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Leader in Vacuum Valves
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Vacuum Valve Applications
1 VAT Swiss Headquarters and R&D2 Cleanroom Assembly3 Parts Production4 Sales & Service Center
Today’s high-tech manufacturing andresearch often require a reliable, highquality vacuum environment. Appli-cations for vacuum valves include:
- Semiconductor manufacturing - Solar cell manufacturing- Flat panel production- Glass and tool coating- Metallurgy- Surface analysis- High energy physics- Synchrotrons- Laser technology- Space simulation- Nuclear processes
Such a variety of applications asks for a wide choice of vacuum valves.
VAT offers by far the largest choice of vacuum valves worldwide: A variety of more than 1000 stand ard valves can be ordered from our catalog.
VAT valves have the highest market share worldwide. They are standard components in production equip -ment as well as at R&D facilities.
Final Products based on Vacuum Technologies
Vacuum Production Systems
Vacuum Valves
VATLOCK VATRING MONOVAT
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Committed to Inno ion
InnoVATion
Since its foundation in 1964 VAT has fully specialized in vacuum valve technology. One third of the company is R&D, product groups and labs.
Important sealing technologies have been invented and patented by VAT under trade names such as VATLOCK, VATRING and MONOVAT.
Long-Term Commitment
VAT today employs more than 700 people, mainly technical staff. VAT is family owned and totally self financed. We are committed to be the best partner to our customers for vacuum valves. We are proud to both support valves sold more than 20 years ago and collaborate in engineering the vacuum systems of tomorrow.
Development and Verification
Virtual Prototype
During product development, many calculations and simulations are carried out to allow a high degree of product maturity to be reached by the time of the first prototoye.
Design Verification
Innovation is important, but equally important is reliability. This is why we verify the specification of our products.We do both design verification of new products and product audits from routine manufacturing.
Valve Laboratory
This is our most important lab. Typical tests done here are:- Vacuum performance- Lifetime (cycle life) and mechanical wear- Bake-out- Pressure rise tests, spectrum analysis
of residual gases- Opening / closing speed- Pressure control performance- Alternative sealing materials
Quality & Process Management
Quality for us means …
meeting commitmentsand continuous improvement.
We are committed to …
ingenious products, state-of-the-art manufacturing and excellent customer service.
acting environmentally conscious and adhering to the standards regarding work safety and busi-ness ethics.
Particle Laboratory
Especially for semiconductor equipment it is essential to keep particle counts at the lowest levels. In this lab we measure particles generated by cycling valves under various conditions.
Quality & Process Management
VAT maintains a company wide, intranet based Quality & Process Management System (QMS) according to ISO 9001/ 14001. This QMS covers all aspects of product quality, process excellence, work safety and environmental protec-tion.
Closed loop controls and monitoring of key performance indicators ensure ongoing improvements and progress.
On request, we provide Certificates of Compliance, Inspection & Test Certifi-cates, ISO Assessment Certificates etc.
Customer acceptance tests at our Swiss manufacturing facilities are always wel-come upon agreement.
Manufacturing
Competence Centers for Parts
In order to enable short lead times and develop key manufacturing technologies, one third of VAT's parts manufacturing is done internally in specialized production cells. Each cell’s responsibilities include process quality - first article inspection (FAI) and statistical process control (SPC) as well as on time deliveries and cost control.
Machined Parts Cell
Machining is fully automated. Our machines are linked together with direct numerical control (DNC). For extended capacity an unmanned night shift can easily be brought on-line.
Vulcanized Parts Cell
Today’s semiconductor processing tools demand a variety of sealing compounds. Here we develop the bonding and vulcanization tools and processing equipment.
Electronic Controller Cell
Design and development for all electronicvalve controllers is carried out by VAT.This includes both software and hardware.Design verification, order configuration, 100% final inspection and testing are allcarried out internally.
Valve Assembly
All valves undergo a computer control led final inspection which includes several functional cycles, leak rate measurements and other parameters.
Data is stored and analyzed for assur ance of a good safety margin for long -term reliability.
Welded Components Cell
For precise alignment of flanges and narrow tolerances of valve bodies both semiautomatic tooling and robot welding is applied.
