Thin Film Products

engineered process solutions

Thin Film Products

2

Thin Film Deposition

Thin film deposition of metallic, insulating,conductive and dielectric materials plays animportant role in a large number ofmanufacturing, production and researchapplications. Resistance heating and electronbeam heating are the processes most widelyused. Techniques employed to perform theseprocesses differ in degree of sophisticationand quality of film produced. A resistanceheated evaporation source is relatively simpleand inexpensive, but the material capacity is small.

Electron beam evaporation is the mostversatile means of vacuum deposition. Thistechnique allows the production of thin filmcoatings from pure elements, including mostmetals, as well as numerous alloys andcompounds. Electron beam evaporation offersseveral advantages over competing processesincluding precise control of low or highdeposition rates, excellent material utilization,co-deposition and sequential deposition and auniform low temperature deposition. Electronbeam offers higher evaporation rates,freedom from contamination, precise ratecontrol at very low deposition levels, precisefilm composition and cooler substratetemperatures. The materials used forevaporation are available in near limitlessshapes and forms, the most common beingpellets, slugs and disks.

Thin Film Applications

Thin film applications requiring electron beamevaporation are continually increasing.Applications are found in the medical,metallurgical, telecommunication, micro-electronic, optical , solar nanotechnology andsemiconductor industries. Electron beamevaporation sources are employed in theproduction of a multitude of low and hitechproducts including: sunglasses, cameralenses, optical filters, infrared detectors,superconductors, automotive decorative trim,costume jewelry, corrosion resistant surfacesand many others. Electron beam deposition isideal for research and production applicationsdue to its widespread material availability,efficient material utilization and unmatchedfilm purity and uniformity.

e-Vap® Summary

e-Vap sources are rugged, reliable and easyto maintain. Electron beam evaporation is anextremely versatile means of depositinguniform high-purity thin films. Cable ofreaching temperatures in excess of 3500

degrees C, evaporation of virtually anymaterial can be accomplished.

e-Vap sources are produced in our HaywardCalifornia factory. Our approach tomanufacturing e-Vap is unique to theevaporation source market. We build e-Vap asa standard product utilizing over 35 years ofexperience in vacuum componentmanufacturing. e-Vap products are producedusing established manufacturing, assembly,testing and quality control departments.Coupled with extensive sales and servicedepartment MDC e-Vap provides aprofessional and reliable alternative for allyour evaporation needs.

Don’t gamble with your process requirements

Other companies’ approach of small scalecustom shop manufacturing hinders theirability to provide reliable support and resultsin unpredictable delivery. This old schoolapproach of relying on specialized personneland complicated service techniques makesyour process vulnerable. A simple shift inpersonnel can leave you scrambling forsupport of your coating tool. Why takeunnecessary chances with the heart of yourprocess. MDC e-Vap provides properlyengineered solutions to your coating needswith standard parts and straight forwardservice.

e-Vap® sources are a modern solution forvacuum coating processes. Our Uniquedesign is compact, efficient and extremelystable. Modern thin film designs require ahigh degree of performance andrepeatability. Our superior magnetic designsoffer unparalleled performance with themost demanding materials.

MDC offers a complete line of e-Vapproducts. From miniature research sourcesto 400cc industrial sources we have theproducts to meet your requirement. Wehave a complete line of electronicsincluding power supplies, source controls,programmable sweep controls andindexing. We also offer rate monitors andcontrollers. MDC is a leading supplier ofvacuum feedthroughs, flanges, chambers,valves and general vacuum hardware. Wecan bundle complete packages and offerOEM versions for plug and play solutionsbased on your exact requirements.

Frame 6 Electron Beam Source

Mighty Source™ mounted on a 6-inch CF flange

XY Programmable Sweep Controller

CVS High Voltage Power Supply

Copyright © 2012 MDC Reproduction in any manner, in whole or in part, in English or

in other languages, is prohibited. All rights reserved.

MDC www.mdcvacuum.com Phone 800-443-8817 3

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Re-Vap™

Heater Elements

Coated Metal Foil Boat

5.00

7.25

.77

3.75

2.75

Resistive Heater Source Assembly

Oxide Crucible

Filament Coil

REFERENCEPART

NUMBERDESCRIPTION

RH-900

RH-PS-900

RH-F-900

RH-CEK-900

RH-PSPK-900

RH-MFB-900TU

RH-MFB-900TA

RH-MFB-900M

RH-CFB-900TU

RH-CFB-900M

RH-FC-900

RH-FB-900

RH-OC-900A

RH-OC-900BN

RH-OC-900Q

992626

991256

992625

992619

991257-08

992624-01

992624-02

992624-03

992623-01

992623-02

992622

992621

992620-01

992620-02

992620-03

COMPLETE SYSTEM 1

900W POWER SUPPLY

RESISTIVE SOURCE ASSEMBLY 2

CONDUCTOR EXTENSION KIT

POWER SUPPLY SPARE PARTS KIT

METAL FOIL BOAT, TUNGSTEN

METAL FOIL BOAT, TANTALUM

METAL FOIL BOAT, MOLYBDENUM

COATED FOIL BOAT, TUNGSTEN

COATED FOIL BOAT, MOLYBDENUM

FILAMENT COIL

FILAMENT BASKET

OXIDE CRUCIBLE, ALUMINA

OXIDE CRUCIBLE, BORON NITRIDE

OXIDE CRUCIBLE, QUARTZ

1 Includes power supply and resistive source assembly. 2 Includes filament coil heater element.

Conductor Extension Kit

Standard Elements

Re-Vap™ Source Assembly

Thermal Evaporation Systems

4 Phone 800-443-8817 www.mdcvacuum.com MDC

Re-Vap™

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004221-2.7x3.6


Resistive Heater Evaporation

MDC’s Re-Vap™ resistive filament heater evaporation is an econom-ical and reliable method of depositing thin film coatings in vacuum.Current passing through a resistive element generates sufficientheat to melt and evaporate various coating materials. Materials com-monly evaporated using resistive heating include iron, nickel, alu-minum, copper, tin, silver, gold and platinum. Re-Vap™ resistiveevaporation can be used for decorative metallizing as well asdemanding research applications. Three basic resistive elementdesigns are offered: filament coil, metal foil boat and oxide crucibletypes. Filament coil designs are by far the most popular. Re-Vap™

heater elements are economical and disposable. They can be dis-carded after each use to prevent material contamination.

Re-Vap™ coiled filaments are typically three stranded tungsten wireslooped into coils. Multistrand filaments are generally used becausethey offer a greater surface area than single wire filaments. Underthese conditions, the evaporant charge should be small comparedwith the mass of the filament. The filament can hold up to 1 gram ofevaporant material which is formed into staple-like shapes and hungon the central helix of the tungsten filament. Upon melting, the evap-orant wets to the filament and is held in place by surface tension.Spreading of the molten evaporant across the wire is desirable toincrease evaporation surface area. This is accomplished by distrib-uting the initial charge evenly over the entire length of the filament

coil. To minimize dripping of the molten material, the filament coiltemperature must be increased rapidly to 1200-1500°C. Using thistechnique, the molten material will climb or cling to the hot wire andvaporize efficiently. Another type of element coil is the filament bas-ket, used to evaporate pellets or chips of materials which either sub-lime or do not wet the filament wire upon melting. If wetting occurs,the coils of the basket are shorted and the temperature of the sourcedrops.

Metal foil boat type resistive elements are yet another choice forsmall evaporation applications. Metal foil boats are made from thinrefractory metal stampings, usually tungsten, molybdenum or tanta-lum. These boats have dimples which hold the evaporation material.Their miniature size and small capacity make them ideal for smallevaporation jobs. Metal foil boats operate at very high temperaturesand may cause alloying to occur with certain types of evaporationmaterials. Wetting of the metal surface by the molten evaporant isdesirable in the interest of good thermal contact, however, themolten metal will lower the electrical resistance of the foil in the meltarea, thereby causing a drop in temperature. This problem can beeliminated by using a boat which has been coated with a thin layerof aluminum oxide. The oxide coating will not allow wetting of themolten metal evaporant to the metal foil element.

Crucible heaters are an open circular wound filament which allowcrucibles to be inserted inside the windings. The crucibles are com-monly manufactured from alumina, carbon, quartz and boron nitride.Crucibles have insulating properties which form a thermal barrierbetween the filament and melt, allowing a uniform melt temperature.Crucible evaporation is very stable because of its uniform heating. Awide range of low to moderate temperature metals like palladium,tin, selenium, arsenic, indium and organic materials evaporate wellfrom crucibles. Crucibles are less prone to failure compared to metalfoil boats because of the complete isolation between the evaporantand the heater element, thus eliminating shorting or alloying.

Features

■ 900W power supply■ 2-3/4" Del-Seal™ CF flange mount■ Ideal for organic material evaporation■ Contact factory for higher current models

Specifications

Cooling Air cooled

Input power 208 V ±10%, Single-phase, 50/60 Hz, 7 Amperes

Voltage output 0 to 6 VAC

Current output 0 to 150 A

Weight 45lb

Dimensions

Power Supply 16" W x 6" H x 12" L

Output Cable 2 AWG x 6' L

Re-Vap™ 900 Watt Power Supply


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e-Vap®


Features■ Industrial design■ Feedthroughs rated at 600 amps■ Removable snap-on ground shield protects

against coating build-up■ Z-bars allow installation of sources in difficult or

hard to reach locations■ Z-bars may be used singularly or in multiples■ Clamp designed for virtually any type of

commercial heater elements up to 1.25" wide ■ Ultra positive clamping method

Resistive Heater Evaporation

Re-Vap™ typical source installation, shown with two Z-bars and boat clamps

Typical Heater Elements

Metal Foil Boat

Typical Installation Schematic

Baffled Boat

Filament

Re-Vap™ clamp & Z-bar™ extension

Z-bar™

Resistive source

Silver platedairside clamps

1" Bolt hole mountfeedthrough

In-vacuumshield

Standard Elements

All dimensions are given in inchesunless specified otherwise.

