Institute forMicroelectronics andMicrosystems

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TABLEOFCONTENTS

IMM at a glance

Micro/Nano Electronics

Functional Materials and Devices

Photonics

Micro and Nano Fabrication

Characterizations

Synthesis of AdvancedMaterials

Theoretical Modeling

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belonging to the Physics and Matter TechnologiesDepartment of CNR, is organized in 7 Sections, with theHeadquarters in Catania and the other Units located inAgrate Brianza (Mi), Bologna, Rome, Naples, Lecce andthe University of Catania. The Institute has a permanentstaff of 219 people (139 of them Researchers) and atemporary staff including around 40 post-docs and 60PhD students. In addition, the IMM research activitiesare further supported by 14 Research Associates(Professors) and 32 Associated Collaborators.

The research activitiesThe research activities are focused on three mainapplication areas and each one of the application areasis organized in workgroups, which coordinate thescientific activities on specific subjects involving thedifferent IMMSections:

1.Micro-Nanoelectronics

a. Power and high frequencies devices

b. Flexible and Large area electronic

c. Devices for classic andquantum information storageand processing

2. Functionalmaterials anddevices

a. MEMS andMOEMS

b. Chemical, physical and biological sensors

c. Multifunctionalmicro/nanosystems

d. Functional nanostructuredmaterials

3. Photonics

a. Energy conversion devices

b. Optoelectronics

c. Plasmonics andNanophotonics

The IMM expertise, instrumentation and facilities arecoordinated into 4 technological areas, which supportthe activities of the application areas, and are:

1.Micro-nanofabrication

2.Characterizations

3. Theoreticalmodeling

4. Synthesis of advancedmaterials

In general, the activities span frommaterial science andprocess development to device fabrication and systemintegration, thanks to the micro-nanofabricationfacilities present at the different sites (clean-room areastotaling >1500m2).

Catania:HeadquartersandUniv.ofCatania

AgrateBrianza

Bologna

Rome

Naples

Lecce

IMMsites in Italy

The Institute forMicroelectronics andMicrosystems (IMM),

Through the participation tomany European projects,IMM benefits from collaboration with prestigiousinternational research institutions, such asLaboratoire d'Electronique de Technologie etd'Instrumentation (LETI), InteruniversityMicroElectronics Center (IMEC), EuropeanSynchrotron Radiation Facility (ESRF), CentroNacional de Microelectrónica (CNM), and with manysemiconductor industries, includingSTMicroelectronics (ST), Leonardo-Finmeccanica,Micron, Enel Green Power (EGP), LFoundry, Philips,SILVACO, AMD and ABB.

Particularly effective is the collaboration withSTMicroelectronics, with two IMM Sectionsembedded in ST plants in Catania and Agrate Brianza,allowing the successful development of public-private initiatives. More recently IMM has alsoestablished a joint lab on solar cell characterizationwith EGP (Passo Martino, Catania) and another jointlab on the heteroepitaxy of GaN has been plannedwith Leonardo-Finmeccanica (Rome), adopting thesuccessful public-private collaboration schemeexperimented for many years with ST. Furthermore,IMM has a close collaboration with many Universities(one of its Section being located within the PhysicsDept. of the University of Catania) and also carries outan important role in the formation, coordinatingmany PhD and graduate student activities. As a result,IMM effectively bridges the Academic Institutionresearch activities with the Industrial applications.

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IMM is currently involved in 20 European Projects, 4 ofthem coordinated by IMM researchers, includingH2020 ICT (5), ECSEL (5), FETPROACT (2). Among theEuropean Projects it is worth mentioning the ERC-Consolidator Grant XFab (coordinated by A. Molle),dealing with the development of two dimensionalmaterials for nanotechnology applications. In addition,IMM is partner of the European Network for ElectronMicroscopy (ESTEEM3) and of the ESFRI initiativeEuroNanoLab, a European initiative aiming to establisha large scale distributed nanofabrication researchinfrastructure.

