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HiLASE CENTRE LASER SYSTEMS & TECHNOLOGIES Dr. Tomáš Mocek Head of Centre

Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

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Page 1: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

HiLASE CENTRELASER SYSTEMS & TECHNOLOGIES

Dr. Tomáš MocekHead of Centre

Page 2: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

HiLASE at a Glance▪ Laser Technology R&D Infrastructure

▪ Up & Running since 2016

▪ Branch of the Institute of Physics

▪ DPSSLs with breakthrough parameters

▪ Applications of DPSSL in hi-tech industry

▪ Project of National Interest

▪ 84 FTE / 95 heads + 30 part-timers

▪ FY2017 budget: CZK 110M (USD 5M)

▪ 11% (institutional)

▪ 89% (projects & contracts)

Page 3: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Laser Facilities (1st floor)

Page 4: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Experimental Halls (2nd floor)

Page 5: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

World-leading Performance

Page 6: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

First-ever 1-kW, ns Superlaser Bivoj

Page 7: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Breaking the 1-kW barrier

Mason et al, Optica 4, 438 (2017)

World’s first kW average

power HE-DPSSL

”Scientists create ‘super laser’ which puts every other laser to shame”

Page 8: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Laser Shock Peening station

Page 9: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Laser Induced Damage Threshold station

Page 10: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

High power thin-disk laser platforms

1030 nm 2 μmConversion

Page 11: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

PERLA B-20

Laser Systems

for Research & Industrial Apps

GO Stable Pico

PERLA C-100

Thermal Modelling

R&D Services

Contract Research Commercial Service

LIDT

Products & Services

Laser Processing

Laser Shock Peening

Page 12: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

PERLA C-100

Specifications

Wavelength 1030 nm

Bandwidth 2 nm

Average power 100 W

Repetition rate 100 kHz

Pulse energy 1 mJ

Pulse width 2 ps

Power stability (RMS) < 0.5%

Energy stability (RMS) < 1%

Contrast of pulse train 500:1

Page 13: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

PERLA C-100: main features ▪ 100-W, 1-mJ picosecond laser▪ Excellent beam quality▪ Integrated pulse-picker: Variable repetition rate (100 kHz, 50 kHz and lower)

Pulse-on-demand mode▪ Integrated beam pointing stabilization▪ Good pulse contrast▪ Integrated CVBG pulse compressor

(or external grating compressor)▪ Control system with user-friendly GUI▪ External fiber front-end module▪ External modules for IR OPA

and harmonic generation

Page 14: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Extreme water repellency by PERLA laser

Page 15: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Conversion to VIS/DUV▪ Assets of PERLA C fundamental beam for HG:

High average output (100-500 W) + Picosecond pulses (1-10 ps)

Application of harmonics:▪ Material processing: low heat loading → photo-ablation → cutting & microdrilling with

precise and high density structuring▪ Scientific applications (DUV): semiconductor lithography, photoemission from metal cathodes at

accelerator devices, promotion of surface phase transitions

Harmonicfrequency

Wavelength(nm)

Crystal Length(mm)

Type

2ω 515 LBO 10, 5 I, oo-e

3ω = 1ω + 2ω 343 LBO 5 II, oe-o

4ω = 2ω + 2ω 257.5BBO,

or CLBO36

I, oo-e

5ω = 1ω + 4ω 206 CLBO 4 I, oo-e

Page 16: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Generation of 2H, 4H, 5H

-10 -5 0 5 10

0.0

0.5

1.0In

ten

sity (

a.u

.)

Delay (ps)

2.3 ps

0 20 40 60 80 100 120 140 160 180 2000

10

20

30

40

50

60

70

80

90

100

92 kHz

pulse duration ~10 ps

First harmonic (W)

Se

co

nd

ha

rmo

nic

(W

)

LBO 8x8x10 mm

5-9-2018

0

5

10

15

20

25

30

35

40

45

Eff

icie

ncy (

%)

Imax~10 GW/cm2

0 10 20 30 40 50 60 70 80 90 1000

5

10

15

20

25

Second harmonic (W)

Fo

urt

h h

arm

on

ic (

W)

pulse duration ~10 ps

92 kHz

CLBO 6x6x6 mm (150 °C)

5-9-2018

0

5

10

15

20

25

30

35

40

Eff

icie

ncy (

%)

Fundamental beam

Page 17: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Tunable parametric mid-IR source • High power pump laser

– 100 W, ps pulse-width, 100 kHz, 1030 nm

• Seed generation for mid-IR

– OPG

• Amplification – Signal beam amplified

– Mid-IR idler beam generated

• Wavelength tunable 1.5 – 3.5 μm (oxide crystals)

Page 18: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

OPA in KTP crystals

Page 19: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Compact ps fiber oscillator

▪ GO = Good One ▪ Repetition rate 37 MHz (tunable)▪ Pulse energy 1 nJ ▪ Pulses duration <2 ps▪ Wavelength 1030 nm▪ Key feature Reliability▪ GO Stable Femto is under development

GO Stable Pico is a commercially availablepicosecond fiber oscillator that is used forspectroscopy and seeding high energy systems.

for Industrial applications

GO Stable Pico

Page 20: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Industrial Collaboration Network

Page 21: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

Academic Collaboration Network

Page 22: Prezentace aplikace PowerPoint - EUV Litho · Up & Running since 2016 Branch of the Institute of Physics DPSSLs with breakthrough parameters Applications of DPSSL in hi-tech industry

„Teaming for Success“

The DNA of HiLASE