Great Asia Machinery Co., LTD.

SUNUP High Tech Co., LTD.

Company Background

• The Sunup Tech Corp. was established in 2006 teamed up with a group of experienced engineers in Semiconductor and Optical-electro industry. We focus on the Semi-con and Optoelectronics supplies, spare parts and equipment maintenance.

• The Great Asia Machinery was established in 1997 and earlier on focused on die make and custom-made machinery manufacturing. Now, the Great Asia Machinery has already stepped in the high-tech industry to design and build-up various equipment and will continue to develop relative equipment in solar cell and flexible display fields.

Company Organization

Business Direction Machine Design

Semi-Con and Optical-electro equipment

$50,000 ~100,000 USD Sputtering and Thermal Evaporation

Used Equipment and Maintenance Service

Vacuum Pump Repair：Dry Pump、Oil Pump

Power Supply Repair：DC、RF、Pulse-DC、MF

Used Parts：Gauge、Controller

used vacuum equipment and spare parts imported from Japan,Europe

and America

International Trade and Agency Business

TFT-LCD, LED illumination build-in switch power supply

TFT-LCD Color Filter Glass Polishing Pad

Original creative Invention

original vacuum gate valve

Solar-cell Equipment, Process, Materials, Patent

Primary Business

Vacuum chamber and equipment manufacturing

CNC machine workshop

3D modeling

Equipment maintenance

Vacuum system spare parts

Semiconductor equipment spare parts

Optoelectronics spare parts

Equipment assembly ODM&OEM

System Design and Reference

• Electron Cyclotron Resonance Plasma CVD

(ECRCVD)

• IC Mask Testing Equipment

• Ultra High Vacuum E-Gun Evaporation

• Vacuum Hot Press Furnace

• Vacuum Bonding System

• Nano Ball Mill

Equipment System Design

Electron Cyclotron Resonance

Plasma CVD (ECRCVD)

Specification

Plasma Source：Electron Cyclotron Resonance

Plasma

Substrate Plate Size：300mm*300mm

Microwave Spec.：2.45GHz、2.5KW

Heating Plate Max. Temp：7000C

Vacuum < 1*10-6 torr

Process Gas：CH4、H2、N2、O2、Ar、He

Process Gas Max. Flow：300 sccm

Application

PECVD:Silicon Thin Film Solar Cell

Dry Etch : Semiconductor

IC Mask Testing Equipment

Specification:

Particle count: <0.5μm, <5ea

Pressure:

Vacuum pressure: 8*10-3 torr

Saturated pressure: 2 atm

Vacuum pressure deviation while process on ±0.1% FS

Gases injected:

Non-corrosive gases: PN2, CDA (or Ar)

Corrosive gases: NH3, SO2, H2S

Full scale flow rate: 2000 sccm MFC (minimum flow rate: 1% full scale)

Ultra High Vacuum E-Gun Evaporation

Specification:

Vacuum < 10-9 torr。

Robot system

load-lock chamber

main chamber

IR Lamp annealing in the load-lock chamber

substrate holder rotation system (0~15rpm)

Vacuum Hot Press Furnace

Specification：

Vacuum < 10-3 torr。

Temperature Control System by Japan RKC

Programmable Control

Electronic Control System by Mitsubishi PLC

Controller

Application:

Ceramic Powder sintering

Sputtering material sintering

Vacuum Bonding System

Application:

Diffusion Bonding

Ceramic Bonding

Ceramic / Metallic Bonding

Parts Service

• We specialize in equipment parts/module

repair and part manufacturing for the

processes of thin film and etching in

Semiconductor, as the processes in Opto-

electronics.

Parts Design

Source Materials Selection for Vacuum Application &

Different Modules in Semiconductor & Opto-

electronics.

Geometric Dimensioning and Tolerance System

Complies with ANSI, JIS & CNS Standards.

Fabrication Standard Recommended.

Heat Treatment Recommended(Annealing, Firing….)

Surface Treatment(Ni,Cr,Au,Ag,Cu,Ti,Al…coated &

Anodization)

Jig & Fixture Design for Fitting & Assembly.

AutoCAD Drawing Available.

Vacuum Equipment Parts

Gate Valve

Engineering Plastics Parts

Shower Pipe

Vespel Screw Vespel Ring

Metal（Alloy）

Stainless Steel (SUS 316 , 316L, 304…)

Al, Ti, W, Mo, Cu, Fe, Ni……

Ti Alloy Deposition Ring 8 inch SUS 316 Clamp

8 inch Al Alloy Sputtering Chamber 6 inch Al Alloy Chuck

8 inch Al Alloy Sputtering Collimator 6 inch Al Alloy Sputtering Collimator

8 inch Al Alloy Sputtering Collimator 6 inch Al Alloy Shower Head

8 inch Al Alloy Shower Head 6 inch SUS 316 Front Side Substrate Holder

8 inch SUS Back Side Substrate Holder SUS304 5 inch wafer Evaporation Done

Evaporation： Free oxide Copper

Source Crucible Assembly Inconel 750 Washer

Evaporation： Free oxide Copper

Source Crucible Assembly SUS 304 Symmetry Clamp

In Line Sputtering：AET Mask In Line Sputtering：Floating Mask

In Line Sputtering：Ground Shield AET Plane

Carrier Plate Mask

Mask Holder TRAY

Ceramic Parts

Ceramic Bearing

• Ceramic Ball：Si3N4、ZrO2

• Ceramic Ring Material：Si3N4、ZrO2

•Type：6000,6001,6002,6003,6004,6005,6006,6007,6200,6201,6202,6203,6204,6205,6206,6207,6208,6300,6301,6302,6303,6304,6800,6801,6802,6803,6804,6805,6806,6807 and Custom-made

Machine Workshop

Machines：

– CNC Machining Centers

– CNC Lathe

– CNC Wire Cutting Machine

– CNC Electric-Discharge Machine(EDM)

– Grinding & Polishing Machine

Machined Parts Via Precision Manufacturing with

Optima Positioning Accuracy:

– Dimensional (Displacement) Accuracy within 0.05mm

– Dimensional (Planar) Accuracy within 0.05mm

– Dimensional (Volumetric) Accuracy as Required

Secondary Machining of Parts within Specified &

Tight Tolerance

CNC Machining Centers

Facility 1:

CNC Machining Center

Capacity: 850mm * 520mm

Facility 2:

CNC Machining Center

Capacity : 1300mm * 750mm

Facility 3:

CNC Machining Center

Capacity : 2100mm * 1800mm

CNC Lathe

Facility 4 : CNC Lathe

Facility5 : CNC Lathe

Machine

Facility6:

Electric-Discharge Machine

(EDM)

Facility7:

CNC Wire Cutting Machine

Machine

Facility8:

Horizontal Grinding Machine

Facility9:

High Speed Lathe

Capacity: 430mm * 1100mm

Machine

Facility10:

High Speed Milling

Capacity: 500mm * 1100mm * 400mm

Facility11:

Horizontal Lathe & Milling Machines

Capacity: 1000mm * 2000mm * 80mm

Welding Facility

Facility1:

TIG WELDING MACHINE

Facility2:

MIG WELDING MACHINE(CO2)

Facility3:

Plasma cutting machine

Surface Treatment

Ceramic Materials Thermal Spraying

- Any materials

Electroplating

Anodization

- Only for Aluminum Material

Polishing - Electropolish

- Chemical

- Mechanical

Vacuum Leak Test

• Helium Detector

– ULVAC HELIOT 700

Certificates of Quality System