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4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Buehler EcoMet 250 Grinder-Polisher
Standard Operating Procedure
Revision: 2.0 — Last Updated: Sept. 13 2019, Revised by Lis Melo
Overview
This document will provide a detailed operation procedure of the Buehler EcoMet 250 Grinder-
Polisher. Formal Training is required for all users prior to using this system.
Revision History
# Revised by: Date Modification
1 Matt Bilton Dec. 1 2016 First version
2 Lis Melo Sept. 13 2019 Central force sample loading, different plates for
sticky and non-sticky polishing media
3
4
5
Document No.
2
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Table of Contents
Overview.................................................................................................................................................. 1
Revision History ........................................................................................................................................ 1
Table of Contents ..................................................................................................................................... 2
Main components: ................................................................................................................................... 3
Safety ...................................................................................................................................................... 4
Operation ................................................................................................................................................ 5
Preparing your grinding or polishing platens: ............................................................................................ 8
Preparing Samples in the Power Head....................................................................................................... 9
Specimen Holders................................................................................................................................. 9
Loading a Specimen Holder ................................................................................................................ 10
Removing a Specimen Holder ............................................................................................................. 11
Single Force ....................................................................................................................................... 11
Central Force ..................................................................................................................................... 11
Mounting the Glass Slide Holder......................................................................................................... 12
Begin the Grinding / Polishing Procedure ................................................................................................ 14
Exchanging grinding paper and polishing cloths ...................................................................................... 16
Using Diamond Polishing Solutions ..................................................................................................... 17
After use ................................................................................................................................................ 18
References and Files ............................................................................................................................... 18
Contact Information ............................................................................................................................... 18
Supplementary Information .................................................................................................................... 19
Silicon Carbide Abrasive Grinding Papers ............................................................................................ 19
Diamond Polishing Solutions .............................................................................................................. 19
Available for purchase at 4D Labs: .......................................................................................................... 20
3
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
General Information
Buehler’s EcoMet 250 is a variable speed grinder-polisher with an 8-inch (203 mm) platen. The AutoMet
Power Head allows for semiautomatic specimen preparation operation, increasing productivity and
specimen consistency.
Main components:
n
Power Head
Specimen holder
Platen
Control Panel
Burst dispensing
unit
Water Hose
EMERGENCY STOP
BUTTON
Power On/Off button
Water Supply: Blue Tap = Main water supply
Black Tap = Flow control tap to polisher
(located behind the polisher table, next
to the sink)
Knob that controls
water flow between hose and
bowl
4
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Safety
• Only trained users are permitted to operate the Grinder-Polisher.
• Wear safety glasses and protective gloves at all times.
• To avoid floods, always check that the water flow hose is securely attached to the outlet at the
rear of the machine, and also that the hose is suitably fitted into the waste collection vessel
beneath the table. Monitor the water levels of the waste containers at all times during use of the
system. Replace with a full carboy if necessary.
• Rotation of the platen could be up to 500 rpms. Keep hands away from moving parts. Do not wear
loose clothing or jewellery, and contain long hair. They can be caught in moving parts and may
result in severe personal injury.
• Protective equipment should be worn to handle specimens, which may be sharp or hot.
• Do not operate machine in the presence of flammable liquids, gases, or dust. Sparks may ignite the
dust or fumes.
• If there is a problem with the tool, do not attempt to repair yourself. Always speak with a tool
owner.
Handling and care of polishing media:
• All liquid waste must be collected in the waste collection vessel beneath the polisher table.
Replace with an empty waste collection vessel before the one in use gets 75% filled. If multiple
vessels are filled within a session, please inform the tool owner.
• Solid waste (contaminated PPE, SiC grinding papers and polishing cloths where diamond solutions
were used) should be disposed of in the chemical solid waste next to the sink.
• All solid waste related to the use of alumina and silica solutions should be placed in a zip-lock bag
and disposed of in the nanoparticle waste in room 6174.
• All general waste not contaminated by sample or solutions can be placed in the general waste bin
outside of the sample prep room.
5
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Operation
Control Panel
Figure 1: EcoMet Grinder-Polisher Control Panel Commands
Time
Water flow (on/off)
Head rotation direction (Clockwise / Anticlockwise)
Force (N / lbs)
Increase / decrease
Water source (tap only)
Burst dispenser (on/off)
Pause / Stop
Platen only
Force mode (single / central)
Speed (base & head)
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4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Time display set for a grinding-polishing cycle (m:ss)
Displays the rpm of the platen or Power Head Base Base = 1 – 500 rpms Head = 30 – 60 rpms
Selects the source of water. Water only comes from the tap and so only this selection can be made. No lights indicate that the water is set to OFF
This button will stop and start the water flow
This button selects the rotation directions of the platen to the head. These can in the same, or opposite directions (the head always rotates counter-clockwise)
This displays the amount of force (in lbs or N) that is applied by the Power Head. Single Force = 1 – 10 lbs (5 – 45 N) Central Force = 5 – 60 lbs (20 – 260 N)
Selects between the central force (upper; ) and single force (lower: “↓↓↓”) modes.
