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OSI VIII 2009 1/11
Robert Ehlert, Jinhee Kwon and Michael C. DownerDepartment of Physics, The University of Texas at Austin, Austin TX 78712, USA.
Step-induced electronic resonance at vicinal Si(001)
observed by spectroscopic SHG and RASSHG and RAS
!on-invasive in-situ sensors are needed
� investigation of step-enhanced
chemical reactions
� atomic wires suitable for
transport
� “lithography” by self
assembly of nanostructures
� …
MotivationMotivation
SHG/RAS need to be applied together
Himpsel, F. J et al., Solid State Communications
117(3): 149-157 (2001).
C. Tegenkamp, Journal of Physics-Condensed
Matter 21 (2009).
J. Viernow et al., Appl. Phys. Lett. 72, 948 (1998);
OSI VIII 2009 2/11
1 2 3 4 5
-2
0
2
∆r/r [10-3]
photon energy [eV]
RAS of vicinal Si(001) surface show step induced features
S
Schmidt, W. G., F. Bechstedt, et al. PRB 63(4) 045322 (2001)
can we use SHG to see this step induced resonance and
would it provide additional information?
RAS spectra of clean and H2
adsorbed Si(001):6
Calculated optical anisotropy and step induced features
Jaloviar, S. G., J. L. Lin, et al. (1999). PRL 82(4): 791-794.
S
OSI VIII 2009 3/11
Combined SHG/RAS probe of stepped Si(001) surfaces in
UHV environment
monochromator
+ PMT
QMSsample
gas inlet valve
PEM
Xenon lamp(1.5 to 5 eV)
tun
ab
le
fs-s
ou
rce
B.S.
quartz
PM
T
BG39
analyzer
strain free
window
analyzer
polarizer
SHG ports
� Coherent MIRA
Ti:Sapphire oscillator
710-900nm
� NOPA
520nm-780nm
H2 sticking coefficient
PMT
+ H2
M. Dürr et al., Phys. Rev B. 63, 121315 (2001)
OSI VIII 2009 4/11
RAS sensitive to adsorbates but does not distinguish
terrace from step adsorption sites
� large number of dangling bonds
contamination in UHVChung, C. H., H. W. Yeom, et al. (2006). "Oxidation of Step Edges on
Si(001)-c(4 x 2)." Physical Review Letters 97(3): 036103.
Nishizawa, M., T. Yasuda, et al. (2002). "Origin of type-C defects on
the Si(100)-(2x1) surface." Physical Review B 65(16): 161302.
see also N. Witkowski et al. / Surface
Science 600 (2006) 5142–5149
24min
� surface very susceptible to contamination
� RAS is sensitive to adsorbates on
Si(001) (2x1)
� origin of features on modified surface
not well understood
250min 1200min
2 3 4 5-3
-2
-1
0
1
2 clean
after 3h in UHV
after 6h in UHV
after peforming AES
∆r/r [10-3]
photon energy
E1 E
0' E
2
� step d.b. highly reactivee.g. oxidation proceeds from step edges
OSI VIII 2009 5/11
Fourier analysis of RA-SHG clearly distinguishes step
edge and terrace adsorption sites
0 60 120 180 240 300 360
0.00
0.06
0.12
clean
1200L
1800L
2400L
SH intensity [arb. units]
azimuthal angle [degree]
0 5 10 15 20 25
-0.04
0.00
0.04
0.08
a2
a3
Fourier coefficients [arb. units]
time [hours]
0.1
0.2
0.3
0.4
a1
0 1000 2000-0.1
0.0
0.1
a2
a3
Fourier coefficients
hydrogen exposure [L]
0 1000 2000
-0.2
0.0
0.2
a1
60 180 3000.0
0.1
0.2
0.3
clean
after 3h
SH [arb. units]
azimuthal angle [degree]
0.00
0.05
0.10
0.15
after 6h
after AES
contamination H2 adsorption at step edges
OSI VIII 2009 6/11
terrace
terrace
step
SH dependence on azimuthal sample rotation Fourier analysis
� 16 λ (720-880nm)
� strong variations with azimuthal angle
� can be broken down in Fourier series
terrace
terrace
step
clean Si(001):6˚ (2x1)
after exposure to H2
Fourier analysis of SHG data yields spectra of Fourier
coefficients a0 to a4 within the available wavelength range
terrace
terrace
step
OSI VIII 2009 7/11
� ab-initio calculations for RAS have shown that
feature at 3eV is step induced*
� resembles line shape and H2 dependence of a1and a3
RA spectrum resembles line shape and H2 dependence of
step induced 1st and 3rd order Fourier coefficients
*W. G. Schmidt, F. Bechstedt and J. Bernholc, Phys. Rev. B 63, (2001).
