84
HDL-CR-82-158.1 April 1983 Integrated Component Fluldic Servovalves and Position Control Systems by D. N. Wormley and K-M. Lee Prepared by Massachusetts Institute of Technology Dinprtment of Mechanical Engineering Cambridge, MA 02139 Under contract DAAK21.79-C.0158 U.S. Army Electronics Research and Development Command Harry Diamond Laboratories C-) Adelphi, MD 20783 DTIC A-o=.d f Pu rei- , . - aV.ut. -i . ELECTEjt APR 2 a8N 04 27 018 I q-°

Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

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Page 1: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

HDL-CR-82-158.1

April 1983

Integrated Component Fluldic Servovalves andPosition Control Systems

by D. N. Wormley and K-M. Lee

Prepared by

Massachusetts Institute of TechnologyDinprtment of Mechanical EngineeringCambridge, MA 02139

Under contractDAAK21.79-C.0158

U.S. Army Electronics Researchand Development Command

Harry Diamond Laboratories

C-) • Adelphi, MD 20783

DTICA-o=.d f Pu rei- , . - aV.ut. -i . ELECTEjt

APR 2 a8N

04 27 018I q-°

Page 2: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

--- S~~Uý W.7--- .

UNCL-ASSIFIEDSECURITY CLASSIFICATION OF THIS PAGE (WmnDota Ln.,r."c.

REPOT DCUMNTATON ACEREAD INSTRUCTIONSREPOT DCUMNTATON AGEBEFORE COMPLETING FORM

1. REPORT NUMBER bQINO. RECIPIENT'S CATALOG NUMBER

HDL-CR-82-158-11 9,006___________

4. TITLE (and Subtitle) S. TYPE OF REPORT 6 PFRIoD COVERED

Contractor ReportIntegrated Component Fluidic Servovalves and Position Final 1979-1982

Contrl SysemSS. PERFORMING ORG. REPORT NUMBER

7. AUjTHR(a) 8- CONTRACT OR GRANT NUMBER(a)

D. N. WormleyK-M Lee DAAK21 -79-C-01 58(HDL Contact: James Joyce)

9. PERFORMING ORGANIZATION NAME AND ADDRESS tO. PROGRAM ELLMEKNT. PROJECT. TASKAREA A WORK UNIT NUMBERS

Massachusetts Institute oil TechnologyPrgaEe:61,2ADeoartment of Mechanical Engineering PormEe .10.Cambridge, MA 02139 HDL Project: A44934

It. CONTROLLING OFFICE NAME AND ADDRESS 12. REPORT DATE

Harry Diamond Laboratories ApIl 19832800 Powder Mill Road 13 NUMBER OF PAGES

Adeiphi, MD 20783 841.MONITORING AGENCY NAME A AOORESS(II different from, Controlling Office) IS. SECURITY CLASS. (of timi report)

UNCLASSIFIED

* -,15s.. OECL ASSIFICATiON/DOWNGRADINGSCHEDULE

-C:": 16. DISTRIBUTION STATEMENT (a(f this Report)

Approved for public release; distribution unlimited.

17. DISTRIBUTION STATEMENT (of the abstract angered In Block 20, It different from Report)

IS. SUPPLEMENTARY NOTES

DROMS Code: 61111102.1-.44001 1DA Project: 1LI161102AH44

19. KEY WORDS (Continue an reverse side It necesem7' and Identify by block number)

-. .,Servovale Fluidir gain blockLaminai proportional amplifier Position control system

2ILAM CT ~eitilwe m rvers ebb If ,evwesay md idanitit r by block nwamhvr)

The operating characteristics of fluidic lamninar proportional amplifiers (LPA's) operating onhydraulic oil have been determined as a function of pressure and temperature. The usefuloperating range of these elements has been defined for application in multistage gain blocks andsumming amplifiers.

An operational servovalve constyucted from LPA's has been developed and coupled with a* f fluidic position feedback transducer, summing amplifier and ram to construct a closed loop posi-

DD I F 4'73 I E01ITION OF I NOV 611IS OBSOLETE1 UNCLASSIFIEDSECURITY CLASSIFICATION OF THIS PAGE (Whe1bn Data &ntrod)

Page 3: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

UNCLASSIFIED- ~SkCURITY CLASSIFICATIOM OF THIS PAGE~~a Data SM1004

S.,

20.'pbstract (Cont'd)

tion control system. Static and dynamic experimental evaluation of the servosystem has shownthet its performance is comparable to that of a servo employing siectrohydraulic components.

This development effort has demonstrated the capability to develop high performance,closed loop servo components from standard, integrated component fluidic elements

2 UNCLASSIFIED

59CURITY CLASSIIFICATION OF' THIS PAGOE(Mo~hn Date Entered•)

...

Page 4: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

CONTENTS

Pagei ~1.• INTRODUCT10N ........................ . . . .. . . . ........ 7 -

2. FLUIDIC INTEGRATED COMPONENTS. ....................... 11

2.1 Laminar Proportional Amplifier ......... 0.......... 11

2.2 Fluidic Channel Resistante.....o...................... 19

3. FLUIDIC GAIN BLOCK AND SERVOVALVE .......................... 21

3.1 Gain Block Configuration and Characteristics .......... 213.2 Fluidic Servovalve Configuration and Characteristics.. 273.3 Temperature Effects and Compensation .................. 333.4 Dynamic Response....*... ................. .. .. 39

4. FLUIDIC POSITION SERVO .................. *............... 47

4 . 1 F l u i d i c S u m m e r . . . . . . . . . . . . . . . . . . . . . . . 4 7

4.2 Mechanical-Fluidic Displacement Transducer............ 474.3 Fluidic Servovalve.. ............................... 514.4 Closed-Loop Fluidic Position Servo .................... 524 .5 I m p l e m e n t a t i o n . . . . *. *.. . . . . . . . . . . . . . .... . . . 5 3

5. SUMMARY AND CONCLUSIONS .................................. 57

NOMENCLATURE ..... I.. .......... ............... 73

DISTRIBUTION .................................................... 77

Aeossjon Fol---

DTIC TABuenamoUnoed

JUStiflostl~o

"_DI Itrlb.u_. t ton/

Avallabillt, Codes

",-.

S S 2 . .

2 * - -T

Page 5: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

FIGURES

Page

1. Closed loop position servo and servovalve output characteristics. 8

2. Kinematic viscosity as a function of tewperature................. 10

3. Primary fluidic C format integrated components*........*......... 12

4. Silhouette for b - 0.5mm LPA in C format........................ 135

5. Comparison of theory and data of blocked load gain ............... 15

6. Experimental data illustrating the operating range of LPA ........ 18

7. Comparison of analytical and experimental nozzle resistance ...... 22

8. Gain block schematics........................................ .... 24

9. Gain block construction schematics ............................... 28

10. Experimental gain block output characteristics ................... 29

11. Comparison of computer-aid design prediction and experimentalgain block output characteristics ................................ 3 0

12. Servovalve schematic .... .*...*.. ....................... . 32

13. Effect of valve parameter a (on valve characteristics)........... 34

14. Servovalve construction schematics .................. ......... 35

15. Experimental data of servovalve output characteristics ........... 36

16. Comparison of experimental and analytical servovalve outputcharacteristics ................... o. o........ ... .............. ..set 37

17. Gain block compeitsated and uncompensated blocked-load pressureg...... ..... ....... 40

18. Fluidic servovalve compensated and uncompengated blocked-loadpressure gain .. o. e..... .... ..... . .. . .. . . .............. a. ..a;.9 41

19. Cain block and servovalve blocked-load pressure gain frequency.response........... .... . ......... ., 43

20. Gain block and servovalve no-load flow gatin frequency responses... 44

21. Comparison of blocked-load frequency response between inte-gre=ed component servovalve and breadboard configurationseIjvovalve...... .. ............ . . ...... ....... ;..,.; .. . 45

22. Comparison of no-load frequency response of integrated.coa-ponent servovalve, breadboard configuration and electrohydraulicservovalveo.o..... .... ...... ... *... . .. . .. . .. . . . . . ..... 46

23. Fluidic position servo block diagram... .e...... ............... 4 8

24. Mechanical-fluidic displacement transducer schematic...... ...... .49

25. Root locus analysis of fluidic position servo ................... 54

26. and W T of fluidic position servo ........................... 55n

27. Fluidic position servo construction schematic...................56

28. Fluidic summer schematic and static characteristics.............. 60

-"-

Page 6: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

K Page29. Fluidic sumuer blocked-load frequency response ...................... 6130. Displacement transducer blocked-load static characteristics......... 62

31. Displacement transducer blocked-load frequency response.....*....... 63

32. Fluidic servovalve no-load static characteristics .......... .... 64

33. Fluidic servovalve no-load frequency response ........ 65

34. Comparison of step response between fluidic and commercialposition servo ........ . .. .......................... 66

35. Comparison of experimental and analytical step response of fluidicposition servo ....................... . ...... ........... 67

A-i Servo components descriptions ..................................... 72

TABLES

1. Hydraulic Oil Unvis J-43 specification ........ .. .......... 11

2. Characteristic dimensions of LPA's ................................. 16

3. Gain block configuration and incremental parameters ................. 28

4,. Fluidic position servo component configuration ........... .... 585. Values of parameters of fluidic position servo ...................... 59

A-1 Gain block stacking order and descriptions .......................... 69

A-2 Servovalve stacking order and descriptions .......................... 71

LN

5

.4"A

Page 7: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

: 1. INTRODUCTION

Hydraulic control systems are wideiy used in applications where high force

levels, fast response and high power to weight ratios are required. Aerodynamic

* control surface actuators, machine tocl actuators, mobile equipment control sys-

tems and marine control systems frequently employ closed loop hydraulic control

systems. Important performance criteria for these systems include maximum force

and velocity capabilities, accur.cy, repeatability, reliability, maintainability

and cost.

The primary power modulation elements in high performance hydraulic systems

are servovalves. In position and velocity control systems servovalves are

utilized extensively as indicated in figure 1. Also shown in the figure are

typical pressure-flow output characteristics of commercial sliding spool servo-

valves. Servovalves with linear flow gains and high pressure gains are desired

to achieve accuracy and overcome actuator and load stiction.

Electrohydraulic servovalves consisting typically of a torque motor, a

first stage flapper nozzle or jet-pipe valve and a final stage sliding spool

valve are the dominant type of valves employed in high performance hydraulic

systems. In these valves the electromechanical interface and the sliding

mechanical elements contribute to valve cost, sensitivity to contamination and

sensitivity to failure due to radiation.

The high reliability, insensitivity to extreme environments and low cost

associated with no moving part fluidic elements and the potential for weight and

size reduction In comparison to conventional valves are attractive features for

servovalves. In addition, the implementation of a closed loop control system

employing only fluid and mechanical elements offers potential for reduction of

sensitivity to radiation and increased reliability with the elimination of

electro-mechanical interfaces. In systems where these &ttributes are important

and where the quiescent power drain associatec with open-center fluid valves can

be accommodated, fluidic servovalves and pure fluid-mechanical control systems

have high application potential.

The application potential of pure fluid servovalves and control systems

1R. Deadwyler, Two Stage Servovalve Development Using a First-Stage Fluidic

Amplifier, Harry Diamond Laboratories, HDL-TM-80-21 (July 1980).

7

-' . - . . . . . . -- .- ,--.-. --•- - - * - - -C . . . . . - . .

Page 8: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

Actuator hposition

Set Processi LaPointI

Dislaowe,: Q

LL

Figue 1.Closd lop poiti~ seVoadsroalve otu

4.. cDarpcteristics.