IMM is also involved in many National and Regionalprojects, including relevant infrastructural projectsfunded by Regione Campania (project CIRO), RegioneLazio (project NanoMicroFab) and Regione Sicilia(project BeyondNano Upgrade). IMM has an annualoperating budget, averaged over three fiscal years,around €24million, including €9.8 million of personnelcosts and €1.4 million of running costs supported byCNR and €12.8 million arising from European RegionalDevelopment Funds, European, International, Nationalprojects and Industrial research contracts (see the piechart below on left).

Scientific results are presented to many InternationalConferences and an average of 380 articles arepublished by IMM researchers on JCR journals everyyear.

The research activities in the area of Micro/NanoElectronics at IMM cover the full electronic “value-chain” from advanced materials and innovativetechnological processes, to emerging logic and non-volatile memory nanodevices exploiting bothclassical and quantumphenomena, as well as systemsand novel computing paradigms beyond von-Neumann.In particular, the Institute is active and has a long andrecognized expertise in materials, advancedtechnological process and modeling/simulation invarious sectors related to:

● Enabling technologies for energy efficient high-power and high-frequency devices based onadvanced materials (such as SiC, GaN, GaAs,graphene, etc.) and high frequency components foraerospace applications.

●Device and electronic circuits on flexible substratesbased on organic/inorganic thin film transistors.

● Novel devices with logic and non-volatile memoryapplications exploiting emerging concepts andadvanced materials.

● Enabling technologies for the nanofabrication andprocessing of devices.

● 2Dmaterials for nanoelectronics and spintronics.

● Devices and methodologies towardsneuromorphic and quantum computation systems,and More than Moore applications.

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Power andHigh FrequencyDevices

Today, power and high-frequency devices findapplication in different fields, e.g., consumer electronics,automotive, photovoltaic, telecommunications,transportations, etc.The main objective of the "Power and High FrequencyDevices" group is the development of key enablingtechnologies for a new generation of energy efficientpower and high-frequency devices, with a reducedpower consumption, able to overcome the currentlimitation of silicon.Wide band gap semiconductors (e.g., SiC and GaN) arethe semiconductors of choice to satisfy theserequirements. Hence, a large part of the activities arefocused on SiC and GaN, where the Institute has a longterm recognized experience. Moreover, the researchcovers other emerging technologies based onpolycrystallinediamond,GaAs, grapheneand related2D-materials, etc.. The activities are currently focused on thefollowing topics:

● Epitaxial growth of 4H-SiC and 3C-SiC for powerdevices and new applications (e.g., MEMS, detectors,etc.).

● Advanced processing and characterizations for SiCand GaN devices (interfaces with metals and insulators,implantation and annealings for SiC selective doping,normally-off HEMTs, new dielectrics and nano-laminates, etc.).

● High-frequency components (e.g., filters, oscillators,antennas, interferometric systems, electromagneticsensors, etc.) based on Si, hydrogenated diamond orother materials (dielectrics, metamaterials, polymers,etc.).

● Novel devices integrating 2D-materials on WBGsemiconductors for RF applications.

Micro/Nano Electronics

Devices for Classic andQuantum Information StorageandProcessing

Nowadays, micro-nanoelectronic research addresses onone side the continuous scaling of logic and memorydevices, also in view of targeting low power electronics.On the other side, there is an increased interest todevelop new systems and new computing paradigms,which can address the current emerging societalchallenges. IMM is at the forefront of emergingtechnologies in the nanoelectronics area and theresearch activities are carried out in collaboration withleading Industries in the field, as well asItalian/international Universities and Research Centers.The research activities are currently focused on thefollowingmacro-areas:

● Materials and devices towards next generation non-volatile memory devices, with focus on phase changememory (PCM) and resistive switchingmemory (RRAM).

● Electronic devices based on 2D (graphene, silicene,phosphorene, MoS2 and related materials) and 1D (Sinanowires) materials for low power nanotechnologyapplications.