0.1
0.3
SH [arb. units]
a1
2.8 3.3
0.0
0.1
SH photon energy [eV]
a3
1 2 3 4 5
-2
0
2
∆r/r [10-3]
photon energy [eV]
may point to common microscopic
origin of RAS/SHG
OSI VIII 2009 8/11
� ab initio DFT calculation provides
input structure for SBHM analysis� SBHM fits to RA-SHG
data at selected wavelength
Simplified Bond Hyperpolarizability Model (SBHM) using ab-
initio structure calculation fits SHG data with high fidelity
*G. D. Powell and D. E. Aspnes et al., J. Vac. Sci. Technol. B20(4), 1699 (2002)
SBHM* enables qualitative bond level interpretation of SHG/RAS
� allows empirical fits with varying
bond hyperpolarizabilities β of
select classes of surface bonds
ResultsResults
SBHM fits data with high fidelity
ββββd.bstep
ββββrebondstep
ββββbackstep
ββββd.b.terrace
ββββdimerterrace
ββββback.terrace
H2 clean
& reproduces measured RAS**R. C. Miller. Phys. Rev. Lett. 5, 17 (1964)
-0 90 180 270 360
0.00
0.02
0.04
840nm
0.0
0.1
0.2
730nm 800nm
840nm
OSI VIII 2009 9/11
step edge bonds terrace bonds
DB step (2x1) terraces
Hyperpolarizability spectra of individual surface bonds
reveal charge transfer at identifiable molecular sites
0.1
0.6back
Re[βstep]
0
1
Re[βstep]
rebond
-1
-3
-5
d.b.
Re[βstep]
0.1
0.6
1.1
d.b.Re[β
terrace]
2.8 3.0 3.2 3.4
-0.4
0.1
0.6
Im[βstep]
back
-0.1
0.1
dimerRe[β
terrace]
0.1
0.6
dimerIm[β
terrace]
0.0
0.5
Im[βstep ]
rebond
0
1
Re[βstep]
rebond
-1
-3
-5
d.b.
Re[βstep]
OSI VIII 2009 10/11
Conclusion
� showed that SHG is sensitive to adsorbates on Si(001) (2x1):6° and
allows to distinguish specific adsorption sites
� acquired spectroscopic SHG and RAS data together on same clean
reconstructed vicinal Si(001):6˚ surfaces before and after dissociative
adsorption of H2 at DB step edges
Results reveal specific underlying connections between RAS and
SHG and allow qualitative bond level interpretation
� reconstructed RAS line shape
� charge-rich step edge dangling bond dominant contribution to SH signal
� able to “see” charge redistribute from step edge dangling bonds into back
bonds
� Fourier analysis revealed step-induced 3rd order Fourier component
shows step d.b. induced resonance, resembling RAS line shape
� SBHM:
OSI VIII 2009 11/11
NSF DMR-0706227
Robert Welch
Foundation F-1038
Funding
Research Group
Junwei Wei, Jimmy
Price, Ming Lei
Future directions
� Extend RAS/SHG study to other adsorbates, i.e. atomic hydrogen
� pump/probe
� Obtain ab-initio calculations of the nonlinear response