R.D. Mathis Company Vacuum Evaporation Sources Catalogrdmathis.com/wp-content/uploads/2017/09/RD-Mathis... · CRUCIBLE TYPE MATERIAL C2 Q Quartz CRUCIBLE TYPE MATERIAL C3 Q Quartz

R.D. Mathis CompanyVacuum Evaporation

Sources Catalog

(562) 426-7049 • (562) 595-0907 fax • www.rdmathis.com

P.O. Box 92916 • Long Beach, CA 90809-2916

Your best choice for quality hi-vacuum evaporation sources.

Welcome to R.D. Mathis CompanyThe R.D. Mathis Company continues to supply the thin film Industry with quality vacuum evaporation sources as we have since 1963. Since then wehave provided innovative and creative solutions to research and development laboratories, university projects and production facilities thathave allowed many pioneering thermal evaporation processes to beattempted and completed successfully.

This experience has been incorporated into our wide selection ofproven evaporation sources offered in our catalog as well as the modified and custom products we produce everyday in our state ofthe art manufacturing facility.

Our flexible tooling and highly skilled work force allow us to produce unique one of a kind sources as well as high-volumeproduction quantities with equal ease. All of our refractory materials are high purity, high quality and are processedusing specific R.D. Mathis Company requirements. Everysource we produce is of the highest quality in the industryand represents value, innovation, reliability and integrity –the cornerstones of our business philosophy.

Along with every source comes our commitment to provide you with the best service possible. Our staffstands ready to provide you with engineering consultation to help determine the right sourcefor you at the best value to make your coatingprocess a success.

We hope your experience with R.D. Mathis Companyis nothing short of exceptional. We look forward to serving you for years to come.

– R.D. Mathis Company


FILAMENTS ……………………………………………Pages 1 – 6Chrome plated tungsten rods, tungsten filaments, tungsten rod sources, point sources, loopsources and spiral heater filaments.

BASKETS & BASKET HEATERS ……………………Pages 7 – 10Single and multi-strand tungsten baskets for direct material evaporation and stranded tungstenbasket heaters for crucible heating and evaporation.

CRUCIBLES & CRUCIBLE HEATERS ………………Pages 11 – 16Crucibles made from alumina, boron nitride, boron nitride composite, graphite, molybdenum,quartz, tantalum, double shielded and single shielded crucible heaters.

BOAT SOURCES ……………………………………Pages 17 – 28Tungsten, tantalum and molybdenum boat sources, covered boats and folded boats.

ALUMINA COATED SOURCES………………………Pages 29 – 34Alumina coated tungsten baskets, alumina coated tungsten and molybdenum boats and barrierstyle alumina coated boats.

BOX SOURCES …………………………………… Pages 35 – 43Baffled box sources for SiO and ZnS, special welded tantalum boxes and covers, folded boxes, baffles and covers and high volume sources.

MICRO ELECTRONIC SOURCES …………………Pages 44 – 47

ORDERING OPTIONS

OUR PRODUCTS

A full selection of smaller sized sources that require lower power and low volume evaporations.Also includes information on tungsten mesh and screens.

– Call in to speak with one of our sales staff at (562) 426-7049– Fax your order to: (562) 595-0907– Email your order to: [email protected]– International orders, send to: [email protected]

– Order online at: www.rdmathis.com– Mail your order to: R.D. Mathis CompanyPO Box 92916, Long Beach, CA 90809

R.D. MATHIS COMPANY Specialists in the quality fabrication of Hi-Vacuum Evaporation Sources. Our refractory metal facilities are completely flexible... mass production or small custom orders are produced withequal ease and attention to detail, customer specifications are rigidly adhered to. Engineering consultation is available to solve those difficult “source” problems.

FILAMENTS

1

We offer an extensive selection of tungsten filaments, rod sources, point sources, baskets and heaters to fit mostapplications as well as custom fabrication. Our filaments are made in house using proven fabrication processes andmaterials, and are of the highest quality, reliability and consistency in the industry. The benefits of using our tungstenmetalizing filaments include low cost, high rates with low power (limited capacity), repeatability and ease of use.

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F1 3x.025WF1 3x.030WF1 .040W

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F2 3x.025WF2 3x.030WF2 4x.030W

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F3 3x.025WF3 3x.030WF3 2x.040WF3 4x.030WF3 .040W

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F4 3x.025WF4 3x.030WF4 4x.030WF4 2x.040WF4 .040W

TUNGSTEN FILAMENTS FOR VACUUM METALIZING

2

CHROME PLATED TUNGSTEN RODS

The R.D. Mathis Company chrome plated tungsten rods are used for thin films of chromium in the electronics and optics industry. The advantage over chrome chips are: good thermal efficiency; regulation of film thickness; and elimination of spalling.

10 Coils

6 Coils

6 Coils

4 Coils

The rods are offered in the below configuration as standards.

PART NUMBERCRW-1CRW-2CRW-3

C&D0.50.50.5

L246

A0.0500.0500.050

B0.0700.0700.070

LB

A

D

C

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F7 3x.030WF7 4x.030WF7 2x.040WF7 3x.040W

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F8 3x.030WF8 4x.030WF8 2x.040WF8 3x.040W

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F9 3x.030WF9 4x.030WF9 2x.040WF9 3x.040W

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F10 3x.030WF10 4x.030WF10 2x.040WF10 3x.040W

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F6 3x.025WF6 3x.030WF6 4x.030WF6 2x.040WF6 3x.040W

FILAMENTS

3

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F5 3x.025WF5 3x.030WF5 4x.030WF5 2x.040WF5 3x.040WF5 .040W

10 Coils

8 Coils

14 Coils

6 Coils

8 Coils

14 Coils

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F13 3x.025WF13 3x.030WF13 4x.030W

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F14 3x.030WF14 4x.030WF14 3x.040W