00, Loa

8P

'4 4 -- 4 - . ..- 4.4. 4 -.. 4 . . ... , 4L

-4W- 4.. . . .. . . . . . . . .. -2 b..~

Page 9: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

-,. motivated a study2 in which a pure fluid servoalve was constructed using laminar

* proportional amplifiers (LPA's) in a breadboard configuration. In the present

study, development of pure fluid servovalves and servosystems has continued.

Servovalves constructed from standard C format laminates 3 and interconnecting

elements have been developed to reduce packaging volume and weight, provide a

basis for standardization and to improve valve dynamic response. The static

and dynamic characteristics of the C format LPA elements individually and

integrated into the servovalve have been measured including performance sensi-

* tivity to temperature. Finally the servovalve has been employed in a closed

loop position control system which !.ncludes an actuator and fluidic position

transducer for evaluation.

Two aspects of the influence of temperature are particularly addressed

in this study, namely, the static characteristic performance and the laminar

operating range of the LPA as a function of supply conditions.

In all tests described in this report, hydraulic oil Univis J-&3 has

been used. The properties and specifications of the fluid are sumnarized

in table 1 and the kinematic viscosity as a function of temperature is shown

in figure.2 in the range from 20'F to 140*F. Univis J-43 changes in viscosity

over this typical temperature range. An exponential curve fit of the form:

S= u - X ( T - T o( I

whereV - kinematic viscosity at temperature T,

V - kinematic viscosity at reference temperature, T0 0

SX - viscosity - temperature coefficient,

may be used to approximate the kinematic viscosity of the hydraulic oil Univis

J-43 as a function of temperature

with X 0.02862 l/OC [0.0159 1/'F]

and v - 21.78 cSt. evaluated at 25*C [77*F]

The exponential curve of equation (1) is a good approximation to the fluid vis-

cosity as shown in figure 2.

D.N. Wormley, D. Lee, and K-M Lee, Development of a Fluidic, Hydraulic

Servovalve, HDL-CR--81-216-1, Harry DJamnnd Laboratories (February 19d1).

3M.F. Cycon and D.J. Schaffer, Design Guide for Laminar Flow Fluidic Ampli-fiers and Sensors, HDL-CR-28-288-1, Harry Diamond Laboratories (April 1982).

9

-.

Page 10: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

LL

00

P 006--0

I I

.4.

10

Page 11: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

b%..

TABLE 1 HYDRAULIC OIL UNIVIS J-43 SPECIFICATION

Specific gravity: 0.860?

Temperature ('C) Kinematic Viscosity (cSt.)

100 5.2

54 10.3

40 14.9

-18 102.7

-40 495.5

-54 2332.

2. FLUIDIC INTEGRATED COMPONENTS

Fluidic C format integrated components are basic elements in the servo-

valve. The pr'.mary elements are the LPA and the channel resistance which

are shown in tigure 3. The secondary elements are vents, exhausts, spacers,

transfers, base plate, input and valve manifolds. The primary elements are

standardized in design and manufacturing and are thus well documented and

have repeatable characteristics.

2.1 Laminar Proportional Amplifier

Laminar proportional arplifiers have been designed to operate in

the laminar flow regime. The detailed geometry of a typical HDL integrated

component laminar proportional amplifier with a summary of LPA characteris-

tic dimensions are illustrated in figure 4.

The LPA performance is influenced by the temperature of the op-

erating fluid through its influence o"? the fluid viscosity.

The analytical design procedures which predict the performance of

the laminar proportional amplifier based on the characteristic dimensions4

and the supply conditions have been discussed by Drzewiecki et al. The

4 T.M. Drzewiecki, D.N. Wormley and F.M. Manion, Computer Aided DesignProcedure for Laminar Fluidic Systems, Journal of Dynamic Systems, Measure-ment and Control, 97, Series G, No. 4 (December 1975).

- 11

Page 12: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

(a) Iamiilar propontiona I awl) lIi fi (LPA)

(b) linear channel resistance

(c) nozzle or nonlinear resistance

Fig•ure 3. i'r imlr-' cy tL.jdic C format integrated components.

1?

Page 13: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

B BtO

x/c/0

b p

b - supply nozzle width

- aspect ratio, h/bs

B control port minimum widthC

B 0 outlet port minimum width0

B - splitter widthB t downstream control edges spacing

X control port channel lengthcX0 outlet port channel length0

Xth supply nozzle throat length

X supply nozzle - splitter distancesp

Capitel.zed parameters are normalized to bsa

Figure 4. Silhouette for b 0.5 mm LPA in C Format3

13

Page 14: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

LPA's with aspect ratios less than one are commonly used in the design of

multistage gain blocks. However, limited experimental data are available

for LPA's of aspect ratio less than one. The work described in this section

provides data and correlations for gain block and servovalve design using

LPA's in this range of aspect ratios.

The supply condition of an LPA may be characterized by the modi-

fied Reynolds number

NR- MR

R ) 2 (lxh

where b 2P

R V P

p - fluid density

P - supply pressure, gage8

T = nozzle aspect zatio, h/bs

Experimental data have been collected from three different C for-

mat LPA configurations (HDL 63020, HDL 72010 and HDL 61505) with aspect

ratios of a - 0.667, 0.55 and 0.333 and supply nozzle throat widths of

0.75 mm, 0.5 mm and 0.375 - respectively. The characteristic dimensions

are shown in Table 2. The LPA's have been tested under blocked-loadconditions over a temperature range of 5.5*C (42°F) to 48*C (118gF) and a

pressure range of 35 kPa (5 psi) to 11,032 kPa (1600 psi). In all tests,

the control bias pressures were adjusted to 5 percent of tl e supply pressure.

The analytical and experimentally measured blocked-load pressure

gain are plotted against the modified Reynolds number in figure 5. The

analytical model is based on the modified two-dimensional, incompressible,4

laminar jet deflection theory discussed by Drzewiecki et al. The experi-

mental gains were determined from the slope of the blocked-load characteris-

tics at the null position.

4 T.M. Drzewiecki, D.N. Wormley and F.M. Manion, Computer Aided DesignProcedure for Laminar Fluidic Systems, Journal of Dynamic Systems, Measure-ment and Control, 97, Series G, No. 4 (December 1975).

14

.......................................

Page 15: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

0 en4- 4

'4.4J

41 0

0, 0 041 4

4444

NI 0

43 )

P0 %. C44

UT~b xnsszd POT PNOOT

o1

Page 16: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

TABLE 2 CHARACTERISTIC DIMENSIONS OF LPA's

HDL design 63020 72010 61505

b (Mm) 0.75 0.5 0.375

"0.667 0.55 0.333

B 1.0 1.0 1.0

B3.08 4.0 4.733

x 8.875 13.312 21.c

B 1.2 1.25 1.330B 2.667 2.875 3.6

X 14.875 16.56 22.080

B 1.25 1.125 1.167t

B 0.55 0.5 0.533sp

Xth 1.257 1.25 1.25

* X 8.0 8.0 8.0sp

The experimental data closely follow the analytical predict,.on up

to N' " 120 beyond which transition-to-turbulence occurs and the theory

based on laminar flow fails. In the turbulent flow regime, the flow noise

K increases, offset increases and the gain decreases. Therefore, thetransition-to-turbulence establishes an upper design limit of operation for

the LPA. In the laminar flow regime, the blocked-load pressure gain in-

creases as the Reynolds number increases.

L.. A guideline to determine the point of transition from laminar

to turbulence for fluidic devices (when X - 8 to 10) has been discussed

by Drzewiecki et al. 5

CdNR

-200 (2).':. +

where Cd volumetric discharge coefficient, f(N•) or the expression may be

written as

5T.M. Drzewiecki and F.M. Manion, Fluerics 40: LJARS, The LaminarJet Angular Rate Sensor, HDL-TM-79-7, Harry Diamond Laboratories (December

16

S.. . . . . . .

Page 17: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

C lr 200 (.. :. I = +Xt5(3)C R Itr l+X th

For Xsp 8 and X th 1.25, the point of transition from laminar to tur-

bulence occurs at N'. = 120.

The lover operating limit of the amplifier may be predicted from

the information on the control edge clearance. The amplifier ceases to

function if the jet cannot deflect. The distance from the control edge to

the jet edge, based on the assumption that the jet spreads linearly, is

given by Manion et al. 6

B 1Bv c (4)

whereBv - distance between control edge and jet edge

C9 = momentum flux coefficient.

With C9 - 1.32 C 2 and B - 0, the expression may be written as

47.5 B

d Ri• The average value of CdN' for the three amplifier conf igurat ion s is ap-

proximately equal to 10 and the point at which the LPA fails to functionoccurs at NR'-- 22.

The experimental data obtained for the blocked-load pressure

gain of the three different LPA configurations are plotted in figure 6.

The effect of the modified Reynolds number on the blocked-load pressure

gain may be sumarized by noting the four regions defined in the following

paragraphs.

In region (1), 0 < N' < 40, the blocked-load pressure gain is

less than 50 percent of its maximum value. In all three different con-

6F.M. Manion ana T.M. Drzewiecki, Analytical Design of Laminar Pro-

portional Amplifiers, Proceedings of the HDL Fluidic State-of-the-ArtSymposium, 1, Harry Diamond Laboratories (October 1974).

17

..................... .

Page 18: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

0 0 kn Go 0 M t-

40 owe0 to4wi i.p4 kOO 0

%0 0 9.b 0

'Ur-

0@4 0 101

00

O41rS-d

4 "4".4 4J

r-

0 (Z 4.bu o

b" 4

181

Page 19: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

figurations tested, the LPA gain is zero for NR< 20.

In region (2), 40 < NR_ 100, the typical LPA operating range is

bounded by two limits, a lower limit below which the LPA gain is too low

for use and an upper limit beyond which transition-to-turbulence occurs.

In region (3), 100 < NR' < 120, just before the analytical rre-

dicted point of transition-to-turbulence, the experimental data are

scattered. This uncertainty suggests that the point of transition-to-

turbulence is in this region.

In region (4), NR_ > 120, the blocked-load pressure gain decreases

and noise increases since the LPA's are operated beyond the transition-to-

turbulence.

2.2 Fluidic Channel Resistance

The channel resistor is one of the important elements in fluidic

circuits. In general, the channel resistance may be represented as a

laminar, fully-developed duct resistance. The channel resistance consists

of a linear portion due to the fully developed viscous dissipative flow in

the channel plus a nonlinear portion due to the entrance region pressure

Sdrop. A general expression for a channel resistance given by Drzewiecki 7

is12 U= + I + C + 0.4752q (6)

R 2bh~ l a bc

where

for 1 < a < 2, 0.35 < C < 0.5;c

for o > 2, C = 0.5,

x - channel length in the direction of flow,

b - average channel length,

b - minimum channel width,

Q volumetric flow through duct,

- channel aspect ratio, -h

c

7T.M. Drzewiecki, Fluerics 37. A General Planar Nozzle DischargeCoefficient Representation, HDL-TM-74-5, Harry Diamond Laboratories,"(1974).

19

Page 20: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

= absolute fltid viscosity,

C = empirical constant.

For the case where the channel length is much longer than the en-

trance length, the nonlinear term may be neglected. An analytical study on

the hydrodynamic entrarce length for incompressible flow in rectangular

ducts has been performed by Han. The experiments to verify the analysis9of Han for aspect ralios of 5 and 2 have been performed by Sparrow et al..

