Nanoelectronics in Indian Academia: Present and Future: a policy & implementation perspective Udayan Ganguly June 10, 2014 Collated based on discussions

Nanoelectronics in Indian Academia: Present and Future:

a policy & implementation perspective

Udayan GangulyJune 10, 2014

Collated based on discussions with Saurabh Lodha, Swaroop Ganguly, Bipin Rajendran, Souvik Mahapatra, Anil Kottantharayil, V Ramgopal Rao, Juzer Vasi

U Ganguly Assocham 2014 2

AgendaPolicy Goal: To enable academic training to address national challenges and achieve international excellence

Policy Descriptions Organizations

Lab Units Numerous scientific grants for individual scientists;

Labs within IITs, IISc, NITs etc

Centers of excellence (2006-present)

Joint projects by multiple faculty; common platform; open access;

CENs/ INUP by DeitY;DAE; DST Centers at IITs, IISc, NITs etc;

a case study of IITBNF

Consortia (2014 …) Consortia of academia/industry for prototyping, incubation & training;

A proposal for future

6/9/2014Academic training infrastructure must respond to evolving national interests


• Mission and Vision

• Nanoelectronics Research Evolution @ IITBNF

• Key Achievements

• IITBNF Organization and Operational Highlights

• Future of Nanotechnology @ IITB – A Proposal

Outline

6/9/2014

IIT Bombay Nanofabrication Facility

250 Crores ($ 50M) facility More than 300 researcher students & 66 faculty members

“I have been extremely impressed … one of the leading universities in the world in the field of technology” - Mr. Joe Biden, July 2013

Mission & Vision

Create a research platform to facilitate hands on experiments

Establish strong connection between science and technology

Bridge gap between research and commercialization

Encourage users from other Departments (IIT Bombay) and other Institutes to avail experimental facilities


IITBNF

National Tech

Education (NPE)

GoI PolicyIncubation

IITBNF outreach and national service

National Policy on Electronics (NPE)12th National Plan (R&D Center)

NanosniffPowai Labs

ITRS JEDEC

First Certification course on Semiconductor Manufacturing

Hands-on Workshops& Research Project Support

IITBNF plays a strategic and academic role

Standards and Roadmap

Indian nanoelectronics

users’ programme

(INUP)

6/9/2014


Timeline & Funding of IITBNF

2006 2007 2008 2009 2010 2011 2012 2013

Centre for Excellence in Nanoelectronics (CEN), DeitY, 50 Cr

Equipment donation - Nanomanufacturing Lab, CLEAN Lab (~ 32 Cr AMAT)Sponsored projects (7.5 Cr AMAT)

INUP DeitY, 12 Cr

Sponsored projects - R&D Organizations (~ 58 Cr)

NCPRE MNRE, 45 Cr

Infrastructure - IITB, 15 Cr

Industry partners (Intel, TSMC, IBM, TI, Micron, Synopsys, Maxim, Renesas, 7.5 Cr)

CEN, DeitY, 80Cr

INUP 35 Cr

6/9/2014


2006 2007 2008 2009 2010 2011 2012 2013

CEN, DIT, $10M

IITB, $ 3M

Infrastructure timelineM

ater

ials

Dev

ice

Fab

Dev

ice

Char

XPS, XRD

ALD

CMP

Comb Sputter

Cryo

Sim

Ellipsometry, PL, AFM

SEM, Hall, Four-Probe

Magnetic

PLD, PVD/CVD, Evaporation, Sputter

Litho (photo, eBeam)

AMAT etch, gate stack

MBE

PIII

DC, AC, pulsed Magnetic

Optical RF, ns pulse

Ab-initioMultiPhysicsProcess & Device (Elec)

PPMSUV-Vis, FTIR, SECM

TEM Prep

6/9/2014


2006 2007 2008 2009 2010 2011 2012 2013

CEN, DIT, $10M

IITB, $ 3M

Expertise timelineM

ater

ials

Dev

ice

Fab

Dev

ice

Char

Sim

Graphene, 2D Materials

Perovskites

Ge

GaN

GaAs

Gate Dielectric

NC/CT

MOS Stacks HEMT ReRAM

Si, Ge CMOS FETs

Gr Flash

CHISEL Flash

DLTS

Micro sec Pulsed

ns PulsedSONOS, CTBTI

BTI FLASH, ESD MultiPhysics Quantum

Cryo

Quant/Neuro

IR sensors LED

Cantilevers

Biosensors

Organics

Solar Cell

OrganicsBiomaterials

Spintronics

FINFET

6/9/2014

National outreach – the INUP program

Facility open to researchers all over the country

Participating Institutions

Number

Academic 80

R&D 11

Industries 11

Total 102


Research Output and Achievements

• Papers in High Impact Journals (2006-2013): >200– IEEE Transactions on ED,

Nanotechnology, IM– IEEE EDL– AIP APL, JAP– ACS Nano– J-MEMS– Organic Electronics– IOP Nanotechnology

