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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.1
CMOS Process Flow• See supplementary power point file for animated CMOS
process flow (see class ece410 website and/or* http://www.multimedia.vt.edu/ee5545/):– This file should be viewed as a slide show– It is not designed for printing
*Thanks to John Christiansen [mailto:[email protected]]
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.2
Layout CAD Tools• Layout Editor
– draw multi-vertices polygons which represent physical design layers– Manhattan geometries, only 90º angles
• Manhattan routing: run each interconnect layer perpendicular to each other• Design Rules Check (DRC)
– checks rules for each layer (size, separation, overlap)– must pass DRC or will fail in fabrication
• Parameter Extraction– create netlist of devices (tx, R, C) and connections– extract parasitic Rs and Cs, lump values at each line (R) / node (C)
• Layout Vs. Schematic (LVS)– compare layout to schematic– check devices, connections, power routing
• can verify device sizes also– ensures layout matches schematic exactly– passing LVS is final step in layout
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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.3
CMOS Layout Layers• Mask layers for 1 poly, 2 metal, n-well CMOS process
– Background: p-substrate– nWell– Active– Poly– pSelect– nSelect– Active Contact– Poly Contact– Metal1– Via– Metal2– Overglass
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.4
Design Rules: Intro• Why have Design Rules
– fabrication process has minimum/maximum feature sizes that can be produced for each layer
– alignment between layers requires adequate separation (if layers unconnected) or overlap (if layers connected)
– proper device operation requires adequate separation• “Lambda” Design Rules
– lambda, λλλλ, = 1/2 minimum feature size, e.g., 0. 6µm process -> λλλλ =0.3µm– can define design rules in terms of lambdas
• allows for “scalable” design using same rules• Basic Rules
– minimum layer size/width
– minimum layer separation
– minimum layer overlap
3
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.5
Design Rules: 1• n-well
– required everywhere pMOS is needed– rules
• minimum width• minimum separation to self• minimum separation to nMOS Active• minimum overlap of pMOS Active
• Active– required everywhere a transistor is needed– any non-Active region is FOX– rules
• minimum width• minimum separation to other Active
3λλλλ
MOSIS SCMOS rules; λλλλ =0.3µµµµm for AMI C5N
10λλλλ 6λλλλ
3λλλλ
5λλλλ
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.6
Design Rules: 2• n/p Select
– defines regions to be doped n+ and p+– tx S/D = Active AND Select NOT Poly– tx gate = Active AND Select AND Poly– rules
• minimum overlap of Active– same for pMOS and nMOS
• several more complex rules available• Poly
– high resistance conductor (can be used for short routing)– primarily used for tx gates– rules
• minimum size• minimum space to self• minimum overlap of gate• minimum space to Active
2λλλλ
2λλλλ
2λλλλ
1λλλλ
2λλλλ
gate =Active-Poly-Select
4
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.7
Design Rules: 3• Contacts
– Contacts to Metal1, from Active or Poly• use same layer and rules for both
– must be SQUARE and MINIMUM SIZED– rules
• exact size• minimum overlap by Active/Poly• minimum space to Contact• minimum space to gate
• Metal1– low resistance conductor used for routing– rules
• minimum size• minimum space to self• minimum overlap of Contact
2λλλλ
1.5λλλλ
2λλλλ2λλλλ2λλλλ
3λλλλ
1λλλλ
5λλλλ
note: due to contact sizeand overlap rules, min.active size at contact willbe 2+1.5+1.5=5λλλλ
4λλλλif wide
2λλλλ
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.8
Design Rules: 4• Vias
– Connects Metal1 to Metal2– must be SQUARE and MINIMUM SIZED– rules
• exact size• space to self• minimum overlap by Metal1/Metal2• minimum space to Contact• minimum space to Poly/Active edge
• Metal2– low resistance conductor used for routing– rules
• minimum size• minimum space to self• minimum overlap of Via
3λλλλ
1λλλλ
see MOSIS sitefor illustrations
3λλλλ
2λλλλ
3λλλλ1λλλλ
2λλλλ2λλλλ
6λλλλif wide
5
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.9
Physical Realization of a MOSFET• nMOS Layout
– gate is intersection of Active, Poly, and nSelect– S/D formed by Active with Contact to Metal1– bulk connection formed by p+ tap to substrate
• pMOS Layout– gate is intersection of Active, Poly, and pSelect– S/D formed by Active with Contact to Metal1– bulk connection formed by n+ tap to nWell
• Effective Gate Size– S/D will diffuse under the gate
• effective channel length is less than drawn• Leff = L(drawn) - 2LD
– FOX will undercut active region• effective channel width is less than drawn• Weff = W(drawn) - ∆W
– LD and ∆ W defined by fab. process– generally taken care of by SPICE
Gate
D
SBulk
Ground
Gate
D
S Bulk
VDD
L(drawn)
LeffLD
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.10
Substrate/well Contacts• Substrate and nWells must be
connected to the power supply within each cell– use many connections to reduce
resistance– generally place
• ~ 1 substrate contact per nMOS tx• ~ 1 nWell contact per pMOS tx
– this connection is called a tap, or plug– often done on top of VDD/Ground rails– need p+ plug to Ground at substrate– need n+ plug to VDD in nWell
n+plugto VDD
p+plugto Ground
6
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.11
Latch-Up• Latch-up is a very real, very important factor in circuit design that
must be accounted for• Due to (relatively) large current in substrate or n-well
– create voltage drops across the resistive substrate/well• most common during large power/ground current spikes
– turns on parasitic BJT devices, effectively shorting power & ground• often results in device failure with fused-open wire bonds or interconnects
– hot carrier effects can also result in latch-up• latch-up very important for short channel devices
• Avoid latch-up by– including as many substrate/well contacts as possible
• rule of thumb: one “plug” each time a tx connects to the power rail– limiting the maximum supply current on the chip