The results of these studies to determine the entrance length may be sum-

marized as2

L- 0.055 c N foro a 5,c c(Jl7(4Oc )2Rc

Le U.127 N o for ac 2,

whe re

L - normalized entrance length, Ze/b

NR - channel Reynolds number, referred to b.c

For flow between parallel-plates, Schlichting10 has derived an expressionfor the entrance length as

L e

2 - 0.04 for b >> h.Oc2NcR

c

If the assumption of fully developed flow is Justified and the

entrance length can be neglected, the flow can be described by Poiseuille

flow between p&rallel plates and the expression for the resistance may be

stated as

R - 2 for b >> h. (7)c bh3

V88L.S. Han, Hydrodynamic Entrance Lengths for Incompressible Flow in

Rectangular Ducts, Journal of Applied Mechanics, 27, Trans. ASME (1960).9 E.M. Sparrow, C.W. Hixon and G. Shavitt, Experiments on LamAxar Flow

Development in Rectangular Ducts, Journal of Basic Engineering, Trans. ASME(March 1976).

10M. Schlichting, Boundary Layer Theory, McGraw-Hill, New York, New York,(1960).

20

.•" • " , " - - " : , • . i - • : . . . .: : ' - : .• . • , • •i' -. . - . ,* . -, / , . . .. . . ..-

Page 21: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

-- 1 . .-.'. i7X -N,-. - - - -. - m

The standard nozzle, 5221A-20 shown in figure 3, has been used as

a channel resistor in the design of the gain block. Since the channel length

is much longer than the entrance length of the flow for a wide range of

Reynolds numbers, the quasi-fully-developed assumption is justified, and

equation (6) may be applied. Normalizing equation (6) to the linear portion,

the expression for resistance is

j-2 a +1 + 2) 1+ X+ 0.7 ( * _(- th C N' (8)

12 \b - ) d R

whereR

Im+

The nozzle resistance as a function of modified Reynolds numbers

has been determined experimentally. The range of temperatures and the

pressure drops across the nozzle are from 6C to 480C and from 5516kPa

to 10170 kPa respectively. The experimentally determined nozzle resis-

tance is compared with analytically predicted values using equation (8) as

a function of modified Reynolds numbers in figure 7. The experimental data

falls within 10 percent of the predictions in the range of Ný tested.

3. FLUIDIC GAIN BLOCK AND SERVOVALVE

The fluidic servovalve consists of a multi-stage LPA gain block and a

set of laminar flow resistors. The gain block is a basic power amplifier

while the resistors are used to provide feedback and summing functions.

3.1 Gain Block Configuration and Characteristics

The analytical design of the fluidic gain block to predict the

essential characteristics as a function of individual stage operating

Reynolds number, control bias pressure and the detailed geometry of the LPA

has been discussed by Manion et al. 4 ' 1 1

4 T.M. Drzewiecki, D.N. Wormley and F.M. Manion, Computer-Aided DesignProcedure for Laminar Fluidic Systems, Journal of Dynamic Systems, Measure-ment and Control, 97, Series G, No. 4 (December 1975).

11F.M. Manion and C. Non, Fluerics 33: Design and Staging of Laminar

Proportional Amplifiers, HDL-TR-1608, Harry Diamond Laboratories (September1972).

21

Page 22: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

-' - W �Y�' -� ' � -. - F-. - - - - - . . -.---- -.--.------ �----I-�----..---'-----�---'--

-� - -- - - - �S. - - . - . ...-... . .-S. -.

I.

C

SciE

.1.4 5-S. *

0 0 N�5** .14 0dJ

Nem.5. - I.

�I �

N0 1

3 0

.- *64

K'0

1'¶5

I

0 4

4J -4�

N h.14* . 0

* Np5.-S -ISi. 1 0

ka I

0* �fl

S p 5

N o

� '.ouw�sTse�i rsuuwv *30CUOTUUWFQ

22.4

%��* � '5 5� '5% - -- -. . - -- - .

-- * . - .- ... - - -

Page 23: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

The general design criteria of a gain block are as follows:

(1) Maximize the laminar operating range by matchingthe modified Reynolds numbers, of each stage:

"il -NM'2 - NR'3NRi =R2 = R3'

(2) Achieve 90' phase shift bandwidth requirement:

900 3 4x3 _ sp

21r2PdCdi p

(3) Maximize the blocked-load pressure gain:

K, K 'KK1 •1 2 3K

where K1 , K2 and K3 are blocked-load pressure gain of Ist 2 nd and 3 rd2 3

stages LPA respectively. R01 and R02 are output resistance of the let

and 2nd stages and R1 2 and Rt 3 are input resistance of the 2nd and 3rd

stages.

(4) Maximize the input-to-output resistance ratio:

R /Rii 03*

(5) Minimize the quiescent flow draw:

3Q8 i: £ Qsis

5i-l

at ud rdwhere Q (i 1,2,3) are supply flows of the 1st, 2 and 3 stages. An

iterative design procedure is generally required to achieve a design which

meets (if possible) the above design criteria.

The gain block shown in figure 8 has been designed using the

guidelines cited above.

The supply pressure of the three stage gain block is connected

directly to the final stage of the gain block. The first and second

23

'1A

Page 24: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

I

L" ~Po

add

'i.r. - -.... -

3 Stage

P%* HDL 71505

S2nd stage

HDL 6302010

IL• . -, ....- • -.. I .Qs i• cd

p3

Figur'e B, Gain block schematic..

24

.~~ Stage-- . ~. - . * ~ . * * - . t * - -A m . . . . . . . . .

Page 25: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

stages are supplied by reducing the main pressure through the pressure re-

ducers which are a number of nozzles in parallel.

The first and second stage supply pressures depend on the final

stage supply condition with respect to the fluid properties. The supplyth;ressure of i stage, P may be expressed as

P sP m 1a5 fb +i (9)

ni Rsi

where

a, no. of LPA's in parallel of ith stage,thni M no. of resistor nozzles in parallel of i stage,

thR * LPA supply resistance of i stage,

R a nozzle resistance of ith stage.ni

As the nozzle resistance, Rni, and the supply resistance, R.i are connected

in series, the flow through R and R are related by the continuityni si

equation as

- 2 (10)

Qsi ni

With equation (10), the ratio of the nozzle resistance, Ri, to the supply

resistance, Ri, may be expressed as

R 24 X [c 1 rH1"ni ni 1. _-ni-

:-" -- = " + n + C • Cd

Rs -2 [ -1B2 H nN Rini ni ni

S]~2 "i+ 0.95 • BiHi] " Cdi (11)

B niH ni n Cdi

where

0, O LPA aspect ratio,

"X U-i normalized nozzle length, Xin/bsi,

Bn a normalized nozzle average channel length, bn/bs,ni ni sit

Bni normalized nozzle throat width, bi/bi,

Hni - normalized nozzle height, hn/bait

25

Page 26: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

-- - - - - - .... .... .. -- --

H H6

-ni Sn.

1 < < 2, 0.35 < c < 0.5; > 2, C = 0.5.B ini B n"S mu ~th I

Subscript i refers to the i stage.

The Reynolds number of the first and second stage LPA may be

. related to that of the final stage as

N b si Psi N(2NRi bsb aN-f (12)N1 7be

wherebs* LPA supply nozzle throat width, i th stage.bsi LPA supply nozzle throat width, i stage,bf 0 LPA supply nozzle throat width, final stage,

N Reynolds number of i stage,Ri.

N Reynolds number of final stage.Rf

" ~ As the first and second stage supply pressures a".. an implicit function of

the final stage Reynolds number, NRf* the first and second stage operating

Reynolds numbers depend only on the final stage Reynolds number. In the

following discussions, the gain block operating Reynolds number is referred

to the operating Reynolds nuaber of the final stage, N Rf* The first and

second stage Reynolds numbers can be related to the final stage by solving

_N• equations (9) through (12) simultaneously.K2In the report by Wormley et al. 2 a hyperbolic tangent curve has

been used to describe the nonlinear saturation characteristics of the gain

block. The output pressure/flow characteristics of the gain block may be

expressed as

QL Pcd Pod-l- tanh (13)

PLs Pcds ods

where

QL = output load flow,

Pod = amplifier output pressure differential,

"P cd amplifier input pressure differential,

2 D.N. Wormley, D. Lee, and K-H Lee, Development of a Fluidic, Hy-draulic Servovalve, HDL-CM-81-216-1, Harry Diamond Laboratories(February 1981).

26

S . .

Page 27: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

f- - " I . . , •. . .ý .- , I - . '..- , ", "- - ,'- , .- ' .- ii..- .-. ,., - .i, -_ . , - - . . . . ' . , . , , - . . . ,

QLs = saturation output load flow,

Pods m saturation emplifier output pressure differential,

and where the saturation control pressure differential is defined as

P ous QLspcd - 0-- =~ L (14)c ds K K (4

V q

with the incremental amplifier static pressure gain K and flow gain, Kp q

defined as

K Kp - cd (15)

QL

LQpQ L

Kq a Pcd o (16)IPod =0

A three-stage fluidic gainblock with a single supply pressure

based on the standard packaging technique was cinstructed and tested. The

construction schematic of the gain block i's shown in figure 9. The

stacking order is listed in appendix A. The characteristic dimensions of

the amplifier laminates and the three stage amplifier parameters, measured

with Univis J-43 at a temperature of 27°C, are summarized in table 3. The

experimental output characteristics are displayed in figure 10. The com-

parison between the predicted and the experimentally measured characteris-

tics displayed in figure 11 shows that the analytical model with hyperbolic

tanh curve closely matches the experimental data.

3.2 Fluidic Servovalve Configuration and Characteristics

The conceptualization, analysis and design of a fluidic servovalve

constructed from the gainblock and fluidic resistance elements in a2

breadboard configuration are described by Wormley et al. . The flow feedback

resistance in the case in which the net flow feedback is equal to zero can

be eliminated. In order to minimize the loss of output flow due to feed-

2Drli Wornley, D. Lee, and K-M. Lee, Development of a Fluidic,

Hydraulic Servovalve, HDL-CR-81-216-1, Harry Diamond Laboratories

(February 1981).

27

" " "" , " . . . . . .' -• ' , .. .. • . , , .. .* z L, i .i ± ... . i ,*: . . -. . . . . . . . .-

Page 28: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

input 'npt anolSignal rptMnfl

., """ " " . ........... a Stage Amplifier2n tge ~- ~ ]2 Stage Amplifier

NozzleF 3I Stage Amplifier

I st tegeI

SNozzle _ _ _., - . __ _ .

-- Base Plate

Valve Manifold

Figure 9. Gain block construction schematics.

TABLE 3 GAIN BLOCK CONFIGURATION AND INCREMENTAL PARAMETERSLAMINATE DESCRIPTION

Stage Design b (mm) a= h/b Number ofs Sections

1 HDL 63020 0.75 0.667 22 HDL 72010 0.5 0.55 3

" 3 HDL 61505 0.375 0.333 6

,_EXPERIMENTAL DATA

P 6895 kPa 1000 psiPods 2551 kPa 370 psi

-6 3QLs 8xW0 m /sec 0.5 cis

Pcds 6.72 kPa 35 in.H 0

K 277

q 8,6xi0-7 m/sec/kPa 0.35 cis/psi

R 5.80x10' 0 N-s/mi5 140 psi/cisa

,', 28

Page 29: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

00

(U UM

* r41

N

o C4

10I 4, ,o4 = I"

41

l I1 II II# N N

0

04.V'

.400on in VA 0

I I p "s•""€ -

o,-

1

4

I2 9

L!