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F15 3x.030WF15 4x.030WF15 3x.040W

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F12 3x.025WF12 3x.030W

TUNGSTEN ROD SOURCE

PART # OL WL WRAP LAYERS

F16A 4 2 8F16B 5 3 8F16C 5 3 12F16D 8 6 12

Dimensions are in inches

TUNGSTEN FILAMENTS FOR VACUUM METALIZING

4

TUNGSTEN FILAMENT

TYPE WIRE SIZE

F11 3x.030WF11 4x.030WF11 2x.040WF11 3x.040W

6 Coils

5 Coils

10 Coils

8 Coils

10 Coils

POINT SOURCE LOOP FILAMENT

TYPE WIRE SIZE

P1 3x.025WP1 3x.030WP1 4x.030WP1 .060W


TYPE WIRE SIZE

P2 3x.025WP2 3x.030WP2 4x.030WP2 .060W


TYPE WIRE SIZE

P3 3x.025WP3 3x.030WP3 4x.030WP3 .060W


TYPE WIRE SIZE

P4 3x.025WP4 3x.030WP4 4x.030WP4 .060W


TYPE WIRE SIZE

P5 3x.025WP5 3x.030WP5 4x.030WP5 .040WP5 .060W

FILAMENTS

5


TYPE WIRE SIZE

P6 3x.025WP6 .040WP6 .060W


TYPE WIRE SIZE

P7 3x.030WP7 4x.030W

LOOSE LAY WIRE

TYPE WIRE SIZE

P8 3x.025WP8 3x.030W

HEATER FILAMENT

TYPE WIRE SIZE

H1 .040WH1 .060W

HEATER FILAMENT

TYPE WIRE SIZE

H2 .040WH2 .060W

HEATER FILAMENT

TYPE WIRE SIZE

H3 .040WH3 .060W

POINT SOURCE LOOP & HEATER FILAMENTS

6

BASKETS

7

Baskets and basket heaters are made from the highest quality multi-strand or single strand tungsten wire. Our tungsten baskets are ideal for low cost, low volume coatings and require minimal power. Materials can be placeddirectly into baskets for evaporation. Basket heaters utilize a crucible and can be used for low and high volume coatings. Custom baskets are available.

BASKET

TYPE WIRE SIZE

B1 3x.025WB1 3x.030WB1 .040W

BASKET

TYPE WIRE SIZE

B2 3x.025WB2 3x.030WB2 .040W

BASKET

TYPE WIRE SIZE

B3 3x.025WB3 .040W

BASKET

TYPE WIRE SIZE

B4 3x.030WB4 .060W0

BASKET

TYPE WIRE SIZE

B5 3x.025WB5 .040W

BASKETS & BASKET HEATERS

8

5 Coils

4 Coils

5 Coils

5 Coils

13 Coils

BASKET

TYPE WIRE SIZE

B6 3x.025WB6 .040W

BASKET

TYPE WIRE SIZE

B7 3x.025WB7 .040W

BASKET

TYPE WIRE SIZE

B12A 3x.025WB12A 3x.030WB12A .040W

BASKET

TYPE WIRE SIZE

B12B 3x.025WB12B 3x.030WB12B .040WB12B .060W

BASKET

TYPE WIRE SIZE

B13 3x.025WB13 3x.030WB13 .040W

BASKET

TYPE WIRE SIZE

B14 3x.030WB14 4x.030WB14 .060W

BASKETS

9

13 Coils

13 Coils

4 Coils

5 Coils

5 Coils

9 Coils

BASKET HEATERS

TYPE WIRE SIZE

B8A 3x.025WB8A 3x.030W

Use with C1 Crucible

BASKET HEATERS

TYPE WIRE SIZE

B8B 3x.025WB8B 3x.030W


BASKET HEATERS

TYPE WIRE SIZE

B9 3x.030WB9 4x.030WB9 3x.040W


BASKET HEATERS

TYPE WIRE SIZE

B10 4x.030WB10 3x.040W


BASKET HEATERS

TYPE WIRE SIZE

B11 3x.040W


BASKETS & BASKET HEATERS

10

CRUCIBLES

The R.D. Mathis Company offers a wide variety of cruciblesizes and materials for your evaporation needs. The cruciblesshown in this section are designed to fit into our basket heatersand shielded crucible heaters. Custom sizes are available uponrequest. We also offer liners for electron beam systems.

11

CRUCIBLES

CRUCIBLE

TYPE MATERIAL

C2 Q Quartz

CRUCIBLE

TYPE MATERIAL

C3 Q Quartz

12

CRUCIBLE

TYPE MATERIAL

C5 AO Alumina OxideC5 Q QuartzC5 BN Boron Nitride*C5 BNC Boron Nitride Composite*

Use with B8A Basket andwith CH-1, CH-10, CH-11,ME-19 Heaters and ME18ABasket

Wall thickness .040

Tapered

Use with B-9 Basket

Wall thickness .050

Tapered

Wall thickness .070

Wall thickness .090

Use with CH-5, CH-12 and CH-13 Heaters and with B10Basket

Wall thickness .060

Tapered

CRUCIBLE

TYPE MATERIAL

C6 AO Alumina OxideC6 Q Quartz

Use with CH-6 and CH-14 Heater and with B11 Basket

Wall thickness .070

Tapered

CRUCIBLE

TYPE MATERIAL

C4 Ta TantalumC4 Mo MolybdenumC4 C Carbon

CRUCIBLE

TYPE MATERIAL

C1 AO Alumina OxideC1 Q QuartzC1 BN Boron Nitride*C1 BNC Boron Nitride Composite*

3/8 in.

1 in.

7/16 in.

1-1/2 in.

.5 in. O.D.

.460 in.O.D.

1/2 in.

.820 in.O.D.

.850 in.

1.35 in.O.D.

13/16 in.

1 in. O.D.