● Dielectrics for CMOS and metal-insulator-metalcapacitors for powermanagement.

● Spintronics based on topological insulators andTMDs.

● Development of advanced nanofabrication toolsbased on self-assembledmaterials.

●Memristivedevices as key elements for neuromorphicsystems and artificial intelligence

● Quantum computation systems: modeling/simulationof semiconducting and superconducting qubits.Electrical characterizationof Si-baseddevices as qubit.

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Flexible and LargeArea Electronics

Flexible electronics represents a new branch ofelectronics in which circuits are deployed on bendableand even stretchable substrates.Flexible electronics offers several advantages over rigidbackplane, such as lower production cost, lightness androbustness. Moreover, this field opens new designs andconcepts and it provides the possibility to realize specificapplications in numerous markets: in particularaerospace, biomedical and environmental companies,consumer electronics, sportswear represent the principalstakeholders since key properties such as lightness,transparency and competitiveness can favor the rise ofbreakthrough products.Nowadays a series of technologies related toconventional microelectronic processes or innovativeprinting techniques offer a wide range of possibilities forfabricating novel devices with different materials,depending by the specific properties that are requested.In fact, circuits’ performances often have to be balancedwith production costs. In IMM two technologicalplatforms are available to fabricate devices based on:

● Polycrystalline Silicon, obtained by excimer laserannealing, providing devices with high electricalperformance and complex integrated circuits.

● Organic semiconductors, deposited by solutionprocess or printing techniques, for large-area and low-cost applications.

In addition, new ultra-thin and two-dimensionalmaterials, such as transparent conductive oxides,graphene, transition metal dichalcogenides, areinvestigated. Indeed, thanks to their properties (highcarrier mobility, optical transparency, stability ofstructural and electronic characteristics upon bending orstretching), are particularly promising for flexibleelectronic applications.

MEMSandMOEMS

The workgroup related to MEMS and MOEMS devices isfocused on activities related to advanced design,development of enabling technologies for differentapplications and the fabrication of complex devices andsystems. The activities are currently focused on thefollowing topics:● Manufacturing and characterization of devices andMEMS sub-systems formicrowave andmillimeter-waveintegrated telecommunications on Si, alumina, SiC andGaAs substrates● Development of MOEMS-type microfluidic platformsfor Lab-On-Chip systems suitable for pharmaceuticalapplications in radiotherapy● Integration of innovative materials deposited withadvanced synthesis technologies (ALD, MOCVD) inMEMS devices, for piezoelectric, thermoelectric,chemical transduction and protective coatingsdeposition● Development of MOEMS SiC sensors for themeasurement of pressure in the cylinders ofendothermic engines● Development of MOEMS technology optical fibreultrasonic probes for minimally invasive medicaldiagnostics● Fabrication of MEMS devices for energy harvestingfrom heat sources and other semiconductor materialsmanufactured with top-down technologies, even onflexible substrates.● Development of MEMS sensors for the measurementof physical parameters of automaticmachines

● Fabrication of newMEMS/NEMS devices based on 2Dmaterials (graphene, MoS2).

The research activities in the "Functional Materialsand Devices" thematic area are organized in amultidisciplinary perspective, exploiting theconsolidated skills in the different IMM Units oninnovative micro- and nanostructured functionalmaterials, the advanced instrumentation andtechnological facilities for the development,characterization and prototyping of sensors,integrated systems and devices with applicativeimpacts in various sectors such as aerospace, energyand sustainable mobility, health, agri-food andbiology. The research activities are structured into 4workgroups: 1) MEMS and MOEMS 2) Chemical,Physical and Biological Sensors 3) Multifunctionalmicro-nano Systems and 4) FunctionalNanostructured Materials.

