Practical manufacturing of BDR/RE discs

Proprietary & Confidential

Practical manufacturing of BDR/RE discs

Overview of the technologies

Manufacturing challenges

&

Path forward

Dr. Giriraj Nyati

CTO-Blank Optical Media & Sr.VP - Corp.Technology

Moser Baer India Ltd

Media Tech, Macau, China

March 15, 2011


Moserbaer Group: Manufacturing:


Moserbaer Group:Histroy of Manufacturing


Moserbaer Group: With Japanese Partners


3/15/2011

World Class Quality Standards

Quality Policy

“We are committed to Excellence and total Customer satisfaction through team work, ceaseless innovation and timely delivery of Quality Products of International Standard.”

Enablers

Real-time process controls: Online reaction to out-of-control limit conditions

Process improvement teams: Follow advanced SPC tools to drive continual improvement on critical processes and operate within tighter process windows

Certification under ISO 9001 : 2000

Certification ISO 14001:2004 & OHSAS 18001:1999

Integrated Management System implemented in the entire Plant

SONY’s Green Partner

SA 8000 Certified


Opportunities for BD Technology

Gamut of Application Avenues


What is BDR/RE used for?

1. For recording of TV program

2. For BD ROM copying

Facts that would fuel the BDR/RE

Demand:

1. Transition to digital and HD broadcasting.

2. Relaxation in copy protection law to allow BD ROM

copying.

BDR/RE Applications


Why the demand would go up: Digital Broadcasting

Digital broadcasting is not identical to HD digital broadcasting. However,

all HD broadcasting could be classified as Digital Broadcasting.

Area Eng of Analog

Broadcasting

Level Key Point

Japan 14 July’ 2011 All broadcasting is

HD

HD broadcasting is

main

USA 17 Feb’2009 Some broadcasting

is HD

CATV is main. CATV is

exchanging to HD

broadcasting now

Europe 2012? Some broadcasting

is HD

England has started,

Next is Germany and

France


Area Type Capacity of 2 hours Copy Control System

Japan MPEG-2/AAC

1440X1080

1920X 1080

15.3GB

21.6GB

Copy Once EPN *

USA MPEG-2/DD

1280X720p

About 10GB Broadcasting Flag

Europe MPEG-2 or 4/DD

1280X720p

About 13-17GB Not yet

Types of HD Broadcasting and Copy Control System

* Encryption and non assertion

Why the demand would go up: Digital Broadcasting


Relaxation in Copying BD ROM

I expect that copying of BD ROM may be

allowed legally under some protection

regulation. Currently this is prohibited

through AACS.

Why the demand would go up: BD ROM copying


Image of BDR Demand

BD

R D

em

and

(Japan

centr

ic T

V r

ecord

er)

2012

Rom

Copy S

tart

Long life span : 20-25 years

Time Horizon


Blu-ray formats: Demand forecast

0

200

400

600

800

1000

1200

Million/Year

MBI Forecast of Global Blank BD Market

BDRE SL

BDRE DL

BDR SL

BDR DL

BDRE SL 2 20 49 71 133 204 206

BDRE DL 4 7 6 4

BDR SL 21 64 185 441 798

BDR DL 11 25 49 42

2007 2008 2009 2010 2011 2012 2013


BD manufacturing :

It is all to do with the available tolerances


BDR/RE discs: Technology

There are two type of recording conditions: H2L & L2H

H2L: Refers to reflectivity transition from high to low after laser recording ,

BDRE & BDR (inorganic) are based on this concept.

L2H: Refers to reflectivity transition from low to high after laser recording ,BDR

organic is based on this concept.

For H2L concept , On-groove recording is used.

For BDR organic ,In-groove recording is required because of certain design

issues like reversed push-pull polarity and low-to-high recording.

Inorganic recording

“On-groove recording”100 um cover

Organic recording

“In-groove recording”


1.1mm PC Substrate

Reflective layer

Dielectric layer

Recording Layer-1

Recording Layer-2

Dielectric layer

Cover Layer

Hard Coat

1.1mm PC Substrate

Reflective Layer

Dye layer

Barrier layer

Cover Layer

Hard Coat

Inorganic Type(BDR*/RE) Organic Type(BDR)

Recording

layer *

BDR/RE discs: Disc Design


Double Layer(DL)

BD-R/RE Multi Layer Disc Technology

Quadruple Layer(QL)

Triple Layer(TL)