1 in. O.D.

.900 in.O.D.

1.5 in. O.D.

1.23 in.O.D.

CRUCIBLES

13

*BORON NITRIDESBoron Nitride is similar to graphite in crystal structure. It is an excellent dielectric over a wide range of temperatures. It is not attacked by many materials used for thin film fabrication. All Boron Nitride crucibles should be slowly heated and thoroughly outgassed before use. Custom Boron Nitride, Carbon, Tantalum and Molybdenum crucibles on request.

CRUCIBLE

TYPE MATERIAL

C7 BN Boron Nitride*C7 C CarbonC7 Q QuartzC7 Ta TantalumC7 Mo Molybdenum

Use with CH-7 Heater

Susceptor Type1/4 in. I.D.

CRUCIBLE

TYPE MATERIAL


Use with CH-8 Heater


CRUCIBLE

TYPE MATERIAL


Use with CH-9 and ME-20 Heaters


CRUCIBLE

TYPE MATERIAL

C9 AO Alumina OxideC9 Q QuartzC9 BN Boron Nitride*C9 BNC Boron Nitride Composite*C9 Ta TantalumC9 Mo MolybdenumC9 C Carbon

Use with CH-1, CH-10, CH-11 and ME-19 Heaters B8B and ME18B Baskets

Wall thickness .040Straight Wall1/2 in.

1/2 in.

1 in.

1/2 in.

1-1/2 in.

1/2 in.

3/8in.

1/4 in.

3/8 in.

1/2 in.

5/8 in.

HEAT SHIELDED CRUCIBLE HEATERS (TO 1800oC)

14

CRUCIBLE HEATER

TYPE

CH-1

Use with C1 and C9 Crucibles

Crucible size 1/2 in. x 1/2 in.

CRUCIBLE HEATER

TYPE

CH-6

CRUCIBLE HEATER

TYPE

CH-5

CRUCIBLE HEATER

TYPE

CH-7

Shielded Crucible Heaters provide uniform heating to theinstalled crucible and allow very high rates, as well ashigh temperatures, up to 1800°C, to be achieved. Due tothe rigid construction, heater and crucible life is extended. The thermal shields protect your vacuumcomponents by reducing the radiant heat that your system is exposed to. Custom sizes are available onrequest. Please contact our technical staff if you wouldlike more information about these products.


Crucible size 1 in. x 1 in.


Crucible size 1-1/2 in. x 1-1/2


Susceptor Type

Crucible size 3/8 in. x 1 in.

CRUCIBLE HEATER

TYPE

CH-8


Susceptor Type

Crucible size 1/2 in. x 1-1/2 in.

4 in. 1-3/4 in.

4-1/4 in.

2-3/4 in.

2-7/8 in. 1-3/8 in.

1-5/8 in.

2-3/4 in. 1-1/4 in.

2-1/4 in.

1-1/4 in.

1-1/4 in.

1-5/8 in.

1-1/8 in.

5/8 in.

CRUCIBLES

15

CRUCIBLE HEATER

TYPE

CH-10

Use with C1 and C9Crucibles

CRUCIBLE HEATER

TYPE

CH-12


CRUCIBLE HEATER

TYPE

CH-11

Use with C1 andC9 Crucibles

CRUCIBLE HEATER

TYPE

CH-9


Susceptor Type

Horizontal Leads


Horizontal Leads


Vertical Leads


Horizontal Leads

Crucible size 1 in. x 1 in.1-1/8 in.

1 in.

3 in.

1 in.

1 in.

3 in. 5/8 in.

1 in.

3 in. 1/2 in.

3-1/2 in.

5/8 in.

16

CRUCIBLE HEATER

TYPE

CH-14


CRUCIBLE HEATER

TYPE

ME-20


CRUCIBLE HEATER

TYPE

ME-19

Use with C1 andC9 Crucibles

CRUCIBLE HEATER

TYPE

CH-13


Vertical Leads

Crucible size 1 in. x 1 in.

Horizontal Leads

Crucible size 1-1/2 in. x 1-1/2 in.


Susceptor Type


HEAT SHIELDED CRUCIBLE HEATERS (TO 1800oC)

3-1/2 in.

1 in.

5 in.

1-1/8 in.

2 in.

2 in.

1-1/8 in.

1-5/8 in.

9/16 in.

1 in.

9/16 in.

1 in.

BOAT SOURCES

17

Evaporation boats are capable of depositing a wide variety of materials. The R.D. Mathis Company offers an extensive selection of standard tungsten, tantalum and molybdenum boats, as well as, custom fabrication to meetyour specific evaporation needs. All of our evaporation boats are made in our factory, using the highest quality materials and processes. Our boats are available in a variety of materials and thicknesses. If you need help in selecting the right boat for your process, or need a custom boat, please give our technical staff a call.