• Only one Z-bar shown ~ may be used in multiples

Re-Vap™ rigid clampRe-Vap™ rigid clamp

REFERENCEPART

NUMBER

METAL FOIL

FILAMENT

BAFFLED

993037

993038

993039


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.56 dia(2 places)

2.00

5.19

2.19 .94

1.00

.63

1.75Fits 3/4" conductor

1.25

.25

.375-16 bolt,nut and washer (x2)

1.00

Airside Clamps

Made of OFE copper with silverplate to minimize oxidation andcontact resistance. Two 9/16-inchholes are provided for fasteningeyelet-fitted power cables. Soldindividually.

Rigid clamp 1-1/4" width 3-1/2" length

.250-20 Thread in Helicoil insert

.50

.25

revision

REFERENCEPART

NUMBER

RIGID 992968-02

Boat clamps use thumbscrews forfast installation of boats or filaments.Two boat clamps are required.Includes bolts. Sold individually.

REFERENCEPART

NUMBER

HCC-750 640070

Boat Clamps

REFERENCEPART

NUMBER

1-IN. BOLT

32MM - 1"

992966

991813

High Current Feedthough

1.50 Hex

1.00 1.88

3/8-16 UNC-2A 1-14 UNS-2A

.75 dia.

2.253.32 4.68

Z-bar™

.500

1.625

1.000

1.8752 places .386

2 places

2.8132.8136.250

.500

.8132 places

R .188 typ. R .812 typ.

MDC Z-bar™ extensions are usedwhere normally an evaporationsource cannot be positionedbecause of spacing limitations. Maybe used singularly or in multiplesfor hard to reach locations. Soldindividually.

REFERENCEPART

NUMBER

Z-BAR 992969

High current feedthroughs are avail-able for mounting to baseplates inthree standard sizes. A removableshield protects ceramic insulatorfrom contamination during deposi-tion.An adapter is available to mount a1-inch bolt feedthrough to a 32mmbolt hole. Adapter not shown.Two feed throughs required. Sold individually.

Standard 1" bolt mount

Boat Clamps


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e-Vap®


Features

■ 3000 Watt outputDesigned for industrial / production applications

■ Compact size - mounts underneath chamber■ High frequency switching power supply■ Connects to Sycon or Inficon rate controllers —

making it stand-alone capable■ CE compliant■ 6000 Watt stack option

Re-Vap™ Power Supply

MDC’s high powered Re-Vap™ resistive evaporation system is a highlyindustrial, robustly designed, economical method of depositing thin filmcoatings. The current passing through a resistive element (filament, boat,etc.) is produced by a unique high current, low voltage switch-mode highfrequency power supply that produces ample amounts of current needed toevaporate materials such as iron, nickel, aluminum, copper, silver, gold andplatinum. Silicon-monoxide, magnesium fluoride, as well as zinc selenideare readily evaporated.

Re-Vap™ Power Supply & Controller

MDC has taken advantage of its extensive knowledge of high frequencysolid-state switching power supplies by incorporating that technology into apatent applied high-powered 3000 watt Re-Vap™ power supply. Tremendoussize and weight reductions are the result. With overall dimensions of 5" x 8"x 13" and a total weight of 20-pounds, the power supply can be mountedunderneath the vacuum coating system just inches away from the high cur-rent feedthroughs. The power supply is only one-eighth the size and one-tenth the weight of a typical 3000 watt resistive power supply. Two uniqueadvantages include higher power efficiency and floor space savings. Powerefficiency is greater because the output cable length is reduced with aresulting lower power loss. The Re-Vap™ controller is a half-rack width dis-play module displaying the current, voltage, safety interlock and status/oper-ation indicators. For automated coating processes, it may be connected to a

rate/thickness controller for precise control. Power can also be controlledthrough the front panel or with the hand-held remote control.

Re-Vap™ clamp, High Current feedthrough and Z-bar™ extensions

The Re-Vap™ positive clamping method is universally designed for heavy useand quick-change capability. Thumbscrews are provided for fast installationof boats or filaments. Air-side clamping uses silver-plated battery clamp-style hard copper connections designed for maximum surface contact andhigh current carrying capacity.

The Re-Vap™ high current 3/4-inch feedthroughs are rated at 600 amps. Ituses high purity alumina ceramic as the dielectric material, which is her-metically sealed to a flexible metal transition using vacuum grade brazealloys in a vacuum brazing furnace. Additionally, a removable snap-onground shield provides protection from line-of-sight coating on exposedceramic surfaces. Re-Vap™ feedthroughs are fitted with Del-Base™ base-plate mounts in standard one-inch, 32mm or 34mm sizes for use in mostvacuum coating systems, including Balzers and Leybold systems.

Z-bar™ extensions are used in cases where normally an evaporation sourcecannot be positioned because of spacing limitations. The modular Z-bar™

extensions allow you to maneuver your evaporation sources around fixedequipment inside your vacuum coating system. Its versatility allows you touse them singularly or in multiples for those hard to reach locations.

Power Supply Specifications

Cooling Air cooled

Input power 208/220/240 VAC, Single-phase, 50/60 Hz, 25 Amperes

Cable 6-foot cable included

Weight 30 lb shipping

Dimensions 5" W x 8" H x 13" D

Weighs only20 pounds

Weighs only20 pounds

Power Supply

Description

REFERENCEPART

NUMBERWEIGHT

DESCRIPTION POUNDS

RV-3000-PS 991301POWER SUPPLY 30


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Material Samples

Silica (SiO2)

Typical e-Vap® Installation

Magnesium Fluoride (MgF2)

Hafnia (HfO2)

Silica (SiO2) Carousel Source

Introductione-Vap®


Ver E ~ 07-06


Custom source and source assemblies can be designed to fit anexisting chamber or for a special application. Contact MDC fordetails regarding custom source assemblies or custom sources.

Standard Multi Pocket Sources that havebeen identified by our customers as themost popular sources are listed to the right.MDC is has made a commitment with sub-component inventory to offer reduced leadtimes for standard multipocket sources.

Custom Sources and Assemblies

FRAME NUMBER VOLUME MAXIMUMSIZE OF POCKETS PER POCKET POWER

4 4 2cc 3kW

4 4 6cc 6kW

5 4 15cc 10kW

5 4 25cc 10kW

5 6 12cc 10kW

5 1 150cc 10kW

6 4 40cc 15kW

6 4 75cc 15kW

6 1 400cc 15kW

6 6 40cc 15kW

REFERENCEPART

NUMBER

EV-MS

EV-4000-66UHV

EV-4000-1015

EV-4000-1025

EV-6000-1012

EV-4000-150CA

EV-4000-1540

EV-4000-1575

EV-4000-400CA

EV-6000-1540

993400

991700

991900

991800

992100

992523

992405

992406

993101

993100

Single-PocketCentered

Multi-Pocket 44@90°

Multi-Pocket 66@60°

Carousel360° Pan

Crucible / Pocket Geometry

1x270°, 1@45°

Custom configurationsStandard configurations

Shown above is one of many possibilities.Contact factory for special geometries.

Custom source and source assemblies■ 7 standard Source models

Single, Multipocket or Carousel CruciblesCustom Crucible configurations available

Standard Features

■ Crucible sizes from 6cc to 400cc■ Power ratings from 6kW to 15kW■ Direct or indirect water cooling■ OEM versions available

Options■ Source Options are available-Consult with MDC for existing

designs, availability and list prices.

■ Miniature Sources

■ Single Pocket Sources (Frame 1 and Frame 2) UHV com-patible sources, volumes 7cc to 100 cc.

■ UHV Rotary Mechanism (Frame 4 and Frame 5) allows forUHV operation of the multi pocket sources.

■ Direct and Indirect Cooling (Frame 5 and Frame 6) optionfor both of these frame sizes. direct cooling allows for higherpower levels to be applied during deposition, the water sealmust be disturbed to change the crucible. Indirect coolingallows the crucible to be removed without disturbing the waterto vacuum seal, however maximum power levels are lower withindirect cooling.

■ Custom Crucibles Can be machined with various pocketsizes and configurations depending upon your application. MDCwill manufacture any custom crucible that is required includiingsingle, four pocket, six pocket, pan carousel and bananas.

e-Vap® Modular Evaporation Sources

e-Vap®

Modular Evaporation Sources


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Filament Assembly

■ Filament is shielded from ion bombardment■ No shorting■ Longer filament life■ Reduced coating of ceramic insulators■ Reduced arcing

Emitter Assembly

■ 270° arc emitter module■ Heat sunk emitter■ Consistent electrostatic field■ Longer life anode and beam former■ Reduced filament distortion■ Modular plug-in emitter design■ Simple maintenance■ Simple filament replacement■ Minimal adjustment...

only requires verification of filament tolerance

Open Cathode Design

■ No space charging■ Increased emission■ Cooler operating filament...

requires only 42 amps for 15 kW

Shielded High Voltage Ceramics

■ Reduces coating of ceramic insulators■ Prevents arcing■ Unique high voltage insulator design.

Beam Sweep Coil Assembly

■ Helmholtz design principle produces a uniformmagnetic field

■ No tunneling■ Beam maintains constant density and shape

when swept across crucible

Magnet Assembly

■ Permanent magnets■ 270° arc beam deflection...

with positive beam containment■ Reliable beam positioning■ Efficient magnetic field generation■ Beam travels vertically through crucible

Crucible Module / Replaceable Modules

■ Capacity from 2cc to 400cc■ Flush-top design■ No contamination from flaking condensate■ Complete utilization of vapor cone during

deposition... no shadowing■ Reduced cross-contamination during changes of

evaporant material

Individual Source

MDC modular e-Vap® sources are state-of-the-art electron-beamevaporation sources designed for the demanding and exacting worldof vacuum coatings. This unprecedented selection of electron-beamevaporation sources provides vacuum coating solutions for most appli-cations including medical, metallurgical, telecommunications, micro-electronics and optics.

Modular sources are offered in seven standard sizes and are standalone components for maximum installation flexibility in existing vac-uum systems. For those desiring standard off-the-shelf solutions,complete horizontal and vertical flange mounted systems are alsoavailable.