By integrating design expertise and excellentcharacterization andmicrofabrication facility IMM candevelop and validate multifunctional devices withTRL up to 6. The fabricated devices and materialsrelated to present area can be classified into thefollowing categories:

● Physical sensors● Chemical sensors● Biosensors●MEMS sensors and actuators● Devices for energy harvesting● Low-dimensional and nanostructured materials●Microphysiological systems

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FunctionalMaterials andDevices

Chemical, Physical andBiological Sensors

The sensors for chemical, biological and physicaldetection represent one of the fundamental researchactivities at IMM, confirming the mission of scientificinnovation and the ability to transfer new materials intohigh performance devices and sensors. The mainresearch activity of this Workgroup is focused onmodeling, design, devices manufacturing with micro-nanoelectronic techniques and their functionalcharacterization in different application domains.

The different devices, systems and related enablingtechnologies concern chemical, physical and biologicalsensors applied in strategic sectors such as aerospaceand the environment, energy and sustainable mobility,health and agri-food, omics sciences and intelligentsystems. In these sectors, innovation pushed by thedevelopment of newmaterials and their integration intohigh performance platforms has revolutionized andcontinuously innovates the society, contributing to theimprovement of the quality of life. The activities have astrong interaction of expertises and a multidisciplinaryapproach with the other workgroups of the applicativeareas. The strategic research activities currently beingdeveloped are oriented to the study of nanostructuredand low-dimensional materials and the investigation ofdisruptive transduction techniques. The currentdevelopment roadmap includes the following advancedmaterials and devices, classified into followingcategories:

● Sensors and sensor arrays based on nanostructuredmaterials for chemical detection

● Nanogap sensor devices● Physical sensors and photodetectors● Biosensors

MultifunctionalMicro-Nano Systems

In the framework of national strategic research roadmap,IMM owns engineering know-how and strategictechnological facilities needed for the development ofmultifunctional systems.

The IMM research activities on sensors andmultifunctional sensing systems are related to bothbasicresearch and application-driven developments; themainaim is to enforce the technological transfer, mergingMEMS/NEMS components with the broad expertise andcapabilities about nanostructured materials into theframework of Smart Systems Integration (SSI).

Main research activities are in the areas of:

● Smart, Secure and Inclusive Communities:autonomous multisensory systems of chemical andphysical parameters, even on unmanned platforms

● Technologies for living environments: multifunctionaland multisensorial systems for assistance to the elderlypeople / Ambient Assisted Living (AAL), advanced andautonomous analytical systems for air quality

● Agri-food and agriculture: advanced electronic nosesand multisensorial systems for food quality and safety;microsensors on drones for precision agricultureapplications

● Multifunctional systems based on functionalizedoptical fibers and silicon integrationof photonic devices

● Flexible sensor systems related to wearable devices:devices for power generation and implantable sensorsfor artificial organs

● Multifunctional systems for biological applications:biosensing and micro-release of drugs, multisensorsystems formedical diagnosis

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Functional NanostructuredMaterials

The workgroup active on the functional nanostructuredmaterials is focused on the research and development ofinnovative materials with specific functional propertiessuch as electrical, optical, magnetic and/or chemical,through the control of the nanoscale structure. Theactivity carried out has a remarkable impact into fieldssuch as sensors, photonics, catalysis, medicine andwaterpurification. The competencies available at IMM rangefrom the growth of different classes of nanostructuredfunctional materials, to the accurate control of synthesisthrough sophisticated techniques (ALD, Sputtering, CVD,Pulsed laser deposition, MOVPE, MBE) and/or low-costchemical and electrochemical processes, potentiallyscalable at the industrial level. Particular attention is paidto the development of advanced characterizationtechniques and methods of investigation andmanipulation.

Themain classes of investigatedmaterials are:

● Semiconductor nanostructures for medical andbiological applications aimed to improve the availabilityand targeting of drug molecules by reducing theirtoxicity; silicon nanostructures, III-V and III-N-V core-shell and core-multishell nanostructures;

● Metal oxides for water purification and disinfection,for concentrating solar systems, supercapacitors andlithiumbatteries;

● Two- and three-dimensional carbon-based materialsfor water purification and their integration with photo-active polymers

● 2Dmaterials, such as TMDC and BN with high qualityand structural purity

● Superconducting andmagneticmaterials● Low temperature of compounds metal thin films forcontacts on 1D structures.