• Presence in top international conferences– Logic and Memory Devices– Photovoltaics– Spintronics – MEMS– Material Growth

IRPSIED

M DRCIM

W

ESSD

ERC

VLSI Te

ch SISC

SISPAD

PVSC

MMM/Inter

magMEM

SMRS

NAMBEISC

S

Euro

MBE

0

2

4

6

8

10

12

14

16

18

20Key Conference Publications (2006-2013)

Logic and Memory Devices

Materials Growth

PV

Simulation

Spin

MEMS

IITBNF enables high impact research in diverse areas

6/9/2014

Product Development

Wireless sensor node for explosive detection

Lab on chip for cardiac diagnostics

Low cost portable SPR

Silicon locket for cardiac diagnostics

Cantilever based low cost explosive detector

Explosive detection by Fluorescence Quenching

More than 40 National and International

Patents Filed


IITBNF Organizational Structure

FOC [Facility Oversight committee, 24F + 41S]Faculty [F] : Making Rules/Policies

Staff [S]: Implementing Policies

Equipment Operations Committe

e[3F + 14S]

Equipment Maintenanc

e Committee [3F + 3S]

Public Relations Committee [2F + 3S]

Inventory

Committe

e[2F + 3S]

HR Committe

e[2F + 2S]

Admin

Committe

e[3F + 15S]

IT Committe

e[3F + 4S]

Disciplinary Committe

e[5F + 2S]

Safety Committe

e[3F+ 8S]

Facility

Committe

e[3F+ 8S]

Professionally run national facility with 24x7 operation19

21

2

EEPhysicsEnergy SciencesBiosciences

Dept NumberEE 19

Physics 2Energy Sciences 1

Biosciences 2Total 24

6/9/2014


Transparent 24x7 open access: online slot booking

Covers ~ 90 tools @ IITBNFSoftware to be adopted by NNF @ IISc

6/9/2014


Lab and Personnel Safety

32 Toxic Gas DetectorsAuto-shut OFF

Fire extinguishers in all lab and corridors

45 min Backup Spill Kits, First Aid, Eye Showers at multiple locations

• Emergency Response Team (24X7)• PA System• Biometric access for head counts in Emergency• Regular safety drills • New materials go through rigorous safety checks

2006 2007 2008 2009 2010 2011 2012 2013

6/9/2014


Issue logging & tracking: building maintenance

Data-driven approach to identify and track issues Now adopted for IITB campus-wide maintenance

Scalable, online ticketing and tracking

Jun 12 Jun 13 Jul 13

IITBNF EE

6/9/2014


“The fact that so many of my students are able to use the facility on a regular basis, basic training is provided to them and they are made aware of the safety issues, etc. speaks volume about how the facility is maintained, and open to others for use…Thanks for being generous and allowing others to use the unique facilities!” – Prof. Amit Agrawal (Mechanical)

“Easily allowing interested people to use the facility, which significantly enhances the utility of the installed facilities.” – Prof. Dipti Gupta (MEMS), on highlights of IITBNF

How are we doing?

“Uniqueness is the accessibility aspect…Simply register and things happen as they should. I am happy as my students have not cribbed till date about something not made available to them.” – Anonymous faculty, on highlights of IITBNF

“The facility caters primarily towards electronic device fabrication. However, there is an increasing number of users in the institute who are working at the interface of physics/engineering and biology and would like to use the IITBNF facility. Therefore, it will be good to have dedicated a few soft lithography equipments to avoid potential contamination issues.” – Anonymous faculty

C“We have never faced any difficulty in accessing any facility.” – Anonymous faculty

“Some processes need to be opened for all users irrespective of the substrate they are using.” – Anonymous faculty

B

A

“From the point of view of an user I find that the facility is administered very professionally. Online slot booking system, billing details, issue of consumables, etc. are very transparent.” – Anonymous faculty, on highlights of IITBNF