Features

Modular sources are fitted with direct watercooled crucibles. Selectmodels have indirectly cooled crucibles that allow the user to changecrucibles without interrupting the flow of water to the source andwithout having to disassemble the source. Modular sources areoffered with material capacities from 2cc to 400cc in a multitude ofpocket geometries and arrangements. They are available in bothfixed and rotary pocket mechanisms for high and ultrahigh vacuumenvironments. e-Vap® modular sources are designed for optimumperformance with e-Vap® power supplies, controls and electronics.Other essential components and hardware required for the installa-tion of e-Vap® modular sources are detailed starting on page __.Contact the MDC technical sales engineers for custom electron-beam evaporation requirements.

e-Vap®



Ver E ~ 07-06


REFERENCEPART

NUMBERDESCRIPTION

EV-CE-3000

EV-SA-3000

EV-PS-CE-3000

EV-FIL-3000

EV-A-3000

EV-BF-3000

EV-IBF-3000

EV-IHV-3000

EV-PS-SPK-3000

992600

992601

991221

992610

991929

991922

990529

991921

991257-03

COMPLETE SYSTEM 1

SOURCE ASSEMBLY

3000W POWER SUPPLY

FILAMENT SET, 5 ea.

ANODE

BEAM FORMER

BEAM FORMER INSULATOR

HIGH VOLTAGE INSULATOR

POWER SUPPLY SPARE PARTS KIT1 Includes source and power supply

e-Vap 3kW Power Supply Source Assembly

3.75 2.75

7.25

7.87

9.00

2 cc Crucible

Source Assembly

Source Detail Filament Detail

e-Vap® evaporation sources. These liners offer improved thermalstability while reducing the transfer of heat to the crucible. Linersprovide the ability to easily and quickly switch evaporant materialswithout removing the crucible for cleaning. They also reduce powerrequirements to achieve specific evaporation rates. See page 26 fora detailed list of crucible liner materials.

2.75 Del-Seal™ CF

Flange

Source fits within

a 1.38 inside diameter tube

• Source can be installed in a portwith 2-3/4" Del-Seal™ CF flanges

Miniature Evaporation Systemse-Vap®


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SpecificationsMaximum Power 3000 watts

Operating Voltage 5000 volts

Beam Current 600 milli-amperes

Compatible Vacuum 2 x 10E-8 torr

Water Flow 65 psi or .62 gpm

XY Sweep Frequency 0 – 50Hz, 1.0 amps

Beam Spot Size 3-4 mm

Crucible Material OFE copper

Bakeout Temperature 150oC

Crucible Geometry 2.0 cc volume crucibles x 4

Weight 6 lbsDimensions 2.4" H x 4.1" L x 2.8” W

Description

Practical, low-cost, and highly reliable electron beamdeposition sources are the future as we know it today. MDCintroduces the e-Vap® “Mighty Source™”– a 4 pocket x 2ccrotary electron beam source. Affordable and extremelycompact, it stands just 2.4-inches tall by 4-inches long by 2.8-inches wide. Is there anything smaller out there? The MightySource™ is rated for 3 kilowatts of power which makes it anideal deposition tool for evaporating metals, oxides, metal-oxides, and magnetic materials. Designed into the source bodyare two hermetically-sealed XY-axis sweep coils that allow youto sweep the electron beam across the crucible pocket,resulting in the maximization of your coating process in termsof material stability and consistency. The Mighty Source™

design is specifically tailored for the following uses – pilotproduction, lab /R&D applications, and the universitymarketplace. Its compact design features allow it to bemounted onto a 2-3/4-inch Del-Seal CF flange or onto a 6-inchor 10-inch Del-Seal CF flange in either horizontal or verticalconfigurations. To complete this product system, MDC alsooffers a 3kw power supply and low cost XY sweep controller.

e-Vap® Mighty Source™ 4 Pocket Evaporation Source

MODULAR SOURCE SERIES

e-Vap® Mighty Source™ Horizontal Source Assembly (6-inch CF flange)

4 inches

DESCRIPTION REFERENCE

Ref# EV-MS* (Mighty Source™)

Ref# EV-MS-F275-H

Ref# EV-MS-F1000

Ref# EV-MS-F600H

EV-PS-CE-3000

EV-PS-SPK-3000

EV-FIL-3000

EV-A-3000

EV-BF-3000

EV-IBF-3000

EV-IHF-3000

Ref# ERK-MS

Ref# CSRK-MS

Cajon Fitting Gasket

Fil Clamp Sleeve-MS

Stand Alone Source

3/4" Del Seal CF Flange (horizontal mount)

10" Del Seal CF Flange (vertical mount)

6" Del Seal CF Flange (horizontal mount)

Power Supply

Power Supply (spare parts kit)

Filament (pack of 5)

Anode

Beam Former

Beam former Insulator

High Voltage Insulator

Emitter Rebuild Kit1 (Mighty Source)

Crucible Seal Rebuild Kit (Mighty Source)

Gasket (1/8” VCR

Filament Clamp Sleeve

993400

993450

993431

993430

991221

991257-03

992610

991929

991922

990529

991921

993410

993439

042064

993415

PART #

*MS indicates Mighty Source™

1 includes 2 filaments, high voltage insulator, beam form, fasteners

e-Vap®

Miniature Evaporation Systems


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Frame 2

Source Size Large

Source Type Fixed Pocket

Maximum Power 15kW

Operating Voltage 6kV to 10kV

Filament 12VAC

Crucible Geometry / Volume

Single-Pocket 75 & 100cc

X-Y Sweep Frequency 200Hz

Large Fixed Pocket

Evaporation Rate of Aluminum

50,000Å/min @15kW with a source to

substrate distance of 250mm

Beam Spot Size 7mm

Crucible Material OFHC Copper

Bakeout Temperature 200°C

Materials UHV Compatible

Compatible Vacuum 2x10-11 Torr

Water Flow

3GPM and / or 65PSIG inlet-outlet differential

Dimensions 6.60L x 5.50W x 2.25H

Weight 10 lbs

Specifications

CRUCIBLE MAXIMUMVOLUME POWER

7cc 6kW

15cc 10kW

25cc 10kW

40cc 15kW

REFERENCE PARTNUMBER

EV-1000-67

EV-1000-1015

EV-1000-1025

EV-1000-1540

990598

990599

990597

990600


75cc 15kW

100cc 15kW


EV-1000-1575

EV-1000-15100

992250

992430

Frame 1

Source Size Small

Source Type Fixed Pocket

Maximum Power 15kW


Filament 12VAC


Single-Pocket 7, 15, 25 & 40cc


Small Fixed Pocket




Beam Spot Size 7mm

Crucible Material OFE Copper




Water Flow



Weight 9 lbs

Specifications

Modular Evaporation Sourcese-Vap®


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Frame 4

Source Size Small

Source Type UHV Rotary Pocket

Maximum Power 6kW


Filament 12VAC


Multi-Pocket 4x 6cc


Small UHV Rotary Pocket




Beam Spot Size 7mm





Water Flow

1.75GPM or 65PSIG inlet-outlet differential


Weight 17 lbs

Specifications


4 X 6cc 6kW


EV-4000-66UHV 991700

Frame 3

Source Size Small

Source Type Rotary Pocket

Maximum Power 6kW


Filament 12VAC


Multi-Pocket 4x 6cc, 6x 3cc

Carousel 360°, 15cc


Small Rotary Pocket




Beam Spot Size 7mm



Materials HV Compatible


Water Flow



Weight 10 lbs

Specifications


4 X 6cc 6kW

6 X 3cc 6kW


EV-4000-66

EV-6000-66

991600

992166


Ver


CRUCIBLE MAXIMUM COOLINGVOLUME POWER

4 X 15cc

4 X 15cc

4 X 25cc

4 X 30cc

6 X 12cc

4 X 15cc

4 X 25cc

4 X 30cc

1 X 150cc

1 X 150cc

10kW

10kW

10kW

10kW

10kW

6kW

6kW

6kW

6kW

10kW

Direct

Direct

Direct

Direct

Direct

Indirect

Indirect

Indirect

Indirect

Direct

REFERENCEPART

NUMBER

EV-4000-1050

EV-6000-1015UHV

EV-4000-1025

EV-4000-1030

EV-6000-1012

EV-4000-615iEV-4000-625iEV-4000-630iEV-4000-150CARiEV-4000-150CAR

991900

992700

991800

992408

992100

992525

992500

992585

992502

992523

Frame 5

Source Size LargeSource Type HV Rotary Pocket

UHV Rotary PocketMaximum Power 10kWOperating Voltage 6kV to 10kVFilament 12VACCrucible Geometry / VolumeMulti-Pocket 4x... 15, 25 & 30cc, 6x 12ccCarousel 360° 150ccCombination Custom designs available

Large HV & UHV Rotary Pocket

Evaporation Rate of Aluminum30,000Å/min @10kW with a source tosubstrate distance of 250mmX-Y Sweep Frequency 200HzBeam Spot Size 7mmCrucible Material OFE CopperBakeout Temperature 150°CMaterials HV CompatibleCompatible Vacuum 2x10-8 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 6.20L x 5.62W x 3.25HWeight 27 lbs

Specifications

Modular Evaporation Sourcese-Vap®

CRUCIBLE MAXIMUM COOLINGVOLUME POWER

Frame 6

Source Size Extra-LargeSource Type Rotary PocketMaximum Power 15kWOperating Voltage 6kV to 10kVFilament 12VACCrucible Geometry / VolumeMulti-Pocket 4x... 40, 60 & 75cc, 6x 40ccCarousel 360° 400ccCombination Custom designs availableX-Y Sweep Frequency 200Hz

Evaporation Rate of Aluminum50,000Å/min @15kW with a source tosubstrate distance of 250mmSource-Substrate Distance 250mmBeam Spot Size 7mmCrucible Material OFE CopperBakeout Temperature 150°CMaterials HV CompatibleCompatible Vacuum 2x10-8 TorrWater Flow3GPM and / or 65PSIG inlet-outlet differentialDimensions 8.50L x 6.87W x 3.50HWeight 40 lbs