BOAT SOURCE

TYPE MATERIAL

S1 .005WS1 .010WS1 .015WS1 .005Ta

TYPE MATERIAL

S1 .010TaS1 .005MoS1 .010Mo

BOAT SOURCE

TYPE MATERIAL

S2A .005WS2A .010WS2A .015WS2A .005Ta

TYPE MATERIAL

S2A .010TaS2A .005MoS2A .010Mo

BOAT SOURCE

TYPE MATERIAL

S2B .005WS2B .010WS2B .015WS2B .005Ta

TYPE MATERIAL

S2B .010TaS2B .005MoS2B .010Mo

BOAT SOURCE

TYPE MATERIAL

S3 .005WS3 .010WS3 .015WS3 .005Ta

TYPE MATERIAL

S3 .010TaS3 .005MoS3 .010Mo

BOAT SOURCE

TYPE MATERIAL

S4 .005WS4 .010WS4 .015WS4 .005Ta

TYPE MATERIAL

S4 .010TaS4 .005MoS4 .010Mo

BOAT SOURCE

TYPE MATERIAL

S5 .005WS5 .005TaS5 .010TaS5 .005MoS5 .010Mo

TUNGSTEN – TANTALUM – MOLYBDENUM

18

BOAT SOURCES

19

BOAT SOURCE

TYPE MATERIAL

S6 .005WS6 .010WS6 .005TaS6 .010Ta

TYPE MATERIAL

S6 .005MoS6 .010Mo

BOAT SOURCE

TYPE MATERIAL

S7 .005WS7 .010WS7 .005TaS7 .010Ta

TYPE MATERIAL

S7 .005MoS7 .010Mo

BOAT SOURCE

TYPE MATERIAL

S8A .005WS8A .010WS8A .015WS8A .005Ta

TYPE MATERIAL


BOAT SOURCE

TYPE MATERIAL

S8B .005WS8B .010WS8B .015WS8B .005Ta

TYPE MATERIAL


BOAT SOURCE

TYPE MATERIAL

S8C .010WS8C .010TaS8C .015TaS8C .010MoS8C .015Mo

BOAT SOURCE

TYPE MATERIAL

S8D .010WS8D .010TaS8D .015TaS8D .010MoS8D .015Mo

S6 Pan Boat

S8 Isolated HotZone Boat(Dimple Type)




S7 Dimple Boat


20

BOAT SOURCE

TYPE MATERIAL

S9A .005WS9A .010WS9A .015WS9A .005Ta

TYPE MATERIAL


BOAT SOURCE

TYPE MATERIAL

S9B .005WS9B .010WS9B .015WS9B .005Ta

TYPE MATERIAL


BOAT SOURCE

TYPE MATERIAL

S9C .010WS9C .010TaS9C .015TaS9C .010MoS9C .015Mo

BOAT SOURCE

TYPE MATERIAL

S9D .010WS9D .010TaS9D .015TaS9D .025Ta

TYPE MATERIAL

S9D .010MoS9D .015Mo

BOAT SOURCE

TYPE MATERIAL

S9E .010WS9E .010TaS9E .015TaS9E .025Ta

TYPE MATERIAL

S9E .010MoS9E .015Mo

BOAT SOURCE

TYPE MATERIAL

S9F .010WS9F .010TaS9F .015TaS9F .025Ta

TYPE MATERIAL

S9F .010MoS9F .015Mo

BOAT SOURCES

21

BOAT SOURCE

TYPE MATERIAL

S10 .005WS10 .010WS10 .005TaS10 .010Ta

TYPE MATERIAL

S10 .005MoS10 .010Mo

BOAT SOURCE

TYPE MATERIAL

S11 .005WS11 .010WS11 .005TaS11 .010Ta

TYPE MATERIAL

S11 .005MoS11 .010Mo

BOAT SOURCE

TYPE MATERIAL

S14 .005WS14 .010WS14 .015WS14 .005Ta

TYPE MATERIAL

S14 .010TaS14 .005MoS14 .010Mo

BOAT SOURCE

TYPE MATERIAL

S12A .005TaS12A .010TaS12A .005MoS12A .010Mo

BOAT SOURCE

TYPE MATERIAL

S12B .005TaS12B .010TaS12B .005MoS12B .010Mo

BOAT SOURCE

TYPE MATERIAL

S13 .005WS13 .005TaS13 .010TaS13 .005MoS13 .010Mo


22

BOAT SOURCE

TYPE MATERIAL

S17A .005TaS17B .005TaS17A .010TaS17B .010Ta

BOAT SOURCE

TYPE MATERIAL

S18 Mo MolybdenumS18 C CarbonS18 Ta Tantalum

BOAT SOURCE

TYPE MATERIAL

S15 .005WS15 .010WS15 .015WS15 .005Ta

TYPE MATERIAL

S15 .010TaS15 .005MoS15 .010Mo

BOAT SOURCE

TYPE MATERIAL

S16 .005WS16 .010WS16 .005TaS16 .010Ta

TYPE MATERIAL

S16 .005MoS16 .010Mo

BOAT SOURCE

TYPE MATERIAL

S19A Ta TantalumS19B Ta TantalumS19C Ta Tantalum

Height – 1-1/2 in.

BOAT SOURCE

TYPE MATERIAL

S20A .005WS20A .010WS20A .015WS20A .005Ta

TYPE MATERIAL

S20A .010TaS20A .005MoS20A .010Mo

Cavity 2 in. long and 3/8 in. wide

S17A S17B

BOAT SOURCES

23

BOAT SOURCE

TYPE MATERIAL

S23 .010WS23 .010TaS23 .010Mo

BOAT SOURCE

TYPE MATERIAL

S21 .005WS21 .010WS21 .005TaS21 .010Ta

TYPE MATERIAL

S21 .005MoS21 .010Mo

BOAT SOURCE

TYPE MATERIAL

S22 .005WS22 .010WS22 .005TaS22 .010Ta

TYPE MATERIAL

S22 .005MoS22 .010Mo

BOAT SOURCE

TYPE MATERIAL

S24 .005WS24 .010WS24 .005TaS24 .010TaS24 .005MoS24 .010Mo

BOAT SOURCE

TYPE MATERIAL

S25 .010WS25 .010TaS25 .010Mo

BOAT SOURCE

TYPE MATERIAL

S26 .010WS26 .010TaS26 .010Mo

2 pieces (top and bottom)





24

Insert fits between top and bottom of S25 & S26 Covered Boat Sources providingadditional baffling, reducing spitting.

