Recent Development of Flexible Display in Taiwano.cena.com.cn/meetting/2015fpd/file/14-zsw.pdf · Recent Development of Flexible Display in Taiwan 1 Shang-wen Chang ... (5”/Pentile/Samsung)

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Recent Development of Flexible Display

in Taiwan

1

Shang-wen Chang

Oct. 14, 2015

TDUA © All rights reserved. Unauthorized use prohibited.

Outline

1) Opportunities and Recent Development in Flexible AMOLED

2) Technology Challenges with Flexible Displays

3) Foldable Display Development in ITRI

4) Conclusions

2


Anytime and Anywhere with Display

3

3

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http://www.google.com.tw/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&uact=8&docid=XZ9uqsH79ukFJM&tbnid=dq5uUBWQxLHI3M:&ved=0CAUQjRw&url=http://blog.sina.com.tw/ptone044/&ei=avOBU_aPEtbs8AWM5YD4Dw&psig=AFQjCNH3kFmwFkBBk8LVoV1qZM-jxJS82Q&ust=1401111652753529


資料來源：Samsung Display(2013/05)

Opportunity for Mobile Applications

Foldable AMOLED Rollable AMOLED

Tablet

Smart Phone

4

4

http://www.google.com.tw/imgres?imgurl=http://notebooks.com/wp-content/uploads/2010/01/ipad61.jpg&imgrefurl=http://notebooks.com/2010/01/29/apple-ipad-information-overview/&usg=__st1EZCExqXn1ve5iK3lcQ8KdudA=&h=410&w=415&sz=36&hl=zh-TW&start=56&zoom=1&tbnid=HH9acPWAnhwskM:&tbnh=123&tbnw=125&ei=UqRZT5rbAZGZmQWmoIXwAQ&prev=/search?q=iPad&start=42&hl=zh-TW&sa=N&gbv=2&rlz=1R2ADFA_zh-TWTW427&tbm=isch&prmd=ivns&itbs=1


Curved AMOLED

Samsung Galaxy Gear fit

(2014)

WearableDisplay

Galaxy Gear S (2014/9)

G Watch R (P-OLED) (2014/9)

Apple Watch (2015/3)

Samsung SPH-WP10

1999

Seiko Pulsar

1978-1980

Casio G-Shock STB-1000

2014

Opportunity for Wearable Applications

5

5

http://www.google.com.tw/url?url=http://pdadb.net/index.php?m%3Dspecs%26id%3D6693&rct=j&frm=1&q=&esrc=s&sa=U&ei=ws4eVNHOCsSj8AXg9YJQ&ved=0CCsQ9QEwCw&sig2=W3_cCWvNu_OkrxS1Ne2NWg&usg=AFQjCNF9gQoIvrA6ISJtWaeb7ewTTY6fcQ

http://www.google.com.tw/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&uact=8&docid=0Yg3OrHVu8DtpM&tbnid=LNoUbLqCxmdFUM:&ved=0CAUQjRw&url=http://akihabaranews.com/2013/09/18/article-en/seiko-solar-atomic-watch-new-skin-care-comfotex-titanium-technology-2105511358&ei=ZWh5U4DSNsbQkgXMhoDICw&psig=AFQjCNHczMTLLXA8fZzrsF3Cy2u7w87j-A&ust=1400551899309263

http://www.google.com.tw/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&uact=8&docid=Zgk-HVtAZ89lmM&tbnid=70v7bxMPCYYPrM:&ved=0CAUQjRw&url=http://smartwatches.org/timeline/&ei=H7N5U6L_CcWokgWPqIG4Aw&psig=AFQjCNFXv_GbI7IP_K8fBwJcUyQetYHbEA&ust=1400571002579563


Recent Development of Flexible AMOLED

Curve

Samsung

LG

Samsung

Rollable

LG

Foldable

6


AMLCD (Liquid Crystal Display)

AMEPD (Electrophoretic Display)

AMOLED (Organic Light Emitting Display)

