POROUS SILICON MULTILAYERS AND MICROCAVITIES.pdf

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    POROUS SILICON MULTILAYERS

    AND MICROCAVITIES

    Prof. Lorenzo Pavesi

    Massimo Cazzanelli*Claudio Mazzoleni

    Pascal Dubois

    Roberta Guardini

    Viviana Mulloni

    Rosa Chierchia

    Claudio Vinegoni

    *leaving to University of Geneve

    (Univ. of Trento)

    (Trinity College Dublin)(Univ. of Trento)

    (Private Company)

    (Univ. of Trento)

    (Univ. of Trento)

    (Univ. of Pittsburgh)

    Department of Physics and Astronomy University of Pittsburgh

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    OUTLINE

    introduction

    porous silicon how to produce it

    structure and morphology

    physical properties

    dielectric multilayers

    fundamentals

    Bragg reflectors Fabry-Perot mirrors

    microcavities

    porous silicon dielectric multilayers

    characterization application to DBR, FPF, PSM

    still open problems

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    Communication technology demands more speed: replacement

    of electrons with photons as carriers of informations.

    PHOTONICS

    Silicon is the basic material for microelectronics

    Indirect-gap semiconductor

    Low efficiency (1 photon emitted every 107 electron holes created)

    - increase the efficiency

    - low cost

    - easy integrable

    POROUS SILICON

    -emits in the visible- 10% external quantum efficiency

    first aim: produce solid state device

    LED

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    problems associated despite the high efficiency:

    - poor stability when exposed in air- long switching times

    - wide emission band

    How to avoid these problems:

    Controlling the PS spontaneous emission (SE) properties via a

    variation of the photon field in an optical cavity

    )()1()()2

    ()(2

    ,,

    = iEPPGHR ffiif fisp

    SE of a material controlled by medium in wich it is placed.

    a simple way is to place the active medium between

    two high reflectivity mirrors

    Ex: use two Fabry-Perot filter in order to embed theoptically active material

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    so we obtain a planar microcavity with a single allowedphoton mode which corresponds to the FP resonance c

    )( spR modified

    c increased for

    inhibited for c

    In order to make PS planar microcavities, dielectric multilayersbased on PS are needed

    It is necessary to control the thickness and refractive index of a

    PS layer in a controlled manner.

    The REFRACTIVE INDEX of PS is determined by itsporosity, which depends on the current density of theelectro-chemical etching once the other etching parameters are

    fixed.

    The LAYER WIDTH is determined by the etching time.

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    HOW TO PRODUCE PS

    Si wafer must be anodically biased (forward biasing

    for p-type doped Si, reverse for n-type)in case of n-type light must be supplied

    current densities below a critical value must be used

    HOLES regulate the mechanism of formation of PS

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    PS formation is a SELF-REGULATEDmechanism, with hole depletion as the limitingagent

    unidirectional (follows thecurrent flow)

    starts at defects on the surface

    (Si-O)

    depletion area

    substrate doping

    current density (determines depletion width and carr. Inj.)HF (determines current upper limity)

    etching times (chemical + electroch. Dissolution)

    illumination (n-type)

    solvent in wich HF is diluted

    CRITICAL PARAM. FOR PS FORMATION

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    STRUCTURE AND MORPHOLOGY OF PS

    AES

    AES indicates no presence of O atoms as in cristallineSi (surface)

    Raman spectr.

    (phonon confinment)

    (b) PS-BULK

    (a) PS-AIR

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    MODEL: layer made of voids and nanocrystalsinterconnected by an amorphous matrix.

    aging -> H sustituted with O

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    PHOTOLUMINESCENCE

    blue band (2.3-2.6 eV)

    VISIBLE BAND (1.4-2.2 eV)

    ir (0.8 eV)

    n

    blue shift

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    Canham: QUANTUM MODEL of ps

    disordered array of quantum wires or dots where the

    excitons are confined. It follows that excitonic transitionenergy becomes greater with the decreasing of size

    (particle in a box model)

    this is supported from the measurements done (n vs.

    energy).

    Width of the band explained by size distribution.

    From absorption measurements -> exp edge resulting

    from the overlap of different edges.

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    RECOMBINATION DYNAMICS

    TRLPL

    )exp()( 0

    tITIPL =

    The decay is

    NON EXPONENTIAL

    (disordered system)

    result from a diffusive motion of

    the excited carriers

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    How we explain TRLPL

    excitons before recombination move through the

    nanocrystals skeleton

    RECOMBINATIONon-site recombination

    exciton diff.