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microsystems, systems on chip (SoC) and systems inpackage (SiP) devices. The dominant PV technology issilicon based, but novel PV technologies may becomevery important in future, for example coupled with Si PVtechnology in utility scale plants, or for buildingintegrated PV, or for powering nomadic or wearableelectronics, etc.

Our work is performed in many cases in strictcollaboration with companies but with focus on novelapproaches with strong potential for industrialapplication. Themajor areas of activity at IMM are:

● Efficiency enhancement and reliability of newgeneration high performance solar cells.

● Hybrid architectures for dye sensitized and perovskitesolar cells.

● Photo-electrochemical water splitting for hydrogenproduction.

● Si, Ge, andmetallic nanostructures● development of high vacuumflat thermal solar panel.

Optoelectronics

Silicon photonics is pushing industrial research, andIMM is engaged in this field with the main objective of1) overcoming the intrinsic inability of silicon to emitlight, 2) studying original configurations (i.e., dielectricmetasurfaces and photonic crystals) for lightmanipulation on a sub-micron scale, and 3) developinghigh performance photodetectors based on resonantstructures and innovative materials (i.e., graphene).Devices and technologies are designed for optical inter-and intra-chip interconnections, for the transmission ofultrafast data in next-generation fiber optic networks,and for sensing.

Photonics has a multidisciplinary character andprovides the technological bases for thedevelopment of high-impact electronic devices andsystems for the society of the future.The research activities at IMM in this area are mainlydevoted to:

● developing photonic devices to be integrated intonext-generation micro and nanoelectronic chips, inwhich the interconnections are optical rather thanelectrical, overcoming the current limits of powerdissipation and data processing speed. Theseactivities are part of the broad scenario that looksforward to the realization of nanoelectronic systemsincreasingly intelligent, fast, miniaturized and cheap(also based on the exploration of quantumtechnologies), as well as of optical networks for ultra-wide band and cryptographic data transmission.

● developing photonic devices, sensors, micro andnanosystems, advanced diagnostic and imagingtechniques for biomedicine, cultural heritage, agri-food, environment control, smart secure andinclusive communities, industrial processes,aerospace, sustainable mobility.

● developing next-generation solar cells characterizedby low cost andhigh efficiency, so tomake themost ofthe planet's main renewable energy source.

Devices for Energy Conversion

The field of Energy Conversion Devices is facing a hugegrowth thanks to the increasing interest towardsrenewable energies, due to the need at the worldwidelevel to reduce carbon emission for energy production.Photovoltaics (PV) is also amajor technology for energyharvesting, to power novel generation of silicon

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Photonics

New Si- and SiC-based UV-visible avalanchephotodiodes and Si photomultipliers with highsensitivity (up to single photon) and/or internal gainare also developed for applications ranging frombiomedicine to nuclear physics.Nanophotonic biological structures, such as diatoms,are studied for the realization of new bio-inspireddevices for smart light manipulation, such as super-lenses, and sensors.Non-destructive imaging and diagnostic systems forbiomedicine, materials science, and micro /nanoelectronics are developed. They are based ondigital holography, linear and non-linear ramaneffects, interferometric and spectroscopictechnologies.New fiber optic sensors are developed, a first familybeing based on linear and non-linear optical Ramanand Brillouin effects, while a second one looks at lab-on-fiber configurations through the realization ofinnovative plasmonic nanostructures andmetasurfaces at the fiber tip.A new objective concerns the development ofquantum technologies and integrated quantumdevices on chip.

Plasmonics andNanophotonics

The research activity is focused on the realization ofnew optically passive and active nanostructures,differently organized in periodic arrays or randomized,for different applications.

