Master sourceSCombine High Performances with Low Cost

The Master Source benefits from MS technology which

consists of a specific crucible design combining high per-

formances with low operating and maintenance costs. the

ultra-pure beam of stable flux is a result of the MS crucible

concept.

The MS crucible is designed in two parts : the reservoir

containing the material, and the effusion nozzle screwed

in the reservoir. the removable nozzle of the MS crucible is

shaped in such a way that it gives better uniformity and an

optimal utilization of the material on the wafer. the cylindri-

cal reservoir shape maximizes the capacity of the crucible

and allows the loading of a single shaped piece of material.

The use of a shaped charge helps to reduce surface conta-

minations and results in high layer performance. The nozzle

shape defines the spatial distribution of the flux. the innova-

tive design permits a narrow or wide flux beam, governing

material consumption and defining uniformity criteria for the

geometry of each system. the surface of the effusion nozzle

for the MS crucible is lower than the evaporation surface

in the crucible leading to a KNUDSEN effect. Thanks to the

KNUDSEN effect, the depletion observed in an open cruci-

ble is strongly decreased and even eliminated.

Crucibles are made of Pyrolytic Graphite that is not wetted

by Ga or In which guarantees a very low defect density. The

nominal capacity of the Master Source varies from 25 cc to

5800 cc, for research applications to production. The Master

Source is the optimal cell technology for the evaporation of

materials with low and medium vapor pressure. It is used for

elements III, but also allows the evaporation of more exotic

materials like Ag, LiF, CdTe, etc.

n high loading capacity: from 26cc to 5800cc

n excellent flux stability

n outstanding uniformity

n high reliability, durability and low maintenance

n cost effective solution: made to last

n re-usable crucibles

s P e c i f i c a t i o n s

cell Model s40 Ms140

s40 Ms240

s63 Ms440

s80 Ms540

s100 Ms1640

s150 Ms4000

s250 Ms2200

Filament Two

Heating filaments (Tantalum) Wire Flat

Thermocouple Double C type

Mounting flange (min) CF 40 CF 40 CF 63 CF 100 CF 100 CF 150 CF 250

Typical operating temperature 100°C - 1150°C

Maximum continuous operating temperature

1150°C

Maximum outgassing temperature

1350°C

Temperature stability ± 0.2°C

Water / gas / electrical

Power consumption 200W 250W 400W 850W 900W 3600W 10KW

Power supply recommended 2x(60V-12.5A) 2x(60V-25A) 2x(80V-19A) 2x(100V-33A)300V-33A /300V-17A

Power output connector Sock- Ø5 Sock-Ø3 Sock- Ø5 WTL Ø6

Thermocouple connector HMPW-C-M

Water connection* SWGØ3 N.A.

Pneumatic connection* Ø4 mm fitting N.A.

OPTions*

Integrated water panel N.A. Yes N.A.

Integrated shutter & water panel

N.A. Yes N.A.

Nipple shutter Yes N.A.

*N.A. : Non applicable

*Integrate shutter and/or water spanel option require the next upsize flange.

characteristics

scheMatic of the disasseMBled vieW

CrucibleRservoir + Nozzle

Cap

Heater

Flange

Electrical and thermocouple connectors

r e s u l t s

gaas deposition rate versus crucible bottom temperature.

The results have been obtained on a C12 using an MS240.

Measurement of the flux transient of the Ms source during the opening of the shutter.

The three graphs are obtained for three different tip-bottom

temperature gradients. No flux overshoot is observed.

The results were obtained on a C12 using an MS240.

o P e r a t i n g t h e s o u r c e

Process control system

Bottom filament T/C cable (6)

Cell (1)

Bottom filament power cable (2)

Top filament power cable (2)

Top filament T/C cable (6)

Communication assembly (8)Bottom filament command cable (4)

Bottom filament PID controller (5)

Power supplies (3)

Top filament PID controller (5)

Communication strap RS 422 (7)Top filament command cable (4)

c o M Pa c t 2 1 s e r i e so r d e r i n g i n f o r M a t i o n

cell Model P. n. h2o flange i.v.l. o.l. o.d.