Specifications

Extra-Large Rotary Pocket

4 X 40cc

4 X 60cc

4 X 75cc

6 X 25cc

6 X 40cc

1 X 400cc

1 X 400c

3 X100cc

6 X 40cc

15kWW

15kW

15kW

15kW

15kW

6kW

15kW

15kW

6kW

Direct

Direct

Direct

Direct

Direct

Indirect

Direct

Direct

Indirect

REFERENCEPART

NUMBER

EV-4000-1540

EV-4000-1560

EV-4000-1575

EV-6000-1525

EV-6000-1450

EV-4000-400CARiEV-4000-400CAR

EV-4000-15100

EV-6000-640i

992405

992400

992406

992599

993100

992720

993101

992400-2000

992674


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Horizontal Source Assembly

Features

■ UHV compatible system■ 8" or 10" Del-Seal™ CF flange mount■ Assembly includes rotary, linear and electrical

feedthroughs, clamps, linkages, water flow switchand water connections

■ Manual, push-pull shutter■ High temperature, 300°C manual rotary drive on

4 pocket models; blanked off on single pocket■ Flange seal surface to crucible centerline is 8" on

8" Del-Seal™ CF■ Flange seal surface to crucible centerline is 10"

on 10" Del-Seal™ CF■ Systems available with or without watercooled

roofs■ OEM packages available

Horizontal Flange Mounted System

UHV Single-Pocket Source

UHV Rotary-Pocket Source

e-Vap®



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e-Vap®


Optional Accessories

REFERENCEPART

NUMBERMOUNTING FRAME SOURCE COOLING SOURCE WEIGHT

FLANGE SIZE TYPE & VOLUME ROOF NUMBER POUNDS

EV-FMP-8H

EV-FMP-8RH

EV-FMP-10H

EV-FMP-10RH

EV-FMP-10HUHV

EV-FMP-10RHUHV

992515

992516

992499

992541

992498

992540

8" DEL-SEAL 1 ONE POCKET 7cc NO 990598 50

8" DEL-SEAL 1 ONE POCKET 7cc YES 990598 50



10" DEL-SEAL 4 FOUR POCKET 6cc NO 991700 95

10" DEL-SEAL 4 FOUR POCKET 6cc YES 991700 95

OPTIONNUMBERDESCRIPTION

-01

-02

-03

-04

-05

-06

-07

-08

PNEUMATIC SHUTTER,TWO POSITION

AUTO INDEXER AND DRIVE

GUIDE RODS

CUSTOM SOURCE POSITION

CUSTOM COOLING ROOF PORTS

15cc CRUCIBLE

25cc CRUCIBLE

40cc CRUCIBLE

OPTION -03

Pneumatic Shutter

Pneumatic shutters are an excellent tool forprecise control of film thickness on to a sub-strate. The air actuated shutter masks off thevapor stream between source and substrate atthe beginning and finishing stages of the evap-oration/deposition cycle. The shutter alsoallows pre-melt or “soak” prior to deposition byblanketing the evaporation material. This is atwo position shutter with a 120VAC solenoid.

OPTION -04 TO -08

OPTION -05

OPTION -02

OPTION -01

Guide Rods

Two linear bearing guide rods allow the flangemounted e-Vap® systems to be routinely main-tained by simply sliding in and out, in drawer-like fashion. A weldable support bracket kit isprovided to secure the guide rods onto theuser’s port flange. Installation is simple and selfexplanatory.

Crucible Indexer & Drive

The Auto-Indexer is a stepper motor drive unitwith optical encoding for rotating and position-ing multi-pocket e-Vap® sources. The unit candrive sources with up to eight pockets in eithera unidirectional or bidirectional manner. It canalso drive continuous carousel-type sources ateight speed settings. Includes mounting brack-et for external drive.

Custom Source Position & Volume

The standard distance from the source centerto the mounting-flange seal face is 10" or 8"for horizontal systems. For custom positionsbetween 8" to 12" add option 4. Standard sin-gle-pocket crucible volume is 7cc. For pocketvolumes of 15, 25 or 40cc add option -06, -07or -08 respectively.

Custom Roof Ports

Watercooled roofs have three ports. A mainport directly over the source, which is usedfor the deposition process. A second port forthe crystal sensor is used to monitor deposi-tion rate. A third port provides direct visualinspection of the source and beam through achamber viewport. Each of these port loca-tions can be specified by the customer.

Horizontal Flange Mounted Source

MDC has eliminated the difficulties of flange mounting electronbeam sources. Problems associated with designing and fittingsources into coating systems have been solved with the introductionof standard horizontal flange mounted evaporation sources. Thecompact footprint of these flanged evaporation systems allows theinstallation of up to three individual sources onto one ten-inch cham-ber. The flanged assemblies include an electron beam source with allwater and electrical connections. A guide rod option provides a

drawer like sliding action, ideal for installation and system mainte-nance. Horizontal flange mounted assemblies come ready to acceptthis guide rod kit. Another option includes a water-cooled roof, whichmounts directly above the e-Vap® source. The water-cooled roof actsas a heat barrier between the source and substrate and also pre-vents vapor condensation on chamber walls. The water-cooled roofis fitted with a deposition port angled towards the substrate, whichaids in deposition uniformity, even when source and substrate cen-terlines are offset. Horizontal systems purchased with a source con-trol module will be fitted with flange-mounted filament transformers.

When ordering e-Vap® assembly options, please add the option number(s) tothe end of the desired assembly Part Number listed above. For example992515-01-02-03-04-05-08


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6.00

11.90

7.00

Vertical Source Assembly

Features

■ UHV compatible system■ 10.0" Del-Seal™ CF flange mount■ Assembly includes rotary and electrical

feedthroughs, clamps, linkages, water flow switchand water connections

■ Shutter is fitted with a high temperature, 300°Cmanual rotary drive

■ Flange seal surface to crucible centerline is 6"standard

■ Systems available with or without watercooledroofs

■ OEM packages available

Vertical Flange Mounted System

UHV Single-Pocket Source

Vertical Flange Mount / Less Cooling Roof

e-Vap®



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REFERENCEPART

NUMBERMOUNTING FRAME SOURCE COOLING SOURCE WEIGHT

FLANGE SIZE TYPE & VOLUME ROOF NUMBER POUNDS

EV-FMP-10V

EV-FMP-10RV

992511

992513



Vertical Flange Mounted Source

MDC has eliminated the difficulties of flange mounting electronbeam sources. The effort that goes into designing and fitting asource to a vacuum coating chamber has been done for you with theintroduction of standard vertical flange mounted evaporationsources. The flanged assembly includes one 7cc electron beamsource with all water and electrical connections. This type of flangemounted system is typically installed vertically through the bottomside of a chamber. The compact footprint of these flanged evapora-tion systems requires only one port flange for installation. A popularoption commonly ordered with these systems is a water-cooled roof,which mounts directly above the e-Vap® source. The water-cooledroof acts as a heat barrier between the source and substrate and

Optional Accessories

OPTIONNUMBERDESCRIPTION

-01

-04

-05

-06

-07

-08

PNEUMATIC SHUTTER, TWO POSITION

CUSTOM SOURCE POSITION

CUSTOM COOLING ROOF PORTS

15cc CRUCIBLE

25cc CRUCIBLE

40cc CRUCIBLE

When ordering e-Vap® assembly options, please add the option number(s) tothe end of the desired assembly Part Number listed above. For example992511-01-04-05-08

OPTION -05

Pneumatic Shutter

Shutters mask off the vapor stream betweensource and substrate. Shutters are ideal forpre-melt or “soak” prior to deposition by blan-keting the evaporation material. Pneumaticshutters for vertical flanged assemblies cannotbe mounted on source flange, but can beinstalled through a secondary 1.33" Del-Seal™

CF port. This shutter is a two position shutterwhich includes a 120VAC solenoid.

OPTION -04

OPTION -01

Custom Roof Ports

Watercooled roofs have three ports. A mainport directly over the source, which is usedfor the deposition process. A second port forthe crystal sensor is used to monitor deposi-tion rate. A third port provides direct visualinspection of the source and beam through achamber viewport. Each of these port loca-tions can be specified by the customer.

Custom Source Position

Source position is the distance from the sourceface to mounting flange seal face. This dimen-sion is standard at 6" for all vertical systems.Customer chamber layout or specificationsmay dictate a custom distance. Source posi-tions between 6" and 10" are optional andavailable at the price listed bellow. Dimensionsoutside these limits must be quoted separately.

also prevents vapor condensation on chamber walls. The watercooled roof is fitted with a deposition port, angled towardsthe substrate, which yields excellent deposition uniformity, evenwhen source to substrate centerlines are offset. The single-pocketsource comes standard with a 7cc capacity crucible. The sameassembly can be fitted with larger capacity sources including 15, 25and 40cc versions. To order the larger volume crucible option addone of the three option numbers to the end of the assembly partnumber. Vertical systems purchased with a source control modulewill be fitted with flange-mounted filament transformers.

OPTION -06 TO -08 Custom Crucible Volume

The standard volume for a single-pocket cru-cible is 7cc. For single pocket volumes of 15,25 or 40cc add option -06, -07 or -08 respec-tively.

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Features

■ 6kW, 10kW and 15kW models■ High frequency switching technology■ Excellent regulation■ Low stored energy■ Power efficiency greater than 85%■ Low ripple■ Rugged IGBT switches■ CE compliant

Sequential or simultaneous operation of up tothree electron beam evaporation sources

e-Vap® CVS Series Power Supplies are constructed using state-of-the-art solid state high frequency switching technology. They areoffered in three standard models rated for 6kW, 10kW and 15kW.CVS series power supplies are for use with the horizontal and verti-cal flange mounted systems detailed on the previous four pages, aswell as the e-Vap® modular sources as detailed beginning on pageof this catalog. These power supplies are also compatible with mostcommercially available electron beam sources and are recommend-ed as upgrade power supplies in existing electron beam evaporationsystems.

Power supply enclosures are fully interlocked for operator safety.e-Vap® CVS Series Power Supplies can power and control up tothree electron beam sources. Source controls and X-Y Sweeps arenot included with power supplies and must be purchased separate-ly. For ordering information please see the next three pages. Thee-Vap® source control module also employs solid state high fre-quency switching technology and is designed to precisely controlemission current when used with e-Vap® power supplies. MDC rec-ommends the use of a high voltage grounding hook when servicingor working with all high voltage power supplies. Grounding hooks aredetailed on page of this catalog.