One of the main aim is the dynamic control of lightpropagation in plasmonic and nanophotonic circuits.Expertise includes: i) design, supported by variouscalculation tools for theoretical modeling; ii)development and implementation of newnanofabrication strategies with different approaches,both top-down and bottom-up, on conventionalsubstrates and not (i.e., optical fibers); iii) opticalcharacterization.

Main research topics are:

● Fabrication of nanostructured plasmonic materials:noble metal nanoparticles (gold, silver), plasmonicnanostructures on planar supports from top-down andbottom-up approaches, and unconventional substrates(optical fiber tip), silicon nanowires and titanium oxidedecoratedwith noblemetal nanoparticles.

● Development of bio-inspired nanostructuredplasmonic devices or of biological derivation.

● Development ofmagneto-plasmonic nanomaterials.● Development of metasurfaces: plasmonics anddielectrics.

● Development of theoretical-numerical methods forthe study of light-matter interaction in plasmonicstructures.

Principal applications are in bio-chemical sensing, lightsources (in a wide spectrum range), solar energyconversion, photo-electro catalysis, integratednanophotonics.

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The MNF network is a state-of-the-art Micro/Nanofabrication research infrastructure that offers anumber of cutting-edge facilities for themanufacturing of microelectronic devices andmicrosystems.Conventional microelectronic production equipmentare combined with large area electronics processes tomeet the needs of scholars and entrepreneurs whowant to investigate new device properties or boostnew applications in the market.Infrastructures, instruments and skills constitute acomplex of the highest level and value, which has noequal at the national level.With over 1400 m2 from ISO 4 to ISO 8 Clean Room,170 equipment distributed over 7 locations in Italyand more than 60 researchers and techniciansoperating in the Clean Rooms, IMM MNF networkrepresents a reference network for basic, applied andindustrial research for the development of:

● MEMS, MOEMS, Micro sensors and actuators,photonic devices, flexible electronics with the abilityto manufacture prototypes with TRL 6 - TRL 7

● Devices for micro / nano electronics: study ofprocesses and materials, power devices

The high number of Italian and European projectswith themost important research centers at Europeanlevel, demonstrate the potential of the MNF networkto contribute to carrying out scientific research ofexcellence.Thanks to its strong orientation towards applicationsand its distribution across Italy, the MNF networkprovides an optimal interface towards the nationalindustrial partners. The numerous collaborations inresearch activities and service contracts with bothItalian and foreign industrial companies, highlight thepotential capacity of the MNF Lab of favoring andencouraging technology transfer to small, medium

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and large companies, and support a small andmediumcustom production.IMM, thanks to the equipment and skills in the field ofmicro- and nano-fabrication present in the MNFnetwork, represents a reference to the nationalexcellence of key enabling technologies (KET).The distributed Clean Room has a complete CMOScompatible 4-inch substrate line manufacturingprocesses, and a partial ability to process 6-inchsubstrates and has facilities such as:

● Design and simulation process software

● Lithography: Near and DUV Optical contactlithographywith resolution down to 700 nmand laserlithography (<500 nm);

● Dry Etching processes: RIE and ICP etching withhigh aspect ratio for different materials (eg Silicon, III-V, GaN, AlN, and SiC);

● Growth and deposition: metallic, dielectric thinfilms and 2D materials by Hot wall tube, PCV, LPCVD,PECVD, ALD, electroplating, and printing system;

● Annealing: thearmal and Laser Annealing, RTP andUH-RTP process for Si and SiC

●Wet anistropic silicon etching by TMAH and KOH

●Wafer bonding

● Doping processes by solid and liquid phase,Medium and High energy ion implantation

● Nanolithography by EBL, Nano Imprint and blockcopolymer thin film

MNF Network is an active part of It-Fab, aninfrastructure consortium of research in the micro andnanotechnology field connected to the EuroNanoLabproject, which will significantly increase the possibilityto access projects on a European scale.

Micro andNano Fabrication (MNF)

Up to 4 circle X-ray diffractometers and X-ray beaminstruments are available for structural and analyticalinvestigations, including XRD, XRR, XRF, TXRF and XPS.