S40 MS 140 26 R235 087 8 No CF 40 (2.75'')

Please contact Riber

S40 MS 240 40 R235 014 5 No CF 40 (2.75'')

S63 MS 440 85 R235 039 5 No CF 63 (4.5'')

S63 MS 440 85 VG R235 096 6 Yes CF 63 (4.5'')

S80 MS 540 130 R235 072 5 No CF 100 (6'')

S80 MS 540 130 VG R235 103 5 Yes CF 100 (6'')

S100 MS 1640 380 R235 071 7 No CF 125 (6.75'')

S100 MS 1640 380 VG R235 096 7 Yes CF 100 (6'')

S150 MS 4000 1000 R235 096 8 N.A. CF 150 (8'')

S250 MS 22000 5800 R241 259 2 N.A. CF 250 (12'')

cell Model voluMe cruciBle P.n. caP P.n.

S40 MS 140 26 Ri 26 M 40 026 R235 095 2 CAP40026 R235 095 9

S40 MS 240 40 Ri 40 M 40 040 R235 095 3 CAP40040 R235 096 0

S63 MS 440 85 Ri 85 M 63 085 R235 095 4 CAP63085 R235 096 1

S63 MS 440 85 VG 85 M 63 085 R235 095 4 CAP63085 R235 096 1

S80 MS 540 130 Ri 130 M 70 130 R235 095 5 CAP70130 R235 096 2

S80 MS 540 130 VG 380 M 100 380-4 R235 095 6 CAP100380-4 R235 096 3

S100 MS 1640 380 Ri 380 M 100 380-6 R235 095 7 CAP100380-6 R235 096 4

S100 MS 1640 380 VG 380 M 100 380-6 R235 095 7 CAP100380-6 R235 096 4

S150 MS 4000 1000 Ri 1000 M 150 980 R235 095 8 CAP150980 R235 096 5

S250 MS 22000 5800 Ri 5800 M 250 5800 R235 099 2 CAP25022000 R235 099 3

Ms cell

cruciBles

S100 380MS1640

Cell gauge

Technology

Volume

PRoduct guide

M 08563

Cell gauge

Crucible ModelM : MS

Volume

PRoduct guide

Nozzle

Cap

Reservoir

s o u r c e s e l e c t i o n g u i d e

systeMs source Model

s40Ms140

s40Ms240

s63Ms440

s80Ms540

s100Ms1640

s150Ms4000

s250Ms22000

riBer

MBE 32

Compact 12

Compact 21

EPINEAT

MBE 412 (4"/6")

MBE 49

MBE 6000

MBE 7000

veeco / varian

GEN II

MOD GEN II

GEN 930

GEN 10

GEN 20

GEN 200

GEN 2000

vg

V80

V90

V100

V150

other systeMs Riber sources are also available for use on systems from Eiko, Anelva, Ulvac, SVTA and DCA, as well as customs chambers. Contact Riber for details.

RECOMMENDED

CONTACT RIBER FOR MORE DETAILS

INAPPROPRIATE

6083

0N12

–201

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t e c h n o l o g i c a l l e a d e r s h i P

W o r l d W i d e P r e s e n c e

Riber is the world leading supplier of MBe processing equipment and related services.

In total, 750 of our MBE systems have been installed with at least one system in each

of the 35 countries with which MBE is involved. This represents 75% of the global market.

Capitalizing on its 30 years of experience, the company’s core philosophy is to design systems

in close association with customers. Riber has invented and designed major features which

are now found in all MBE systems.

Riber plays a key role in the development of MBE technology, providing customers with solutions

from equipment to epitaxial growth.

RIBER - 31, rue Casimir Périer, B.P 70083, 95873 Bezons, France Tel: +33 (0)1 39 96 65 00 - Fax: +33 (0)1 39 47 45 62 - email:info@riber.com – Internet: www.riber.com

F o r m o re i n fo r m a t i o n :

tel: +33 (0)1 39 96 65 00

e m a i l : i n fo @ r i b e r. c o m

internet: www.r iber.com