CVS-6 Power Supply

REFERENCEPART

NUMBERPOWER WEIGHTSUPPLY VOLTAGE POUNDS

CVS-6-2CE

CVS-10-2CE

CVS-15-2CE

CVS-6-4CE

CVS-10-4CE

CVS-15-4CE

991240

991275

991242

991193

991245

991246

6kW 208 75

10kW 208 90

15kW 208 100

6kW 400 75

10kW 400 90

15kW 400 100

Specifications

Metering Digital Voltage and Emission Current

Cooling Air cooled

Input power 208 V ±10%, Three-phase, 50/60 Hz, 30, 40, 60 Amperes

400 V ± 5%, Three-phase, 50/60 Hz, 15, 20, 30 Amperes

Voltage output 1 to 10 kV DC, negative polarity

Voltage Ripple Less than 1% RMS

Voltage regulation ± 0.25% of full scale output

Efficiency 85%

Cables From – To LengthInput power cord Facilities outlet – Power Supply 12'8 gauge ground wire Power Supply – Ground 12'

Current output

6 kW 0 to 0.6 Amperes



Weight See Table

Dimensions 19" W x 10.25" H x 21" L

Power Supplies

e-Vap®



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REFERENCEPART

NUMBERWEIGHT

DESCRIPTION POUNDS

SCM2-DFM-CE

SCM2-RCM-CE

SCM2-RCM-1"B

EV-HRS

SCM-25FC-CE

991364-01

991364

991364-02

991062

991287

DIRECT PACKAGE 10

REMOTE PACKAGE 10

REMOTE FOR 2-1" BOLT FT10

HALF RACK SPACER 1

25-FOOT CABLE KIT 3

Source Control Module

Indirect

Source Control Module

Features

■ High frequency switching technologyImproved emission stability over 60 Hz SCR circuits

■ Compact filament transformer■ Electrically isolated from high voltage unit■ Grounded and shielded filament transformer

offers improved safety over conventional designs■ Self contained emission current monitoring for

independent operation■ CE compliant■ Full remote control capability■ Touch screen programming■ PS/2 handheld mouse/trackball■ Rack mount brackets included

e-Vap® CVS Source Control Modules are designed for use withe-Vap® CVS Series Power Supplies. The source control module unitincludes filament transformer assembly, hand held mouse controland all necessary cables for hook-up with an e-Vap® CVS PowerSupply. A maximum output current of 70 amperes assures sufficientpower to drive virtually any commercially available electron beamsource. e-Vap® CVS Source Control Modules are available in threeinstallation packages, direct flange mount and two remote cablemounts. Direct flange mount packages are used on all MDC flangemounted evaporation systems. This package allows mounting of thefilament transformer to a high voltage feedthrough fitted with a2.75" Del-Seal™ CF flange. Filament transformer attachment isaccomplished by bolting the transformer housing via two of theflanges .250-28 bolts positioned 180° apart. The remote cablemount packages provide 36" of high voltage cable with OFE copperconnector lugs and an acrylic high voltage shield. This package istypically used with modular source installations where high voltageelectrical feedthroughs are fitted with 2-3/4 Del-Seal™ CF flanges,but limited space does not allow direct installation. The secondremote package is used on installations where high voltage are two1" feedthroughs.The source control module’s compact size occupies only half thewidth in a standard 19" electronics rack. To facilitate the installationinto a standard 19" rack, MDC offers half-rack spacers. However, ifthe source control module is purchased in conjunction with an e-Vap® programmable X-Y sweep controller the two units can be fas-tened together to form the standard 19" rack width and would notrequire the half-rack spacer.

Specifications

Metering Digital Emission Current

Cooling Air cooled

Input power 208 V ±10%, Single-phase, 50/60 Hz, 8 Amperes

Voltage output 12 VAC

Current output 0 to 70 Amperes

Efficiency 85%

Cables From – To LengthInput power cord1 Wall outlet – Source Control Module 7.5'Interface cable1 Power Supply – Source Control Module 6'Secondary cable1 Transformer – e-Vap® Source 3'Control cable2 Source Control Module – Transformer 12'Transformer input cable2 Source Control Module – Transformer 12'High voltage cable2 Power Supply – Transformer 12'

Weight 20 lb

Dimensions 8.5" W x 5.25" H x 14" L1 Fixed length cables; not available in other lengths2 A 25-foot cable kit may be purchased separately; three cables are included in one kit

Direct

e-Vap®

Controls and Measurement


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Features

■ Use with virtually any electron beam source■ Large color LCD display■ Store up to 99 sweep patterns (up to 95

user programmable)■ Four pre-defined and highly expandable

patterns include CIRCLE, SPIRAL, FIGURE 8, and, LINE patterns

■ PS/2 handheld mouse/trackball control included■ An audible alarm warns of possible fault conditions■ Ability to custom name each sweep pattern■ Ability to choose a crucible pocket number to

correspond to specific sweep patterns and/orparameters such as beam centering or evaporation material specification

■ Ability to custom name the sweep controller itself for coating machine identification

■ Expanded beam power-profile capabilities allow the user to control erosion of difficult to evaporate materials

■ Customizable display color (foreground and background) to match your company colors or coating machine colors

■ Password option – requires a four digit password to access functions

■ RS-232 interfaceSafety-interlocked

■ All cabling included■ CE compliant■ Rack mounting brackets included

e-Vap® XY Programmable Sweep Controller with mouse

The next generation e-Vap® Programmable Sweep Controller has taken electron beam sweep capabilities to a higher level in versatility and practicality.It combines years of customer feedback with the latest advances in electronicstechnology. It possesses profound advancements from its predecessor interms of functionality and ruggedness. It is designed with both the coatingengineer and coatingoperator in mind. Electronbeam control is dynami-cally precise allowing theuser optimum ability todeposit dielectrics andmetals in the mostdemanding of applications.The strength of the sweepcontroller lies in its abilityto easily adapt to differentevaporation processrequirements, using its many expandable sweep patterns. Four predefinedsweep patterns and up to 95 additional user-defined patterns can bestored. The predefined patterns include CIRCLE, SPIRAL, FIGURE 8, andLINE patterns. Each of the 95 user defined patterns may consist of up to 208 XY points with a different beam dwell time for each beam point.The user interface includes a large, vibrant color LCD display with six function keys and a smooth rolling adjustment knob. A handheld PS/2device/trackball is provided which allows beam maneuverability for crucible material preparation and evaporation. For computer-automatedvacuum systems, a detailed rear panel digital I/O port along with a standard RS-232 interface allows access to the most important sweeperfunctions and status signals. An optional interactive Windows program isavailable allowing desktop sweep pattern design and virtually unlimited sweep pattern storage.

SpecificationsGraphic Display Color LCD

Input Power 100-120/200-240V, 50/60Hz, 3A

Max Coil Output (sweep + dc bias) 5 Amps

Max Sweep Frequency 200 Hz

Programming Interface Pushbutton, Digital I/O, or RS-232

Mouse Remote Input PS/2

Max Cable Length (18AWG) 25 feet (7.6 meters)

Weight 11 lbs

Dimensions 8.5" W x 5.25" H x 14” L, Rack-mountable

XY Programmable Sweep Controller

Description

Welcome Screen DisplayWelcome Screen Display

Ordering Information

REFERENCEPART

NUMBERDESCRIPTION

XYS2-CE

EV-HRS

991344

991062

XY PROGRAMMABLE SWEEP CONTROLLER

HALF RACK SPACER


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The e-Vap® Crucible Indexer is a micro stepper controlled motor driveunit used to position and rotate a multi-hearth electron beam source.The crucible indexer will rotate and position up to eight pocket positions,additional eight preprogrammed configurations can be selected via dipswitch settings at the back of the controller. These include: 4 pocket, 6pocket, 2 pocket, 180° Banana, 3 pocket 90° Banana, 3 pocket 120°Banana, 3 pocket 135° Banana, 3 pocket 145° Banana, or Continuous360° rotation. An additional dip switch lets the user select the follow-ing modes: Bi-Direction (shortest path between pockets), CounterClockwise Rotation, UHV Source Type, High Speed Range, BCD I/O, andEnable Ethernet communications. In addition the indexer can be userconfigured for any pocket / banana crucible layout. The Indexer alsoeliminates mechanical adjustment of the home or 1st pocket location,the "home" position can be defined electronically.

The e-Vap® Crucible Indexer can be controlled either manually orremotely, it can be configured to interface with most deposition con-troller equipped to select pockets on a multi layer deposition. AWindows-based configuration screen can be used to customize thepocket layout. The drive motor comes with a bracket to attach to a 2.75inch Del Seal rotary feedthrough or to a 1 inch bolt type rotaryfeedthrough. The indexer is supplied with a coupling to connect the 1/4inch drive shaft to the 1/4 inch feedthrough shaft. The e-Vap® CrucibleIndexer is designed to be one of the most flexible methods to customizeor fine tune crucible rotation and control for multi hearth electron beamsources.

