Recipe Management Experiences

Recipe Management Experiences

Lance Rist / ISMI

Austin, Texas

Advanced Materials Research Center, AMRC, International SEMATECH Manufacturing Initiative, and ISMI are servicemarks of SEMATECH, Inc. SEMATECH, the SEMATECH logo, Advanced Technology Development Facility, ATDF, and the ATDF logo are registered servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners.

Improved Recipe ManagementImproved Recipe ManagementRaP capability represents a fundamental improvement

in factory automation

• ISMI has driven the development of this new recipe management capability

ISMI Member Company inputOpen input through standards process

• RaP Standard - SEMI E139Recipe and Parameter Management has been approved

• Successful PrototypingRaP “Accelerated Learning” prototype completedRoth & Rau commercial prototype completed

• Commercial Implementations Becoming AvailableSemitool Raider Platform demonstrated

• CollectCollecting data has long been a priority in Automation StandardsThe “EDA” effort has improved this capability significantly

• AnalyzeAnalysis and decision making takes place off-tool in this contextThis is an area where device makers seek competitive advantage

• ActThe “300mm” standards made remote equipment operation feasibleRecipe management is the missing link

This neglected area represents opportunity

Controlling The EquipmentControlling The Equipment

The Problems With RecipesThe Problems With Recipes• Recipes on equipment can change without notice

We can’t trust the recipes on the equipmentWe must download recipes over and over again

• Inadequate parameterization requires us to:Manage many nearly identical recipesNeglect some process control for lack of parameters“Hack” recipes to make changes (then download – again)

Recipes in-use are sometimes overwritten

• Multi-part recipes are not adequately supportedThey are necessary for multi-chamber equipmentWe cannot verify correct components will be used

• We can’t be sure exactly what happened during a jobTraceability is weak or non-existentMulti-part recipes and parameter values increase issue

Factory Goals & OpportunitiesFactory Goals & Opportunities$ Recipe Content Trusted

Guarantee that the recipe on the equipment is exactly the one the factory approved/downloaded/selectedDownload only once

$ Process Control EnhancedUser defines which settings become job parameters and when during processing they will be used

$ Number of Recipes ReducedIf they are parameterized, fewer recipes are needed

$ Multi-Part Recipes Explicitly Supported Enabling a practical method for reuse of recipe componentsEnsuring all needed recipe components are available

$ Traceability of Recipes EnabledUnique identifiers assigned to recipe components (and parameter values) are reportable via events

With RaP, equipment can support new, sophisticated host-side recipe management systems

Improved ConfidenceImproved ConfidenceThe right recipe will be used at the right time and

produce the expected results• The recipe identity is assured

Secured by the uuid* and checksum• The recipe is valid

Supported by a detailed verification process• The correct subcomponents are used

Multi-part recipe resolution supported

*universally unique identifier (ISO/IEC standard)

Parameterization OpportunitiesParameterization OpportunitiesThere are many sources for parameter values

• Five examples (there could be more)Feedback control

Run-to-run, wafer-to-wafer, downstream data

Feed forward controlProduct history, upstream data

Equipment matching supportRecipes shared between like equipment

Recipe mergingFor similar processes

Runtime optionsDiscrete choices

– For example: select which chamber to use

• Make a record of what happenedWhich job was run on what material?

Which wafer at what step?What PDE was used?What parameter values were used?

– Note that the supplied values may change wafer-to-wafer and step-by-step

• Traceability enables run-time flexibilityMore sophisticated processing requires this flexibility

Multi-part recipes, complex flowsRun-to-run or wafer-to-wafer control…

TraceabilityTraceability

RaP Standards TimelineRaP Standards Timeline• 2004

E139 RaP Standard ApprovedE139.1 Recipe Transfer Form Approved

• 2005RaP “Accelerated Learning” PrototypeE139 Amended Based Upon Learnings

• 2006E139.2 SECS Protocol Mapping ApprovedRaP Commercial PrototypeInvitation to Demonstrate RaP

Two production equipment have demonstrated RaP capabilities

Commercial RaP Prototype

Phase 1

Commercial RaP Prototype

Phase 1

e-Manufacturing

IntroductionIntroduction• Recipe and Parameter Management (RaP)

This segment discusses the results of an ISMI project to demonstrate RaP on a commercial tool in a factory environment

