Outlook for Cleans in the Semiconductor Industry · • Downturn expected in a few years but overall strong outlook for semiconductor industry • Still many technical challenges

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Outlook for Cleans in the Semiconductor Industry

Mike Corbett

Business of Cleans, 2019


2

Linx Consulting Service Portfolio


3

Background & Market Trends


4

Industry Has a Strong Growth Outlook

Semiconductor may be

set to capture a larger

share of global GDP.

Connected World Growth Drivers


5

Connected World Drives Many Opportunities

Opportunities for Cleans

• Novel Materials

• Cobalt, Mo, Ru, etc.

• Novel Integrations

• Al PERR for 200mm wafers

• Replacement chemistries

• Novel strippers

• Copper compatible products

• Advanced Packaging


6

There are Still Many Technical Challenges

Scaling and New Materials

• RC considerations impacting Logic Interconnect

– Limitations of current architectures/materials

• FinFET gate deposition

– GAA Nanowire development

– High mobility materials

• Memory technology extension

– 3D-NAND growth

– DRAM capacitor dielectric

– Novel architectures

• Patterning

– Low temperature spacers

– Lithography aids

– EUV insertion

Challenges

• BEOL

– Novel barriers, Liners

– Novel cleans and CMP

• FEOL/MOL

– WF metals

– Novel MHM

– Cobalt Contacts


– Gap fill

• Memory


– Gap fill

– Horizontal fill


7

Cleaning Trends


8

PERR - FEOL, MOL and BEOL Materials

• The introduction of new metals for FEOL, MOL and BEOL and novel integration schemes

has led to an increase in the number of unique PERR cleaning steps in advanced logic

• Some new formulations can be utilized/tuned across multiple metals so the number of

cleaning steps is difficult to know exactly

• Above are some of the different potential combinations of metals that may be present on

advanced logic device

Location/

Step

FEOL, MOL and BEOL Metals & Combinations (Illustrative)

Layers

FEOL MHM

FEOL WF

Metals W Co

TiX

Liner/MHM

Al203

Replacemnt

Plug Co SEL/Cap Copper TaN

FEOL/

CleansX X X X X X

MOL/

CleansX X X X X X X X X

BEOL/

CleansX X X X X X X


9

FEOL MHM

FEOL WF

Metals W Co

TiX

Liner/MHM

Al203

Replacemnt

Plug Co SEL/Cap Copper TaN

FEOL

MHMFEOL

FEOL WF

MetalsMOL

W BEOL

Co

TiX

Liner/MH

M

Al203

Replacemnt

Plug

Co

SEL/Cap

Copper

TaN

PERR Has Fragmented

• PERR has fragmented. End-users are trying to find

chemicals to control infrastructure and costs.

• End-users need chemistries that solve multiple

problems.

• They cannot afford to have 6 different cleans and are

trying to minimize the number of unique cleans,

however.

• There are some key selectivity including: Copper,

Cobalt, TiN, MHM, W


10

PCMP Evolution

Copper

• Memory

• Logic

Copper/Cobalt

• Advanced Logic

• SEL and Cap

Cobalt

• Advanced Logic

• Bulk Metal

Tungsten

• Advanced Logic

• Contacts

• MG

Ceria

• Advanced Logic

• 3DNAND

• STI

• Oxide

• Whereas historically the major home for formulated PCMP cleans was in copper CMP, the

industry is now using advanced formulated products for Cobalt, W and ceria-based polishes,

as shown below

• As the requirements to develop products for these applications becomes increasingly difficult,

the industry is relying more heavily on the larger multi-national chemical companies to develop

technology based solutions

Formulated Post CMP Cleans


11

CMP Intensity Continues to Increase

0

5

10

15

20

25

30

35

40

ASIC 10nm DRAM 15nm 2DNAND 3DNAND 96 layers

# CMP Steps per Wafer

ASIC 10nm DRAM 15nm 2DNAND 3DNAND 96 layers


12

Highest Growth CMP Segments All Have Cleaning Challenges

2018 2019 2020 2021 2022 2023

Slurry Growth

Cobalt FEOL Ceria


13

Outlook & Suppliers


14

2,800

2,900

3,000

3,100

3,200

3,300

3,400

17 18 19 20

March 2019 Update

ESF 2019 Q1 (February)