'I

4%*

:.: 29

F.

Page 30: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

r-

441

tn 0

a*a

0. 0

u.~CLgi *!4440 . 0C 0

a oo~-r r-4.

0 14

P04

67...

I qC4 cLteso/ -mmm ol.-ii.94n

30

Page 31: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

back and the complexity of the valve construction, the case of zero flow

feedback is chosen for the performance evaluation. In this particular case,

the resulting nonlinear normalized governing equation of the valve becomes

*LQ + - tanh + (17)Pods PPod

Ls ods [f ida dS

where

" Pidm maximum input pressure differential

Ixm P -Am. for R >>R (8R+ cds fp i.(8;.: + R

•* a

'Y RRi 1 1 l,(9

i- R K )Kp (19)fp +

a

R, M input resistance,

Rfp - pressure feedback resistance,

R a amplifier input deflection resistance.a

The schematic drawing of the servovalve is shown in figure 12.

The fluidic servovalve steady state blocked-load pressure gain and

no-load flow gain can be obtained from the linearized valve model as

aqL KG q _ ~--- (20)

dqs RiPod- 1+ +

Gs - PId - (21)dQLO ( R-y) +a

31

L P

G(_

- .•_ R '

Page 32: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

pP od

'ý44

I Ra a

K Rfp

fpp

4 ~ id

Figure 12. Servovalve schematic,

32

Page 33: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

.; o .. L- -r --.- ,,--- , -.. ..... •¶ r r r "''" "-V '• I • • " V 7W -' - - ' '

The steady state performance of the servovalve is characterized

by the parameters a and y. The valve parameter ot indicates the flow gain

linearity with respect to the maximum input pressure differential whereas

the parameter y provides information regarding the limit of servovalve

stability.

As shown in equation (21), the servovalve pressure gain is sen-

sitive to the valve parameter y. The fluidic servovalve has a maximum

pressure gain at y equal to one and has a negative pressure gain for y

greater than one. The valve is unstable when the valve pressure gain

curve has negative slope.

The effect of a variation in a is illustrated in figure 13. With

y - 1 to achieve maximum pressure gain, the servovalve flow gain becomes

more non-linear as a is increased.

An integrated component fluidic servovalve has been constructed

and tested. The gain block discussed in the preceeding section has been

used in the servovalve design. Two HDL 5196 capillaries are connected in

series to form an input resistor Ri. The pressure feedback resistor Rfp

consists of four parallel HDL 5026 capillaries in series, with a HDL 5027

capillary. The experimentally measured resistances at the temperature of

"27C (80.6*F) are::: =1010

R 4.42 x N-s/m 5 (105 psi/cis) and

Rfp= 7.52 x 10l2 N-s/mi5 (17850 psi/cis).

The servovalve construction schematic is shown in figure 14. The stacking

order is summarized in appendix A.

The experimental data obtained at a temperature of 270C and a

supply pressure of 6895 kPa (1000 psi) showing the output characteris-

tics are displayed in figure 15 and compared with the analytical prediction

in figure 16. Apart from the offset, the analytical prediction fits the

experimental characteristics well.

3.3 Temperature Effects and Compensation

For imcompressible flow, the working fluid temperature affects

the Reynolds number, NR - (b /v)/2Ps/P, through an influence on the fluid

33

Page 34: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

1.0 II/Q~s C --.

L Ls a - 0.5

1.0

0.5

.4 od

4. "-1.0 -0.5 0 0.5 1.0 ods

;.'

QL/QLs

-10,-000. 1.02

a- 125

y

=1.0

________________ ~od

-1.0 -0.5 0 0.5 1.0 Pods

t• -

a ,, 2.S

"Y -1.0

,•.S

'•'

Pod

-'-1.0

-0.5 0

0.5 1.0 Pods

.4," Figure 13. Effect of valve parameter a on ValveCharacteristics.

* 34,p

4,E':• •,,',,'- -'','•," '-_'-1-

. ..2._

, ". . '", -.- •, . . . .. .J -• , -_.. ,.'- , ". _- " i . ,._ -. _. . .. • ._- . .i .... -

.. . - -

Page 35: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

00 U,

'o - -4 F4 *q

4 04

414

35 - -

Page 36: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

'..,, ..

, I,

A.-to

a!

4.dO

o (~4

36~

Yl-"

Page 37: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

0 0

.494

04

a a60

100

9. 0

37

Page 38: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

"viscosity. The effect of the change of operating Reynolds number on the

blocked-load pressure gain of the LPA has been discussed in section 2.1.

The stability of the fluidic servovalve is primarily deter-

mined by the valve parameter 1, which is a measure of the degree of

positive pressure feedback. The value of y can be increased by de-

creasing the pressure feedback resistance, or increasing the gain block

pressure gain, Kp, or the value of input resistance to the point where y

is greater than one and the valve fails neutrally. The additional flow of

the positive pressure feedback due to the increase in temperature tends to

decrease the valve stability. On the other hand, if the positive feedback

flow is reduced as a result of a decrease in temperature, the valve behaves

as an amplifier with reduced feedback. To compensate for the temperature

effects, the valve parameter y must be kept at a desired constant value in

the temperature range concerned. Since the ratio of two linear resistances

is independent of fluid viscosity and the factor 1/(1 + Ri/Ra) is not

significantly affected by temperature variations, the valve parameter y is

primarily dependent on the blocked-load pressure gain of the gain block,

K.p

The valve parameter a is proportional to the ratio of maximum

input pressure differential, P id' to the saturation control pressure

differential P cds The saturation control pressure differential, Pcds'

decreases as the temperature increases. The maximum input pressure dif-

ferential must be limited in order to keep the flow gain in a reasonable

linear range. However, the linearity of the servovalve flow gain is main-

tained at the expense of the maximum input pressure differential, Pidm"

Since the gain block characteristic performance is primarily

a function of final stage Reynolds number, this provides a means of ten-

perature compensation by maintaining a constant operating Reynolds number,1Rf. From the definition of the Reynolds number and the kinematic viscosity-

temperature relation as written in equation (1), we have

N R(T)Rv Ps(T) ~(T-T) P(T))T -

N(T) V Ps(T) e 0 T) (22)4Rf 0 s 0

38

Page 39: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

If NR (T) = NR (T) - constant, thenf f

P (T)- e' 2X(T-To). (23)

SP(T 0 )

Hence, the supply pressure must be varied directly proportional to the

square of the fluid viscosity in order to maintain a constant Reynolds

number. To decrease the high pressure required at the low temperature op-

erating condition, the supply pressure is scheduled as a linear function

of temperature, i.e.

P (T) - P (T )

T-T (24)

0

The choice of A depends on the temperature range considered and the naxi-t

mum of safe supply pressure imposed by the hydraulic plant at the lowest

temperature of interest. As an example, consider the following,

0Reference temperature, T = 256C (77(F),

soReference pressure, Psa(To 0 6895 kPa (1000 psi),

Temperature range, 10C < T < 50*C, (50"F < T < 122*F),

Maximum supply pressure, P 11,032 kPa (1600 psi),

It follows X0 W 275.8 kPa/*C [22.2 psi/IF].

The experimental data for linearly compensated and uncompensated

gain block and servovalve blocked-load pressure gain as a function of

temperature are shown in figures 17 and 18. The temperature compensation

based on the supply pressure scheduling significantly reduces the

temperature sensitivity of both the gain block and servovalve pressure gain

and successfully extends the operating range of the servovalve beyond the

design temperature.

3.4 Dynamic Response

The fluidic servovalve dynamic model for small derivatives may be

expressed as

QL(s) G (s)Pd(s) - G (S)P (S) (25)L q9id qp od

39

Page 40: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

4��%

*1

4.

*4%�

4,4..

EU

a.. * EU

I''S. U EU

6

4., #1 AI0 0

I0

* _

'1

Id

4.- 0

1*� SiI-p S

0(�%I -

U1W�� .TflUSSZd PWO'I-pS�po�

40

.4

I.. -a.,.I. - - - - . - .*.� ,. ....--.---.- . - - . -

Page 41: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

I 0

*1 0

0

0 0

ON rd

M 02' >r. uo 04J w

r' 02 .~00

00

4 4i

00

uivq, axn~ssad po'q-pa(ooT

41

Page 42: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

where G (S) K (S) (26)q -~Z (S) qiz a + a(S)

V..

G (s) G (S) [1 - y(s)]K (s). (27)qp pqp

K (S)

(a = -y [ + __a(S)(28

Zi(s) Kp(s)yG)(s) s)(S) (29)

Sfp [I + Zi_(S)_

S+ Za(S)

*, s Laplace operator.

,S., The input Zi(s) and feedback Zf(S) impedances consist of a resistance and

inertance. The input deflection impedance of the gain block is Za (s).

Two dynamic tests, flow frequency and pressure frequency response

tests, have been conducted point by point on both the gain block and servo-

valve at a temperature of 27*C. The experimentally measured pressure and

flow gain as a function of frequency are plotted in figures 19 and 20. The

test data show that the flow gain of the valve reaches 900 phase shift at

80 ,.z, the pressure gain reaches 900 phase shift at approximately 100 Hzand the experimentally measured pure delay time for both the pressure and

flow gain is 1.1 ms.

The comparisons of the frequency response between the breadboard

configuration and the integrated component fluidic servovalve are shown in

figures 21 and 22. The elimination of the feedback line capacitance which

is present in the breadboard configuration as described by Lee 12, leads to

improved response in the integrated component fluidic servovalve. The data

show that the pressure gain reaches 900 phase shift at 7 Hz for the bread-

1 2 D. Lee, The Analytical and Experimental Development of a Fluidic

Servovalve, Massachusetts Institute of Technology, Ph.D Thesis (April 1980).

42

I

Page 43: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

14 01

3 0 0 00~

C3 0

100

00

14

04

59 J

43'~

Page 44: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

beo

V4

re0

in

up Q090 3U v Q Jo ut

440

Page 45: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

700 Breadboard

Con fiquration[-..

?00

0"0

So

40

00

10 so100,s.

oa

o\ o ..

UQ

F r q e n c y i n R

0

I0400

300

510 so 'ý1001z~q~ncyin H

Figure 21. Comparison of blocked-load

frequency

response between integrated

component

servovalve and breadboard

configuration

servovalve.

45

Page 46: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

Znktoqrated5COnzent Servovaeve

B readboardConfiguration

- ~ .~ EectrohydraulicServiovalve

0

-10

5 10 ~Frequency in Hz5010

-00

Fiue22. Comp~arison of no-load freqwp-ncy response ofintegrated comrponent 4uervovalve, breadboard

-7.con figuration ade lectrohydraulic servovalve.

........

Page 47: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

board configuration and at 100 Hz for the integrated component configuration.

figure 22 indicates that the flow gain reaches 90' phase shift at 60 Hz for

the breadboard configuration and at 80 Hz for the integrated component con-

figuration and electrohydraulic servovalve approximately. The comparison

shows that a si.gnificant decrease in phase shift has been achieved and the

dynamic performance of the fluidic servovalve is comparable to the electro-

hydraulic servovalve with standard packaging.

4. FLUIDIC POSITION SERVO

A closed-loop fluidic position servo has been constructed as shown in

figure 23. An integrated component fluidic servovalve, similar to that

discussed in the preceeding section, has been used as a power modulation

element. A fluidic summing amplifier is also used to perform signal pro-

cessing. In addition, a fluidic feedback transducer has been developed so

"that the mechanical displacement sensing is fedback in the form of a

fluidic signal. The elements in the control system are described in the

following paragraphs.