BOAT SOURCE

TYPE MATERIAL

S28 .005WS28 .010WS28 .005TaS28 .010Ta

TYPE MATERIAL

S28 .005MoS28 .010Mo

BOAT SOURCE

TYPE MATERIAL

S33 .005WS33 .005TaS33 .005Mo

BOAT SOURCE

TYPE MATERIAL

S27 .005WS27 .010WS27 .005TaS27 .010Ta

TYPE MATERIAL

S27 .005MoS27 .010Mo

DEEP CUP BOAT SOURCE

TYPE MATERIAL

S29 .005WS29 .010WS29 .005TaS29 .010Ta

TYPE MATERIAL

S29 .015TaS29 .005MoS29 .010Mo

WRAPPED/COVERED BOAT SOURCE

TYPE MATERIAL

S30A .005WS30A .010WS30A .005TaS30A .010Ta

ELONGATED DIMPLE BOAT

TYPE MATERIAL

S31A .005WS31A .010WS31A .015WS31A .005TaS31A .010Ta

TYPE MATERIAL

S31A .015TaS31A .005MoS31A .010MoS31A .015Mo

Dimple Boat

BOAT SOURCES

25

DIMPLE BOAT

TYPE MATERIAL

S34 .005WS34 .010WS34 .005TaS34 .010Ta

TYPE MATERIAL

S34 .005MoS34 .010Mo

FLAT BOAT

TYPE MATERIAL

S35 .005WS35 .010WS35 .005TaS35 .010Ta

TYPE MATERIAL

S35 .005MoS35 .010Mo

BOAT SOURCE

TYPE MATERIAL

S36 .010WS36 .010TaS36 .015TaS36 .010Mo

BOAT SOURCE

TYPE MATERIAL

S37 .005TaS37 .010TaS37 .005MoS37 .010Mo

BOAT SOURCE

TYPE MATERIAL

S38 .005WS38 .010WS38 .005TaS38 .010Ta

TYPE MATERIAL

S38 .005MoS38 .010Mo

TUNGSTEN CRUCIBLE HEATER

TYPE MATERIAL

S32 .010WS32A .010W

Accommodates C1 and C9 CruciblesS32A

S32


26

BOAT SOURCE

TYPE MATERIAL

S39 .005TaS39 .010TaS39 .005MoS39 .010Mo

BOAT SOURCE

TYPE MATERIAL

S40 .005WS40 .005TaS40 .010TaS40 .005MoS40 .010Mo

BOAT SOURCE

TYPE MATERIAL

S42 .005WS42 .010WS42 .015WS42 .010Ta

TYPE MATERIAL

S42 .015TaS42 .010MoS42 .015Mo

BOAT SOURCE

TYPE MATERIAL

S43 .005WS43 .010WS43 .015WS43 .010Ta

TYPE MATERIAL

S43 .015TaS43 .010MoS43 .015Mo

BOAT SOURCE

TYPE MATERIAL

S44 .005WS44 .010WS44 .015WS44 .005TaS44 .010Ta

TYPE MATERIAL

S44 .015TaS44 .005MoS44 .010MoS44 .015Mo

BOAT SOURCE

TYPE MATERIAL

S45 .005WS45 .010WS45 .015WS45 .005TaS45 .010Ta

TYPE MATERIAL

S45 .015TaS45 .005MoS45 .010MoS45 .015Mo

BOAT SOURCE

TYPE MATERIAL

S46 .005WS46 .010WS46 .005TaS46 .010Ta

TYPE MATERIAL

S46 .005MoS46 .010Mo

BOAT SOURCE

TYPE MATERIAL

S47 .010WS47 .015WS47 .020WS47 .010Ta

TYPE MATERIAL

S47 .015TaS47 .020TaS47 .010MoS47 .015Mo

BOAT SOURCE

TYPE MATERIAL

S49 .010WS49 .015WS49 .020WS49 .010Ta

TYPE MATERIAL

S49 .015TaS49 .020TaS49 .010MoS49 .015Mo

BOAT SOURCE

TYPE MATERIAL

S50 .010WS50 .015WS50 .020WS50 .010Ta

TYPE MATERIAL

S50 .015TaS50 .020TaS50 .010MoS50 .015Mo

BOAT SOURCE

TYPE MATERIAL

S51 .010WS51 .010TaS51 .010Mo

BOAT SOURCES

27

BOAT SOURCE

TYPE MATERIAL

S48 .005WS48 .010WS48 .010TaS48 .010Mo

5/8” cavity x 1/8” deep (opening)


28

BASIC PART NUMBER

FB1

FB2

FB3

FB4

AVAILABLE ON REQUEST: AL2O3 COATED INSIDE OR AL2O3 BARRIER TYPE

BL1.88

1.88

3.75

3.75

BW

.75

1.3

1.0

.75

H

.73

.47

.50

.75

OL4.5

4.34

6.16

6.16

W

2.13

2.13

2.13

2.13

LL

.75

.75

.82

.75

VOL

17CC

19CC

31CC

35CC

MATERIAL

AVAILABLE IN .005, .010, & .015 Mo & Ta

TUNGSTEN ON REQUEST

BASIC PART NUMBER

FB10

FB11

FB12

AVAILABLE ON REQUEST: AL2O3 COATED INSIDE OR AL2O3 BARRIER TYPE

BL

.66

1.25

1.56

BW

.45

.38

.50

H

.43

.31

.31

OL

1.42

2.56

2.94

W

1.25

1.00

1.13

LL

.38

.56

.69

VOL

2CC

3CC

4CC

MATERIAL

AVAILABLE IN .005, .010, & .015 Mo & Ta

TUNGSTEN ON REQUEST

LL

BW

OL

BL

W

H

LL

BW

OL

BL

W

H

FOLDED BOATS

ALUMINA

29

Alumina (AI2O3) coated evaporation sources have been developed to replace alumina crucibles for some specific applications. The advantages of this type of source is good heat transfer and the inertness of alumina with most metals.Also, the evaporant does not wet the alumina, resulting in no resistant change of the boat when the evaporant melts.Due to the non wetting characteristics of alumina, the evaporant forms a sphere when melted resulting in a point source.