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.12
Multiple Contacts• Each contact has a characteristic resistance, Rc• Contact resistances are much higher than the resistance
of most interconnect layers• Multiple contacts can be used to reduce resistance
– Rc,eff = Rc / N, N=number of contacts
• Generally use as many contacts as space allows
N=6
use severalContacts
in wide txs
add Viasif roomallows
7
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.13
Cell Hierarchy and Instancing• Hierarchical Design
– transistors used to build gates– gates used to build logic functions– logic functions used in larger blocks– build up in this manner to final chip level
• Each physical design file is called a “cell”– basic cells can be used to create a “cell library”
• elements of the cell library used to create all higher level cells– lower level cell is called an “instance”– construct functions by “instancing” cells into higher level cells
• details of the cell is left inside the lower level cell file• information is not copied, but referenced
transistor-levelcell
gate-level cell
function
higher level function
final chip
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.14
Cell Concept• Instancing
– construct all blocks using instances of lower level cells• tx-level cells are called “primitives” (lowest level cells)
– allow layout optimization within each cell– eases layout effort at higher level
• higher level layout deal with interconnects rather than tx layout• Cell View
– see only I/O ports (including power), typically in Metal1– can’t see internal layer polygons of the primitive
Cell-level view of INV, NAND, and NOR primitives
8
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.15
Instancing• Ports
– all signals that connect to higher level cells– physical locations of the layout cell, typically in Metal1 or Metal2
• Metal1 vs Metal2 ports– best to keep ports in Metal1 for primitives– always try to use only the lowest level metals you can
• Building Functions from Primitives– instantiate one or more lower-level cells to from higher-level function– Example: f = a b
NOT a NAND NOTnew cell has ports a, b, f (output), VDD, Gnd
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.16
Cell Pitch• Pitch = cell height
– Official Definition• from middle of VDD rail
to middle of Gnd rail– Our Definition
• from top of VDDto bottom of Gnd
– Considerations to set pitch• fix height for pMOS tx, nMOS tx, and some internal routing• fix height to match height of more complex cell (e.g., flip flop)
• Transistor Orientation– Horizontal (tx W run vertically)
• pitch sets max tx W• cells taller & narrow
– Vertical (tx W runs horizontally)• can increase tx W with fixed pitch• cells short & wide
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ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.17
• Metal1 routing strategy– very flexible– requires fewer metal layers– demands much chip area for routing
• High-level metal routing strategy – allows high density tx packing– minimum chip area for routing– demands several metal layers
• Inter-cell routing– always use lowest level interconnect possible
Cell Routing
☻☻�
�
☻☻
“flipped”
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.18
Transistor Sizing• Channel Resistance (from Chapter 3)
“ON” resistance of transistors– Rn = 1/(µnCox (W/L) (VGS-Vtn) )– Rp = 1/(µpCox (W/L) (VSG-|Vtp|) )
• Cox = εox/tox [F/cm2], process constant
• Channel Resistance Analysis– R ∝ 1/W (increasing W decreases R & increases Current)– R varies with Gate Voltage, see plot above– If Wn = Wp, then Rn < Rp
• since µn > µp• assuming Vtn ~ |Vtp|
– to match resistance, Rn = Rp• adjust Wn/Wp to balance for µn > µp
VGVDD-|Vtp|Vtn
RnRp
10
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.19
Transistor Sizing• Channel Resistances
– Rn = 1/(µnCox (W/L) (VG-Vtn) )– Rp = 1/(µpCox (W/L) (VG-|Vtp|) )– Rn/Rp = µp/µn
• if Vtn = |Vtp|, (W/L)n = (W/L)p
• Matching Channel Resistance– there are performance advantage to setting Rn = Rp
• discussed in Chapter 7– to set Rn = Rp
• define mobility ratio, r = µn/µp• (W/L)p = r (W/L)n
– pMOS must be larger than nMOS for same resistance/current
• Negative Impact– ⇒ CGp = r CGn larger gate = higher capacitance
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.20
Transistor Matching and Scaling• Channel Resistance Matching
– increase Wp so that Rn = Rp– pMOS larger than nMOS– pMOS current drive = nMOS
current drive• Scaling ratio, S
– scaling W to increase current capabilities– typically in unit steps, 1x, 2x, 4x, etc.– generally L kept at
minimum value
11
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.21
Inverter Layout Options• Layout with Horizontal Tx
– pitch sets max tx size• Layout with Vertical Tx
– allows scaling without changing pitch
• Vertical Tx with 2x scaling• Vertical Tx with Rn=Rp scaling
horizontal
vertical
matched, Rn=Rp
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.22
Layout Alternatives
• Figure 5.44 • Figure 5.45• Figure 5.46• Figure 5.47
12
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.23
Figure 5.44 (p. 182)Layout for an electrically symmetric NOT gate.
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.24
Figure 5.45 (p. 182)A NAND2 and NOR2 layouts using vertical FETs.
13
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.25
Figure 5.46 (p. 183)Alternate NAND2 and NOR2 cells.
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.26
Figure 5.47 (p. 184)Complex logic gate example.
14
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.27
Hierarchical Cell Design• Figure 5.48• Figure 5.49• Figure 5.50• Figure 5.51
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.28
Figure 5.48 (p. 185)Primitive polygon-level library entries.
15
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.29
Figure 5.49 (p. 186)Expanding the library with more complex cells.
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.30
Figure 5.50 (p. 186)Cell hierarchy.
16
ECE 410, Prof. F. Salem/ Prof. A. Mason notes with updates Lecture Notes Page 5.31
Figure 5.51 (p. 187)Effect of the flatten operation.