4.1 Fluidic Summer

The fluidic summer is shown in figure 23. For low frequency ap-

plications, the transfer function of the fluidic summer may be expressed

as-T aK (a) K e s (30)

where G

K - LPA (31)

2+-R

as

GIp,LPA LPA blocked-load pressure gain,R - Summer input resistance,

R = LPA deflection resistance,as

T - LPA pure time delay.

4.2 Mechanical-Fluidic Displacement Transducer

The mechanical-fluidic displacement transducer is essentially

a position feedback sensor in which the mechanical translational displace-

ment is transformed into a fluidic signal. The electrical equivalent and

the construction schematic are shown in figure 24. The displacement trans-

47

S.. ., .. ... ., . .. - . . . . . . , ,.. . . . . • . .. • .. . . , .i•...," " , .*' - -. . . . - " " " "-..

Page 48: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

'P .idR- R

"Rfp Rfp

Ri- Y15 PS Ris R

S Pdid

!d~d Fluidic id Fluidic LHydraulic x mechanical

Signal Sumer-- Perova-e Ra-&Lad

Signal m&Iodisplacement

Feedbackran.da cer I

- pstImplementation

Rf

R

Figure 23. Fluidic position servo block diagram.

48'-4

-I.

Page 49: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

xl 4J

.9.

?A "

41 wto'4

4J4

IQ.94

44 )

41

49.

Page 50: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

4) Id

4Jy A

t o

41AU

4j~

0 0

500

•i ÷4- •-t- + o

50

S

Page 51: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

ducer may be considered as a fluidic resistance bridge. It consists of two

pairs of fixed resistors and a pair of variable resistors.

The transducer sensitivity at blocked-load may be derived from

circuit analysis

P (s) P +2Kts) dt a t 1(2(=) -x Rf + sL (32)

v v

where

P - output pressure differential of transducer,

P " supply pressure of transducer,at

x - translational displacement,

x - half stoke,

RfRv- fixed and variable resistance, respectively,

Lf,Lv= fixed and variable inertance, respectively.

The resistance and inertance of the channel resistance are

R - !?Ax for b >> h,c bh 3

L - ' (33)Lc bh

and the time constant of the channel resistance, T, may be expressed as

I c h2

c 2r"T " -7-" 2"-7" (34)

c

If equal channel heights are chosen for both fixed and variable resistances,

the transfer function of the mechanical-fluidic displacement transducer may

be simplified from equations (32) and (34) as

'•'•K ( laP (35)

V

and the dynamics of the transducer may be neglected.

4.3 Fluidic Servovalve

The characteristic performance of the fluidic servovalve has been

discussed in section 3.2. In the application of the fluidic servovalve in

51

Page 52: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

the position servo system, the output flow/pressure characteristics must

be designed to meet the particular ram and load requirements. The actuator

and load described as part of the position servo by Lee1 3 has been used in

this study so that a step response between the fluidic position servo and

a conventional electrohydraulic position servo may be compared directly.

From the characteristics of the fluidic sei-vovalve and the para-

meters of the actuator and load, the dimensionless group

"G d

A 2

r

and the time constant,

m < I secondd -

-may be calculated

where

G '(S) -G (s)/G (S)qp q p

d - damping coefficient

A r area of ram,rm - mass of load.

As a result of the high pressure gain and small load mass and friction, the

load dynamics for this particular system can be neglected and the dynamic

flow gain of the servovalve is the dominant valve performance parameter.

The experimentally determined flow gain from section 3.4 is

QL (s) G e vsG (s) L - se (36)

q Pid(s) (I + T q S)

where

G - steady state servovalve flow gain,qs

T v - pure time delay of the servovalve,v

T - first order time constant.q

4.4 Closed-Loop Fluidic Position Servo

With the dynamic characteristic performance of the fluidic summer,

fluidic feedback transducer and fluidic servovalve predicted in sections

52

L...... . •-

Page 53: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

4.1, 4.2 and 4.3 respectively, the fluidic position servo can be represented

"*: by the block diagram shown in figure 25. The open loop transfer function of

pomition servo may be expressed as

Ke-TOGH(s) - (l+Tqs) (37)

where K KO a GS....K t 55 8 ,

K ,Ar

T " F + TV a

The dynamic performance of the closed-loop position servo may be expressed

in terms of two dimensionless parameters, namely, the normalized gain KT,

and the normalized characteristic time constant T/Tq and may be analyzed by

Root Locus analysis. Normalized gain for zero damping, which indicates the

limit of closed-loop stability, and normalized gain for critical damping,

which corresponds to a step response with no overshoot, are of particular

interest. KT corresponding to • - 0 and • - 1 are plotted as a function of

nT/q in figure 25. For simplicity and as a first-order guide in selecting

the combination of KT and T/Tq, the damping ratio & and normalized natural

frequency, wnT are plotted against the normalized KT with T/T as an q

parameter in figure 26.

4.5 Implementation

A fluidic position servo has been constructed and tested. The

construction is shown in figure 27. A flapper-nozzle valve with an elec-

trical torque motor has been used as a fluidic signal generator.

The gain block, used in the servo is a modified form of the gain

block described in section 3 in which the steady state flow gain has been

increased and the transport time delay has been reduced with no change in

blocked-load pressure gain at the design temperature of 25*C. The increase

of the no-load flow gain provides improved servo frequency response and

has been achieved by increasing the number of sections in parallel in the

final stage and by operating the servovalve at a higher supply pressure

whereas the decrease of the pure time delay is achieved by using LPA's with

smaller nozzle throat width (x S/b = 8) for first and second stages. Thesp5

53

%8

Page 54: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

I--

I..K 0

s-Il ��Yl I-'

M�0 0

AI U

1wHU

Sr.b.c

(.4 H

-. * HU H

i- b4

U

U Hp1: Uo

* H

5' t

w

+ * H

0

IIH

fl-h

3 * C..'0

.5. 3

H0 H

0

H

o

A' * 0 * 0

H ,-4 o o o o

'.5 54

Page 55: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

Pld s (1+T S)

1.6-TS 1 2

e TS-- +-'-(Ts)

1.4 1 12 T

n i+ 2

KtS1.2

/

,0.0

" •1.0 •

r 0.8, 5

". 0.6

0.4 , . .

0- .5,1.0,2.0

•qq

0 0.2 0.4 0.6 0.8 1.0 1.2Normalized Gain, Kt

omFigure 26. and W nT of fluidic position servo.

55

Page 56: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

,,4

.. A

56

Page 57: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

increase in first and second stage gain, resulting from the higher aspect

ratio, is designed to offset the additional pressure drop. Hence, K hasp

not been varied significantly. The same input and feedback resistors as

described in section 3.2 have been used to construct the servovalve.

The fluidic servo components are summarized in table 4. The

components have been tested individually for both static and dynamic per-

formance. The data are presented in figures 28 through 33 for the fluidic

summer, displacement transducer and servovalve respectively. As shown in

table 5, in which the essential servo component parameters are summarized,

the servovalve flow gain has been increased by a factor of 2.2 and the pure

time delay has been successfully reduced from 1.1 ms to 0.65 ms in compari-

:2 son to the value of section 3. The displacement transducer exhibits a

linear characteristic throughout the entire stroke tested in a blocked load

condition and significantly solves the mechanical-to-fluidic interface

problems encountered in the previous investigations. 1 3

The fluidic position servo response has been calculated based on

L responses to step inputs. The experimental data, in figure 34 show that the

fluidic position servo design with 5 percent overshoot exhibits performance

comparable to the commercial electrohydraulic position servo and a sig-

nificant improvement over the hydraulic position servo described by Lee

and Wormley.1 3

Figure 35 compares the experimental and analytical step responses

for the fluidic position servo. The preliminary analytical pure time delay

based on the sum of LPA transport time lags in both the fluid in summer and

servovalve is observed to be smaller than the measured time delay of the

servo. Since the dynamic responses of the components have been measured

individiaully, the additional time delay may be attributed to the inter-

connections between the components of the fluidic position servo.

5. SUMMARY AND CONCLUSIONS

The characteristic performance of HDL fluidic integrated components

essential for servovalve design have been evaluated as a function of supply

1 3D. Lee and D.N. Wormley, Multistage Hydraulic Summing and Signal

Processing Amplifiers and Fluidic Input Servovalve Development, HarryDiamond Laboratories, HDL-CR-76-233-1 (1976).

57

Page 58: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

TABLE 4 FLUIDIC POSITION SERVO COMPONENT CONFIGURATION

FLUIDIC SUMMIER '

LPA design 81505 o = 1.666 b = 0.375 mms

= 90, G 10.5NR p,LPA

R 1.45x10 N-s/m5 350 psi/cisas

Input resistance, R1 6.863x10 9 N-s/m5 16.5 psi/cis

MECHANICAL-FLUIDIC DISPLACEMENT TRANSDUCER

10 5Variable resistance, R 2.O3xl0 N-s/m5 49 psi/cisFixed resistance, Rf 1.491x10 N-s/mr 36 psi/cis

FLUIDIC SERVOVALVE*

Amplifier

Stage LPA a No. of sections

1 x1505 1.000 5

2 x61505 0.667 4

3 x61505 0.333 12

Pressure Reducer

"" Stage Nozzle No. of sections

1 5221A-2( 6

2 5221A-20 8

3 direct supply

*

Supply pressure, P= 10.343 kPa (1500 psi)

58

- - -~. . . . . . . .. - . .A

Page 59: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

TABLE 5 VALUES OF PARAMETERS OF FLUIDIC POSITIONSERVO

ACTUATOR

Area, A 432 mm2 0.67 in 2r

Volume (single side) V 8.19xi03 ,m 0.5 in 3

Oil Bulk Modulus, i 1.38x106 kPa 2xlO5 psi

LOAD

Mass, m 16.65 kg 0.095 lb-s 2 /in

Damping constant, d 29.6 N-s/m 0.169 lb-s/in

FLUIDIC SUMMER

Steady state gain, K 5Pure time delay, T 0.35 m

s

MECHANICAL-FLUIDIC DISPLACEMENT TRANSDUCER

Transducersensitivity, Kt 11 kPa/mm 40.5 psi/in

FLUIDIC SERVOVALVE

Steady state flow -9 5gain, G 1.207x0- m /N-s 0.5 cis/psiqs

Pure time delay, T 0.65 msv

1st order timeconstant, 5.3 msSq

59

Page 60: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

P sd

lda

Flui-lic Suwmmer Schematic

%I.

P d Supply condition

P P - 448.2 kPa [65 psi]

as -6 3=s 4.64x10 m /sec [0.29 cis]

T = 29.4*C [85*F]

P 2d +0.0287P s

0 P 2d -0.0287

0.5 1.152.5 3

a I'd x10 2

P. ass

Figure 28. Fluidic summer schematic and static characteristics.

60

Page 61: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

. ..~ - 0--. 4- L

0

0 10

0

000

*0 0 0

in 0

0

0

00

0O 0

09 0

up l~ub ans~ld BZT QUIO sagbou UT aieq

610

Page 62: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

Temperature 29C [846F 0.5 dt

Supply pressure 345 kPa st 0-5

Leakage flow 1.632x10 -5 /sec[1.02 cis],'.- ::0.4

x 12.7 mn1-2 [ inch]

0.3

0.2

0.1

1.0 -0.75 -0.5 -0.25 0.25 0.5 0.75

X,•-, x

"-0.1 m

Sensitivity - 10.86 kPa/um

0[40 psi/inch]

.. , -0.2

h.°"." -0.3

-0.4

Figure 30. Displacement transducer blocked-load staticcharacteristics.