Specifications

MOTOR DRIVE

Motor type micro-stepper

Torque 1.4 N-m (200 oz-in)

Speed (RPM) low: 0.05, 0.06, 0.08, 0.10, 0.12, 0.15, 0.19, 0.24, 0.30, 0.37

high: 0.5, 0.6, 0.8, 1.0, 1.2, 1.5, 1.9, 2.4, 3.0, 3.7

Resolution 1.8ºl

Repeatability 0.25ºl

Size (height x width x depth) 89 x 89 x 122 mm (3.5" x 3.5" x 4.8")

Weight 1.5 Kg (3.2 lbs)

Power 12 W (supplied by controller)

Specifications

CONTROLLER

Pockets up to 8

digital inputs binary or BCD encoded

low = 0 to 2 Vdc, high = 4 to 24 Vdc, non-isolated

Communications RS-232 or Ethernet

Size (height x width x depth) 88 x 213 x 197 mm (3.5" x 8.4" x 7.75")

Weight 2.7 Kg (6 lbs)

Power 100-120 / 200-240 VAC, 50/60 Hz, 20W

Compliance CE (LVF & ECD)

Interconnecting cable 10ft (3m), standard DB25

REFERENCEPART

NUMBERDESCRIPTION

EV-CI-INDEXER 991400CRUCIBLE INDEXER

Features

■ Direct drive-No pulleys or belts to set or adjust■ Electronic calibration of position■ 8 predefined pocket configurations included■ User configurable feature allows for custom or

special pocket configurations■ Can be operated manually or by external controller■ Two speed ranges for a total of 20 speed settings■ 1.8º resolution■ CE compliant

e-Vap® Crucible Indexer

Crucible Indexer

e-Vap®


24 ----Phone 800-443-8817 www.mdcvacuum.com MDC

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Deposition Monitoring and Control

The SQC-122 controls deposition rate and thickness in multi-layerthing film deposition processes. The controller was designed forease of use with six content sensitive Softkeys providing rapidaccess to frequently used data. The 122C memory will hold up to 25processes consisting of 250 layers and 25 materials. Cut / Copy/Paste Capabilities make it easy to modify or duplicate processesand layers. The controller has inputs for two crystal sensors, two 0-10 volt outputs are available to control the evaporation rate. Eightrelays and digital inputs can be independently assigned to over 40possible events, including pocket rotation and external process con-trols. A windows program for set up and data acquisition is alsoincluded with the controller.

The SQC-310---- model of the controller includes software for co-deposition control. The two crystal sensors and two outputs to con-trol deposition rate, along with special software features allow forco-deposition capability.

MDC offers a choice of four units with a range of capabilities frommonitoring the deposition process to controlling multiple depositionprocess or controlling co-deposition processes. The choices are tai-lored from introductory / economical thin film deposition to fullprocess control for a production process. Co-deposition of materialsfrom multiple sources allows easier fabrication and investigation ofcomplex material compositions and layers. All of the monitors andcontrollers utilize proven 6 MHz quartz crystal sensor technology tomeasure the thin film deposition process.

The SQM-160 measures thickness and deposition rate of the thinfilm deposition process. The base unit can monitor from 2 indepen-dent measurement channels. Four relays are available to controlsource and crystal shutters during the deposition process. Up to ninefilms can be stored in memory in the SQM-160, active film can beeasily changed from the front panel. All parameters can also be setfrom the front panel of the monitor. The SQM-160 is a monitor onlyit is not capable of controlling the rate during deposition.

SQM-122C Two Channel Deposition Controller

Description

SQM-160 Rate/Thickness Monitor

SQM-122C Screen Example

SQM-310 Co Deposition Controller



e-Vap®


Crystal Sensor Packages

REFERENCEPART

NUMBERWEIGHT

DESCRIPTION MOUNT POUNDS

LPSP-1

LPSP-275

LPSP-HT-275

CRP-500-117

991310

991311

991637

991131

LOW PROFILE SENSOR PACKAGE 1" BASEPLATE 5

LOW PROFILE SENSOR PACKAGE 2.75" DEL-SEAL 5

BAKEABLE SENSOR PACKAGE 2.75" DEL-SEAL 5

SENSOR CRYSTALS, GOLD RATED BOX OF 10 5

1" Base-Plate Low Profile 2.75" Del-Seal™ CF Low Profile 2.75" Del-Seal™ CF Bakeable to 400°C

This low profile sensor package includes sensor head,oscillator, 30" in-vacuum cable, 6" BNC cable, 10' BNCcable, a box of gold coated sensor crystals with 5 crystals per box, two Swagelok® compression fittingsand a 1" base-plate sensor feedthrough. Bakeable to180°C.

This low profile sensor package includes sensor head,oscillator, 30" in-vacuum cable, 6" BNC cable, 10' BNCcable, a box of gold coated sensor crystals with 5 crystals per box, two Swagelok® compression fittingsand a 2.75" Del-Seal™ CF sensor feedthrough. Bakeableto 180°C.

This bakeable sensor package includes a 400°C bake-able sensor head, oscillator, 30" in-vacuum cable, 6"BNC cable, 10' BNC cable, and a box of gold coated sen-sor crystals with 5 crystals per box. Sensor head is preinstalled on a 2.75" Del-Seal™ CF flange, which includesthe sensor feedthrough.

Deposition Monitoring and Control

The SQM-242 is a thin film deposition controller and a standardPCI expansion card. Each SQM monitors from one to four crys-tal sensor inputs, and provides two control voltage outputs. Atypical single sensor deposition system is shown, the SQM-242card is installed in a computer, a quartz crystal sensor is con-nected to the input and the output is connected to a power sup-ply. The card will control the deposition rate and adjust the out-put of the power supply for constant deposition rate. The basicSQM-242 card includes software that is easily modified to

REFERENCEPART

NUMBERDESCRIPTION

SQM-160

SQC-122C

SQC-222C

SCM-242

SQS-242

991366

991309

991367

991327

991328

SQM-160 TWO CHANNEL DEPOSITION MONITOR

SQC-122C TWO CHANNEL DEPOSITION CONTROLLER

SQC-222C TWO CHANNEL DEPOSITION CONTROLLER

SQM-242 TWO CHANNEL DEPOSITION CONTROL CARD

SQS-242 CO DEPOSITION SOFTWARE

SQM-242 Co Deposition Controller Software

SQM-242 Co Deposition Controller PCI Card

communicate with digital I/O cards. The SQS-242 software packagesupports multiple cards, co-deposition, digital I/O , graphing, anddata logging.


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Pneumatic Shutter -Two Position

Pneumatic shutters are an excellent tool for precise control of film thicknessonto a substrate. The air actuated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of the evapora-tion/deposition cycle. The shutter also allows pre-melt or “soak” prior to depo-sition by blanketing the evaporation material. Shutters with a 2" diameter and2" stroke are used on sources with crucible volumes of less than 40cc. Shutterswith a 3" diameter and 4" stroke are used on sources with crucible volumes of40cc and greater. These shutters come standard with a 120VAC solenoid valve.

REFERENCEPART

NUMBERNOM. SHUTTER STROKEFLANGE DIAMETER LENGTH

PS-2P2-133

PS-2P3-133

PS-2P2-275

PS-2P3-275

991796-02

991796-01

991794-02

991794-01

1-1/3 2.00 2.00

1-1/3 3.00 4.00

2-3/4 2.00 2.00

2-3/4 3.00 4.00

Pneumatic Shutter - Three Position

Pneumatic shutters are an excellent tool for precise control of film thicknessonto a substrate. The air actuated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of the evapora-tion/deposition cycle. The shutter also allows pre-melt or “soak” prior to depo-sition by blanketing the evaporation material. A three position shutter offersgreater process flexibility than other shutters. In position one the shutter willclose the deposition and rate monitoring ports on a horizontal e-Vap® system fit-ted with a water-cooled roof. In position two the shutter continues to block thedeposition port, but opens the rate monitoring port. In position three all ports areopen and the system is ready to begin a coating cycle. This shutter includes a120VAC solenoid air control valve.

REFERENCEPART

NUMBERDESCRIPTION

PS-3PU-133 996343SHUTTER 3-POSITION

High Voltage Safety Accessories

REFERENCEPART

NUMBERDESCRIPTION

EV-SGH

HVE-2

BHVE-2

991106

640051

640057

HIGH VOLTAGE SAFETY GROUND HOOK

ACRYLIC SHIELD 2-3/4" DEL-SEAL

ACRYLIC SHIELD 1" BASE-PLATE

Grounding Hook... MDC recommends the use of a grounding hook prior to ser-vice or maintenance of any high voltage equipment. Connections which werepreviously energized should be discharged with a grounding hook solidly con-nected to a low impedance earth ground. Hook installation is made easy withthe supplied 64" insulated cable.

High Voltage Shield... To prevent accidental contact with exposed high voltageleads MDC recommends the use of high voltage acrylic shields. Shields areavailable for 2-3/4" Del-Seal™ CF flange and 1" Baseplate mounted feed -throughs. Strain relief will accept cable sizes from .23" to .47" diameters.

e-Vap®

Evaporation Source Accessories


Ver E ~ 07-06


Manual Shutter - Push-Pull

Manual shutters are an excellent tool for control of film thickness onto a sub-strate. The manually operated shutter masks off the vapor stream betweensource and substrate at the beginning and finishing stages of the evapora-tion/deposition cycle. The shutter also allows pre-melt or “soak” prior to depo-sition by blanketing the evaporation material. Shutters with a 2" diameter by 2"stroke are used on sources with crucible volumes of less than 40cc. Shutterswith a 3" diameter by 4" stroke are used on sources with crucible volumes of40cc and greater.

Linear Guide Rods

Linear bearing guide rods allow horizontal flange mounted e-Vap® systems tobe routinely maintained by simply sliding in and out, in drawer-like fashion. Twolinear ball bushings provide the smooth gliding action required for ease of move-ment. Weldable support brackets secure the guide rods onto the user’s portflange. The bracket installation procedure is simple and self explanatory.

REFERENCEPART

NUMBERDESCRIPTION

EV-LGRA 991791GUIDE RODS

Water Flow Switch

e-Vap® electron beam sources rely on water-cooling to dissipate the largeamounts of heat generated by an electron beam. Proper water flow is essentialfor normal system operation as well as for safety. The water flow switch will turnoff all power to the e-Vap® source when and if a preset water flow rate dropsbelow its set point.

REFERENCEPART

NUMBERDESCRIPTION

EV-WF110

EV-WF240

991031

991031-01

WATER FLOW SWITCH 110V AC

WATER FLOW SWITCH 24VDC

REFERENCEPART

NUMBERNOM. SHUTTER STROKEFLANGE DIAMETER LENGTH

MS-2-133

MS-3-133

MS-2-275

MS-3-275

991793-01

991793-02

991792-01

991792-02

1-1/3 2.00 2.00

1-1/3 3.00 4.00

2-3/4 2.00 2.00

2-3/4 3.00 4.00

e-Vap®



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REFERENCEPART

NUMBERLINER CRUCIBLEMATERIAL SIZE

MDC recommends using crucible liners with all e-Vap® sources. Crucibleliners provide thermal isolation between a target material and a source’swatercooled crucible. These liners offer improved thermal stability whilereducing the transfer of heat to the crucible. Liners provide the ability to eas-ily and quickly switch evaporant materials without removing the source forcleaning. They also reduce power requirements to achieve specific evapora-tion rates. Graphite and vitreous carbon are the most popular liner materialsdue to their low cost and favorable thermal properties. Vitreous carbon isproduced using a patented glazing process baked above 1400°C eliminat-ing any porosity in the carbon. Please contact MDC sales for price and avail-ability on the various non-priced liner materials.