6/9/2014


Faculty and Student Participation

biosciences8%

energy11%

chemical6%

chemistry3%

electrical30%

mechanical6%

metallurgical15%

physics21%

Facultybiosciences

6% chemical1%

chemistry2%

crnts8%

electrical32%

energy11%environmental

1%

mechanical5%

metallurgical15%

physics19%

PhD Students

biosciences 10chemical 2chemistry 3crnts 13electrical 51energy 17environmental 1mechanical 8metallurgical 24physics 30

159

Strong inter-disciplinary focus and open access

6/9/2014

EE Nanoelectronics Growth


2001 2002 2003 2004 2005 2006 2007 2008 2009 2010 2011 20120

5

10

15

20

25

30

Year

EE

fac

ult

y (M

icro

elec

tro

nic

s &

VL

SI)

~4X Growth

From 8 to 29 Faculty over 10 years

EE Annex EE Annex + Nano bldg0

5000

10000

15000

20000

25000CharacterizationFabrication

Sq. Ft.

~2X Growth

From 10,000 20,000 sq. ft. in 10 years

Similar growth across institute; Increased cross-disciplinary research

6/9/2014


What should the future look like?

• A greenfield made-to-custom 200,000 sq. ft center: 20+ years vision 2018-2040• An INTEGRATED IIT Bombay Nanotechnology Center• 40,000 sq. ft. (approx) ground floor clean room space, allied specialty nano-labs • Faculty, technical staff and graduate student offices• Technology Incubation and Entrepreneurship

Birck Nanotechnology Center, PurdueStanford Nano Center

CENSE, IISc

A State-of-the-art Nanotechnology Center

6/9/2014


India’s Need for Semiconductor Manufacturing

Electronics production value chain

Strong need for semiconductor manufacturing to increase electronic production

Source: Applied Materials

Design + Manufacturing = Products

• Semiconductors are the basic building block for all electronics products– 25-30% of product value (even higher for PDA, Tablets, Mobile Phone etc.)

• Semiconductor fabs are a catalyst for development of large number of downstream electronics industries– Significant driver for employment growth

6/9/2014

Two India Fabs approved by

union cabinet in 2013;


R&D Foundry

Incubation of

technology start-ups

Training on

production tools

Prototyping of new

technology

Sustaining a Semiconductor Ecosystem -Role of Academia

Training & R&D are two key areas where academic institutions and industry have a major role to play

R&D Foundry

Incubation of technology start-ups

Training on production tools

Prototyping of new technology

1,500 specialists & 10,000related skilled jobs/fab

Source: Applied Materials, CP presentation 2012

Example: Semiconductor Tech & Manuf. Course

Example: IMEC (Belgium), ITRI (Taiwan)

6/9/2014


R&D Organization Value: ITRIInitiation: In 1973, three R&D institutes form a private company Industrial Taiwan Research Institute

Technology core: 1976 RCA tech transfer and training

Corporations Incubated: 163 UMC (1980); TSMC (1987)- Largest foundryTaiwan Mask Corp (1989);Mirle Automation (1989) Epistar Corp (1996): supply chainPhalanx Biotech (2002); Del Solar (2004); Daily Care Biomed (2004);

Products: 14000 PatentIBM compatible PC (1983); Carbon Fibre Bicycle, rackets (1985); TFT Display; CD ROM; Std First common car engine, WiMAX, FlexUPD;

Standard Labs: National Measurements Lab; Fire and Explosion LabWorld Leader by 2010Top 100 world R&D awards: 4Wall Street Journal Technology Innovation: 3

1973

-78

1978

-83

1983

-88

1988

-93

1993

-98

1998

-03

2003

-08

2008

-13

0

2

4

6

8

10

12

14

Year

Mile

ston

es

Acqu

ired

4” te

chno

logy

Indi

geno

us 8

” te

ch.

& M

irle

Aut

omati

on

TSM

C

UM

C

Long time horizons > 10 yearsITRI has played a vital role in transforming Taiwan’s economy from a labor-intensive industry to a high-tech industry.

Imported Tech/knowledge Do It Yourself Innovation: Culture of Leadership;

Gro

wth

in v

ario

us c

ore/

non

cor

e se

gmen

tshttp://www.itri.org.tw/eng/econtent/about/about05.aspx

Del

Sol

ar

Epi S

tar S

uppl

y Ch

ain

Time horizons > 10 years

6/9/2014


R&D Centers History and GeographyYear Org Univ partner Corporate1967 LETI Univ of Grenoble, France IBM, ST Micro, Soitec1973 ITRI Multiple TSMC, UMC etc