Our results represent the cooperation of five companies to pioneer this new approach to recipe management

AIS Automation-Dresden, Infineon, Roth & Rau, Siemens, and ISMI

• Fundamental DifferenceRaP capability represents a fundamental difference in factory automation

This project demonstrates the commercial viability of this new capability

RaP Commercial PrototypeRaP Commercial PrototypeTask: Demonstrate RaP in a factory environment

• ISMI worked with AIS-Dresden to implement RaP on a commercial tool

Roth & Rau IonScan 800 was the selected toolThis is a 200 mm wafer etch toolConfigurations can include one or two process chambers

Siemens provided tools and consulting support

• Infineon contributed the Recipe Management System Goal was to integrate this RaP-enabled tool with the Infineon Recipe Management System

Seeking the recipe integrity benefit as first stepRecipe parameterization was left for a later step

Project ResultsProject Results• This project spanned ~3 months

Development time: 4.5-5 person-months• The result was demonstrated

In an Infineon factory On an installed IonScan 800Using the Infineon Recipe Management System

This prototype implementation was successful!

Approach – Development StepsApproach – Development Steps• RaP communication functions

Develop RaP communication objectIntegrate the RaP communication object into ToolLink

• RaP-compliant recipe managementAdapt the existing recipe editors and recipes

• Adaptation of existing recipe execution Integrate RaP parameters into process execution

• Integration of an off-tool recipe managementCell Controller representing the FICS

FICS ➙ Factory Information & Control SystemInfineon Recipe Management System

Prototype modification to support RaP

• Equipment ↔ FactoryThe existing SECS/GEM I/Fprovided base communications

• New Messages For RaPAdding new RaP Stream 19 messages was easily done

• Used Existing “Data Set Transfer”Stream 13 supports Data Set Transfer for large files

• Cell Controller ↔ Recipe ManagerStandard Infineon protocol for interfaceInfineon created a wrapper for existing Recipe Manager

Masked differences in RaP recipesNo real issues in this integration

RaP CommunicationRaP Communication

EQUIPMENTRECIPE EDITOR

FICS

Cell Controller

Recipe Manager

Data BaseAPC

settings history

RaP Y

Z

Key RaP ConceptsKey RaP Concepts• RaP adds to the recipe

Human and machine readable recipe headerChecksum protection for recipe contentUser selected parameters

• Transfer container optimizes recipe transfer

Provides for .zip compression

PDE (= Recipe Component)PDEheader

<<Documentation Part>>• Name• UID• GroupName• GID• Description• …

PDEbody<<Executable Part>>

Content is not specifiedand may be kept private

• Target Equipment• Antecedents• PDE References• External Parameters• User Info

PDEPDEPDE PDEbodyPDEbodyPDEbody

Manifestuid PDE PDEbody Locationxxx abc.xml abc.dat \productionyyy mno.xml <none> \maintenance…

VariableParameterso PDEparam1o PDEparam2

o etc…

PDE

PDE PDE

PDE PDE PDE

PDE PDE

Process Job

Master PDERCPSPEC/PPID

ProcessModule A

ProcessModule B

• User selects Variable Parameters during recipe creation

Adaptation Of Tool RecipesAdaptation Of Tool Recipes• Use the existing recipe

The recipe will be used as the recipe bodyNo change necessary or desired for execution

• Make the recipe format compliant to RaPRaP defines only additional data to describe the recipeUID will be added to each recipeVersion number added

– Merged with name to aid management

New recipes to include parameters and bounds

PDE

Body

+ UID, + Bounds…

ExistingRecipe

Header

ExistingRecipe

Adaptation Of Tool Recipe MgmtAdaptation Of Tool Recipe Mgmt• Necessary changes for tool recipe management

Global unique identifier for identification Database had to be changed

PDE Header Data, Additional body parameter

• Change the existing editorSome input fields must be added

For the PDE header dataEach time the PDE is changed a new UID will be created and the recipe version number will be increased (new PDE)Should all parameters be externally changeable?

Not definitely: Review carefully – this depends on the toolHowever, be open minded – parameter control is expanding rapidly

• Never change a running system?The recipe execution was not changedNecessary changes were done in execution preparationBe careful to guarantee the functionality of the tool

• Integrate the PDE parameter functionalityCopy the recipe into a special execution environmentMerging the parameter into the recipe copy

Adaptation Of Recipe ExecutionAdaptation Of Recipe Execution

HOST

EQUIPMENTSelection Logic

PPSelect: PDE Map, PDE Parameter

RecipeStorage

ExecutionStorage

Merge

Recipe Executor

1.

