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Examples and disciptions for measurements
On pixel and strip sensors
New Panel
21/04/23 DESY Zeuthen 2
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16
16 H
16 L
18 H
18 L
24 H24 L21 H
21 L
General CommentsIf you are not sure about the setup, settings or obtained results:
CONTACT THE EXPERT!!!BUT check before: Is everything switched on? Connect cable in a prober way? • Check if bias ring is connected to ground (switch light on (0V!!!) and see if
current flow) Same for pixel if you have doubts
Move chuck up and down 3x, test again
• 3 Needle measurements (special Cint) could be problematic if the contact is lost -> check all 3 curves!
• Be careful if the needles are in contact and you touch the probe station or close it -> go to seperation before
• WedgeCard handle: Fix X; Move Y to the right position and fix it, needle high (Z-direction) change with fixing!!!; Contact Z
• 11121/04/23 DESY Zeuthen 3
CHECK THAT !!!
0 50 100 150 200 250 300
9.00E-014
9.50E-014
1.00E-013
1.05E-013
1.10E-013
1.15E-013
1.20E-013
1.25E-013
1.30E-013
1.35E-013
1.40E-013
1.45E-013
1.50E-013
1.55E-013
1.60E-013
1.65E-013
1.70E-013
1.75E-013
FZ320P-02-Mpix-2_1-120_line7_0006_pixel FZ320P-02-Mpix-2_1-120_line7_0008_pixel FZ320P-02-Mpix-2_1-120_line7_0010_pixel
Loosing one contact (partly)
Ag
ilen
t_E
49
81
A-f
ara
d
voltage0 50 100 150 200 250 300
-5.00E-015
0.00E+000
5.00E-015
1.00E-014
1.50E-014
2.00E-014
2.50E-014
3.00E-014
3.50E-014
Ag
ilen
t_E
49
81
A-f
ara
d
voltage
FZ320P-02-Mpix-2_7-120_line7_0006_pixel FZ320P-02-Mpix-2_7-120_line7_0008_pixel FZ320P-02-Mpix-2_7-120_line7_0010_pixel Average pixel 8 & 10
Loosing one contact (complete)
How to measure irradiated sensors• Open dry air valves and cool down the Chuck to -10*C
– LOOK that the pressure not drops below 5bar!– Open the outer door of the lap and switch on the air system
• Take the sensor from the fridge & put it into the station. – Close the climate chamber and look if water is on the probe station / sensor and
wait until everything is dry! (COMMENT: If this takes longer than 1-2 minutes something is maybe wrong!)
• Cool down to -20*C and have a look to the pressure. If it drops to strong close dry air valves. WAIT 1 minute after reaching goal temperature that everything is stabilized!
– Look if no Water/Ice is on the sensor. If this happen you have to warm the chuck again and wait until everything is dry again!!!
– Needles cool down during measurement -> first time it could be that you loose the contact => CHECK THAT.
• Note the time (if greater than 5 minutes; in 5 minute steps) the sensor was approximately over 0*C in the field: “Additional comment” as: “Sensor was warmed approximately … minutes”
------------------------------------------------------------------------------• After measurement: Warm the Chuck to -5*C and take
the sensor out and bring it back to fridge (ASAP!!!)
21/04/23 DESY Zeuthen 6
I/V - Bias ring /Guard ring (Change Ampere meter)
- Voltage source: 0…(700)1000V for (120;200um)320um thickness; 300/500V for 100 and 50
um [OR maximum Voltage before break] in 5V steps < 100V, 10V steps >100
- !!!Type (p -> ’-’; n -> ’+’) !!!!- T = 22 / -20 ˚C (non-irradiated / irradiated)- Currentlimit: 50A / 1mA (non-irradiated / irradiated)
A
VD
C
SampleChuck
BP
Bia
s R
ing
Guard Ring
0 100 200 300 400 500 600 7000.0
2.0n
4.0n
6.0n
8.0n
10.0n
