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29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers © 2020 IEEE International Solid-State Circuits Conference 1 of 40 Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High- Order Rotational Transition Probing and Slot-Array Couplers Cheng Wang, Xiang Yi, Mina Kim, Ruonan Han Massachusetts Institute of Technology, Cambridge, MA

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  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

    1 of 40

    Sub-THz CMOS Molecular Clock with

    43ppt Long-Term Stability Using High-

    Order Rotational Transition Probing

    and Slot-Array Couplers

    Cheng Wang, Xiang Yi, Mina Kim, Ruonan Han

    Massachusetts Institute of Technology, Cambridge, MA

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

    2 of 40

    Outline

    • Background

    • High-order locking for long-term stabilization

    • Architecture and circuit design

    • Measurement results

    • Conclusions

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Ultra-Stable, Miniaturized Clocks

    Synchronization of high-speed

    radio access networks

    • 5G massive MIMO → σt < 65ns

    • Precise positioning → σt < 10ns

    • 1-min holdover → Δf

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Comparison of Portable Clocks

    Stability

    Cost

    Power

    Oven compensated crystal

    oscillator (OCXO) Chip-scale atomic clock (CSAC)

    Chip-scale molecular clock

    (CSMC) (This work)

    ~100mW~100mW~1W

    ~$10~$1000~$100

    ~10-11@103s~10-10@103s ~10-11@103s

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Outline

    • Background

    • High-order locking for long-term stabilization

    • Architecture and circuit design

    • Measurement results

    • Conclusions

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Rotational Spectra of Polar Gaseous Molecules

    +

    -

    F

    F

    E/M torque → molecular rotation

    Photon absorption →state transition (J→J+1)

    Rotational spectra observed in WG gas cell

    EM field

    E or M dipole

    16O

    12C

    32S

    MW photon

    Polar gaseous molecules

    Quantized rotational states

    16O

    12C

    32S

    16O

    12C

    32S

    16O

    12C

    32S

    RF in RF out

    hν J=1J=2

    J=3

    J=4

    J=5

    J=6

    J=7

    ~2×105

    Q =f0

    fFWHM

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Wavelength Modulation Spectroscopy (WMS)

    • K: “open” → rotational spectrometer

    VWM(t) = A(t)·sin[2πfpt + Δf·sin(2πfmt + θ0)]

    fm - Modulation freq. Δf - Freq. deviation

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    High Order Harmonics of fm

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    High Order Harmonics of fm

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Multi-Order Dispersion Curves

    Nth order dispersion curve ≈ Nth order derivative

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Multi-Order Dispersion Curves

    Odd order curves → zero-crossing point

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Molecular Clock Locking to Spectral Line Center

    Zero-crossing point:

    • Kr : Response, [V/Hz]

    • Vn : Noise , [V/ Hz]

    SNR =Verror,max

    Vn

    Allan deviation:

    Vn

    ·Kr·f0σy =

    2τ≈

    N0

    ·Q·SNRττ - Avg. time

    • K: “open” → rotational spectrometer• K: “closed” → Lock to zero-crossing point

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Proof-of-Concept: The 1st CSMC Prototype

    [C. Wang, et al., Nature Electronics, 2018]

    • 231.061GHz line of OCS

    • 1st order dispersion curve

    • Frequency stability:

    σy =3.8×10-10@τ=103s

    • 66mW DC power.

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Frequency Stability of Molecular Clock

    Short

    term

    Medium

    term

    Long

    term

    VCXO

    noise

    σy ≈N0

    ·Q·SNRτ

    1

    GBW

    Temperature dependency

    Drift due to Magnetic field

    Drift due to Electrical field

    Drift due to baseline tilting

    • This work: High order locking

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Asymmetric Line Profile due to Baseline Tilting

    +

    • Symmetric in theory • THz transceiver response

    • Gas cell response

    Asymmetric

    line profile

    Baseline

    tilting

    Rotational

    spectral line

    =

    • Measured in reality

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Asymmetric

    line profile

    Baseline

    tilting

    1st Order Dispersion Curve w/ Baseline Tilting

    Rotational

    spectral line

    Offset

    voltage VOffset

    Long-term

    clock drift

    • Symmetric in theory • THz transceiver response

    • Gas cell response

    • Measured in reality

    1st order

    dispersion curve

    • Invariant zero-crossing

    point under PVT

    +

    • Voffset is PVT dependent

    =

    • How to deal with varying

    zero-crossing point?