Increase or decrease the selected paramter (Time, Speed, and Force)
This button activates the platen for manual grinding, removing the use of the Power Head.
This button activates the connected burst dispensor unit (if required)
Pause or Stop a cycle
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4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
OPTIONS FOR POLISHING MEDIA 1) 2) 3) 4) 5)
Fixed (included with instrument use)
*User to purchase their own
First layer (included with instrument use)
Not needed
Second layer (user brings their own or buys ours)
(prevents adherence of
magnetic particles)
(easier to remove PSA backing paper/cloths)
Third Layer (user brings their own or buys ours)
Sticky polishing media (PSA backed grinding
paper or polishing cloths)
Sticky polishing media (PSA backed grinding
paper or polishing cloths)
Non-sticky polishing media (Apex S CarbiMet SiC papers)
**all 4D-labs grinding papers are non-sticky and should use
this combination
Non-sticky polishing media (Apex S CarbiMet SiC papers)
*although magnet is not needed, user to provide own
Al platen
Sticky polishing media (PSA backed grinding paper or
polishing cloths) ** all 4D-labs polishing cloths are sticky and should use this
combination
8
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Preparing your grinding or polishing platens:
1. Check that the aluminum platen and the magnofix magnet is secure and lying flat (see first layer
from page 7 for more information).
2. Attach the appropriate second layer magnet (Apex S film metal backed plate for non-sticky Apex S
polishing media or magnomet carrier plate for sticky PFA backed polishing media, see previous
page for more information).
3. Prepare the platen with the appropriate abrasive grinding paper (SiC), disc (diamond) or polishing
cloth.
• For diamond grinding discs, check that the disc is firstly affixed to an APEX S magnetic
backed plate. This can then be connected to the magnet disc on the Al platen. Water flow
is recommended during use of diamond discs to prevent heat buildup, and to remove
waste materials.
• For silicon carbide grinding, affix the selected SiC grinding paper onto the adhesive side of
an APEX S film metal backed plate. Water flow is recommended during use of SiC grinding
papers to prevent heat buildup, and to remove waste materials.
• For polishing cloths, affix the selected cloth (PSA backed that is sticky) onto a magnomet
carrier plate (it has a non-sticky surface). One polishing cloth should be used for each
specific colored diamond polishing fluid. Do ensure that these are not mixed up. MetaDi
fluid should be used instead of water to prevent heat buildup and to remove waste
materials.
9
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Preparing Samples in the Power Head
Specimen Holders
Figure 2: Different sample holders
A. Central Force Holder (1): Supports 1.25” samples
B. Single Force Holder: 40 mm samples with distance rings insets for 1” & 1.25” samples.
C. Flat-Sample Holder: For support of flat/unconventional samples e.g. Si wafers
D. Glass-Slide Holder: Supports 27 x 46 mm glass slides. This holder attaches into the single force
holder using 2 x 1” distance rings; see Section titled “Mounting the Glass Slide Holder”.
E. Central Force Holder (2): Supports 3 x 40 mm samples.
A: Central Force Holder (1)
B: Single Force Holder
C: Flat-Sample Holder
D: Glass Slide Holder
E: Central Force Holder (2)
10
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Loading a Specimen Holder
To load either the Single Force or Central Force Specimen Holder:
1. Position the Power Head for easy loading of the specimen holder. Untighten the locking handle
(see Figure 3) on the left side of the Power Head to enable rotation of the head.
2. Move the Power Head into the desired position. (Buehler recommends the specimen be
approximately 1/3 off the edge of the platen in its outmost position.)
3. Rotate the locking handle clockwise to tighten and secure the Power Head into position.
Figure 3: Locking Handle
4. To attach the Specimen Holder, raise the outer sleeve of the lift-lock chuck of the Power Head
(Figure 4B).
Figure 4: Lift-Lock Chuck on Power Head
A B: Lift and hold sleeve of lock chuck
C: Align pins of specimen holder to lock chuck
D: Release lock chuck to secure sample holder
Locking handle
11
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
5. Insert the specimen holder (Figure 4C).
6. Release the sleeve to allow the holder to be locked in place (Figure 4D), you may need to gently
rotate the specimen holder until it locks in place. When in place, it may feel slightly loose, but this
is normal.
7. Load your samples. For central force, ensure that the sample holder is balanced (using blank
balance pucks if necessary).
8. Position the polishing head over the platen. Buehler recommends the specimen be approximately
1/3 off the edge of the platen in its outmost position.
Removing a Specimen Holder
• Raise the lift-lock chuck to release the specimen holder.
Single Force
In single force mode, the specimens are placed, but not secured, in the specimen holder (Figure 5). The
amount of force selected on the control panel is applied to each individual specimen through hydraulic
fingers. The single force specimen holder must be locked rigidly in place to ensure optimum polishing
results.
Figure 5: A: Single Force Specimen Holder, and B: lowered force fingers during operation.
Central Force
In central force mode, the specimen holder (Figure 6) secures the specimens in place and the selected
amount of force is applied at the central point of the specimen holder. At least three specimens (balance
B A
12
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
pucks are ok) are needed for a grinding and polishing cycle with the central force specimen holder. Ensure
that your pucks/mounts are at least 1 cm thick. Place the specimen holder on its sample alignment base
(Fig. 6B). Place the samples and ensure they are level for grinding/polishing and secured individually using
an Allen key.
