CVD - Reactor Requirements SPS-DC Power Supply brochure.pdf · 2015. 7. 26. · SPS-DC Power Supply Founded in 1950 to design and manufacture High Power Converters, FRIEM continued

SPS-DC Power Supply Founded in 1950 to design and manufacture High Power Converters, FRIEM continued to develop its know-how

in energy conversion particularly for the electrochemical industry.

Thanks to its experience in 1984, FRIEM was able to start its first Power Supply for a PolySilicon CVD Reactor.

Nowadays FRIEM has more than 100 Units in service all over the world, producing PolySilicon with all the different

types of CVD Reactors.

Its deep knowledge in such a particular field and its capability of following the requests of continuous improvement

coming from the market drove FRIEM through the development of a completely new Power Supply for PolySilicon

production.

In early 2005 this gave origin to the SPS-DC Line: nowadays a complete line of DC Power Supplies for all kinds

of CVD Reactors.

SPS-DC Line General Characteristics:

• Independent Load Supply: High Process Efficiency and Production Capacity

• Re-start Function and Protections: Maximum Production Capacity together with Safety

• Modular Design: Maximum Flexibility for all the CVD Reactor types

• μ-Processor Current Regulation: High Accuracy and Fast Response

• User-Friendly HMI: Reduced Commissioning Time and High Process Optimization

• Bar-To-Ground Protection: Latest generation μ-Processor based device

Process and Production Benefits

• Higher Production Continuity granted by the Independent Load Supply

• Constant Electrical Performances for all the Different Processes

• Full Control and Protection of each Hairpin

• Higher MV Network Dips Withstand Capability

Electrical System Benefits

• Power Factor > 0,947 and CONSTANT through ALL the Process

• Low Harmonic content and CONSTANT through ALL the Process

• NO Medium Voltage Phases Unbalance

• Complying with IEC and IEEE Standards even WITHOUT Capacitor Banks and/or Harmonic Filters

SPS-DC is the only Poly-Si Power Supply based on the use of IGBT DC/DC Converters

The whole system is constituted by:

Rectifier Transformer

Main Control Panel

Start Choppers

Run Choppers

Pre-Start Unit

FRIEM supplies also:

Load Switching System

Earth Switching System

Busbar System Design and Supply

MV Switchgear

DCS Design and Communication with the SPS Main Control

CVD - Reactor Requirements

Main Characteristics

The Chemical Vapour Deposition (CVD) Reactor is the most diffused technology for production of extra-pure PolySilicon both

Electronic and Solar Grade.

During the deposition process Pure Trichlorosilane or Silane gas (injected in the Reactor) deposits on Pure Silicon Filaments,

which are heated up to more than 1000°C, continuously enlarging their size.

Electrical Power must be supplied to the Si Rods in order to heat and keep them at the requested temperature through

all the process despite that they continue to grow; the process lasts about 70 hours.

The finest is the Filament Temperature Regulation, the highest are the Poly-Si Production Rate and Quality; the Temperature

Regulation is Directly Proportional to the Regulation of the Current Supplied to the Si rods.

Therefore the Current Regulation of a Power Supply for CVD Reactors must be both Accurate on an extremely wide range

and Fast and Reliable.

In order to increase the Production Rate CVD Reactors of the last generation are provided with a higher number of rods

resulting in an increased request for flexibility of the Power Supply System.

FRIEM has replied with the SPS-DC Line, which, thanks to its modular design, perfectly meets the flexibility and load

independency required.

CVD Reactors No. of Rods 12 18 24 36 48 54

The main characteristics today required to Power Supply for the maximum production capacity are:

• Load supply independency: highest efficiency of the process with the independent control of the different parts

of the Reactor;

• Flexible electrical supply in order to always match with the process requirements: a batch process is varying time

by time (up to 20% difference from one cycle to another);

• Fast regulation response: smooth control of the process and good electrical performances.