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    • Voffset is PVT dependent• Eliminated by high order

    derivative, Voffset ≈ 0

    • Invariant zero-crossing

    point under PVT

    • Varying zero-crossing

    point due to Voffset

    Offset

    voltage VOffset

    1st order

    dispersion curve

    High Order Dispersion Curve w/ Baseline Tilting

    +

    High order

    dispersion curve

    Long-term

    clock drift

    Stability

    enhanced

    • Invariant zero-crossing

    point under PVT

    =

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Idea: CSMC with High-Order Locking

    • Simulation: 0.1dB/GHz baseline

    tilting → a frequency drift of:

    • 5×10-9 for 1st order locking

    • 3×10-10 for 3rd order locking

    • This work: a chip-scale

    molecular clock (CSMC) locking

    to high order dispersion curve

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Outline

    • Background

    • High-order locking for long-term stabilization

    • Architecture and circuit design

    • Measurement results

    • Conclusions

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    System Architecture

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    TX: 231GHz Cascaded Two-Stage PLL

    • Freq. tunability: ~1% of line width fFWHM

    • 27GHz (12%) bandwidth for line coverage

    • Precise wavelength modulation (WM)

    • Δf/fp≈10-5 (Δf ≈2.5MHz, fp=231.06GHz)

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    TX PLL2: 57.77GHz VCO and 231GHz Quadrupler

    • Varactor 1: highly-sensitive for large PLL bandwidth

    • Varactor 2: low sensitivity for wavelength modulation

    • KVCOVaractor 1 / KVCOVaractor 2 ≈ 103

    Simulated under

    free-running

    Simulated

    WM response

    Varactor 1

    Varactor 2

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    TX: Wavelength Modulator (WM)

    • 100kHz differential

    output voltage

    • 3-bit Δf control

    • 0.6° phase control

    • Low distortion:

    spur < -55dB

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    RX: THz Detector and VGA

    • Sub-threshold NMOS pair → low noise THz square-law detector

    • 2-stage variable gain amplifier

    • 65dB max gain / 10-bit control

    • AC coupled / monolithic integrated

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    RX: Harmonic Rejection Lock-in Detector (HRLKD)

    • Convert Nth harmonic of fm to DC

    • Harmonic rejection of ref. clock fref for

    low interference and noise-folding

    • Reduce flicker noise at DC output

    Conventional

    Phasor diagram of harmonic rejection mixer

    Proposed

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    RX: Harmonic Rejection Lock-in Detector (HRLKD)

    • Harmonic rejection > 80dB

    • Reduced DC flicker noise• DC offset Vp-Vn ≈10µV (1µV change → 10-10 drift)

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Chip-to-Waveguide Coupler

    • Conventional designs

    • Costly external components

    • Special process/wafer thinning

    • Insufficient TRX isolation

    [C. Wang, et al., JSSC, 2018]

    E-plane quartz probe

    [H. Song, et al., MWCL, 2016]

    Integrated dipole couplerDielectric resonator

    MMIC Absorber

    Dipole

    coupler

    Dipole

    coupler

    [D. L. Cuenca, et al., EuMIC, 2017]

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Slot Array Coupler: Architecture

    • Radiates downward into

    waveguide aperture

    through Si-substrate

    • No external components

    • No wafer thinning

    Simulated E-field distribution

    Port 1

    Port 2Port 3

    Port 4

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Slot Array Coupler: Simulated Results

    • Simulated loss = 5.2dB

    • BW3dB = 21%

    • 60dB simulated TX/RX

    isolation

    • 10-9 drift by 60dB isolation

    (removable w/ calibration)

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Outline

    • Background

    • High-order locking for long-term stabilization

    • Architecture and circuit design

    • Measurement results

    • Conclusions

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Chip Photo and Packaging

    XTAL

    • TSMC 65nm CMOS process.