Successful

Manufacturing

of Blu-ray Discs

Manufacturing

Equipments

Technology,

Process and

Product Design

Test and

Measurement

Set-up

Media

Compatibility

Skill Set

Manufacturing of BDR/RE discs: Important factors


Manufacturing challenges: Mastering


Manufacturing challenges: Mastering

vendor -1

vendor-2

vendor- 3

S-No Parameter Instrument Remarks

1

Groove

Depth/Width

Depth/WA

AFMit is about the specific stamper

design and easy to match

2

Groove

Depth/Width

Depth/WA

DOMSxe Its about the specific stamper design

3 Thickness ADE have to validate its impact

4 Elec-Testing CATS No comparison

5Back Surface

Roughness

Roughness

Measurem

ent

Vendor-1

RA=0.03

RY=0.40

RZ=0.25

Vendor-3

RA=0.04

RY=0.41

RZ=0.28

Results comparable

6 Hardness (HV)Hardness

Tester

Vendor-1

Data area =208

Backsurface =180

Vendor-3

Data area =299

backsurface =216

Vendor-3 having high hardness as

compare with competitor stamper

7 Mechanical Eta Spikes error

Reverse Taper Thickness found on competitor stamper

CATS showing error in competitor stamper made

spikes error with competitor stamper made

Comparative Stamper Analysis

Observations / Results

GD/WA comparable with Vendor-3 Spec and GW 35

nm higher in Vendor-1

As per DOMSxe study, GD on competitor stamper is

observed low as compare with Vendor-3 also GW is

higher


Manufacturing challenges: issues in Mastering

GD variation needs to be controlled :+/- 2nm ,Need good

process control & higher tonnage moulding machine with

extremely good replication capability.

Groove finishing/Groove Roughness improvement is major

challenge because of higher density of grooves ( lower track

pitch) .

Stamper back side roughness : more critical to control TE/FE

specially for high speed media (6X BDR & beyond)

Cost of manufacturing is significantly higher because mother

stamper is used as production stamper and only a limited

number of mothers can be produced from one father family.


Manufacturing challenges- Issues in sputtering

Sputtering / Stack layer deposition:

• High vacuum levels in process chambers >10E-5 mbar

• Sputtering layer thickness uniformity (ID-OD) < 2%

• Sputtering layer thickness uniformity between discs <2%

• Precise control of sputtered layers with nano-metric

accuracy


Manufacturing challenges: Issues in CL & HC

Control on Cover layer (CL) thickness : +/- 2 micron (with reference if ID of the disc)

Stability of Cover Layer in regular production , Bubble free/ Defect free

Coating of CL & HC : vulnerable to dirt and scratching. Slight scratches/Finger prints cause

increase in error rates and/or loss of the tracking servo signal

Control on Ski Jump

Shrinkage of Cover layer : Influences tilt over time.

CL/HC materials

UV System for the BD process

Information Area

Areas of non-uniformity or Ski Jump

Dispense of a lacquer bead

& Spinning


1.1mm PC Substrate

Recording layer etc.

Cover Layer (98um)

Hard Coat (2um to 4um)

Disc Structure

HC Layer Process

Material property: High Hardness but with sufficient lubrication

properties to protect the surface from scratches and fingerprints.

Typical materials :

UV resin + Dispersion of colloidal Silica(SiO2)

(To keep high transparency and low birefringence)

Performance

Steel Wool scratch test over 300 cycle : no significant increase in

jitter (maximum 10% from the original value)




HC Layer Process

Special Hard Coat

Normal Hard Coat

Polycarbonate

Sheet (No HC)


Normal humidity

BD: Change in radial deviation1. Reversible due to swelling or shrinking of Polycarbonate under humidity changes

2. Non-Reversible due to continuous shrinkage of polycarbonate over time

Polycarbonate

Freshly molded

Polycarbonate

1 year

Polycarbonate

10 year

Polycarbonate

High humidity: swelling

Polycarbonate

H2O

Low humidity: shrinkage

Polycarbonate

H2O

Manufacturing Challenge: Tilt control


BD-R/RE: Change in radial deviation

Manufacturing Challenge:Tilt control

Radial Deviation change due to swelling or shrinking of Polycarbonate under humidity changes

CD

DVD

BD without

Back

Sputter

BD with

Back

sputtered

Low humidity: after 1 hourNormal humidity Low humidity: after 3 days Normal humidity,

after 1 Year

Laser entry sideShock Humidity tilt change test

is mandatory in BD specification

Laser entry side

Laser entry side

Laser entry side


Impact of 100um defect on the disc

Manufacturing challenges: control on defects

4.5 um

100 um defect

Defect size

compared to

Data density

155K user bits

Big challenge

to have defect

free disc


Good news: Better Error correction technique

100 um cover

100 um defect

at disc surface

Substrate

100 um defect

Blue LaserSmall spot size in BD

at disc surface:

130 um beam diameter

BD has powerful error correction:

1. Long distance: (LDC, Long Distance Code)

2. Burst error for local defects (BIS, Burst Indication Sub code)

In BD standard, random errors and burst errors are treated separately:

0.02% random bit errors are allowed


•Yield Management•Process Control•Product Quality

•Electrical•Mechanical•Visual

•Productivity •Tact time•Equipment Uptime


Path Forward

Manufacturing Process: Management and Economics


Manufacturing challenges: Media compatibility

• Media quality = f ( ability of the drive to write on to it)

• Media design with sufficient sensitivity across all speeds

- Stamper design & quality

- Moulding process

- Stack layer design & uniformity

- Manufacturing tolerances

• Design & development of suitable Write Strategy,

Write power, asymmetry,

Resultant control on parameters like Jitter, modulation







Castle Write Strategy:



Power margin of good BDR media (1X-8X)



Jitter (both) and RSER of good BDR (1X-4X) media

RSER - Max {Book Spec : RSER < 2.00E-04}

-4.00E-05

4.00E-05

1.20E-04

2.00E-04

1 2 3 1 2 3 1 2 3 1 2 3 1 2 3 1 2 3 1 2 3

EL00 1.0c RH26 1.03 1.00 1.04 1.03

HLDS : BH12NS30 Optiarc : BWU-300S Liteon : DH-12B2LH Panasonic : LF-PB371 Panasonic : UJ-240AS Plextor : PX-B940SA Pioneer : BDR-205


Test and

Measurement

characteristics

Manufacturing

Equipments

Important factors

•Correlation

•Consistency

•Repeatability

•Reliability

•Accuracy

•Speed of measurement

•Presentation of results

•User Interface

Manufacturing challenges: Testing capability

Special tools/

features

- Power margin

- BCA verification

- TE/FE

- Overwrite

Parameters:

• Un-recorded

• Recorded

• Mechanical

Data

Interpretation &

presentation



Good control on TE/ FE is key to High speed BDR

media manufacturing



Dielectric layer thickness optimization & process controlI2/ZS82 - R8H

8

9

10

11

12

13

14

15

16

17

18

20 21 22 23 24 25 26 27 28 29

Layer thickness [nm]

R8

H [

%]

Rec: 1x

Rec: 2x

I2/ZS82 - Modulation

0.5

0.55

0.6

0.65

0.7

0.75

0.8

0.85

0.9

20 21 22 23 24 25 26 27 28 29


Mo

dula

tion

[-]

Rec: 1x

Rec: 2x

I2/ZS82 - Jitter Both

5

5.5

6

6.5

7

7.5

8

20 21 22 23 24 25 26 27 28 29


Jit

ter

Bo

th[%

]

Rec: 1x

Rec: 2x

I2/ZS82 - Alpha

300

350

400

450

500

550

600

20 21 22 23 24 25 26 27 28 29 30


Alp

ha

(T

r16)

Rec: 1x

Rec: 2x



4X

5

6

7

8

9

10

6.4 6.6 6.8 7 7.2 7.4 7.6 7.8

Trailing Jitter Leading Jitter Spec6X

5

6

7

8

9

10

8.6 8.8 9 9.2 9.4 9.6 9.8 10 10.2

Trailing Jitter Leading Jitter Spec

2X

5

6

7

8

9

10

5.8 6 6.2 6.4 6.6 6.8 7 7.2 7.4

Trailing Jitter Leading Jitter Spec 1X

5

6

7

8

9

10

4.0 4.2 4.4 4.6 4.8 5.0 5.2 5.4 5.6

Trailing Jitter Leading Jitter Spec

Ability to perform some special tests like Power Margin


Path Forward

• There is no doubt that the spread of BD technology had

been rather slow . However, every signal now indicates an

explosive growth of this format in coming years. Predictions

range from 500M recordable discs (most conservative) to a

billion by the year 2013.

• This growth opens avenues for better business conditions

for otherwise a depressed optical disc industry. The

equipment sector & media makers stand to benefit .

• Manufacturing of BDR/RE formats posses some unique

technological challenges . However, with the right

technology, positive bend of mind & skill set and suitable

manufacturing/testing equipments , one can still succeed in

this area.

Documents

Practical manufacturing of BDR/RE discs