62

%',1

•°

Page 63: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

4J4

V4

0 Li

-' 0'00

p-I

00

N.,

00

00

- 0 in Y9-nLLn4

RP Ue OX.4" tiU 84

:4'63

Page 64: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

QLK0.4---Ps 10342 kPa s

[1500 psi]

Q s xi0 cis-m3/sec 0.3

T 29.4C[85F]

0.2

0

0.1

-3 -2 - 1 2 3

p id 3x 1o

-0.1 5Gqs 1.207x10 N-S.

(0.5 cis/psi]

S-0.2

-0.3

-0.4

Figure 32. Fluidic servovalve no-load staticcharacteristics.

64

Page 65: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

00

00

*0

00

r- LUP 'TW5 %OI PBZTV=N 9Qfi~ UT gw1

7".

653

Page 66: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

0.1 1.

20 insec

% 1.0

0.8 Fluidic position servo0.8 0. mm

I ~ IElectrohydraulic position servo,

8

'-4 .6 *(Lee and Wormley)0.6a

x'; 0.32 mm

IComercial fluidic-input servo'U (Lee and Wormley)

Oorýxm =0.304 mm0.4

V0.

0-20 40 60 - I0 1'20Tire in msec

Figure 34. coIuparison of step response between fluidicand commercial position servo.

66

Page 67: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

"r.. I I

0 E

411

.941

i4 C

44 41

0) IH

,ftU

ft., H I'

bVA

* 0'4

C4tf OD% U

148 H

67

- - . f ft ft - - .-_-Af

Page 68: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

pressure and temperature which are characterized in terms of the modified

Reynolds number. The point of transition-to-turbulence of three standard

LPA configurations namely, HDL 63020, HDL 72010 and HDL 61505 occurs between

modified Reynolds numbers of 100 and 120. The useful operating range of

LPA's has been determined through the experimental program to be

40 ' < 100.

The relationship between the supply conditions of the individual

stages and that of the final stage of the gain block has been derived and

verified experimentally. Compensated fluidic gain blocks and servovalves

are sensitive to temperature variation at constant supply pressure. The

temperature compensation technique, based on the supply pressure scheduling

to maintain an approximately constant final stage modified Reynolds number,

significantly suppresses the temperature sensitivity of the blocked-load

pressure gain of the gain block and servovalve.

The fluidic gain block, summing amplifier and feedback transducer

have been used with an actuator and load mass to construct a closed loop

position control systems. Static and dynamic tests of the servosystem have

shown its performance comparable to an electrohydraulic servoloop. This

development effort has demonstrated the capability to develop high per-

formance position servo components from standard integrated component

fluidic elements and to interconnect the components into a closed loop

servo with performance comparable to high performance electrohydraulic

commercial components.

In the current fluidic servo, the maximum load pressure differen-

tial and flow gain of the servovalve are primarily limited by the LPA

characteristics. Future effort is merited to optimize the LPA design to

achieve high pressure recovery, to reduce the ratio of quiescent to maximum

load flow and to further minimize the overall power-to-weight ratio.

68

- .j •. 2

Page 69: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

APPENDIX A. -- GAIN BLOCK AND SERVOVALVE CONSTRUCTION DETAILSIn this appendix the gain block stacking order is sunmmarized as given in

tables A-i and A-2 with the components shown in figure A-i.

TABLE A-1 GAIN BLOCK STACKING ORDER DESCRIPTIONS

Stacking HDL HDL

Order Part No. Orientation Quantity Description

ValveBaseplate

1 5018 C (*)2 5047 G3 5221A-20 H Stage

5040 F 6ýpairs Frstte5 5221A-20 H Reducer6 5018 H 31pairs7 5200 C8 5200 H9 5021 F

10 5216 F211 5339A F 6 sections Third Stage12 61505 F Amplifier13 5339A F and14 5216 F 2 Vent

Assembly15 5040 E16 5221A-20 7pairs Second State6 5Pressure17 5018 F 21pairsR18 5222A-20 C Reducer19 5021 C20 5046 B21 5021 D22 5216 C 223 5216 H 724 5046 D25 5018 A"26 5046 B27 504628 5239 H Second State29 5137 H Amplifier

and3 sections Vent

Assembly30' 72010 H31 5137 C32 5237 C33 5216 H34 5021 A35 5200 H36 5200 C37 5047 D

1 unless otherwise stated

69

Page 70: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

TABLEA-(Cn.

CAIN BLOCK STACKING ORDER AND DESCRIPTIONS

Stacking HDL HDLOrder Part No. Orientation Quantity Description

38 5239 D 239 5018 H40 5216 F 241 5237 F42 5236 F43 63020 F44 5236 F45 5237 F46 5216 A First Stage47 5237 A Amplifier48 5236 A and49 63020 F Vent50 5236 F Assembly51 5237 F___________

52 5216 F256 5046 E___ ____

* Input manifold

77

70

Page 71: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

TABLE A-2

SERVOVALVE STACKING ORDER AND DESCRIPTIONS

StackingOrder Part No. Orientation Quantity Description

Supply/output

manifold baseplate

1. SP5

2. SP3 feedbackmainfold

3. HDL 5043

4. HDL 5026 [4 pairs feedback

5. HDL 5040 resistors

6. 3 stage ampli ier Refer to amplifier stacking order (1-56)

7. SP2 summingmanifold

8. HDL 5040

9. HDL 5027 feedbackresistors

10. HDL 5112 2

11. HDL 5196 inputresistance

12. HDL 5040

13. SP4

14. HDL 5040

15. HDL 5196 inputresistor

16. HDL 5040

17. HDL 5112 2 inputmanifold

71

Page 72: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

AA

AAoo;

--

I Section A-A

2B

SP2 Suneaing Manifold (includinq cover)

o 0

00

,0 0

S !4 Se P

Figure A-1. Servovalve components descriptions.

72

I4-

Page 73: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

NOMENCLATURE

A ram arear

B LPA control port minimum widthc

B LPA average control port channel width

B normalized nozzle throat width, bA of ih stageni n Siste

B LPA outlet port minimum widthB LPA average outlet port channel width0

Bsp LPA splitter width

B LPA downstream control edges spacet

B LPA jet-control edge space

B normalized nozzle average channel width, b /bC empirical constant in channel resistance model

Cd discharge coefficient

diC di discharge coefficient of i th stage LPA

Ce momentum flux coefficient

G servovalve blocked-load pressure gainP

G servovalve blocked-load pressure gain at steady statepsGpLPA LPA blocked-load pressure gain

G servovalve no-load flow gain|°b% qP qG servovalve no-load flow gain at steady state.. qsG servovalve output admittance:. qPH Hi normalized nozzle height, hn /bs

601 K fluidic servo open-loop steady state gain

K ith stage LPA blocked-load pressure gain, i-12,3

K gain block blocked-load pressure gainpK K gain block no-load flow gain:• q

K fluidic summer gain

K fluidic summer steady state gain"S

Kt displacement transducer sensitivityL normalized entry length, Re/b

L channel fluid inertance•g~i C

L transducer fixed channel fluid inertancefL transducer variable channel fluid inertance

v

NR Reynolds number

N channel Reynolds numberRc

Naf gain block final stage Reynolds number,:., Rf

73

.~:.....:. ..... . . ...:-: ,...- .•." " ........ -.._. .,_ . . - . . .-..-.---

Page 74: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

t'-th

N gain block i stage Reynolds numberN'

Rit LPA modified Reynolds number

N, gain block final stage modified Reynolds numberRf th

NRi gain block i stage modified Reynolds number

P control pressure differentialcd

P saturation control pressure differential* cds

A P bias control pressureco

P output pressure differential of transducer- .- :dt

- id input pressure differential

Pd maximum input pressure differential

"" PL defined in figure 1

Pod output pressure differential

- ods saturation output pressure differentialP main supply pressure

Psd defined in figure 28S.' supply pressure of ih stage, I 1 1,2,3

PsiP! ass supply pressure of sumer

Pst supply prescure of transducer

""P ld input 1 of summr

P 2d input 2 of summer

:. Q volumetric flow rate

load flow

QLs saturation load flow

Qflow through ith stage nozzle

Qs supply flow

Qsi supply flow of ith stage LPA

R channel resistance

Snormalized resistance defined in equation (8)

""R gain block input deflection resistanceaRa LPA input resistance for summeras

Rf fixed resistance in transducerRfpR fp servovalve feedback resistance

Ri servovalve input resistance

Ril 1 st stage input resistanceR 2 nd stage input resistance

i2 rd3R 3 stage input resistance

7.4

"= ~74

•. •2

Page 75: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

R nozzle resistance of ith stagenisR stat

Rol 1 state output resistance

R 2 ndstage output resistance02 r3rd

R 3 stage output resistance03 tR supply resistance of ith stagesi

R variable resistance in transducerV

,R1 summer input resistance

T temperature

T reference temperature

X channel length

X LPA control port channel lengthc

X normalized nozzle channel length of stage

X 0LPA outlet port channel length

X LPA supply nozzle-splitter distanje

X th LPA supply nozzle throat length

Z gain block input complex impedancea

Z servovalve input complex impedance

Zfp servovalve feedback complex impedance

Lower Case Letter

b channel width

b average channel width

b b LPA supply nozzle throat width

bsf final state LPA supply nozzle throat widthith

b h stage LPA supply nozzle throat width

d damping coefficient

f frequency

h channel height

meentry lengthe

1 mass

mi number of LPA in parallel in ith stage

number of nozzles in parallel in ith stage

S Laplace transform operator

x valve input in section 1

channel length in section 2

displacement in section 4

x half stroke, maximum travelm

75

Page 76: Integrated Component Fluldic Servovalves and Position ... · The primary power modulation elements in high performance hydraulic systems are servovalves. In position and velocity

x dimensional LPA supply nozzle-splitter distance

Greek Letter

OL aservovalve parameter, defined in equation (18)

bulk modulus, table 5Y y servovalve parameter, defined in equation (19)

- ~ A viscosity-temperature coefficient

x defined in equation (24)0

P. absolute viscosity of oilS•V kinematic viscosity of oil

.V• kinematic viscosity at reference temperature

damping ratio

P density

a aspect ratio

a• channel aspect ratio, h/b

a c aspect ratio of ith stage

ST total time delay of fluidic servo

T defined in equation (34)T 1t order time constant of G q()qqT time delay of sumera

T ' time delay of servovalve

w natural frequencyn

Subscripts

tr. transition

900 900 phase shift

L.

