 8 No CF 40 (2.75'')
Please contact Riber
S40 MS 240 40 R235 014 5 No CF 40 (2.75'')
S63 MS 440 85 R235 039 5 No CF 63 (4.5'')
S63 MS 440 85 VG R235 096 6 Yes CF 63 (4.5'')
S80 MS 540 130 R235 072 5 No CF 100 (6'')
S80 MS 540 130 VG R235 103 5 Yes CF 100 (6'')
S100 MS 1640 380 R235 071 7 No CF 125 (6.75'')
S100 MS 1640 380 VG R235 096 7 Yes CF 100 (6'')
S150 MS 4000 1000 R235 096 8 N.A. CF 150 (8'')
S250 MS 22000 5800 R241 259 2 N.A. CF 250 (12'')
cell Model voluMe cruciBle P.n. caP P.n.
S40 MS 140 26 Ri 26 M 40 026 R235 095 2 CAP40026 R235 095 9
S40 MS 240 40 Ri 40 M 40 040 R235 095 3 CAP40040 R235 096 0
S63 MS 440 85 Ri 85 M 63 085 R235 095 4 CAP63085 R235 096 1
S63 MS 440 85 VG 85 M 63 085 R235 095 4 CAP63085 R235 096 1
S80 MS 540 130 Ri 130 M 70 130 R235 095 5 CAP70130 R235 096 2
S80 MS 540 130 VG 380 M 100 380-4 R235 095 6 CAP100380-4 R235 096 3
S100 MS 1640 380 Ri 380 M 100 380-6 R235 095 7 CAP100380-6 R235 096 4
S100 MS 1640 380 VG 380 M 100 380-6 R235 095 7 CAP100380-6 R235 096 4
S150 MS 4000 1000 Ri 1000 M 150 980 R235 095 8 CAP150980 R235 096 5
S250 MS 22000 5800 Ri 5800 M 250 5800 R235 099 2 CAP25022000 R235 099 3
Ms cell
cruciBles
S100 380MS1640
Cell gauge
Technology
Volume
PRoduct guide
M 08563
Cell gauge
Crucible ModelM : MS
Volume
PRoduct guide
Nozzle
Cap
Reservoir
s o u r c e s e l e c t i o n g u i d e
systeMs source Model
s40Ms140
s40Ms240
s63Ms440
s80Ms540
s100Ms1640
s150Ms4000
s250Ms22000
riBer
MBE 32
Compact 12
Compact 21
EPINEAT
MBE 412 (4"/6")
MBE 49
MBE 6000
MBE 7000
veeco / varian
GEN II
MOD GEN II
GEN 930
GEN 10
GEN 20
GEN 200
GEN 2000
vg
V80
V90
V100
V150
other systeMs Riber sources are also available for use on systems from Eiko, Anelva, Ulvac, SVTA and DCA, as well as customs chambers. Contact Riber for details.
RECOMMENDED
CONTACT RIBER FOR MORE DETAILS
INAPPROPRIATE
6083
0N12
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t e c h n o l o g i c a l l e a d e r s h i P
W o r l d W i d e P r e s e n c e
Riber is the world leading supplier of MBe processing equipment and related services.
In total, 750 of our MBE systems have been installed with at least one system in each
of the 35 countries with which MBE is involved. This represents 75% of the global market.
Capitalizing on its 30 years of experience, the company’s core philosophy is to design systems
in close association with customers. Riber has invented and designed major features which
are now found in all MBE systems.
Riber plays a key role in the development of MBE technology, providing customers with solutions
from equipment to epitaxial growth.
RIBER - 31, rue Casimir Périer, B.P 70083, 95873 Bezons, France Tel: +33 (0)1 39 96 65 00 - Fax: +33 (0)1 39 47 45 62 - email:[email protected] – Internet: www.riber.com
F o r m o re i n fo r m a t i o n :
tel: +33 (0)1 39 96 65 00
e m a i l : i n fo @ r i b e r. c o m
internet: www.r iber.com