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RECX
Thin film metrology
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Phi-scan- In plane orientation
GIXRD- Enhance material probed- Phase- Stress- Depth
profiling
HRXRD / RSM- Texture- Strain- Orientation
XRR- Film thickness- Roughness- Density
Rocking cr!e- iscut- Orientation
Polar "lot
-Texture
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Phi-scan- In plane orientation
GIXRD- Enhance material probed- Phase- Stress- Depth
profiling
HRXRD / RSM- Texture- Strain- Orientation
XRR- Film thickness- Roughness- Density
Rocking cr!e- iscut- Orientation
Polar "lot
-Texture
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Reflecti!ity as function of angle to obtain information
on"- Film thickness- Surface roughness- Density
XRR #X-ray reflectometry$
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kk
Q
Scattering from
surfaces andinterfaces at lowangles, ~0-8o
Scattering occurs fromvariations in electrondensity
Electron densityFouriertransform
Variations in electron density
arise from lm t!ickness,roug!ness and density w!ic! can"e
determined for eac! layer
~#0nm $a%i&'on Sr(i&
'
~#0nm $a%i&'on Sr(i&
'
)ensity
(!ickness*oug!ness
XRR #X-ray reflectometry$
*ened +arameters$a%i&'(!ickness 8./8nm *oug!ness 0.'0 nm
)ensity 1.0# g2cm'
3 surface layer of 4.nm isalso re5uired to fully e6+laint!e
results
= 2
4 |)exp(
)(|
1)( dzziq
dz
zd
qqI
z
z
z
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$ayered t!in lms of Eu7&'and (i&7
grown "y 3$) as conversionmaterial wit! t!e aim of
controllingt!e Eu-Eu distance.
XRR #X-ray reflectometry$
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$ayered t!in lms of Eu7&'and (i&7
grown "y 3$) as conversionmaterial wit! t!e aim of
controllingt!e Eu-Eu distance.
(!e dou"le layer
t!icknesses 40% 1.#970% 4#./ 9#0% 7/.4 9
:alf t!e dou"le layert!ickness of t!e 40%sam+le, '.8 9, is
a++ro6t!e same as t!e s!ortestEu ; Eu distance in cu"icEu7&',
'.< 9
XRR #X-ray reflectometry$
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XRR #X-ray reflectometry$
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Phi-scan- In plane orientation
GIXRD- Enhance material probed- Phase- Stress- Depth
profiling
HRXRD / RSM- Texture- Strain- Orientation
XRR- Film thickness- Roughness- Density
Rocking cr!e- iscut- Orientation
Polar "lot
-Texture
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GIXRD #Gra%ing inci&ent '-ray &iffraction$
Increase the path#ay through the sample
$on!entional %&
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GIXRD #Gra%ing inci&ent '-ray &iffraction$
Increase the path#ay through the sample
'I(RD
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GIXRD #Gra%ing inci&ent '-ray &iffraction$
) *nO film of &++ nm deposited by ),D
'I(RD
$on!entional %&
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GIXRD #Gra%ing inci&ent '-ray &iffraction$
Depth profile analysis
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Phi-scan- In plane orientation
GIXRD- Enhance material probed- Phase- Stress- Depth
profiling
HRXRD / RSM- Texture- Strain- Orientation
XRR- Film thickness- Roughness- Density
Rocking cr!e- iscut- Orientation
Polar "lot
-Texture
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Increase the path#ay through the sample
HRXRD #High-resoltion '-ray &iffraction$
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HRXRD #High-resoltion '-ray &iffraction$
ap the reciprocal space to obtain information on"-
Orientation- Strain- Texture - and a lot more-
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HRXRD #High-resoltion '-ray &iffraction$
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HRXRD #High-resoltion '-ray &iffraction$
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HRXRD #High-resoltion '-ray &iffraction$
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HRXRD #High-resoltion '-ray &iffraction$
Film of .a.bO/on ,a)lO/
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Phi-scan- In plane orientation
GIXRD- Enhance material probed- Phase- Stress- Depth
profiling
HRXRD / RSM- Texture- Strain- Orientation
XRR- Film thickness- Roughness- Density
Rocking cr!e- iscut- Orientation
Polar "lot
-Texture
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