even numbers = poly siliconodd numbers = punch throughregions 1-6 pixel length = 2421mregions 7-12 pixel length = 1171m
I/V Bias Ring -FZ320P-07-Mpix-1
Cu
rre
nt [
A]
1-120 2-120 3-100 4-100 5-80 6-80 7-120 8-120 9-100 10-100 11-80 12-80
Voltage [V]
Additional Measurement for Irrad.(if possible and current not to high)•-75…75V in 1V for Region 5,6,7•“-5…-1V” in 0.05V + “-1…1V” in 0.01V + “1…5V “ in 0.05V for Region 5,6,7
21/04/23 DESY Zeuthen 7
C/V - Bias ring / Guard ring
- LCR:1MHz @ 1V !!! Open correction !!!- Voltage source: |5…450V| or max Volt in 5V < 200V resp. 10V steps > 200V
- !!! Type (p -> ’-’; n -> ’+’) !!!- T = 22 / -20˚C (non-irradiate / irradiate)- Please ramp voltage back in 50V steps-Currentlimit: 50A / 1mA (non-irradiated / irradiated)
Bia
sA
dapt
er
LCR
Met
er
BP
Bia
s R
ing
Gu
ard
Rin
g
H
L
0 -100 -200 -300 -4000.0
20.0p
40.0p
60.0p
80.0p
100.0p
even numbers = poly siliconodd numbers = punch throughregions 1-6 pixel length = 2421mregions 7-12 pixel length = 1171m
C/V Bias Ring -FZ320P-07-Mpix-1
1-120 2-120 3-100 4-100 5-80 6-80 7-120 8-120 9-100 10-100 11-80 12-80
Ca
pa
cita
nce
[F]
Voltage [V]
Additional Measurement for Irrad.(if possible and current not to high)•-75…75V in 1V for Region 5If there is some influence :•“-5…-1V” in 0.05V + “-1…1V” in 0.01V + “1…5V “ in 0.05V for Region 5,6,7 and also first measurement for Region 6,7
21/04/23 DESY Zeuthen 8
Inter pixel capacitance
“Cint”
- LCR:1MHz @ 1V !!!Open correction !!!- Voltage source: |5…500V| or maximum voltage before break
in 5V steps <= 100V; 10V steps for > 100V
!!! Type (p -> ’-’; n -> ’+’) !!!-T = 22 / -20˚C (non-irradiated / irradiated)-Currentlimit: 50A / 1mA (non-irradiated / irradiated)-Ramp voltage back in 50V steps
LCR
Met
er
BP
Bia
s R
ing
H
LGuard Ring
0 100 200 300 400 5000.0
50.0f
100.0f
even numbers = poly siliconodd numbers = punch throughregions 1-6 pixel length = 2421mregions 7-12 pixel length = 1171m
1-120 2-120 3-100 4-100 5-80 6-80 7-120 8-120 9-100 10-100 11-80 12-80
Cint
- E100N-03-Mpix-2
Ca
pa
cita
nce
[F]
Voltage [V]
Additional Measurement for Irrad.(if possible and current not to high)•-75…75V in 1V for Region 5 for one PixelIf there is some influence :•“-5…-1V” in 0.05V + “-1…1V” in 0.01V + “1…5V “ in 0.05V for Region 5,6,7 and also first measurement for Region 6,7
21/04/23 DESY Zeuthen 9
- Bias Voltage: 500V or maximum voltage before break
- !!! Type (p->’-’; n->’+’) !!!- Voltage source: -2.5…2.5V in 0.25V steps-T = 22 / -20˚C (non irradiated / irradiated)-Currentlimit: 50A / 1mA (non-irradiated / irradiated)
VDC
BP
A
Bias Ring
Guard Ring
DC-PADs
H
Inter pixel Resistance
“Rint”
-2 -1 0 1 2
0
20p
even numbers = poly siliconodd numbers = punch throughregions 1-6 pixel length = 2421mregions 7-12 pixel length = 1171m
1-120 2-120 3-100 4-100 5-80 6-80 7-120 8-120 9-100 10-100 11-80 12-80
Voltage [V]
Rint
- E50Y-01-Mpix-1
Cu
rre
nt [
A]
21/04/23 DESY Zeuthen 10
I/V – DC-Pad “I3Pixel”- Voltage source: 0…(700)1000V for (120;200um)320um thickness; 300/500V
for 100 and 50 um [OR maximum Voltage before break] in 1V steps < 10V, 5V steps 10…100V, 10V steps >100V
- !!!Type (p -> ’-’; n -> ’+’)- T = 22 / -20˚C (non irradiated / irradiated)- Currentlimit: 50A / 1mA (non-irradiated / irradiated)
Bia
s R
ing
A
DC
-PA
Ds
BP
Gu
ard
Rin
g
0 100 200 300 400 500 6000
100p
200p
300p
400p
500p
even numbers = poly siliconodd numbers = punch throughregions 1-6 pixel length = 2421mregions 7-12 pixel length = 1171m
1-120 2-120 3-100 4-100 5-80 6-80 7-120 8-120 9-100 10-100 11-80 12-80