SEMI MSI (History to 18Q4)

Millio

n S

qu

are

In

ch

es

History: Semi.org

Forecasts: Hilltop Economics, LLC

Annual Percent Change In MSI

2016 2017 2018 2019 2020

2.9% 10.0% 7.9% -1.5% 2.9%

Semiconductor MSI Outlook

Latest MSI Forecast by ESF Model


15

MSI Vs. All Cleans

$-

$500

$1,000

$1,500

$2,000

$2,500

$3,000

$3,500

0

2,000

4,000

6,000

8,000

10,000

12,000

14,000

16,000

2012 2013 2014 2015 2016 2017 2018 2019 2020 2021 2022 2023

MSI All Cleans (US$ Million)

All Cleans includes Bulk Wet + Strippers + Formulated Cleans


16

Overall Outlook

• The total market size of the segments studied is $2,378 million in 2018 and is expected to

grow to $2,945 million in 2023. Overall AAGR of 4.4% during forecast period driven by new

products.

• Key challenges around metrology, defectivity and particles will lead to increased

management of supply chain.

• There is minimal impact from Chinese suppliers at this time.

$-

$500

$1,000

$1,500

$2,000

$2,500

$3,000

$3,500

2018 2019 2020 2021 2022 2023

US$ Million

Formulated Strip Bulk


17

MSI Vs. Formulated Cleans

$-

$100

$200

$300

$400

$500

$600

$700

$800

$900

$1,000

0

2,000

4,000

6,000

8,000

10,000

12,000

14,000

16,000

2012 2013 2014 2015 2016 2017 2018 2019 2020 2021 2022 2023

MSI Formulated Cleans (US$ Million)


18

All Formulated Products

$-

$100

$200

$300

$400

$500

$600

$700

$800

$900

$1,000

2016 2017 2018 2019 2020 2021 2022 2023

US$ Million

Al PERR Cu SAC Co PERR PCMP Ceria PCMP W PCMP Cu PCMP Co

AAGR + 8.8% over the forecast period


19

“New” Formulated Products

$-

$100

$200

$300

$400

$500

$600

$700

$800

$900

$1,000

2016 2017 2018 2019 2020 2021 2022 2023

US$ Million

Al PERR Cu SAC PCMP Cu Co PERR PCMP Ceria PCMP W PCMP Co

New Products – Ceria PCMP, W PCMP,

Co PCMP, Co PERR

Existing Products – Cu

PCMP, Cu PERR, Al PERR


20

Leading Suppliers Formulated Cleans

EKC Tech

Entegris

Avantor

Versum

FFEMPS / Wako

MCC

BASF

JSR Micro

TOK

Other

2018, US$ Million


21

Leading Electronic Materials Suppliers in Semi

$-

$200

$400

$600

$800

$1,000

$1,200

$1,400

$1,600

WF

M R

even

ue

s / $

m 2

01

7 b

asis

CMP Dep Cleans Wet Litho Bulk Gas Spec Gas


22

Versum and Entegris Combined Materials Business

Cleans Dep ESG CMP Litho

$M

Entegris Versum


23

Versum and Merck Combined Business

Cleans Dep ESG CMP Litho

$M

Versum Merck


24

Conclusions


25

Conclusions

• Downturn expected in a few years but overall strong outlook for semiconductor

industry

• Still many technical challenges ahead that will drive demand for new cleans in

PERR

• Critical challenges for PCMP will continue and drive needs for more cleans here

as well

• Good growth outlook for cleaning chemicals, which require continuous

investment to meet end-user needs

• Regional suppliers are not meeting leading edge fab needs for innovative

solutions

• M&A will continue to impact cleaning suppliers

Documents

Outlook for Cleans in the Semiconductor Industry · • Downturn expected in a few years but overall strong outlook for semiconductor industry • Still many technical challenges