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Polysilicondeposition

Inlet gases

Waste gases

Run phase = Main Deposition

Start phase = Deposition

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V-I Curve of the Process

SPS-DC Line

Power Supply SystemPower Electronics & Automation

FRIEM S.p.A. - Via Edison, 1

20090 Segrate - Milano - Italy

Phone: +39 02 213 33 41 Fax: +39 02 26 92 30 36

Internet: www.friem.com E-mail: [email protected]

ISO 9001-2000STANDARD

FRIEM_271_depliant4ante:FRIEM 23-02-2009 17:16 Pagina 1








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Pre-Start

System Accessories


Main Control Panel

Start Chopper SPS Advantages

Protection and Measurements

General CharacteristicsThe Silicon filament has a high electrical resistance at low temperature

and results in being non-conductive. Therefore high voltage is applied

with a dedicated unit, the Pre-Start, in order to obtain a small current

flow and starting the warm-up of the filaments. The Pre-Start is a

high-voltage apparatus and must follow specific standards. The Pre-Start

supplies only a few hairpins contemporarily. As soon as the hairpins

are in conduction at a set current, the SPS switches on the relevant

Start Choppers and the Pre-Start can supply other filaments.

If necessary all the filaments of the Reactor can be Pre-started. Since the Pre-start

time is very short, one Pre-Start unit is generally common for multiple Reactors (usually 4).

General CharacteristicsThe Rectifier Transformer Unit is used to provide a steady DC network

to the DC/DC Converters supplying the Reactor. The Rectifier is based

on thyristor technology in order to grant a smooth operation and regulation

and fast response in case of fault. The unit is designed for 18 or 36

pulses in order to reduce the harmonics and increase the power factor.

Transformer Characteristics • AC Input Voltage: From 6,6kV to 69kV, 50 or 60Hz

• Connection: Three Secondary Windings

• Construction: Dry-type cast resin or oil immersed

• Installation: Indoor or Outdoor

• Reference Standard: IEC 76

General CharacteristicsDuring the first phase of Deposition (START phase), each silicon hairpin is supplied by its dedicated

and independent DC/DC Converter (Start Chopper), which supplies the correct power in order

to obtain the correct growth of all the rods.

In modern reactors, with an always growing number of silicon rods, this independence grants

the highest flexibility and continuity of the Process, therefore the greatest production capacity.

Given that the operation and protection parameters of each Chopper are independently configurable,

even in case of fault of one or more hairpins, all the remaining rods can continue the Deposition;

therefore increasing the average production capacity.

In accordance with the SPS-Line modular design concept, also the Start Choppers grant high flexibility,

easy maintenance and allow the possibility of future expansion or upgrading.

General CharacteristicsEach SPS Unit is equipped with a Main Control Panel, type SMC,

which controls all the automations and protections of the Power

Supply System via the PLC housed inside the panel itself.

The SMC is equipped with a Touch Screen HMI showing all the

measurements, alarms and trips and allowing local control of the

Power Supply.

When connected to the Plant DCS, Local or Remote Control can be

easily and safely selected both from the panel itself and from the DCS.

In Local Mode the full management of the SPS Unit is done via the HMI

still allowing the DCS to read all the operating values; vice versa in

Remote Modality.

Moreover, both in Local and Remote modes, it is possible to select

Automatic or Manual Operation allowing a greater flexibility in tuning

the system especially during commissioning and start-up.

All the automation logics and protections functions are designed and

realized by FRIEM according to its over 25 years of experience in this field.

The PLC and the PLC/DCS Communication protocol can be chosen among

the most common industrial brands according to the customer’s requirements.

Run Chopper

Besides the Power Supply itself, FRIEM is capable of offering the

customer a complete package, including in the SPS those accessories like:

• Load Switching System• Earth Switching System• Busbar System Design and Supply• MV Switchgear• DCS Design and Communication with the SPS Main Control• Remote SPS Supervision

Operating Characteristics

• Technology: AC or DC

• Type: AC/DC RECT35-40, INV-H6, INV-H9, SVV-H6, SVV-H9

• Semiconductor: Thyristors

• AC Input Voltage: From 380V-3Ph to 440V-3Ph, 50 or 60Hz

• Output Voltage: From 6 kV or 2,8kV to 500V Regulated

• Output Current: From 0,1A to 40A Regulated

• Output Regulation: Current and Voltage Regulation standard ±1%

accuracy by means of thyristors phase firing delay

• Regulator: μ-Processor based Regulator, FRIEM’s type DRP-6T/6T

• Control Automation: via dedicated Industrial PLC housed in the Control Panel

• Reference Standard: IEC 146-6


• Type: AC/DC RECT 1500 or AC/DC RECT 1800

• Connection: Bridge

• Semiconductor: Thyristors

• DC Output Voltage: From 750V to 300V Regulated

• DC Output Current: From 700A to 1800A Regulated

• Output Regulation: Current and Voltage Regulation

standard ±1% accuracy through thyristors phase firing delay

• Regulator: μ-Processor based Regulator, FRIEM’s type DRP-6T

• Control Automation: via Industrial PLC housed in the Control Panel

• Pulses: 6 per each Bridge (up to 36 Total)