Itotal
for 3 Pixel
M200N-10-Mpix-1C
urr
en
t [A
]
Voltage [V]
Additional Measurement for Irrad.(if possible and current not to high)•-75…75V in 1V for Region 5,6,7•“-5…-1V” in 0.05V + “-1…1V” in 0.01V + “1…5V “ in 0.05V for Region 5,6,7
21/04/23 DESY Zeuthen 12
C/V – DC-Pad “C3Pixel”
- LCR:1MHz @ 1V !!! Open correction !!!- Voltage source: |5…450V| or max voltage in 5V < 200V resp. 10V steps > 200V- !!! Type (p -> ’-’; n -> ’+’) !!!- T = 22 / -20˚C (non irradiated / irradiated)- Ramp voltage back in 50V steps
Bia
sA
dapt
er
LCR
Met
erBP
Gu
ard
Rin
g
L
H
Bia
s R
ing
0 100 200 300 4000.0
500.0f
1.0p
1.5p
even numbers = poly siliconodd numbers = punch throughregions 1-6 pixel length = 2421mregions 7-12 pixel length = 1171m
1-120 2-120 3-100 4-100 5-80 6-80 7-120 8-120 9-100 10-100 11-80 12-80
Ctotal
for 3 Pixel -
E100P-03-Mpix-1
Ca
pa
cita
nce
[F]
Voltage [V]
Additional Measurement for Irrad.(if possible and current not to high)•-75…75V in 1V for Region 5If there is some influence :•“-5…-1V” in 0.05V + “-1…1V” in 0.01V + “1…5V “ in 0.05V for Region 5,6,7And also first measurement for Region 6,7
21/04/23 DESY Zeuthen 14
RBias “Poly silicon”- Bias Voltage: 500V !!! Type (p -> ’-’; n -> ’+’) !!! or maximum voltage before break- Voltage source: - 2.5…2.5V in 0.25V steps- T = 22 / -20˚C (non irradiated / irradiated)- Rbias : = V/(Imeas(V) – Ileak(0V) )
-2 -1 0 1 2-1µ
-500n
0
500n
1µ
Poly Silicon 2-120 4-100 6-80 8-120 10-100 12-80
RBias
- M200P-07-Mpix-2
Cu
rre
nt [
A]
Voltage [V]
VD
C
SampleChuck
BP
Bia
s R
ing
A
DC
-PA
D
Gu
ard
Rin
g
H Lin
Hout
Additional Measurement for Irrad.(if possible and current not to high)Check for Region 5: +50V and -50V bias voltage--- if no difference: Its ok; if not: Contact supervisor
Rbias
”Punch Through”
I
RPT
U
VD
C
SampleChuck
BP
Bia
s R
ing
PA
D
Gu
ard
Rin
g
Internal voltage from K2410
1E-9 1E-8 1E-7 1E-6
106
107
108
Re
sist
an
ce [O
hm
]
Current [A]
Bias Voltage 300V 100V 5V
Punch through resistance E100N-03-Mpix-2
- Bias Voltage: 500V or maximum voltage before break
- !!! Type (p -> ’-’; n -> ’+’) !!! - T = 22 / -20˚C (non irradiated / irradiated)- Methode1: Make voltage scan and find break; max 50V! Begin with voltage ramp 5V before break in 100mV steps- Methode2: Current source: 50, 100, 200, 500p/nA + 1uA
RPT
VD
C
SampleChuck
BP
Bia
s R
ing
PA
D
Gu
ard
Rin
gA
Additional Measurement for Irrad.(if possible and current not to high)Check for Region 5: +50V and -50V bias voltage--- if no difference: Its ok; if not: Contact supervisor
L
Rbias
”Punch Through revers”- Bias Voltage: 500V or maximum voltage before break
- !!! Type (p -> ’-’; n -> ’+’) !!! - Make voltage scan and find break; max 50V!- Begin with voltage ramp 5V before break in 100mV
steps Don’t take to less steps, there are needed for fitting!
RPT
VD
C
SampleChuck
BP
Bia
s R
ing
Gu
ard
Rin
g
A Setup 1
A
-15 -10 -5 0 5 10 15
0.0
1.0n
2.0n Overview Scan
Current \
A
Voltage \ V
RPt: overview 7-120
Pinhole- 10V between AC & DC- Bias Voltage: 500V or maximum voltage before break!!! Type (p -> ’-’; n -> ’+’) !!!- T = 22 / -20˚C (non irradiated / irradiated)Pinole I= >200pA
VDC
BP
A
Bias Ring
Guard Ring
AC
DC
Coupling Capacitance- LCR: 100Hz @ 1V !!! Open correction !!!- Bias Voltage: 500V or maximum voltage before break!!! Type (p -> ’-’; n -> ’+’) !!!- T = 22 / -20˚C (non irradiated / irradiated)
LCR
Met
er
BP
Bia
s R
ing
H
LGuard Ring
AC
DC
12 11 10 9 8 7 6 5 4 123
12 1
Pixel 32…1
8
Line
1
N S
E
W