Crucible Liners

GRAPHITE 2cc

GRAPHITE 6cc

GRAPHITE 7cc

GRAPHITE 15cc

GRAPHITE 25cc

GRAPHITE 30cc

GRAPHITE 40cc

GRAPHITE 60cc

GRAPHITE 75cc

GRAPHITE 100cc

VITREOUS CARBON 2cc

VITREOUS CARBON 6cc

VITREOUS CARBON 7cc

VITREOUS CARBON 15cc







FABMATE 2cc

FABMATE 6cc

FABMATE 15cc

FABMATE 25cc

FABMATE 40cc

MOLYBDENUM 2cc

MOLYBDENUM 6cc

MOLYBDENUM 7cc

MOLYBDENUM 15cc

MOLYBDENUM 25cc

MOLYBDENUM 30cc

MOLYBDENUM 40cc

MOLYBDENUM 60cc

MOLYBDENUM 75cc

MOLYBDENUM 100cc

TUNGSTEN 2cc

TUNGSTEN 6cc

EV-CL2G

EV-CL6G

EV-CL7G

EV-CL15G

EV-CL25G

EV-CL30G

EV-CL40G

EV-CL60G

EV-CL75G

EV-CL100G

EV-CL2VC

EV-CL6VC

EV-CL7VC

EV-CL15VC

EV-CL25VC

EV-CL30VC

EV-CL40VC

EV-CL60VC

EV-CL75VC

EV-CL100VC

EV-CL2FM

EV-CL6FM

EV-CL15FM

EV-CL25FM

EV-CL40FM

EV-CL2M

EV-CL6M

EV-CL7M

EV-CL15M

EV-CL25M

EV-CL30M

EV-CL40M

EV-CL60M

EV-CL75M

EV-CL100M

EV-CL2TU

EV-CL6TU

992584-01

990586-01

990587-01

990588-01

990589-01

992484-01

990590-01

992571-01

992572-01

992573-01

992584-02

990586-02

990587-02

990588-02

990589-02

992484-02

990590-02

992571-02

992572-02

992573-02

992584-10

990586-10

990588-10

990589-10

990590-10

992584-03

990586-03

990587-03

990588-03

990589-03

992484-03

990590-03

992571-03

992572-03

992573-03

992584-04

990586-04

TUNGSTEN 7cc

TUNGSTEN 15cc

TUNGSTEN 25cc

TUNGSTEN 30cc

TUNGSTEN 40cc

TUNGSTEN 60cc

TUNGSTEN 75cc

TUNGSTEN 100cc

BORON NITRIDE 2cc

BORON NITRIDE 6cc

BORON NITRIDE 7cc

BORON NITRIDE 15cc

BORON NITRIDE 25cc

BORON NITRIDE 30cc

BORON NITRIDE 40cc

BORON NITRIDE 60cc

BORON NITRIDE 75cc

BORON NITRIDE 100cc

ALUMINA 2cc

ALUMINA 6cc

ALUMINA 7cc

ALUMINA 15cc

ALUMINA 25cc

ALUMINA 30cc

ALUMINA 40cc

ALUMINA 60cc

ALUMINA 75cc

ALUMINA 100cc

COPPER 2cc

COPPER 6cc

COPPER 7cc

COPPER 15cc

COPPER 25cc

COPPER 30cc

COPPER 40cc

COPPER 60cc

COPPER 75cc

COPPER 100cc

REFERENCEPART

NUMBERLINER CRUCIBLEMATERIAL SIZE

EV-CL7TU

EV-CL15TU

EV-CL25TU

EV-CL30TU

EV-CL40TU

EV-CL60TU

EV-CL75TU

EV-CL100TU

EV-CL2BN

EV-CL6BN

EV-CL7BN

EV-CL15BN

EV-CL25BN

EV-CL30BN

EV-CL40BN

EV-CL60BN

EV-CL75BN

EV-CL100BN

EV-CL2A

EV-CL6A

EV-CL7A

EV-CL15A

EV-CL25A

EV-CL30A

EV-CL40A

EV-CL60A

EV-CL75A

EV-CL100A

EV-CL2CU

EV-CL6CU

EV-CL7CU

EV-CL15CU

EV-CL25CU

EV-CL30CU

EV-CL40CU

EV-CL60CU

EV-CL75CU

EV-CL100CU

990587-04

990588-04

990589-04

992484-04

990590-04

992571-04

992572-04

992573-04

992584-05

990586-05

990587-05

990588-05

990589-05

992484-05

990590-05

992571-05

992572-05

992573-05

992584-06

990586-06

990587-06

990588-06

990589-06

992484-06

990590-06

992571-06

992572-06

992573-06

992584-08

990586-08

990587-08

990588-08

990589-08

992484-08

990590-08

992571-08

992572-08

992573-08

e-Vap®



Ver E ~ 07-06


EMITTER RETROFIT KIT

EMITTER RETROFIT KIT 1, 2, 5 1

EMITTER RETROFIT KIT 6 2

EMITTER ASSEMBLY

EMITTER ASSEMBLY 1, 2, 5 1

EMITTER ASSEMBLY 6 2

REPLACEMENT PARTS

ANODE 1-6 3

BEAM DEFLECTOR SHIELD 1-6 4

FILAMENT INSTALLATION TOOL 1-6 5

CATHODE BLOCK, LH 1-6 6

CATHODE BLOCK, RH 1-6 6

FASTENERS, NON-GALLING (Set of 8) 1-6 7

FILAMENT CLAMP, LH 1-6 8

FILAMENT CLAMP, RH 1-6 8

CONSUMABLES

FILAMENT SET, 5 ea. 1-6 9

INSULATOR, HIGH VOLTAGE 1-6 10

REFERENCEPART

NUMBERUSED WITH

DESCRIPTION FRAME SIZE FIGURE

EV-EAHF1-KIT

EV-EAHF6-KIT

EV-EAHF1

EV-EAHF6

EV-AHF

EV-BDSHF

EV-FIT

EV-LCBHF

EV-RCBHF

EV-FKHF

EV-LFCHF

EV-RFCHF

EV-FILHF

EV-IHVHF

992908

992909

992850-02

992850-01

992845

992846

992534-04

992853

992852

993042

992847-01

992847-02

990527

992414

Figure 3

Figure 5

Figure 7

Figure 1

Figure 9 Figure 10

Figure 8

Figure 6

Figure 4

HF Emitter Assembly

Retrofit KitA complete HF Emitter Assembly retrofit kit includes:■ One HF Emitter Assembly■ One filament installation tool■ One face plate for emitter■ Permanent magnets (Frame size 5 and 6 only)■ Two installation screws■ Detailed instructions

Components may be purchased individually or as acomplete retrofit kit.

The spare parts detailed below are a list of e-Vap® consumable com-ponents which may require periodic replacement. These compo-nents have been specifically designed for use with MDC e-Vap®

electron beam evaporation sources and systems equipped with theHF Emitter Assembly.

Figure 2

e-Vap®



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The spare parts detailed below are a list of e-Vap® consumable componentswhich may require periodic replacement. These components have beenspecifically designed for use with MDC e-Vap® electron beam evaporationsources and systems.

ANODE 1-6 1

BEAM DEFLECTOR SHIELD 1, 2, 5, 6 2

BEAM DEFLECTOR SHIELD 3, 4 2

BEAM FORMER 1 - 6 3

CATHODE BLOCK, LH 1, 2 4

CATHODE BLOCK, RH 1, 2 4

CATHODE BLOCK, LH 3 - 6 4

CATHODE BLOCK, RH 3 - 6 4

EMITTER ASSEMBLY 1, 2 6

EMITTER ASSEMBLY, OLD 5 6




FASTENERS, NON-GALLING 1 - 6 5

FILAMENT CLAMP, LH 1 - 6 7

FILAMENT CLAMP, RH 1 - 6 7

FILAMENT SET, 5 ea. 1, 2, 6 8

FILAMENT SET, 5 ea. 3, 4, 5 8

INSULATOR, HIGH VOLTAGE 1 - 6 A

INSULATOR, FILAMENT BLOCK 1 - 6 B

INSULATOR, BEAM DEFLECTOR 1 - 6 C

INSULATOR, BEAM FORMER 1 - 6 D

REFERENCEPART

NUMBERUSED WITH

DESCRIPTION FRAME SIZE FIGURE

EV-EA

EV-BDS

EV-BDS

EV-BF

EV-LCB

EV-RCB

EV-LCB

EV-RCB

EV-EA-1000

EV-EA-4010

EV-EA-4015

EV-EA-4066

EV-EA-4UHV

EV-FK

EV-LFC

EV-RFC

EV-FIL

EV-FIL

EV-IHV

EV-IFB

EV-IBDS

EV-IBDS

990537

992201

990534

990533

990525-01

990526-01

990525-02

990526-02

990630-01

990630-02

990630-03

990630-04

990630-06

990585

990531

990532

992330

990527

990530

990528

990535

990529

270º Emitter Consumable Accessories

Figure 1

Figure 3

Figure 5

Figure 6

Figure 8 Figure 9

Figure 7

Figure 4

Figure 2

A

B

C

D

C

e-Vap®



Ver E ~ 07-06


e-Vap®


Installation Hardware

Listed below are the essential components required for a typical installation ofstand-alone modular e-Vap® electron beam sources. Included are feedthroughsfor source water cooling and all electrical interfaces. Manual and auto-indexertype rotary feedthroughs are available for the installation of multi-pocket sources.All components are fitted with industry standard vacuum mounts to facilitatesource installation onto existing coating systems. Standard mounts include... Del-Seal™ CF metal seal flanges and 1" baseplate O-ring seal mounts. Customers withBalzers systems with 1-1/4" base plate ports can use MDC 1-1/4" to 1" base-plate port adapters.