"76

.*2",- '-'.-, ---- S - - -t - - - - - --- .,.-

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hyJ

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COMMANDER POINT MUGU, CA 93042US ARMY TANK AUTOMOTIVE COMMANDARMOR & COOP DIV, DRDTA-RKT COMMANDERBLDG 215 NAVAL SHIP ENGINEERING CESTERATTN K. WHITMORE PHILADELPHIA DIVISIONWARREN, MI 48090 ATTN CODE 6772

PHILADELPHIA, PA 19112COMMANDERATTN STEWS-AD-L, TECHNICAL LIBRARY COMMANDERWHITE SANDS MISSILE RANGE, NM 88002 NAVAL SURFACE WEAPONS CUSTER

ATTH CODE 413, CLAYTO! ICKISURACOMMANDER/DIRECTOR WHITE OAK, MD 20910ATMOSPHERIC SCIENCES LABORATORYUSA ERADC0M COMMANDERATTN DELAS-AS (HOLT) NAVAL ORDNANCE STATIONATTN DELAS-AS-T (R. RUBIO) ATTN CODE 51 23C, K. ENGLAMDERWHITE- SANDS MISSILE RANGE, NM 88002 INDIANHEAD, MO 20640

OFFICE OF NAVAL RESEARCH NAVAL SHIP RES & DEV CENTERDEPARTMENT OF THE NAVY CODE 1619, K. READERATTN STANLEY W. DOROFF, CODE 438 BETHESDA, MD 20084ATTI D. S. SIEGEL, CODE 211

4 ARLINGTON, VA 22217 NAVAL RESEARCH LABORATORYATTN S. SEARLES, 117 BG A68

DEPARTMENT OF THE NAVY WASHINGTON, DC 20375R&D PLANS DIVISIONROOM 5D760, PENTAGON NAVAL SEA SYSTEMS COMMASATTN BENJ R. PETRIE, JR. SA05R31

OP-987P4 ATTN J. H. HARRISONWASHINGTON, DC 20350 WASHINGTON, DC 20362

COMMANDANT CO0MMNDERUS NAVAL POSTGRADUATE SCHOOL NAVAL WEAPONS CUNTERDEPARTMENT OF MECHANICAL ENGINEERING ATTN CODE 533, LIBRARY DIVISIONATTN CODE 69 Nn(NUNN) ATTN CODER 3636, C. SURMEISTEtMONTEREY, CA 93940 CHINA LAKE, CA 93555

COMMANDERNAVAL AIR DEVELOPMENT CENTERATTN R. MCGIBONEY, 60134

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DISTRIBUTION (Cont 'd)

COMMANDER DEPARTMENT OF COMMERCEAF AERO PROPULSION LABORATORY, AFSC NATIONAL BUREAU OF STANDARDSATTN LESTER SMALL, AFWAL/POTC ATTN JAMES SCHOOLEY, CHIEF,WRIGHT-PATTERSON AFB, OH 45433 TEMPERATURE SECTION

ATTN T. NEGAS, SOLID STATECOMMANDER CHEMISTRY DIVISIONAIR FORCE AVIONICS LABORATORY ATTN RAY DILS, RN B-254, BLDG 221ATTN AARA-2, RICHARD JACOBS ATTN GEORGE BURNS, R4 B-222, BLDG 221WRIGHT-PATTERSON AFB, OH 45433 WASHINGTON, DC 20230

DIRECTOR DEPARTMENT OF COMMERCEAF OFFICE OF SCIENTIFIC RESEARCH BUREAU OF EAST-WEST TRADEATTN NE OFFICE OF EXPORT ADMINISTRATIONBOLLING AFB, DC 20332 ATTN WALTER Jo RUSNACK

WASHINGTON, DC 20230CONNANDERAIR FORCE FLIGHT DYNAMICS LABORATORY DEPARTMENT OF ENERGYATTN AFWAL/FIGL, H. SNOWBALL C-156, GTN (OART)ATTN AFWAL/FIER, R. J. DOBBEK ATTN ROBERT ROBERTSWRIGHT-PATTERSON AFB, OH 45433 ATTN SANDY DAPKUNAS

WASHINGTON, DC 20545COMMANDERAF WEAPONS LABORATORY, AFSC DEPARTMENT OF ENERGYATTN SUL, TECHNICAL LIBRARY FE-22KIRTLAND AFB, NM 87117 ATTN T. K. LAU

WASHINGTON, DC 20545COMMANDERARMAMENT DEVELOPMENT & TEST CENTER DEPARTMENT OF ENERGYATTN ADTC (DLOSL), TECH LIBRARY F-317, GTN (COAL GASIFICATION)ATTN DLMA, DAVID T. WILLIAMS ATTN JIM CARREGLIN AIR FORCE BASE, FL 32542 WASHINGTON, DC 20545

AIR FORCE FLIGHT TEST CENTER FEDERAL BUREAU OF INVESTIGATION6510 ABG/SSD J. EDGAR HOOVER BLDGATTN TECHNICAL LIBRARY ATTN ROBERT WILLISEDWARDS AFS, CA 93523 WASHINGTON, DC 20535

AF INSTITUTE OF TECHNOLOGY, AU DEPARTMENT OF JUSTICEATTN LIBRARY AFIT (LD), IMMIGRATION & NATURALIZATION SERVICE

BLDG 640, AREA B 425 "I- STREET, NNATTN AFIT (ENN), MILTON E. FRANKE ATTN NEILL ICKAYWRIGHT-PATTERSON APB, OH 45433 WASHINGTON, DC 20536

HQ, AF SYSTEMS COMMAND SCIENTIFIC LIBRARYATTN SGB, CPT GEORGE JAMES US PATENT OFFICEANDREWS AFB, DC 20334 ATTN MRS. CURETON

WASHINGTON, DC 20231ARGONNE NATIONAL LABORATORYAPPLIED PHYSICS DIV, BLDG 316 NASA AMES RESEARCH CENTERATTN N. M. O'FALLAN ATTN HS 244-13, DEAW CHISEL9700 S. CASS AVE MOFFETT FIELD, CA 94035ARGONNE, IL 60439

NASA LANGLEY RESEARCH CENTEROAK RIDGE NATIONAL LABORATORY ATTN, MS 494, H. D. GARNERCENTRAL RES LIBRARY, BLDG 450ON, RM 175 ATTN MS 494, R. R. HELLBAUKPo BOX X ATTN MS 185, TECHNICAL LIBRARYATTN E. HOWARD HAMPTON, VA 23665ATTN C. A. MOSSMANATTN R. E. HARPER"OAK RIDGE, TN 37830

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NASA SCIENTIFIC & TECH INFO FACILITY FRANKLIN INSTITUTE OF THE STATEPO BOX 8657 OF PENNSYLVANIAATTN ACQUISITIONS BRANCH ATTN KA-CHEUNG TSUI, ELEC OCR DIVBALTIMORE/WASHINGTON INTERNATIONAL ATTN C. A. BELSTERLINGAIRPORT, 1D 21240 20TH STREET & PARKWAY

PHILADELPHIA, PA 19103UNIVERSITY OF ALABAMACIVIL & MINERAL ENGINEERING DEPT HUGHES HELICOPTERS"P0 BOX 1468 DIVISION OF SUMMA CORPORATION

""t ATTN HAROLD Re HENRY CENTINELA & TEALS STREETSUNIVERSITY, AL 35486 ATTN LIBRARY 2/T2124

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UNIVERSITY OF ARKANSAS JET PROPULSION LABORATORYMECHANICAL ENGINEERING ATTN JOHN V. WALSH, #S 125-138ATTN JACK H. COLE, ASSOC. PROF. 4800 OAK GROVE DRIVEFAYETTEVILLE, AR 72701 PASADENA, CA 91103

CARNEGIE-MELLON UNIVERSITY JOHNS HOPKINS UNIVERSITYSCHENLEY PARK APPLIED PHYSICS LABORATORIESATTN PROF. W. T. ROULEAU, ATTN MAYNARD HILL

NECH ENGR DEPT ATTN THOMAS RANKINPITTSBURGH, PA 15213 ATTN JOSEPH WALL

LAUREL, IC 20810

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ATTN PROF. P. A. ORNER LEHIGH UNIVERSITYATTN PROF. B. HORTON DEPARTMENT OF MECHANICAL ENGINESRINGUNIVERSITY CIRCLE ATTN PROF. FORBES T. BROWNCLEVELAND, OH 44106 BETHLEHEM, PA 18015

THE CITY COLLEGE OF THE CITY LINDA HALL LIBRARYUNIVERSITY OF NY ATTN DOCUMENTS DIVISION

DEPT OF #ECH ENGR 5109 CHERRY STREETATTN PROF. L. JIJI KANSAS CITY, I4 64110ATTN PROF. G. LOWEN1 39TH ST. AT CONVENT AVE LOS ALAMOS SCIENTIFIC LABNEW YORK, NY 10031 PO BOX 1663

ATTN FRANK FINCH, MS 178

CLEVELAND STATE UNIVERSITY LOS ALAMOS, NM 87545PENN COLLEGE OF ENGINEERINGATTN PROF. R. COMPARIN MASSACHUSETTS INSTITUTE OF TECHNOLOGYCLEVELAND, OH 44115 ATTN ENGINEERING TECHNICAL REPORTS,

R14 10-408DUKE UNIVERSITY ATTN DAVID WORMELY, MECH ZNGR DEPT,COLLEGE OF ENGINEERING RM 3-146ATTN C. H. HARMAN 77 MASSACHUSETTS AVENUEDURHAM, NC 27706 CAMBRIDGE, MA 02139

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UNIVERSITY OF MISSISSIPPI PENNSYLVANIA STATE UNIVERSITYATTM JOHN A. FOX ENGINEERING LIBRARY201 CARRIER HALL, DEPT OF UCKH ENGR ATTN N. BENNETT, ENGINEERING LIBRARIANUNIVERSITY, MS 38677 201 HAMMON BLDG

UNIVERSITY PARK, PA 16802MISSISSIPPI STATE UNIVERSITY

*-.,DRAWS ME PORTLAND STATI UNIVERSITYATTH C. J. BELL, UCH KING DEPT DEPT OF EDGINEERING &STATE COLLEGE, MS 39762 APPLIED SCDICE

PO BOX 751MISSISSIPPI STATE UNIVERSITY ATTN PROF. P. I. CHEIDEPT OF AEROSPACE ENGINEERING PORTLAND, OR 97207ATTN DAVID IURPHREEMISSISSIPPI STATE, MS 39762 PURDUE UNIVERSITY

4 SCHOOL OF MECHANICAL ENGINEERINGUNIVERSITY OF NEBRASKA LIBRARIES ATTH PROF. VICTOR W. GOLDSCH14IDTACQUISITIONS DEPT, SERIALS SECTIONS ATTH PROF. ALAN T. MCDONALDATTm ALAN GOULD LAFAYETTE, IN 47907LINCOLN, NE 68508

ROCK VALLEY COLLEGEUNIVERSITY OF NEW HAMPSHIRE ATTN KEN BARTONMUCH ENGR DEFT, KINGSBURY HALL 3301 N. MULFORD ROADATTH PROF. CHARLES TAFT ROCKFORD, IL 61101ATTN PROF. DAVID LIMBERTDURHAM, NH 03824 RUTGERS UNIVERSITY

LIBRARY OF SCIENCE & NICINRUNIVERSITY OF N * CAROLINA ATTN GOVERNMENT DOCUMENTS DEPTINSTITUTE OF MARINE BIOMEDICAL RESEARCH SANDRA R. LIVINGSTONATTM MICHAEL E. SHEEHAN NW BRUNSWICK, Wx 08903

• WILMINGTON, IC 28401SYRACUSE UNIVERSITY

NO JERSEY INSTITUTE OF TECHNOLOGY DEPT OF RMD & AEROSPACE ENGINEERIMGDEPARTUIDT OF MECHANICAL DIGINEERING ATTN PROF. Do S* DOSANJHAT"N R. Y. CHER 139 E. A. LINK HALL323 HIGH STREET SYRACUSE, NY 13210NEWARK, NJ 07102

UNIVERSITY OF TUINESSEEOHIO STATE UNIVERSITY LIBRARIES DEPT OF MECHANICAL ENGINEERINGSERIAL DIVISION, MAIN LIBRARY ATTN PROF. G. V. SMITH