This type of source will give long life compared to the non protected sources. Coated sources will require from thirtyto fifty percent more power to effect an evaporation due to the difference in heat conduction. The aluminais semi-conductor grade and is applied to the boat by a plasma spray technique. Temperatures of 1850˚C should beavoided and when an evaporation is effected the power should be reduced slightly to avoid over heating.

EVAPORATION SOURCE

S2B-AO-MO

S2B-AO-W

0.005 AI2O3 Coating0.010 Molybdenum Boat0.010 Tungsten Boat

EVAPORATION SOURCE

S3-AO-MO

S3-AO-W


EVAPORATION SOURCE

S8C-AO-MO

S8C-AO-W


EVAPORATION SOURCE

S1-AO-MO

S1-AO-W


EVAPORATION SOURCE

Alumina Coated Tungsten Baskets

30

ALUMINA COATED EVAPORATION SOURCES

RDM-WBAO-1RDM-WBAO-2RDM-WBAO-3RDM-WBAO-4RDM-WBAO-5RDM-WBAO-6

Part NumberWireDia.

“A”Top I.D.

InsideDepth

“B”OAL

“C”Height

Volts Amps Watts Temp

.020”

.040”

.040”

.040”

.050”

.060”

.150”

.375”

.420”

.790”

.500”

.900”

.225”

.350”

.425”

.725”

.775”

.975”

4”4”4”4”4”4”

.375”

.500”

.575”

.875”

.925”1.125”

114039335049

5.706.206.9013.007.0015.80

63248272429350768

1475˚C1475˚C1475˚C1475˚C1475˚C1475˚C

Dash Numbers are inorder of size (height)

EVAPORATION SOURCE

S9A-AO-MO

S9A-AO-W


EVAPORATION SOURCE

S9B-AO-MO

S9B-AO-W


EVAPORATION SOURCE

S9C-AO-MO

S9C-AO-W


EVAPORATION SOURCE

S9F-AO-MO

0.005 AI2O3 Coating0.010 Molybdenum Boat

EVAPORATION SOURCE

S21-AO-MO

S21-AO-W


ALUMINA

31

EVAPORATION SOURCE

S29-AO-MO

S29-AO-W


EVAPORATION SOURCE

S36-AO-MO

S36-AO-W


EVAPORATION SOURCE

S37-AO-MO


EVAPORATION SOURCE

S38A-AO-MO

S38A-AO-W


EVAPORATION SOURCE

S35A-AO-MO

S35A-AO-W



32

TUNGSTEN & MOLYBDENUM BOATS WITH ALUMINA BARRIERS

This type of source has been designed to give the benefit of a refractory metal boat and a ceramic barrier. Theexposed metal area in the bottom of the boat allows the evaporant to be in good thermal contact with the source.The alumina barrier will inhibit the evaporant from creeping toward the heat sink or from wetting the entire boat.

TUNGSTEN & MOLYBDENUM BOATSALUMINA

33

EVAPORATION SOURCE

S35B-AO-MO

S35B-AO-W


Evaporation Area1/4 in. x 3/4 in.

EVAPORATION SOURCE

S38B-AO-MO

S38B-AO-W



EVAPORATION SOURCE

S42B-AO-MO

S42B-AO-W



EVAPORATION SOURCE

S45B-AO-MO

S45B-AO-W


Evaporation Area5/8 in. x 1-3/4 in.

EVAPORATION SOURCE

S51-AO-MO


5/8” cavity x 1/8” deep

(opening)


34

EVAPORATION SOURCE

ME4-AO

AI2O3 Coating0.005 Mo Boat

EVAPORATION SOURCE

ME3-AO


EVAPORATION SOURCE

ME6B-AO


EVAPORATION SOURCE

ME9-AO


EVAPORATION SOURCE

ME17-.030W-AO

.030W

EVAPORATION SOURCE

ME22-AO

AI2O3 Coating0.010 Ta Boat

EVAPORATION SOURCE

SB3-AO


EVAPORATION SOURCE

SB5-AO


EVAPORATION SOURCE

ME25-AO-MO


EVAPORATION SOURCE

SB3A-AO

AI2O3 Coating0.005 Ta Cover

Both under and top surfaces coated

EVAPORATION SOURCE

SB5A-AO



EVAPORATION SOURCE

ME22A-AO



5/8” cavity x 1/8” deep

(opening)

BOX SOURCES

35

This section includes Special Tantalum Boats, Folded Baffled Box Sources and Shielded Baffled Box Sources. Specialtantalum boats have welded corners and offer the benefits of long life along with covered evaporation areas to helpreduce spitting and contain volatile materials. These are available in a variety of sizes and offer baffling in somecases. Custom sizes are easily made and available on request. Also shown are Folded Baffled Box sources, availablein Molybdenum and Tantalum, and offer exceptional baffling, without heat shielding. These are available in varying capacities as standard items, as well as custom sizes on request. The last section includes Shielded Baffled BoxSources and High Volume Sources that are ideal for SiO, Zns and other subliming materials.

SB-1B Cover(0.005 Ta)Baffled

SB-1A Cover(0.005 Ta)Baffled

SB-1(0.010 Ta)Baffled

SB-2B Cover(0.005 Ta)

SB-2A Cover(0.005 Ta)

SB-2(0.010 Ta)



SB-3(0.010 Ta)

SPECIAL TANTALUM BOATS

36



SB-4(0.010 Ta)



SB-5(0.010 Ta)