Scanning probe analysis instruments are installed atalmost all IMM units. The methods include AFM,EFM/MFM, KPFM, TUNA, SCM, CAFM, SSRM. Roma Unithas developed analysismethods usingmicrowaves.

Mössbauer, EPR and ToF-SIMS (at Agrate Unit) completethe list of analytical techniques.

Electrical andOptical Characterization

Electrical and optical analyses are often strictly relatedand in IMM are applied to a wide range of samples, fromSi and SiC based materials and devices, to bio-materials,2D materials, solar cells, and much more to characterizedefects, charge transport dynamics, interfaces, etc..

Lecce Unit hosts two laboratories (NPAL and ELPHO)devoted to Nanophotonics, Plasmonics and Electro andElectro-optical analysis. At Napoli Unit a Non-linear andUltrafast Optics lab allows optical analysis of bio- andnano-materials.

The electrical andoptical facilities are spread at almost allIMM Units and include several Probe stations (for up to12” wafers) with temperature controlled chucks;Magnetic measurements; Ellipsometry; Opticalspectrometry; Electro- and Photo-luminescence; FTIRandRaman spectroscopy; Reflectivity, QE,Transmittance,Spectral irradiancemeasurements.

Characterization plays a crucial role in the researchactivities at IMM. Investigating the physical andchemical properties of materials is of fundamentalimportance also to understand the operation ofdevices.IMM has recognized and consolidated tradition in thecharacterization of materials and devices. Themultidisciplinary nature of the Institute alwaysrequired techniques for themorphological, structural,analytical, optical and electrical characterization. Assuch, some techniques are developed to amaturity tobecome a full research activity and the experience ofresearchers allows the organization of educationalevents.The characterization facilities, widespread among theIMM units, can be classified in two groups: (i)Structural, Morphological and Analytical techniquesand (ii) Electrical and Optical ones.

Structural, Morphological and AnalyticalCharacterization

IMM houses a variety of instruments for morphologicaland structural characterization including transmissionand scanning electron microscopes, probemicroscopes andmulti-purposeX-rays diffractometers.

Electron probe analysis includes 5 TEMs, 7 SEMs and 2FIBs (with electron and ion columns). Catania HQ hoststhe first aberration probe corrected TEM installed inItaly. The instruments are also available for externalcustomers.

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Characterizations

● new nanocomposite materials based onnanostructured polymers, titanium and zinc oxide,graphene oxide.

Low dimensional structures:● 0D: Silicon, Germanium and Silicon Carbidenanopar�cles, colloidal nanocrystals of metal oxides,pure, doped and in core-shell configura�on;● 1D: nanowires and nanotubes of Carbon, Silicon,Titanium, Zinc and Copper oxides, chalcogenide andcore (mul�) shell nanowires based on III-V compoundsemiconductors;● 2D: graphene, silicene, phosphorene or hexagonalboron nitride, an�monene and transi�on metaldichalcogenides;● 3D: graphene foams;● Biocompa�ble and biodegradable nanomaterials.

The synthesis techniques are mainly based on Chemicaland Physical methods:● Chemical Vapor Deposi�on, CVD●Metalorganic Chemical Vapor Deposi�on, MOCVD● Atomic Layer Deposi�on, ALD●Molecular Beam Epitaxy, MBE● Spu�ering and Evapora�on● Low-cost chemical and physical synthesis

These techniques are compa�ble with ultra/large-scaleintegra�on processes, allowing IMM to keep strict andfrui�ul collabora�ons with world leader microelectronicindustries.