    Exciton diffusion controlled by:hopping time from one crystal to the other

    confining energy of the crystal

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    DIELECTRIC MULTILAYERS

    Multiple interferences

    Choosing appropriate index of refraction and thickness we

    obtain constructive and destructive interference at the

    desidered

    2sin1

    1

    1 22

    2

    0

    +

    =FR

    TIIT

    )1(

    42R

    RF

    = Finesse

    (measure of the sharpness of the fringes)

    Thin slab

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    Airy function

    DIELECTRIC BRAGG REFLECTORS

    Mathematical treatment via transfer matrix approach, if

    we have more than one layer.

    2

    2

    2

    1)/(

    1)/(

    +

    =N

    LH

    N

    LH

    nn

    hnR

    nH high refractive index layer

    nL low refractive index layer

    thickness /4/4

    Named: DIELECTRIC BRAGG MIRROR

    N fixed: R, nH/nLnH/nL,fixed: R, N

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    Conclusions:

    increasing N, R increasesincreasing N, the stop band enlarges

    increasing N, the stop band sharpens

    increasing nH/nL the stopband enlarges and

    sharpens

    increasing nH/nL the reflectance valuesincrease everyw.

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    FABRY PEROT INTERFERENCE FILTERS

    Using two parallel mirrors separated by a spacer its

    possible to construct a particular class of interferometer;

    Fabry-Perot interference filters

    Narrow pass-bandbased on multiple reflections of two mirrors

    Particular class of FP filters based on dielectric multilayers

    Idea: use two DBR separeted by a spacer formed by

    the same material but with a different ref. Index and itshould be or /2/2 thick.

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    MICROCAVITIES

    Spontaneous emission rate given by the product of the

    electronic matrix element and the photon mode density

    )()1()2

    (2

    ,

    = iEPP ffiif )G(H)(R fi,sp

    Light confinement in optical cavity

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    Imagine two FPR with an active media between

    them.

    Multiple in-phase reflections which occur on the

    mirrors.

    allowed photon states: transmission permittedforbidden photon states: all light reflected

    NB all this for light propagating perpendicular to themirrors

    modesallinemissionsspontaneou

    modedesiredin theemissionsspontaneou=

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    DIELECTRIC PS MULTILAYERS

    Porosity dependence of the refractive index of PS

    Maxwell-Garnett approximation (spherical particles):

    M

    M

    Meff

    Meff f

    22 +=+

    M embedding environment f volumetric fraction

    ef effective index of ref.

    for silicon

    if negligible absorption effeffn 2

    fDetermine refractive index

    Based on measurements of interference fringes

    1

    1

    11

    2

    1

    +

    =

    rrdn

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    FP structure porosity/ref.index sequence

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    TEM image

    layer 1 - 20 nm, 64% porosity

    layer 2 - 200 nm, 84% porosity

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    DIELECTRIC BRAGG REFLECTORS

    (a) DBR centered at 670 nm 15 rep. of two layers of 62 and 75% porosity

    (b) DBR centered at 590 nm 15 rep. of two layers of 62 and 75% porosity

    (c) same as b with 30 rep.

    (d) DBR centered at 465 nm 15 rep. of two layers of 62 and 75% porosity

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    FABRY-PEROT FILTERS (RANDOM)

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    ALL POROUS SILICON

    MICROCAVITIESWith a FP we can realize an all-PS microcavity

    Top and bottom DBR act as photon CONFINERS.

    The central layer act as OPTICALLY ACTIVE MED.

    In the central layer coupling between excitonic

    transitions and photon modes

    PL spectra of a PSM with resonance at c (solid line) c-thick

    PS reference layer (dotted line) and of a DBR .

    leacky waveguide mode

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    choosing appropriate widht of the active layer and DBR we

    can tune the wl of the PSM taking advantage of the broad

    emission band of PS

    High angular concentration of output emission

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    Time decays of the luminescence in PSM

    (basic)

    peak at c=750 nm

    doesnt move

    the decay of the side band

    luminescence is faster than

    that of the peak at c

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    CONCLUSIONS

    coupling between photon and exciton mode is weak

    emission takes place in all the central layer

    emission of PS wider than the stop band of DBR

    emission of PS central layer and DBR overlaps

    There is no true photon confinement

    Finite reflection angle

    photon mode penetrates into DBR

    Theoretical treatment of the coupling of the

    electronic resonance with the optical mode

    shows that dielectric microcavities differ from

    ideal or metallic microcavities.

    Doesnt modify the spontaneours emission rate

    but redistribute in space.

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