Angle Valves
Vacuum10-7
Series 24 Aluminum, Stainless Steel
Angle or inline valve with shaft feedthrough for large gas flows
Actuation: Manual, pneumaticFlange: ISO-KF, ISO-KSizes: I.D. 10 to 1000 mm (⅜" to 40")
HighVacuum10-8
Series 26 Aluminum, Stainless Steel
Angle or inline valve with bellows feedthrough
Actuation: Manual, pneumatic, electro-magneticFlange: ISO-KF, ISO-K, CF-R Sizes: I.D. 10 to 160 mm (⅜" to 6")
UltraHighVacuum10-10
Series 28 Stainless Steel
Angle valve with bellows feedthrough and metal bonnet seal for extremely low outgassing rate
Actuation: Manual, pneumaticFlange: CF-R Sizes: I.D. 16 to 63 mm (⅝" to 2½")
ExtremeHighVacuum<10-10
Series 54, 57 Stainless Steel
All-metal angle valve for UHV and XHV applications
Actuation: Manual, pneumaticFlange: CF-R Sizes: I.D. 16 to 160 mm (⅝" to 6")
Vacuum range in mbar / mtorr
Gate Valves
Series 012, 08, 12 Aluminum
Low cost gate valve with shaft feedthrough
Actuation: Manual, pneumaticFlange: ISO-KF, ISO-F, JIS, DIN insertSizes: I.D. 16 to 320 mm (⅝" to 12") (for sizes > DN 320 see series 19)
Series 26 Aluminum, Stainless Steel
Angle or inline valve with bellows feedthrough
Actuation: Manual, pneumatic, electro-magneticFlange: ISO-KF, ISO-K, CF-R Sizes: I.D. 10 to 160 mm (⅜" to 6")
Series 14 Stainless Steel
General purpose gate valve with rotary feedthrough
Actuation: Manual, pneumaticFlange: ISO-F, CF-F, ASA-LP, ASA, JISSizes: I.D. 63 to 400 mm (2½" to 16")
Series 010, 10 Stainless Steel
Gate valve with bellows and metal bonnet seal for UHV applications
Actuation: Manual, pneumaticFlange: ISO-KF, CF-F, ISO-F, ASA-LPSizes: I.D. 25 to 320 mm (1" to 12") (for sizes > DN 320 see series 19)
Series 48 Stainless Steel
All-metal gate valve for UHV and XHV applications
Actuation: Manual, pneumaticFlange: CF-FSizes: I.D. 16 to 320 mm (⅝" to 12")
Transfer Valves
Door Valve Series 07 Aluminum, Stainless Steel
Door valve for load lock chambers, virtually particle and vibration free
Actuation: PneumaticFlange: SEMI interface and various other typesSizes: Height: 37 mm (1.5") to 250 mm ( 10") Width: 160 mm (6.3") to 3500 mm (140")
Transfer Valvewith linear drive
Series Aluminum, Stainless Steel02, 03 Transfer valve or insert, virtually particle and vibration free
Actuation: PneumaticFlange: SEMI interface and various other typesSizes: Height: 25 mm (1.0") to 56 mm (2.2") Width: 160 mm (6.3") to 700 mm (28")
Transfer Valvewith L-actuation
Series Aluminum04, 05 Transfer valve or insert for corrosive processes, virtually particle and vibration free
Actuation: PneumaticFlange: SEMI interface Sizes: 46 x 236 mm (1.8" x 9.3") 50 x 336 mm (1.9" x 13.2")
Large Size Transfer Valves
For FPD and PV production systems or any other large coating systems.
Wide variety of sizes up to 3000 mm (120")
Control Valves
Soft-pump / Vent Valve
Series 29 Aluminum, Stainless Steel
Angle valve with adjustable throttling position for pump down and venting with reduced turbulences, particle and substrate agitation and condensation
Actuation: PneumaticFlange: ISO-KFSizes: I.D. 25 to 250 mm (1" to 10")
Throttling System or Throttling & Isolation System
Series 61 Aluminum, Stainless Steel
Butterfly valve pressure control system for downstream applications
Actuation: Stepper motor, actuated via adaptive, integrated controller
Flange: ISO-KF, ISO-F, CF-F, ASA-LP, JISSizes: I.D. 25 to 250 mm (1" to 10")
Throttling &Isolation System
Series 64 Stainless Steel
Gate valve pressure control system for downstream applications
Actuation: 3-position pneumatics or stepper motor, actuated via adaptive pressure controller
Flange: ISO-F, CF-F, ASA-LP, ASA, JISSizes: I.D. 100 to 400 mm (4" to 16")
Throttling &Isolation System
Series 65 Aluminum (Option: hard anodized)
Pendulum valve pressure control system for downstream applications
Actuation: Stepper motor, actuated via adaptive, integrated controller and pneumatics for leaktight closing
Flange: ISO-F, JISSizes: I.D. 100 to 400 mm (4" to 16")
Compact Valves
Vatterfly Valve
Series 20 Aluminum, Stainless Steel Compact isolation valve with two-step turn-and-tilt mechanism, virtually particle free
Actuation: Manual, pneumaticFlange: ISO-F, CF-FSizes: I.D. 63 to 200 mm (2½" to 8")
Pendulum Valve
Self-regulating heating device with insulation
Uniform temperature distribution
Heating jackets for controlled bakeout Various surface coatings
Series 16 Aluminum (Option: hard anodized) Compact isolation valve, ideal for demanding semiconductor processes as well as for large coating and FPD production systems, virtually particle free
Actuation: Pneumatic Flange: ISO-F, ASA-LP, JISSizes: I.D. 63 to 500 mm (2½" to 20“)
Choice of sealing materials
Heating Compounds and Coatings
Valves for Specific Applications
Series 47RF-Bridge Valve
All metal gate valve used as sector valvein accelerators and storage rings
Series 19VERY LARGE Gate Valve
for large vacuum vessels used in e.g. fusion research and space simulation
Sizes: I.D. 400 to 1600 mm (16" to 63")
Series 75, 77Fast Closing Valves/Shutters
75: Seals vacuum-tight within milliseconds77: Reduces full conductance to a small leak within milliseconds
Accessories
Series 31 – 33 Fittings Range of quality accessories
Series 35 VATSEAL Patented metal seal for flat flanges
BellowsCOMVAT: www.comvat.com
Multi-valve Modules andCustomized Valves
Special Valves
Despite our vast choice, you may still require a special solution. With more than 40 years of experience and a broad knowledge of sealing and valve techno-logy, VAT has the resources to offer reliable and cost efficient solutions.