ITRI, 2009 ITRI, 2009 ITRI, 2007

7

Displays on Flexible Substrate

7

../../sony1/Local Settings/790224/Local Settings/Users/970116/Desktop/3_7in AMLCD.MPG

http://www.google.com.tw/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&uact=8&docid=JCmMRd0o8oSGwM&tbnid=D78qfiaLFIIWyM:&ved=0CAUQjRw&url=http://richfree.pixnet.net/album/photo/142918051&ei=dRuAU_eYEIP58QWUioCQCw&psig=AFQjCNHKQCxdyzEYs8P0KfjDv_nllY2AhA&ust=1400990926233766

http://www.google.com.tw/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&uact=8&docid=IHl4FcVT5457sM&tbnid=iQuORI6FSeXBLM:&ved=0CAUQjRw&url=http://konedreamhouse.blogspot.com/2013/06/smart-goal-setting.html&ei=NRyAU4k30fXxBdDSgvgK&psig=AFQjCNG_23FzKxAgZXgQc6GleQVXKAXi0Q&ust=1400991132184869


Challenges for Flexible AMOLED

Touch Panel

Plastic Substrate with Gas Barrier


OLED

R TFT

• Substrate material

• Substrate handling

• Barrier for gas and water

• TFT process on plastic

• TFT’s performance on plastic

• Flexibility of TFT

• Barrier for gas and water

• Flexibility of OLED

• Thinner Polarizer

• Durability of touch panel

• Flexibility of touch panel

• On-cell touch panel

8


Substrate Handling Technology

Technology Ultra thin glass

attached on carrier Plastic substrate

laminated on carrier Plastic substrate coated on carrier

Method

Production NA NA Yes

Temp. for TFT ~250oC ~250℃ ~450℃

Flexibility Low High High

PI UTG Plastic

Carrier Carrier Carrier


Development Topics - Plastic Substrate Coated on Carrier

• Temp. stability: ~300℃

• Transparency : > 90%

• b* : < 1

• Flexibility : > 100k times @ r < 3mm

• WVTR : < 5x10-6g/cm2-day

• Transparency : > 95%

• Temp. stability : > 500℃

• De-bonding force : < 3g/cm

• CTE : < 10 ppm /℃ @ (250~450℃)

• Water absorption : < 0.1%

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http://www.google.com.tw/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&uact=8&docid=LEBJlbvij65QmM&tbnid=x-I2P_k9Uf5YHM:&ved=0CAUQjRw&url=http://dere.com.tw/page/result.php&ei=47WAU6_5M4iF8gXql4LAAw&psig=AFQjCNFaQYbSBWEYGVF2UQ3kXNzpcv7zoQ&ust=1401030444253934

http://www.google.com.tw/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&uact=8&docid=dT8P_OwHd87gCM&tbnid=uuFXMNOicO9PnM:&ved=0CAUQjRw&url=http://edm.itri.org.tw/enews/epaper/10007/e02.htm&ei=K7uAU_-NBcv28QWjvIDADQ&psig=AFQjCNHQpjZ90-_nEt5rnWXEomehCMo19A&ust=1401031722952691


De-bonding of AMOLED on ITRI’s FlexUPTM

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Light on during de-bonding process

Light on before de-bonding Light on after de-bonding


Flexible TFT Technology

Technology a-IGZO CAAC-IGZO LTPS

Production Yes

(for glass AMOLED TV & S/M size AMLCD)

Yes (for glass S/M size

AMLCD)

Yes (for glass & plastic S/M

size AMOLED)

Process Temp.(oC) 200 ~ 350 <500 400 ~ 450

Mobility (cm2/Vs) 5 ~ 25 5 ~ 10 > 50

Electrical Stability Acceptable Good Excellent

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• Yield of ELA & Ion Implantation

• Mobility > 100cm2/Vs

• Device uniformity : Vth 3σ < 0.1V

Development Topics - Flexible LTPS TFT

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• Maintain device property after inward and outward bending

• Vth shift < 0.5V after bending

• Bending radius < 3mm

• Robust circuit design for bending

• Compensation for degradation from mechanical stress

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http://www.google.com.tw/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&uact=8&docid=xuktg8_HBKchCM&tbnid=lUFkorHBx2SGRM:&ved=0CAUQjRw&url=http://webarchive.ncl.edu.tw/archive/disk22/16/35/86/61/64/201104123036/20130119/web/itri.org.tw/chi/eol/p4741b.html?RootNodeId%3D070%26NavRootNodeId%3D0731%26NodeId%3D073141%26ArticleNBR%3D117&ei=VraAU5LIJJXn8AWDgYGYDw&psig=AFQjCNEKWwooW0e8zAs3nU26DTMEACFewQ&ust=1401030607094956

http://www.google.com.tw/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&uact=8&docid=PpXq6oQKTrcfwM&tbnid=keXslEHi9WvI-M:&ved=0CAUQjRw&url=http://www.display-all.com/news/news_detail.php?language_page%3Dtaiwan%26button%3Dnews%26adtype%3Dnews_ptech%26cate%3Dtech%26serial%3D20251%26check_o%3D47433&ei=BLeAU63DFI26lQXC6ICoBw&psig=AFQjCNHt4U4TG4_J57K5xGOktBqVHN6IxA&ust=1401030783632734