• Type: DC/DC 3xCH500

• Connection: Step Down Chopper

• Semiconductor: IGBT



• Rated DC Output Power: Up to 100kW

• Output Regulation: Current Regulation standard

±1% accuracy by means of IGBT switching control

• Regulator: μ-Processor based Regulator, FRIEM’s

type DRP-2D


Harmonics and Power FactorThe use of DC/DC Converters Technology is also extremely beneficial

in terms of Harmonic Content and Power Factor, key features for the

Electric Power Quality.

Even without the use of any Harmonic Filter and/or Capacitor Bank,

the current Harmonics pollution results are lower than the limits of the IEC

and IEEE standards, while the Power Factor is always higher than 0,946.

Moreover both Harmonics Content and Power Factor are constant

throughout all the process.

Balanced MV PhasesAs a further advantage to the Electric Power Quality the DC/DC

Converters Technology allows the phases of the Rectifier Transformer

and therefore those of the MV line to be perfectly balanced throughout

all the process.

This, besides running whichever number of loads independently

not affecting the network stability, also results in an easier design

of Rectifier Transformer.

DRP Digital RegulationAll the machines of the SPS are controlled by a state-of-the-art Digital Regulator, FRIEM DRP type. The DRP, together with the

PLC, takes care of the complete management of the SPS.

Measurements and RecordingThanks to the Serial Communication between the DRP and the PLC,

remotely on the DCS or locally on the HMI or on a Local Lap-top can be read:

• Current, Voltage and Power of each single Hairpin

• Complete list of Alarms, Events and Trip recording

• Oscillographic Recordings and Load Profile

ProtectionsAll the functions of the SPS have the aim to protect the apparatus and the whole process from major damages whilst still granting

the Highest Continuity of Production. Each function can be easily set up, enabled or disabled via a PC or the DRP keyboard:

• Regulation: Current, Voltage and Power

• Machine Protections: IGBT/Thyristor Failure, Overcurrent, Over and Under Voltage, Over Temperature, Cooling System Failure

• System Protections: Bars to Ground Protection, Silicon Rods Break (with Automatic Re-start)

• Self-diagnostic: Communication Failure, Internal Fault, Lack of Aux. Power Supply.

Maximum Production CapacityOver 25 years of experience in this field and the improved requirements of the

Deposition Process, led FRIEM to be the only Company in the World designing

and producing a Modular Power Supply for the PolySilicon production using

the DC/DC Converters Technology.

The loads independency given by the use of separated DC/DC Converters grants

the highest Production continuity and capacity, always reaching the maximum

rods’ diameter.

The highest production rate is also granted by the Automatic Re-start function

embedded in the DRP-2D Regulator: in case of a transient fault, the DC/DC

Converter automatically re-starts allowing the Reactor to continue the production.

Operating Characteristics• Type: DC/DC CH3000

• Connection: Step Down Chopper

• Semiconductor: IGBT



• Rated DC Output Power: Up to 700kW

• Current Regulation: standard ±1% accuracy by means

of IGBT switching control

• Regulator: μ-Processor based Regulator, FRIEM’s type DRP-2D


General CharacteristicsAfter some hours of deposition in the Start phase,

the system automatically switches to the MAIN RUN

phase, in which a dedicated Main Run Chopper

supplies independently a group of hairpins

connected in series.

Independent operation and modularity are also

maintained on the Main Run DC/DC Converters,

granting advantages like high flexibility and

continuity, therefore maximum Production Rate.

During this last phase of the Process most of the

rods’ growth takes place, therefore the power supply

independency is not only important but absolutely

necessary. Moreover the different sections (circles)

of the reactor are requiring different power.

In case of one or more rods’ fault, only the DC/DC

Converter Technology allows the remaining rods

to continue up to the end of the process, reaching

the maximum diameter.


Documents

CVD - Reactor Requirements SPS-DC Power Supply brochure.pdf · 2015. 7. 26. · SPS-DC Power Supply Founded in 1950 to design and manufacture High Power Converters, FRIEM continued