Baffled Cover


Baffled Cover

SB-6(0.005 Ta)Baffled

BOX SOURCES

37

FOLDED BAFFLED BOX SOURCES

38

FOLDED BAFFLED BOX SOURCE

BASIC PART NUMBER

SB-7

SB-8

SB-9

SB-10

BL

1.75

1.75

3.0

2.75

W

1

1.5

1.38

2

H

.75

1

.75

1.25

OL

3.5

3.5

4.75

4

P0.06 (60 HOLES) 4 X 15 ROWS

0.06 (75 HOLES) 5 X 15 ROWS

0.06 (115 HOLES) 5 X 23 ROWS

0.12 (65 HOLES) 5 X 13 ROWS

VOL

21CC

43CC

50CC

112CC

* = SINGLE HOLE SIZES AVAILABLE ON REQUEST DIMENSIONS IN INCHES

BASIC PART NUMBER

PART (COVER, BAFFLE BOX)

MATERIAL THICKNESS & TYPE

USE ONLY FOR AI2O3 COATED PARTS

LIST ANY MODIFICATIONS

EXAMPLE: SB-10-C-.010 Ta-AO, MODIFIED, 3/4 DIA. HOLE IN CENTER

STANDARD AI2O3 COATED

.005Mo OR Ta

.005 OR .010Mo OR Ta

.005Mo OR Ta

NORMALLYNOT USED

.005 OR .010Mo OT Ta

.010Mo OR Ta

STANDARD MATERIALS

COVER

BAFFEL

FOLDEDBOX

C

B

A

BOX SOURCES

39

“BAFFLED BOX” SILICON

MONOXIDE SOURCES

The R.D. Mathis Company, “Baffled Box”Silicon Monoxide Source has proven to be anextremely successful method of depositingSilicon Monoxide.

Source material is positioned in the boat intwo separate cavities, when heated it follows an indirect path through a series ofbaffles and then out the vertical chimney.The substrate cannot see the bulk sourcematerial at any time, this, essentially, eliminates any chance of spitting andstreaming, which causes pinholes.

A paper describing the techniques of SiliconMonoxide deposition and the results of capacitor and resistor manufacturing utilizing the “Baffled Box” Source will besent upon request...ask for “SiliconMonoxide Evaporation with “Multi-baffledBox Source” by Earl Olson of the Halex Corp.and R.D. Mathis.

VERTICAL OR

SOURCE HORIZONTAL INVERTED

3.5 Gram SM-8 SM-95 Gram SM-10 SM-1110 Gram SM-12 SM-1320 Gram SM-14 SM-1540 Gram SM-16 SM-17

Additional sizes are available upon request.

BAFFLED BOX SILICON

MONOXIDE SOURCE

40 GRAM

1100 Watts

BAFFLED BOX SILICON

MONOXIDE SOURCE

20 GRAM

950 Watts

BAFFLED BOX SILICON

MONOXIDE SOURCE

10 GRAM

750 Watts

BAFFLED BOX SILICON

MONOXIDE SOURCE

5 GRAM

600 Watts

BAFFLED BOX SILICON

MONOXIDE SOURCE

3.5 GRAM

500 Watts

RADIATIONSHIELDS

SiO

CROSS SECTION

NEW SILICON MONOXIDE SOURCES (SO SERIES)

40

NEW SILICON MONOXIDE SOURCES SO SERIES

This new silicon monoxide source design is an improved model of our very sucessful SM series. It incorporates thesame type of baffling and shielding as the SM sources, insuring an indirect path from source material to substrate.

The new SO Series silicon monoxide source offers the following features: Longer life, eliminates leakage, loadingwithout removal from system and “completely sealed” one unit construction.

SILICON MONOXIDE

SOURCE SO SERIES

SO-20

1.5 GRAM

333 Amps286 Watts

S0-20 Up EvaporationS0-21 Down Evaporation

SILICON MONOXIDE

SOURCE SO SERIES

SO-10

6.5 GRAM

226 Amps282 Watts


SILICON MONOXIDE

SOURCE SO SERIES

SO-22

6.5 GRAM

246 Amps330 Watts


BOX SOURCES

41

NEW SILICON MONOXIDE SOURCES SO SERIES

A technical bulletin is available upon request – “Silicon Monoxide – Properties and Evaporation Techniques” by R.D. Mathis

(Larger SO Series Sources available on request)

SILICON MONOXIDE

SOURCE SO SERIES

SO-26

13 GRAM

Horizontal Source

271 Amps439 Watts

SILICON MONOXIDE

SOURCE SO SERIES

SO-24

13 GRAM

264 Amps441 Watts


DOUBLE SHIELDED SiO/ZnS EVAPORATION SOURCE

42

DOUBLE SHIELDED SiO / ZnS EVAPORATION SOURCE

SO-32SO-34SO-36SO-38

BASIC PART NUMBER LH BL W H OL LW VOL MATERIAL1 1/4”2”2”3”

2.882.882.882.88

1.801.802.302.30

1.792.422.423.42

4.04.04.04.0

1.01.01.51.5

20 cc40 cc60 cc90 cc

Ta – Heater & Fill Hole Covers

Nb – Lower Heat Shields

Mo – Upper Heat Shields

AVAILABLE ON REQUEST: DOWN OR SIDE EVAPORATION SOURCE

HIGH VOLUME SIO SOURCESBOX SOURCES

43

PART NUMBER SL W SD LW OL Ø VOL*

SO-100SO-150SO-200SO-250SO-300SO-500SO-800SO-1000SO-1500SO-2000

5.875”5.875”5.875”5.875”5.875”8.625”8.625”7.875”8.250”8.375”

3.250”3.500”3.750”4.250”4.250”4.250”6.000”6.000”6.375”7.188”

2.000”2.250”2.500”3.000”3.000”3.000”4.800”4.800”5.188”5.938”

0.750”0.750”1.500”2.250”1.000”2.250”2.000”2.000”2.000”2.500”

7.625”7.625”8.125”7.250”8.125”11.000”10.150”11.000”12.000”11.500”

0.750”0.750”0.750”0.750”0.750”0.750”1.000”1.000”1.000”1.000”

100 cc150 cc200 cc250 cc300 cc500 cc800 cc1000 cc1500 cc2000 cc

HIGH VOLUME SiO/ZnS SOURCES

CAP

SHIELD, TOP OUTER

SHIELD, TOP INNER

HEATER

SHIELD, BOTTOM INNER

SHIELD, BOTTOM OUTER

FASTENERS

* Volumes shown are maximums. Recommended usage is 50% of volumes indicated

MICRO ELECTRONIC SOURCES

44

Our Micro-Electronic sources represent a full line of smaller size sources that are similar to the standard size sourcesin our catalog. The overall length on these sources is slightly less than 2 inches, in most cases. The smaller sourcesare ideal for lower power systems or processes that require small amounts of evaporants. Custom sizes and modifications of these sources are available on request.