LTPS-TFT on FlexUP

-10 -5 0 5 101E-13

1E-12

1E-11

1E-10

1E-9

1E-8

1E-7

1E-6

1E-5

W/L=6/12 um

Initial

100s

500s

1000s

5000s

NBTS of LTPS-TFT after folding test NBTS : Vg=-30V, Vd=0V, Temp.=70oC

Vth ~ -0.47V

-10 -5 0 5 101E-13

1E-12

1E-11

1E-10

1E-9

1E-8

1E-7

1E-6

1E-5Flexible LTPS-TFT

Before de-bonding

After de-bonding

After folding

Id-Vg before/after de-bonding and after folding

Folding Test : 100k times @ r=5mm


Technology WOLED + CF FMM RGB OLED

Structure

Production Yes (for glass AMOLED TV)

Yes (for glass and plastic S/M size AMOLED)

Resolution 40 ppi (55” TV/LG)

326 ppi (3.4” prototype/SEL)

441 ppi (5”/Pentile/Samsung)

NTSC (%)

(Prototype)

>100 (micro cavity by ITO)

>100 (micro cavity by HIL or HTL)

Flexible OLED Technology


OLED

R TFT


CF



OLED

R TFT

CPL

15


Technology Challenges - Flexible OLED

• Increase elongation

• Low out-gassing

Adhesive Flexible substrate

Flexible substrate

• Reduce edge delamination

• Moisture & gas blocking

Flexible substrate

Flexible substrate

H2O

O2

<1mm

• Low stress inorganic film

• Pin hole free

Pin hole

OLED OLED

• Thinner circular polarizer

• Coating type

~100µm

~20µm circular polarizer

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ITRI’s Thin-film Encapsulation

0 hrs 120 hrs 240 hrs

OLED with thin-film encapsulation only, in the condition of 60oC/90%R.H.

500 hrs

Substrate

OLED

H2O O2

H2O

O2

PDL PDL

Anode

Thin Film Encapsulation

Cathode

OLED Anode

PDL


Substrate

OLED

Substrate

17


Conventional Structure

0 hrs 700 hrs 120 hrs 240 hrs 500 hrs

Storage Condition : 60oC/90% R.H.

ITRI’s Structure

Substrate

OLED Adhesive

Flexible Barrier film

H2O

O2

H2O

O2

H2O

O2

H2O

O2

Substrate

OLED Adhesive

Flexible Barrier film

ITRI’s Edge Sealing for Flexible OLED

18 18


Flexible Touch Sensor Technology

Technology Sensor on PET

Sensor on transparent PI

Substrate PET roll PI coated on glass carrier

(carrier is re-usable)

Process by R2R facility by G/G & OGS facility

Production Yes On-going

Thickness (m) 40 ~ 125 3 ~ 15

Flexibility (with ITO) Normal Good

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Technology Challenges - Flexible Touch Panel

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• Ultra-thin flexible cover

• Integrate gas barrier

• Foldable >100k times @ r< 3mm

• Reduce thickness

• Transparency > 88%

• Yellow index b* < 0.5

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http://www.google.com.tw/url?sa=i&rct=j&q=&esrc=s&frm=1&source=images&cd=&cad=rja&uact=8&docid=wxXW5eYWTOu-DM&tbnid=otjG2Wn4wlfOrM:&ved=0CAUQjRw&url=http://spiderman186.pixnet.net/blog/category/2291432&ei=4LiAU5u0DdLr8AXvtYHgDg&psig=AFQjCNFGYJ2qW2Wg3neuGV-HIcS6LVDVzw&ust=1401031219027440

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ITRI’s Curve Out-cell AMOLED

21

Demonstrated in Touch Taiwan Exhibition 2014


FlexUPTM

TFE

R TFT

FlexUPTM

Gas Barrier

Gas Barrier

~60m

Touch Sensor

ITRI’s On-cell Touch Sensor on FlexUPTM

22 22


ITRI’s Inward Foldable On-cell Touch AMOLED (Folding @ 7.5mm)