46 1858 HEIL AVENUE KNOXVILLE, IN 37916COLUMBUS, OH 43210

UNIVERSITY OF TUNNESSEE SPACE INSTOKLAHOMA STATE UNIVERSITY ENERGY CONVERSION DIVISIONSCHOOL OF RMDC A AEROSPACE ENGR ATTN MARY AMl SCOTTATTH PROF. KARL N. REID TULLAHOMA, TN 37388STILLWATER, OK 74074

UNIVERSITY OF TEXAS AT AUSTIN

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ATMN PROF. S. B. FRIEDMANOXFORD, ON 45056 THE UNIVLRSITY OF TEXAS AT ARLINGTON

MECHANICAL ENGINEERING DEPARTMENTPENNSYLVANIA STATE UNIVERSITY ATTN ROBERT L. WOODSATTN J. L, SHEARER ARLINGTON, TX 76019215 MECHANICAL DNGINEERING BUILDINGUNVERSITY PARK, PA 16802 TULANE UNIVERSITY

DEPT OF MECHANICAL ENGINEERING

ATTN H. F. HRUBECKYNW ORLEANS, LA 70118

81

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DISTRIBUTION (Cont'd)

UNION COLLEGE BENDIX CORPORATIONMECHANICAL ENGINEERING ELECTRODYNAMICS DIVISIONATTN ASSOC. PROF. W. C. AUBREY ATTN D. COOPER

MECH MR DEPT. STEINMETZ HALL 11600 SHERMAN WAYSCHENECTADY, NY 12308 NM HOLLYWOOD, CA 90605

UNIVERSITY OF VIRGINIA BENDIX CORPORATIONDEPT OF 1ECH & AEROSPACE ENGR RESEARCH LABORATORIES DIVATTN DAVID LEWIS BENDIX CENTERCHARLOTTESVILLE, VA 22090 ATTN Co J. AIIERN

ATTN LARL TAPLINVIRGINIA POLYTECHNIC INSTITUTE SOUTHFIELD, NI 4875

OF STATE UNIV

MECHANICAL ENGINEERING DEPARTMENT BOEING COMPANY, THEATTN PROF. H. MOSES PO BOX 3707BLACKSBURG, VA 24061 ATTN KIEIRIK STRAUB

SEATTLE, WA 98124WASHINGTON UNIVERSITYSCHOOL OF ENGINEERING BOWLES FLUIDICS CORPORATIONPO A ox 1185 ATTN VICE PRUS/ZNGRATTN NW M. SWANSON 9347 FRASER AVENUEST LOUIS. NO 63130 SILVER SPRING, MD 20910

WEST VIRGINIA UNIVERSITY R.e . BOWLESMECHANICAL ENGINEERING DEPARTMENT 2105 SONDRA COURTATTN RICHARD A. DAJURA SILVER SPRING, MD 20904

NORGANTOWN. WV 26505CHAMBERLAIN MANUFACTURING CORP

WICHITA STATE UNIVERSITY EAST 4TH A ESTHER STSATTN DEPT AERO ENGR, E. J. RODGERS PO BOX 2545WICHITA, KS 67208 WATERLOO, IA 50705

UNIVERSITY OF WISCONSIN CONTINENTAL CAN COMPANYMECHANICAL ENGINEERING DEPARTMENT TECH CENTERATTN FEDERAL REPORTS CENTER ATTN P. A. BAUERATTN KORMAN H. DEACHLEY, DIR 1350 W. 76TH STRUT

DESIGN ENGINEERING LABORATORIES CHICAGO, IL 606201513 UNIVERSITY AVENUEMADISON, WI 53706 CONTROL SYSTEMS INNOVATION

ATTN N. F. MKCIAWORCESTER POLYTECHNIC INSTITUTE 517 EAST ORION STREETATTN GEORGE C. (GORDON LIBRARY (TR) TEMPE, AZ 85283ATTN TECHNICAL REPORTSWORCESTER, MA 01609 CORDIS CORPORATION

PO BOX 428AVCO SYSTEMS DIVISION ATTN STEPHEN F. VADAS, K-2ATTN W. K. CLARK MIAMI, FL 33137201 LOMLL STREET

WILMINGTON, MA 01887 CORNING GLASS WORKSFLUIDIC PRODUCTS

BARNES EIGINEERING CO ATTN R. H. BELLMANATTN FRED SWEIBAUN HOUGHTON PARK, B-230 COMMERCE ROAD CORNING, MY 14830STAMFORD, CT 06904

CHRYSLER CORPORATIONLHELICOPTER COMPANY PO BOX 118

PO BOX 482 CINS-418-33-22ATTN R. D. YEARY ATTN L. GAUFT WORTH, TX 76;01 DETROIT, NI 48231

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BETHPAGE, L. I., NY 11714ELECT'hIC POWER RESEAI,}H INSTITUTE:0 B)X 10412 HAMILTON STANDARD

ATTN MS. M. ANGWIN, DIVISION OF UNITED AIRCRAFT CORPORATIONP. M. GEOTHERMAL ENERGY ATTh PHILIP BARNES

3412 ;ILJVIEW AVE WINDSOR LOCKS, CT 06096PALO AL'1D, CA 94303

HONEYWELL, INCFLUIDICS ýUARTERLY ATTN J. HEDEENPO BOX 2989 ATTN W. POSINGIESATTN D. H8 TARU9OTO 1625 ZARTHAN AVESTANFORD, CA 94305 MINNEAPOLIS, MN 55413

FOXBORO COMPANY HONEYWELL, INCCORPORATE ATTN RICHARD STEWART, MS 200RESEARCH DIV 1100 VIRGINIA DRIVEATTN JAMES VIGNOS FT WASHING-lTON, PA 19034ATTN J. DECARLOATTN JOHN CHANG JOHNSON CONTROLS, INCATI74 TOM KEGEL ATTN WARREN A. LEDERMAN38 NE'ONSET AVE ATTN GEORGE JANUFOXBCRO, MA 02035 507 E. MICHIGAN

MILWAUKEE, WI 53201GARRETT PNEUMATIC SYSTEMS DIVISIONPO BOX 5217 LEEDS & NORTHRUP COATTN GLRY FREDERICK ATTN ERNEST VAN VALKENBURGATTN TREVOR SUTTON DICKERSON ROADATTN TOM TIPPETTS NORTH WALES, PA 19454ATTN C. APBOTT

111 SOUTH 34TH STREET MOORE PRODUCTS COMPANYPHOENIX, AZ 85010 ATTN R. ADAMS

SPRING HOUSE, PA 19477GENERAL ELECTRIC COMPANYSPACE/RES DIVISIONS MARTIN MARIETTA CORPORATIONPOBOX 8555 AEROSPACE DIVISIONATTN MGR LYIRARIES, LARRY CHASEN ATTN R. K. BRODERSON, MP 326PHILADELPHIA, PA 19101 PO BOX 5837

ORLANDO, FL 32805GENERAI ELECTRIC LOMPANYKNOLLS ATfOMIC POWER LAEORATORY MCDONNELL AIRCRAFT COMPANYATTN J. KROMMENIOEK GUIDANCE & CONTROL MECHANICS DIVISIONSCHENECTADI, 61. 12301 ATTN LOYAL GUENTHER

ST LOUIS, MO 63166'GENERAL .0TORS CORPORATIONDELCO ELECTRONICS DIV MODONNEL DOUGLAS ASTRONAUTICS COMANFRED C WRIGHT PROPULSION DEPARTMENTNEW COMMERCIAL PROnUCTS ATTN V. E, HALOULAXOS (t3-226)PO BOX 1104 ATTN J. D. SCHWEIKLE (A3-226)

ATTN R. E. SPARKS 530. BOLSA AVENUEKOKOM-,, IN 46901 HUNTINGTON BEACH, CA 9264?

CRUMMAN AEROSPACE CORPORATION NATIONAL FLUID POWER ASSOC.TECHNICAL INFORMATION CENTER ATTN JOHN R LUEKEATTN C. W. TURN'R, DOCUMENTS DIR 0.' TECH SERVICES

LIBRARIAN 3333 NORTH MAYFAIR ROADATTN TED SORENSEN, MS B1535 MILWtJKEE, WI 53222

83

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DISTRIBUTION (Cont'd)

NEOS, INC SCIENCE & TECHNOLOGY ASSOCIATES, INC3711 AIR PARK RD ATTN DR. T. DRZEWIECKIATTN A. J. OSTDIEK 1700 N. MOORE ST., SUITE 1920LINCOLN, NE 68524 ARLINGTON, VA 22209

NORTHRUP CORP, ELECTRONICS DIV SIKORSKY AIRCRAFTATTN DESMOND NELSON, ATTN J. R. SOEHNLEIN

SENOIR ENGINEER NORTH MAIN STREETORGN C3133, W/C STRATFORD, CT 06602

2301 W. 120TH STHAWTHORNE, CA 90250 STEIN ENGINEERING SERVICES, INC

5602 E MONTEROSAPATSCENTER INTERNATIONAL PHOENIX, AX 85018ATflN MR. JOHN CLINE

707 ALEXANDER ROAD TRANS-TECH, INCPRINCETON, NJ 08540 ATTN L. DOMINGUES

12 MEEI AVEPLESSEY AEROSPACE LTD GAITHERSBURG, MD 20760ATTN A. ROSENBERG1700 OLD MEADOW ROAD TRITEC, INCMCLEAN, VA 22102 ATTN L. SIERACKI (2 COPIES)

PO BOX 56PROCON, INC COLUMBIA, MD 21045ATTN HERB MARCHOUP PLAZA UNITED TECHNOLOGIES RESEARCH CENTERDES PLAINES, IL 60016 ATTN R. E. OLSON, AGR FLUID

DYNAMICS LABORATORYPROPULSION DYNAMICS 400 MAIN STREETATTN T. HOULIHAN E. HARTFORD, CT 061082200 SOMERVILLE RANNAPOLIS, MD 21401 VOUGHT CORP

PO BOX 225907ROCKWELL INTERNATIONAL CORPORATION ATTN KELLEY FLINGCOLUMBUS AIRCRAFT DIVISION, PO BOX 1259 DALLAS, TX 75265ATTN MARVIN SCHWEIGERATTN LOUIS BIAFORE US ARMY ELECTRONICS RESEARCH4300 E. 5TH AVENUE & DEVELOPMENT COMMANDCOLUMBUS, OH 43216 ATTN TECHNICAL DIRECTOR, DRDEL-CT

ATTN PUBLIC AFFAIRS OFFICE, DRDEL-INSANDIA LABORATORIESATTN WILLIAM R. LEUENBERGER, DIV 2323 HARRY DIAMOND LABORATORIESATTN JERRY HOOD ATTN CO/TD/TSO/DIVISION DIRECTORSATTN NED KELTNER ATTN RECORD COPY, 81200ATTN ANTHONY VENERUSO, DIV 4742 ATTN HDL LIBRARY , 81100 (3 COPIES)ALBUQUERQUE, NM 87185 ATTN HDL LIBRARY (WOODBRIDGE), 81100

ATTN TECHNICAL REPORTS BRANCH, 81300SCIENCE APPLICATIONS, INC. ATTN LEGAL OFFICE, 97000ATTN J. ISEMAN ATTN CHAIRMAN, EDITORIAL COMMITTEE8400 WESTPARK DR ATTN CORRIGAN, J., 20240MCLEAN, VA 22102 ATTN CHIEF, 13000

ATTN CHIEF, 13400 (20 COPIES)

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