TYPE MATERIAL

ME3- .005WME3- .005TaME3- .005Mo

TYPE MATERIAL

ME4- .005WME4- .005TaME4- .005Mo

TYPE MATERIAL

ME6A- .005WME6A- .005TaME6A- .005Mo

TYPE MATERIAL

ME5- .005WME5- .005TaME5- .005Mo

TYPE MATERIAL

ME6B- .005WME6B- .005TaME6B- .005Mo

TYPE MATERIAL

ME7- .005WME7- .005TaME7- .005Mo

TYPE MATERIAL

ME8- .005WME8- .005TaME8- .005Mo

TYPE MATERIAL

ME9- .005WME9- .005TaME9- .005Mo

TYPE MATERIAL

ME10- .005Ta

TYPE MATERIAL

ME11- .030WME11- 3x.025W

TYPE MATERIAL

ME13A- .030WME13A- 3x.025W

TYPE MATERIAL

ME13B- .030WME13B- 3x.025W

TYPE MATERIAL

ME14- .030WME14- .040W

TYPE MATERIAL

ME1 Tantalum

.7 VOLTS 129 AMPS 95 WATTS

TYPE MATERIAL

ME12- .030WME12- 3x.025W

TYPE MATERIAL

ME13C- .030WME13C- 3x.025W

ME 2(.005 Ta)

ME 2ACover

(.005 Ta)

ME 2BCover

(.005 Ta)

Silicon Monoxide

and Cadmium

Sulfide Source.

This source

is similar to the

SM 10 Baffled Box.

The capacity is

approximately

2 grams.

MICRO ELECTRONIC SOURCES

45

Radiation ShieldsSiO

TYPE MATERIAL

ME16E- .030WME16E- 3x.025W

TYPE MATERIAL

ME17- .030WME17- 3x.025W

TYPE MATERIAL

ME18B- 3x.025WME18B- 3x.030WUse with C9 Crucible

TYPE MATERIAL

ME18A- 3x.025WME18A- 3x.030WUse with C1 Crucible

TYPE

ME20Use with C10 CrucibleCrucible size 1/2 in. x 1/4 in.(Susceptor Type)

TYPE

ME19Use with C1 and C9 CrucibleCrucible size 1/2 in. x 1/2 in.

TYPE MATERIAL

ME21- .005WME21- .005TaME21- .005Mo

TYPE MATERIAL

ME23- .005WME23- .005TaME23- .005Mo

(Covered Boat Source)

TYPE MATERIAL

ME24- .005WME24- .005TaME24- .005Mo

(Covered Boat Source)

TYPE MATERIAL

ME15- .030WME15- .040W

TYPE MATERIAL

ME16A- .030WME16A- 3x.025W

TYPE MATERIAL

ME16B- .030WME16B- 3x.025W

TYPE MATERIAL

ME16C- .030WME16C- 3x.025W

TYPE MATERIAL

ME16D- .030WME16D- 3x.025W

ME 22(.005 Ta)

46


ME 22BCover

(.005 Ta)

ME 22ACover

(.005 Ta)

R.D. MATHIS COMPANY

47

R.D. Mathis Company specializes in the quality fabrication of Hi-Vacuum Evaporation Sources. Ourrefractory metal facilities are completely flexible... mass production or small custom orders are produced with equal ease and attention to detail, customer specifications are rigidly adhered to.Engineering consultation is available to solve those difficult “source” problems.

TYPE SIZE

TM1 2 in. x 3 in.TM1 2 in. x 4 in.TM1 3 in. x 4 in.TM1 4 in. x 4 in.TM1 3 in. x 6 in.TM-2 Linear

Tungsten screen material available without frame inrandom lengths x 6 inches wide. Part No. TM-2

TUNGSTEN SCREEN

CUSTOM ORDER INFORMATION

For a prompt quotation on any special source...in either custom or production quantities...please send us a sketchshowing type of material, size and dimensions.

MATERIAL FOR RESALEAs a service to our customers, R.D. Mathis Company has available small quantity orders of the following material.

WIRE.001 through .020W3 x .025W3 x .030W4 x .030W3 x .040W3 x .040W3 x .060WP8 – 3 x .025W Loose LayP8 – 3 x .030W Loose Lay

SHEET.005W, Ta, Mo.010W, Ta, Mo, Nb.015W, Ta, Mo.020W, Ta

W = Tungsten Ta = Tantalum Mo = Molybdenum Nb = Niobium

TUNGSTEN MESHTM2 6” wide x random length, wire size .001”

ROD.070W.080W.100W.125W

A – Overall length D – No. of coils

B – Coil length E – Material

C – I.D. of coil

Continuos coils are available with I.D.

diameters 1/4 in., 3/8 in. and 1/2 in.

48

NOTES

R.D. Mathis Company

Your best choice for quality hi-vacuum evaporation sources.


P.O. Box 92916 • Long Beach, CA 90809-2916

Documents

R.D. Mathis Company Vacuum Evaporation Sources Catalogrdmathis.com/wp-content/uploads/2017/09/RD-Mathis... · CRUCIBLE TYPE MATERIAL C2 Q Quartz CRUCIBLE TYPE MATERIAL C3 Q Quartz