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Measured RF Power and Phase Noise of TX

    • PRF = -9.4dBm w/ slot array coupler

    • PLL bandwidth: 27GHz (12%)

    • Phase noise : -81.5dBc/Hz@1MHz

    • PM-to-AM noise → SNRPN= 84dB

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Measured WMS Spectrum and RX Performance

    • Spectrum of TX probing signal

    with wavelength modulation

    • NEP of RX w/ slot array coupler:

    62.8 pW/ Hz at fm=100kHz

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Measured Dispersion Curves and Allan Deviation

    • 3rd order curve: SNR = 66dB

    • VOffset = 4.3μV (256× smaller)

    • 1st order curve: SNR = 84dB

    • VOffset = 1.1mV

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Measured Allan Deviation by 3rd Order Locking

    • Allan deviation: σy = 3.2×10-10@ τ =1s, 4.3×10-11@ τ=103s

    This work: free

    running VCXO

    1st CSMC: 1st orderCSAC, ISSCC 2011

    This work: 3rd order

    CSAC, ISSCC 2019

    CSAC, Microsemi

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Measured Temperature and Magnetic Sensitivity

    Temperature (°C) Measurement Time (Minutes)

    Fre

    q.

    Dev

    . (1

    0-9

    )

    Fre

    q.

    Dev

    . (1

    0-9

    )

    353025 40 45

    6

    3

    0

    -6

    -3

    2

    1

    0

    -1

    -20 3 6 9 12

    on off on off on off on

    15 18 2150 55 65

    on: 75Gauss

    off: 0 Gauss

    avg

    60

    • Drift < ± 3×10-9 in 27~65 ºC w/ 2nd

    order temperature compensation

    • Drift < ± 2.9×10-12/Gauss w/o

    magnetic shield in CSAC

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Outline

    • Background

    • High-order locking for long-term stabilization

    • Architecture and circuit design

    • Measurement results

    • Conclusions

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Performance Comparison Table

    Parameters SiTime [1] Microsemi [3] ISSCC2019 [4] VLSI2018 [5] This work

    Mechanism OCXO 133Cs CSAC 133Cs CSAC 16O12C32S MC 16O12C32S MC

    Cost Medium High High Low Low

    Freq. (GHz) 0.06 4.6 4.6 231.061 231.061

    Harmonics N/A 1st order 1st order 1st order 3rd order

    σy (τ =100s) 3.0×10-11 3.0×10-10 8.4×10-11 2.4×10-9 3.2×10-10

    σy (τ =103s) 4.0×10-11 1.0×10-11 0.8×10-11 3.8×10-10 4.3×10-11

    Temp. Drift a ±5.0×10-9 ±5.0×10-10

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Acknowledgement

    • This work is supported by National Science Foundation (CAREER

    ECCS-1653100 and ECCS-1809917), MIT Lincoln Lab, Jet Propulsion

    Lab (NASA), and a Texas Instruments Fellowship;

    • The authors acknowledge Dr. Stephen Coy, Prof. Keith Nelson, and

    Prof. Robert Field of MIT for technical discussions and assistance;

    • We appreciate the help from Qingyu (Ben) Yang on the experiments.

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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    Demo Session 1

    Chip Scale Molecular Clock

  • 29.5: Sub-THz CMOS Molecular Clock with 43ppt Long-Term Stability Using High-Order Rotational Transition Probing and Slot-Array Couplers© 2020 IEEE International Solid-State Circuits Conference

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