Inserts
A variety of valve types can be integrated. Early involvement of VAT’s pro-duct engineers in the design phase of customer systems ensures both optimized technical solutions and lowest cost.
Multi-valve Modules
Various valves or valve mechanisms are intercon-nected or integrated in a common housing to provide multiple functions within only one component. The design is customer- specific and thus allows optimal adaptation to the customer system and ample scope to meet also unusual customer requirements. Advantages are:- Compact- Cost-saving- Easy installation- Low risk of leakage- Only one contact
Engineering Support
Joint Development
In order to meet performance and cost targets of today’s OEM systems a close collaboration among engi neering is necessary.
Please contact us!
We offer a Variety of Support …
- On-site workshops- Valve specification advice- On-site design collaboration for specials and integrated solutions- Design verification
Engineering Compe tence through specialized Product Groups
PG 1 Angle ValvesPG 2 Gate ValvesPG 3 All-Metal ValvesPG 4 Transfer ValvesPG 5 Control ValvesPG 6 Large Transfer ValvesPG 7 Multi-valve Modules
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www.vatvalve.com
Global Support
YB
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EA
— USA/CanadaVAT Inc. 500 West Cummings ParkSuites 5450-5650Woburn, MA 01801Tel (0781) 935 1446Fax (0781) 935 3940Email [email protected]
— Headquarters SWITZERLANDVAT Vakuumventile AGCH-9469 HaagTel +41 81 771 61 61Fax +41 81 771 48 30Email [email protected]
— Representatives in many other countries
— BENELUXVAT Contact Office Zuiderstraat 30NL-3434 BN NieuwegeinTel (031) 30 6018251Fax (031) 30 6018252Email [email protected]
— FRANCEVAT S.A.R.L. Z. I. des Godets, SILIC 419F-91374 Verrières-le-BuissonTel (0) 1 69 20 69 11 Fax (0) 1 69 20 90 08Email [email protected]
— GERMANYVAT Deutschland GmbH Am Hochacker 4D-85630 GrasbrunnTel (089) 46 50 15Fax (089) 46 37 65Email [email protected]
— GREAT BRITAINVAT Vacuum Products Ltd. Edmund House, Rugby Road Leamington Spa Warwickshire CV32 6ELTel 01926 45 27 53Fax 01926 45 27 58Email [email protected]
— JAPANVAT Ltd. (Sales Office)Yokohama Plaza Building Kinko-cho Kanagawa-ku Yokohama 221-0056Tel (045) 440 0340Fax (045) 440 0342Email [email protected]
(Sales & Service Center) 67-1325 Kizu, Ako City, Hyogo Pref. 678-0165Tel (079) 148 1680Fax (079) 148 1681
KOREAVAT Korea Ltd. # 391 Chilgue-DongPyongtaek-CityGyeonggi-Do, 459-050Tel (031) 662 68 56Fax (031) 662 68 71Email [email protected]
— — CHINAVAT Vacuum Valves (Shanghai) Co., Ltd.848 Yunqiao Road, Building 1, 4th FloorPudong New Area Shanghai 201206Tel (021) 5032 6658Fax (021) 5032 6320Email [email protected]
TAIWANVAT Taiwan Ltd. 8F-6, No. 81, Shui-Li RoadHsin-Chu City 300Tel (03) 516 90 88Fax (03) 516 90 99Email [email protected]
— — SINGAPOREVAT Singapore Pte. Ltd. Wisdom Industrial Building38A Jalan Pemimpin # 01-01 Singapore 577179Tel +65 6252 5121 Fax +65 6252 5127 Email [email protected]