2.

3.4.

5.

6.

Cell Controller

Commercial RaP Prototype

Phase 2XML/SOAP Interface

Demonstration

Commercial RaP Prototype

Phase 2XML/SOAP Interface

Demonstration

e-Manufacturing

Phase 2 AdditionsPhase 2 Additions• XML Messaging

Builds on EDA standard approachProvides working example as basis for SEMI standard

Ballot for XML mapping anticipated later this year

• Off-tool Recipe EditorStandard interface allows editor to exist anywhere on the factory network

Can connect to the tool or to the factory RMSInterface support first step towards universal recipe editor

• Completed Recipe Integrity ImplementationImplemented checksum and canonicalization process

The XML AdvantageThe XML Advantage• Equipment control

over SECS continuesNeeds basic RaP messaging

• Secure transport addedSame technology as EDARecipe content protected

• Multiple clients allowedEquipment Recipe Store management could migrate to a separate client

Move from “job setup” to “look-ahead”

Off-tool editors are clients

EQUIPMENT RECIPE EDITOR

FICS

StationController

Recipe Manager

Data BaseAPC

settings history

SECS XML XML

XML

RaP Prototype DemonstrationAvailable Upon Request

RaP Prototype DemonstrationAvailable Upon Request

e-Manufacturing

Prototype ConclusionsPrototype ConclusionsWhat did we learn?• RaP can be implemented on a real tool

Impact on the tool is manageable• The value-to-effort ratio to add RaP to a tool is high

Less than 5 person-months development effort for SECS-IICan be even less (~2 person-months) with use of a third-party product

• A RaP-enabled tool can be integrated with an existing recipe management system

Realizing some factory-side RaP benefits can be done quicklyAdditional benefits can be phased-in

• XML messaging offers advantagesEquipment can handle job-oriented inquiries via SECS while transferring recipes over separate XML connectionOff-tool recipe editors can seamlessly connect to any appropriate RaP-enabled recipe store

Factory, equipment, or even other editors

Additional RaP-enabled EquipmentAdditional RaP-enabled Equipment• ISMI has created a supplier opportunity

See our “Invitation to Demonstrate RaP”http://ismi.sematech.org/emanufacturing/prototype.htm

Reference implementation expected in 2007This will enhance our ability to assist/assess suppliers

• Semitool demonstrated RaP-enabled equipment to ISMIOctober 2006

• Semitool Raider PlatformUsed for their single-wafer clean and electrochemical deposition (ECD) tools

• Commercial AvailabilityExpected early 2007Batch tools ~mid-2007

RaP Implementation AssistanceRaP Implementation Assistance• ISMI has published a new Guidline document

To assist suppliers’ RaP implementationsRequirements

Emphasize key requirementsClarifications (might ➔ shall)Additional Requirements

Documents Operational ScenariosCommon tasks of Device MakersError handling considerations

Provides Implementation AdviceFrom implementation experiences

Download from:http://ismi.sematech.org/docubase/abstracts/4801aeng.htm

• Other questions: Industry ForumsRaP Forum now available

See Equipment Integration and Automation Standards Discussionhttp://ismi.sematech.org/emanufacturing/forums.htm

Device Maker ReadinessDevice Maker Readiness• Factories are highly “risk averse”

No one wants to be first to use new technology“Prove it works, then we will consider it”

• Device makers must sell technology internallyCompany strategists say “This will bring us value”

Supports creation of new capability like RaP

Factories say “Prove it in the other factory”

• Move to RaP must be supportedTransition planRaP-enabled factory systemsWorking examples – proof it works

Next StepsNext Steps• 2007 focus for RaP is device maker readiness

Expect first pilot factory installationsShow how factory can leverage equipment support for RaP

Common requirementsFactory recipe management systems (RMS)

Transition strategies

• Continue to encourage supplier implementationInvite more suppliers to demonstrate RaP

Leverage 3rd-party software suppliers

Create reference implementation

RaP is Ready The Industry Is ReadyRaP is Ready The Industry Is Ready• At SEMICON Europa 2005, STMicroelectronics:

“RaP is a key component to the realization of a Centralized Recipe Management solution”“New Paradigm: Managing all human configurable data taking part in the process repetition"

• At SEMICON West 2005, AMD:“We have gone to great lengths to work around the limitations of GEM-style recipe management”“We are all about process control, and RaP will enable more sophistication”“We are requesting RaP now”

• At AEC/APC Europe 2006, Infineon:“We intend to deploy RaP into factory operation late 2006”

• At ISMI Symposium 2006, 300 Prime/450 mmPresentation cites RaP as low risk “Small Evolution”solution for existing fabs

RaP is Recognized as Providing Productivity Gains

Final ConclusionsFinal Conclusions• RaP is rapidly maturing as a factory capability

Prototyping shows readiness for implementationAt least one Device Maker is ready to deploy RaP3rd party support for equipment implementation is available

• In the next year, the growing interest in a maturing RaP is expected to yield more and more implementations

ISMI will continue to assist RaP implementersFor example, see our “Invitation to Demonstrate RaP”

– http://ismi.sematech.org/emanufacturing/prototype.htmIn 2007, we transition to assist host-side implementations

ISMI publishes guidance to assist implementersRaP Supplier Implementation Guidelines available

– http://ismi.sematech.org/industry/emanufacturing.htm2007 work will yield more shared learnings and collective direction

Now is the time to place RaP on your roadmap!

Supplemental MaterialsSupplemental Materials

e-Manufacturing

All Clipart Copyright © 1998 Corel Corporation and its licensors. All rights reserved.The AIS symbol is the trademark of AIS Automation Dresden; the Siemens symbol is the trademark of Siemens AG; the Infineon symbol is the trademark of Infineon Technologies AG; the Roth & Rau symbol is the trademark of Roth & Rau AG.

PrototypeAcknowledgements

PrototypeAcknowledgements

• AIS Automation DresdenPrime Contractor and Developer

Organized the CooperationVAC NT/32 Automation platform

• Infineon & QimondaFactory System / Recipe ManagerAccess to Factory for Integration

• SiemensToolLink Integration ProductConsulting & Support

• Roth & RauAccess to Ion Scan Control SoftwareAdvice and Cooperation

Thanks to the many contributors:

RaP Unique IdentifierRaP Unique Identifier• Unique identification for each recipe

Each recipe is tagged with a unique identifier (uid)Based on ISO standard defining “uuid”The uuid value is guaranteed unique – regardless of source

Different recipes have a different uidname not a unique identifier – user definedRaP does not define a “Version” – left to Recipe ManagerA checksum over recipe contents ensures integrityCorrect recipe can be used with certainty

Process history can be expressed in terms of uid’s

44BBA855-CC51-11CF-AAFA-00AA00B6015C

Recipe

Transfer ContainerTransfer Container

• TransferContainer bundles PDEs for transfer

Optimizes the transfer process

Supports compression

Can be used to group related PDEs

TransferContainer

PDEPDEPDEPDEbodyPDEbodyPDEbody

Manifestuid PDE PDEbody Locationxxx abc.xml abc.dat \productionyyy mno.xml <none> \maintenance…

Transition To RaPTransition To RaP• Existing recipes can be preserved (in many cases)

Original recipe can be maintained as a separate (nearly unchanged) “opaque” entityPDE can act as a descriptive wrapper on the original recipeExecution on equipment may not need to changeEquipment recipe management must adjust to new structures

• Communication services very similar to current onesPull or push recipes, directory, verify, delete (add get-header)

• Within the context of E40:Define the name to be used in the RCPSPEC field of Stream 16 SECS II messagesDefine the name to be used in the RCPPARNM field of Stream 16 SECS II messages

Prototype Integration ChallengesPrototype Integration Challenges• Interaction between the new RaP Stream 19 and the

old Stream 13 (Data Set Transfer)Existing Stream 13 object was dedicated to a different useImplemented on tool and cell controller

• Adaptation of existing equipment recipe managementWrapping of existing recipes

• PDE Parameters need input fields to define boundariesExtension of recipe editor for PDE header dataAdditional recipe body data

• Add PDE Parameters without changing executionMust resolve parameter values before the recipe is executed

• Infineon Recipe System required an adapterMust mask recipe header data from the main system