1982 IMEC KU Leuven , Belgium Intel IBM TSMC, Samsung, Micron, TEL etc

1986 Sematech UT Austin, USA Intel, IBM, Micron, TI etc1988 ISRC Seoul National Univ, Korea Samsung, Hynix, LG 1991 IME Nat. U Singapore Intel, Applied Materials, etc2001 SMC U Edinburgh, Scotland Intel, Logitech, Synopsis

2001 Albany Nanotech SUNY Albany, USA IBM Global Foundries, Toshiba, Applied, TEL

2002 NCRC U Tokyo Toshiba, NEC, Hitachi, Fujitsu2010 MCCI U Limerick, Tyndall Nat. Insti., Ireland Intel Analog, Xylinx TI etc Recent Intel Ireland fab

Drivers for Corporations - Corporate Research is expensive:- Hedge against low probability disruptive technologies- Pre-competitive research cost sharing- Human Resource development – “A company is as good as its employees”

Drivers for R&D Center- Corporation provide mid term technology vision & highlight opportunities- Ensure quality of research- Provides consistent cost sharing (vis a vis start ups)- Future employment path to trainees- Funds/support for disruptive tech incubation

Major corporations strongly partner with multiple University lead prototyping

R&D Center “canopy” is essential for sustainable Fab/Semiconductors ecosystem

6/9/2014


1984

1985

1986

1987

1988

1989

1990

1991

1992

1993

1994

1995

1996

1997

1998

1999

2000

2001

2002

2003

2004

2005

2006

2007

0

50

100

150

200

250

300Revenue

Grant

1984

1986

1988

1990

1992

1994

1996

1998

2000

2002

2004

2006

0%

10%

20%

30%

40%

50%

60%

70%

80%

90%

100%

% of grant

R&D Organization Sustainability

% g

rant

of r

even

ue

Fund

ing

(Mill

ion

€)

Year

53% support in 10 years

IMEC (1982- present) AIST (2001-present)

10 year grant: 189M€ = 130Cr INR (http://www.imec.be/ScientificReport/SR2007/)

http://www.aist.go.jp/aist_e/about_aist/facts_figures/fact_figures.html

IMEC used 189Million € (~1300 Cr INR at 69 INR=1€) of subsidy and 315 Million € of revenue over initial 10 years.

22% support in 20 years

AIST from Japan shows a similar 60% subsidy after 10 years of operation.

From 10 to 20 years, subsidy percent reduces from 60 -22% (essentially non-subsidy revenue increase)

6/9/2014

U Ganguly Assocham 2014

Nano-Engineerng Ecosystem Model

6/9/2014 P 26

Rese

arch Flexible

ExploratoryProof of concept

Dev

elop

men

t OptimizationIntegrationProduction h/w test

Man

ufac

turin

g Reliable YieldProduct

Academia or Industry Research

Industry-Academia Development Centers

Industry Fab

Yorktown Heights Albany Nanotech Fishkill

KU Leuven IMEC Various Corporations

Nano-Centers @IISc, IITs etc R&D Center India Fab

Strong need for a connecting entity between Research and Manufacturing

Barr

ier t

o M

ater

ials

/ T

ech

Flow

(e.g

. 4”

vs 1

2”, c

lean

)h/w

Tech. Concept /IPMaterials/Process

High Tech Human Resources


Proposed R&D Center ModelBroad Stakeholders

R&D Foundry

“Skilled HR and Tech for

Electronics ecosystem

”

Technology Focus & Diversity

R&D FoundryCMOS e.g.

28nm inverter capable baseline

DeviceLogic, RF,

MEMS

Materials & Process

Circuits & Systems

International Collaborations

Fab Baseline Develop

Broad user base around standard baseline

Multiple stakeholders – how to engage? Multiple technology development focus – what to prioritize?

6/9/2014


Board Representing Major

Stakeholders e.g.CEO, President

DeitYFab

DRDO/ISRO/DAEIndustry

Academia

6/9/2014

Organizational Structure

CEO, President

Fab &Industry Assignees Staff University

ResearchersTemporaryTemporary Permanent

CEO must have international experience in managing large R&D Labs/CentersStaff preferably have strong background in semiconductor industry or large R&D labs

R&D Center must be autonomously & professionally managed with vision from stakeholders


Prologue

SEMI and IESA industry forum to develop ecosystem consensus with GoI Leadership

6/9/2014

A globally time-tested R&D model needs to be implemented to support the bold vision of Indian semiconductor manufacturing and innovations

Documents

Nanoelectronics in Indian Academia: Present and Future: a policy & implementation perspective Udayan Ganguly June 10, 2014 Collated based on discussions