FEEDTHROUGHS, WATER & ELECTRICAL

WATER, DUAL .312" TUBES, 2.75" DEL-SEAL 1

WATER, DUAL .312" TUBES, 1" BASE-PLATE 1

SWEEP COIL, 4 PIN .056, 1.33" DEL-SEAL 2

SWEEP COIL, 4 PIN .056, 2.75" DEL-SEAL 2

SWEEP COIL, 4 PIN .056, 1" BASE-PLATE 2

TC-CRIMP CONTACTS FOR .056 PIN, Pkg of 5 2

HIGH VOLTAGE, 2 PIN .250, 12kV 2.75" DEL-SEAL 3

HIGH VOLTAGE, 1 PIN .312, 12kV 1" BASE-PLATE 10

CONNECTOR, RIGHT ANGLE POWER, .25" PIN 3

CONNECTOR, INLINE POWER, 25" PIN 3

CONNECTOR, RIGHT ANGLE, .312" PIN

FEEDTHROUGHS, ROTARY BELLOWS SEAL

ROTARY MANUAL, .250 SHAFT, 1.33" DEL-SEAL 4

ROTARY MANUAL, .250 SHAFT, 2.75" DEL-SEAL 4

ROTARY, .250 SHAFT BOTH ENDS, 1.33" DEL-SEAL 5

ROTARY, .250 SHAFT BOTH ENDS, 2.75" DEL-SEAL 5

FEEDTHROUGHS, ROTARY O-RING SEAL

ROTARY, .250 SHAFT BOTH ENDS, 1" BASE-PLATE 6

ASSEMBLY EQUIPMENT

BASE-PLATE ADAPTER BALZERS 1-1/4" TO MDC 1" 7

VCR® GLAND, .250" MODIFIED .218" BORE 8

VCR® GLAND, .250" TO .312" TUBE ADAPTER 8

WATER FLOW SWITCH, 110V AC 9

WATER FLOW SWITCH, 240V DC 9

HIGH VOLTAGE SAFETY GROUND HOOK 11

HIGH VOLTAGE ACRYLIC SHIELD, 2-3/4" DEL-SEAL 12

HIGH VOLTAGE ACRYLIC SHIELD, 1" BASE-PLATE 12

REFERENCEPART

NUMBERDESCRIPTION FIGURE

991534

991726

991531

991532

991727

991538

640005

992940

991537

991536

992818-03

670004

670005

991731

991730

652000

991813

990610

991809

991031

991031-01

991106

640051

640057

Figure 2

Figure 4

Figure 6

Figure 8

Figure 11

Figure 9

Figure 7

Figure 5

Figure 3

EV-LF275

EV-LF1

EV-IF133

EV-IF275

EV-IF1

TC-CRIMP

EV-HC275

EV-HC1

RAPC

ILPC

REVHVC

HTBRM-133

HTBRM-275

EV-BRMI-133

EV-BRMI-275

FRM-1

EV-BAI

EV-MVCR

EV-TAVCR

EV-WF110

EV-WF24D

EV-SGH

HVE-2

BHVE-2

Figure 1

Figure 10

Figure 12


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Ver E ~ 07-06

Complete Vacuum Coating SolutionsHigh and Ultra-High Vacuum Systems

HV Chamber notes:• High vacuum D chamber and box coater packages.• Full internal deposition shielding.• Water cooled chamber option.• Integrated frame system with casters and leveling pads.• Dry pumping. Standard packages use mag lev turbo and

scroll pump.• Digital vacuum gauging.• Sample and source viewports.• Static and rotating sample holders up to 4” standard.

Special sizes upon request.• Substrate heating options.• E-Vap electron beam evaporation sources.

Single or multi pocket.• Re-Vap resistive evaporation sources. Single or multiple sources.• Sputtering sources.• Ion source for pre-clean etch or Ion assisted deposition.• Crystal rate monitor system. Crystal rate controller systems.• Manual gas systems. Mass flow control systems.• Electronics rack with cable assemblies.• Easy to follow instruction manuals.• Factory and onsite training available.

Thin FilmHV Packaged Systems

MDC offers virtually every component required for vacuum research and vacuum coating applications. Now with the introduction of the MDCstandard chamber line researchers and OEM’s have the advantage of bundling these high quality pieces together without hours or weeks ofspecial engineering. Many of our most popular parts are already designed to work together.

Shown: Optional Sputter Source

Shown: High Vacuum Coating System (Multiple Options Available)

Shown: High Vacuum D-Shape Chamber (Multiple Options Available)


Ver E ~ 07-06


Complete Vacuum Coating SolutionsUltra High Vacuum System - with ION Assisted eVap

Easy Accessfor Source Loading

Water Cooled Chamber

eVap Source

Crucible Indexer

Rate Controll erION Source ad GasController

eVap Source & Sweep Controller

Dry Turbo CartDry Pumping

Frame 5Six Pocket

2” Ø SampleLoad Lock Systems

Thin FilmUHV Packaged Systems

Electronics and Control RackIsolation Valve

Digital Vacuum Gauge

ION Source

Pump Controller

High VoltagePwr Supply

Shown: Complete High Vacuum Coating Solution (part number 204199)

UHV chamber notes: Shown part number 204199 UHV load lock coating system including:• 6 pocket e-vap source with auto indexing• Ion source for pre clean or assisted deposition• Sample holder for 2” diameter.• Crystal rate monitor• Load lock system• Water cooled chamber• Large diameter view port for sample (IR coated)• Source viewport (IR coated) with shutter• Full removable sst internal shielding• Front access port for source material loading.• Spare ports• Utilities panel for gas, water and air connections

• Mag lev turbo with dry scroll roughing pump.• Digital vacuum gauging• Dry turbo cart for load lock system• Frame with heavy duty casters and leveling pads

Assembled electronics rack including:• Rate monitor control• Ion source power supply• Gas controller with 100sccm mass flow control• Programmable e-vap source controller• Programmable e-vap sweep controller• Turbo pump controller• 6 kilowatt e-vap high voltage power supply• All required cables.


Ver E ~ 07-06

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Shipping Method

All standard shipments are made by thefollowing method unless otherwise specified:• FOB Hayward, California and Sarasota,

Florida.• prepay and added to invoice (PPA);• shipped via UPS ground service or best

way as determined by MDC.

Nonstandard shipments must be specified bythe customer. General notes include thefollowing:• orders may be specified to ship collect;• charges for nonstandard methods of

shipping are determined by the specifiedcarrier;

• in some cases, oversized items may becharged at a “dimensional weight” (dim-weight) rate which is substantially higherthan surface rates.

MDC recommends in all cases that analternative carrier be named at the time oforder.

Weights stated in this catalog are forreference only. Exact shipping weights aredetermined at the time of shipment.

Payment Terms

Net 30 days with prior credit approval.VISA®, MasterCard® and American Express®

credit cards, prepaid, are also accepted.

Prices and Specifications

Prices and specifications are subject tochange without notice.

Delivery

Every effort will be made to ship within three(3) days of receipt of an order. In the event ofback-order, a firm delivery date will beestablished and quoted.

Warranty

All products manufactured by MDC VacuumProducts, LLC are warranted to be free fromdefects in materials and workmanship for aperiod of twelve (12) months from the dateof shipment by MDC Vacuum Products, LLCto the buyer. Liability under this warranty isexpressly limited to repair or replacement ofdefective products at the option of MDCVacuum Products, LLC. Products returned toMDC Vacuum Products, LLC for repair orreplacement shall be received prepaid.Expendable items such as gaskets, bellows,bearings, lubricants, etc., may have a servicelife of less than one year in normal usage. Ifsuch items fail to give reasonable service fora period of time, as determined by MDCVacuum Products, LLC, they will be repairedor replaced by MDC Vacuum Products, LLCat its election.

Return Policy

In the event that a product is to be returnedto MDC, a Return Authorization (RA) numbermust be obtained from the MDC SalesDepartment prior to shipment of the product.Call the toll free number listed at the bottomof this page and request an RA number. Tofacilitate processing, please provide theoriginal date of purchase and either theoriginal purchase order number or theoriginal MDC sales order number.

Products returned to MDC Vacuum Products,LLC for repair or replacement shall be

received prepaid. Items arriving without aReturn Authorization number will be refused.

A product failing to give reasonable servicefor a period of time, as determined by MDCVacuum Products, LLC, will be repair ed orreplaced by MDC Vacuum Products, LLC atits election.

Trademark Ownership

American Express® American Express Co.MasterCard® Mastercard International Inc.VISA® VISA International Service AssociationApiezon® Avo Biddle InstrumentsAutoCad® AutoDesk CorporationConflat®, Fel-Pro® Varian Associates Inc.Corning®, Pyrex® Corning Inc.Dicronite® Rotary Components, Inc.Kovar® Carpenter TechnologyMazak® Yamazaki Mazak Corp.Slo-Syn® Superior Electric Co.Suprasil™ Heraeus Amersil Inc.Swagelok®, VCR® Swagelok Co.Teflon® E.I. DuPont de Nemours & Co., Inc.Viton®, Buna®, Kapton®, Kalrez®, Krytox®,Vespel®, Delrin® DuPont Dow

ElastomersCab-Fast® Caburn-MDC EuropeDel-Seal™, Del-Base™, Del-Weld™, Kwik-Flange™, Large-Flange™, Mini-Scaffold™,Auto-Dock™, C-Loc™, Uni-Loc™, V-Plane™, Re-Vap™, e-Vap®

MDC Vacuum Products, LLC

MDC customer service and technical department MDC inventory and stock room MDC shipping and receiving department

All dimensions in this catalog are given ininches unless specified otherwise.

e-Vap®

Ordering Information

35

Visit www.mdcvacuum.com to order online, for all of the latest pricing,

new product and sales representative contact information.

Access over 5,000 parts onlinethousands of components in-stock!

MDC 23842 Cabot Boulevard, Hayward, CA 94545-1651• Toll Free 800-443-8817• Phone 510-265-3500 • Fax 510-887-0626• e-mail [email protected] • www.mdcvacuum.com

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