(for further details visit the website)

The synthesis of new and technologically advancedmaterials represents a strategic field in terms ofscientific endeavor and industrial perspectives. IMMhas a deep knowledge and experience in the field andis equipped with a broad variety of sophisticateddeposition systems, based on physical and chemicalmethods. The research activity stretches from thesynthesis of thin-films to nanoscale structures withnovel functional properties. Several state-of-the-artsystems along with innovative depositionmethodologies are employed and developed forvarious applications, from energetics tonanoelectronics, photonics, biomedicine, sensing,and environmental/cultural heritage protection. Thiswide range of applications ensures the as-synthetizedadvanced materials to play a key role in thedevelopment of hi-tech products and sophisticateddevices.All Application Areas of IMM are involved in thefunctionalization and exploitation of advancedmaterials, which can be grouped into two mainclasses: ultra-thin films (down to atomic monolayers)and nanostructures of several geometries.

Thin films/monolayers:● oxides: ultra-thin films of transition metaloxides/rare earths● transparent conductive oxides and materials● nanostructured functionalized semiconductoroxides● Selenium- and Tellurium-based chalcogenides● hybrid perovskites, manganites, ruthenium,nitrides● flexible conductors and semiconductors

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Synthesis of AdvancedMaterials

The theoretical-computational activity at IMM aims atbridging the gap between quantum phenomena atthe nanoscale and devices and processes withmacroscopic dimensions. To this end severalapproaches at different scale are developed andemployed, starting from quantum mechanicsschemes for the description of materials up to therealization of advanced algorithms for the simulationof real-world processes and devices.

Applications include:

● ab-initio modeling , using Density FunctionalTheory (DFT) and beyond, of the structural,electronic, optical, and magnetic properties ofmaterials and nanosystems;

● electronic transport modeling in high-frequencydevices, large-area electronics, memristors;

● finite elements methods (FEM) multiphysicsmodeling of electronic, microelectro-mechanical,microfluidic, sensing, and mechanical devices;

● electromagnetic modeling of photonics devices,plasmonic and magneto-plasmonic nanosystems,multilayer structures and complex 3D systems;

●modeling of two-dimensional systems (graphene,silicene, germanene, phosphorene) and hybridperovskites;

● modeling of phase-transitions and thermalmodeling of nanostructures and solar absorbers;

● simulations of semiconductor devices andprocesses;

● statistical methods for image analysis.

The IMM researchers have a large expertise in usingsoftware for modeling of devices (COMSOL, FEniCS,SILVACO, SYNOPSIS, CADENCE, DESSIS, DIOS-TCAD,Microwave Office, MEMS-Pro, Lumerical) and foratomistic electronic structure simulations (QuantumEspresso, TURBOMOLE, Yambo, Wien2K, PROFESS,Siesta).

Fundamental research includes developments of:

● new functionals (both exchange-correlation andkinetic energy) for DFT;

●methods for strongly-correlated quantum systems(Hubbard models, quantum-control, Density MatrixRenormalization Group);

● non-equilibrium Green-function methods;

● kinetic Montecarlo on lattice and super-lattice formaterial processing;

● quantum-computation and technologies(quantum-control, quantum-noise, circuit-QED);

IMM is also involved in the development ofcommercial software, namely TURBOMOLE(COSMOLOGIC), a quantum-chemistry package, andLIAB (LASSE Innovation Application Booster) a FEMtool for laser annealing simulations.

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TheoreticalModeling

Contacts

IMMDirector: Guglielmo Fortunato (guglielmo.fortunato@cnr.it)

Application Areas

Micro-NanoelectronicsSabina Spiga (sabina.spiga@mdm.imm.cnr.it)

Functionalmaterials and devicesLuca Francioso (luca.francioso@le.imm.cnr.it)

PhotonicsIvo Rendina (ivo.rendina@cnr.it)

Technological Areas

Micro-nanofabricationFulvio Mancarella (mancarella@bo.imm.cnr.it)

CharacterizationsSebania Libertino (sebania.libertino@imm.cnr.it)

TheoreticalmodelingFabio Della Sala (fabio.dellasala@cnr.it)

Synthesis of advancedmaterialsPaola Prete (paola.prete@cnr.it)

For more details visit the website: https://www.imm.cnr.it

Document updated inMarch2019