23 23



ITRI’s Outward Foldable AMOLED (Folding @ r=7.5mm)

24 24



Size : 7.1” (16:9) Resolution : FHD (310 ppi) Multi-Touch : 5 points Reliability Test : 85oC/85%RH for 500hrs

25

ITRI’s Foldable AMOLED with on-cell touch panel (Folding 100k times @ r= 5mm)


25



26

Size : 7.1” ; Resolution: 310 ppi; Bending Radius: 5 mm

ITRI’s 7.1” 310ppi Z-Fold Foldable AMOLED

26


Rollable (r=5mm) AMOLED

ITRI’s 7.1” 310ppi Rollable AMOLED

Demonstrated in Touch Taiwan Exhibition 2015 27 27


Pilot Lab. View

Gen. 2.5 Touch AMOLED Pilot Lab.

Substrate Size : 370×470 mm2

Cleaning Room : 3,124 m2 (Class 100, 1000)

Facility :

FlexUPTM : slot die coater and oven

a-Si / MOx / LTPS-TFT : thin-film deposition,

photolithography and etcher

BE / TE / Transparent OLED : evaporator, thin-film

encapsulation and encapsulation

Touch Sensor : spin coater, thin-film deposition and

screen printer

AMOLED & Touch Sensor Facility of DTC/ITRI

28 28


DTC/ITRI’s FlexUPTM Facility

Baking Oven of G2.5 Slot Die Coater of G2.5 29

Glass Carrier

De-bonding Layer

Slot Die Coater

AMOLED

PI

29


Processes for a-Si, MOx, LTPS-TFT and Touch Sensor

DTC/ITRI’s TFT Facility of G2.5 Size

30 30


DTC/ITRI’s OLED Facility

Flexible Encapsulation

VAS

L/UL Thermal

cure

UV Cure

Dam & Fill

Film

Laminator

De-bubble

OLED Deposition

Cathode

Core 2

Mask

stock

Loading

Core 1

O2 Plasma

G Linear Source

B Linear Source

Relay

R Linear Source


Relay

CVD

Core 3

31 31


Items

Substrate G2.5 (370mm 470mm)

OLED Structure

Top Emission Bottom Emission Transparent

Encapsulation reliability @ 60oC / 90% R.H.

~ 500 hrs

Resolution (ppi) WOLED+CF > 400 FMM RGB: 300~ 400

OLED Lifetime (hrs) 10,000

Capacity (pcs G2.5/day)

~ 20

DTC/ITRI’s OLED Capability of G2.5 Size

32 32


Conclusions

3) ITRI’s Interest in Commercialization:

ITRI’s role is to develop the fundamental technologies and, subsequently,

transfer the capability to the industries. Collaboration with experts of various

fields will be essential to accelerate the technology commercialization.

33

2) R&D for Technology Issues:

To realize bendable, foldable, rollable and large size flexible AMOLED, there are

many technology challenges yet to be solved, including material, equipment,

process integration, and structural simplification.

1) Opportunity for Display Market:

Flexible AMOLED will create new form factors, and added value for smart

handheld products. Wearable device, by integrating bendable AMOLED, will

become the next main stream portable .

33


Touch Taiwan 2016 Organizers：TDUA(Taiwan Display Union Association), Chan Chao Int'l Co.

Show date : Aug. 24–26 (Wed.–Fri.), 2016

Venue : 1st Floor, Nangang Exhibition Hall, Taipei World Trade Center

Organizers：TDUA(Taiwan Display Union Association), Chan Chao Int'l Co.

Show date : Aug. 24–26 (Wed.–Fri.), 2016

Venue : 4th Floor, Nangang Exhibition Hall, Taipei World Trade Center

CORETECH 2016

Organizers：TDUA(Taiwan Display Union Association), Nikkei BP

Conference date : Aug. 24–25 (Wed.–Thur.), 2016

Venue : 4th Floor, Nangang Exhibition Hall, Taipei World Trade Center

& FPD International Taiwan 2016

34


Welcome to Touch Taiwan 2016

35

Documents

Recent Development of Flexible Display in Taiwano.cena.com.cn/meetting/2015fpd/file/14-zsw.pdf · Recent Development of Flexible Display in Taiwan 1 Shang-wen Chang ... (5”/Pentile/Samsung)