Figure 6: A: Sample alignment base for central force specimen holder, B: central force specimen holder placed on its alignment base; C: central force specimen holder on the polisher
Mounting the Glass Slide Holder
The glass slide holder supports glass slides 27 x 46 mm in size and is used only with the single force
holder. Use the follow steps to mount this holder:
1. Position 2 adjacent 1” distance rings into the single force sample holder. Use the provided Allen
key to unlock and lock these in place as necessary (Figure 7).
Figure 7: Single force holder with 2 x 1” distance rings (circled in red)
B A
C
13
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
2. Place the glass slide holder into the 1” distance rings (sample side down). Lock the holder in place
by turning the locking caps of the glass-slide holder over the edges of the distance rings (Figure
8).
Figure 8: Positioning the glass-slide holder into the single force holder. Red arrows indicate locking position.
3. Attach your glass slide sample to the under-side of the glass-slide holder (positions for adhesion
are shown in Figure 9A). Use a double-sided adhesive tape, or wax to do this. Do check that your
choice of adhesive is fully removable from the glass-slide holder after polishing. Take care not to
use too much adhesive as your sample may be difficult to detach from the holder after polishing;
Note: the downward force of the Power Head will strengthen the adhesion).
4. Mount the full single-force holder with glass-slide holder onto the Power Head (Figure 9B). You
may need to counter balance the holder using balance pucks.
Figure 9: A: Sample attachment and B: mounting of holder to the Power Head. Attach samples at the red marked
areas of the glass-slide holder.
B A
14
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Begin the Grinding / Polishing Procedure
1. Turn on the equipment.
2. Place the desired specimen holder as described in page 10.
3. Place the desired combination of plates and grinding papers/polishing cloths according to page 7.
4. Use the control panel to select your desired force mode, Single or Central (check that this
corresponds to your selected sample holder). Press MODE to select between CENTRAL or SINGLE
mode.
• An LED will light next to the selected MODE parameter.
5. Enter the TIME for the specimen preparation using the INCREASE or DECREASE buttons.
• The time selected will be shown in the TIME display field.
6. Press SPEED to enter a platen speed. The SPEED display field will flash when the speed is changed.
Press SPEED again to select the Power Head speed.
• Press INCREASE or DECREASE to adjust the rotational speed of the platen.
• The rpms will be displayed in the SPEED display field.
• Recommended speeds are as follows:
i. Base = 1 – 500 rpms ii. Head = 30 – 60 rpms
7. Press FORCE to select a force. (N or LBS)
• To change the force units between N (Newtons) and LBS (pounds) press INCREASE and
DECREASE buttons simultaneously.
• A LED will light next to the selected FORCE parameter.
• Press INCREASE or DECREASE to select the amount of force. The amount of force selected
will be displayed in the FORCE display field.
• Recommended force ranges are as follows:
i. Single Force = 1 – 10 lbs (5 – 45 N) ii. Central Force = 5 – 60 lbs (20 – 260 N)
15
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
8. The WATER SOURCE should have a LED next to the tap icon, indicating that water from the tap is
selected.
• In the case of using polishing solutions, make sure to press the button again so no LED is
on, indicating that the fluid option is turned off.
9. Press HEAD ROTATION to select between complementary or counter rotation.
• An LED will light next to the selected HEAD ROTATION parameter.
10. To use water, position the Water Dispensing Arm over the platen.
11. Open the main tap behind the sink and the regulator valve underneath.
12. Press the WATER FLOW button.
• The WATER LED will light and water will be dispensed from both the water dispensing arm
and the platen bowl wash.
• Turn the tap counter-clockwise to increase water flow through, or clockwise to reduce
flow.
• Water flow distribution between the dispensing arm and bowl can be controlled by
additional knob behind the bowl and under the head. Rotating counter-clockwise
increases the flow to the dispensing arm, while clockwise increases flow to the bowl
13. To start the machine, simultaneously press and hold the 2 green buttons on either side of the
Power Head. Keep holding the buttons as the Power head lowers the head to the platen. Let go of
the buttons once the process is underway (see Figure 10). Using both hands here (one for each
green button) ensures safety from trapping hands beneath the Power Head.
• In Central Force mode, holding the green buttons will begin the polishing process once the
Power Head reaches the platen.
• In Single Force mode, the Power Head will firstly lower onto the platen when the green
buttons are first held; polishing will not begin. Now you can place your samples into the
sample holder. Pressing the 2 green buttons again will lower the force fingers onto the
samples, and polishing process will begin.
14. Press WATER FLOW to stop the water flow and proceed to next section on “Exchanging the
grinding papers and polishing cloths”.
16
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Figure 10: Power Head Start Buttons (one located on each side of Power Head)
• To pause the process, press PAUSE / STOP for approximately 1 second.
• To stop the process, press and hold PAUSE / STOP for about 3 seconds
• When the STOP function has been selected all parameters return to their default settings.
• To resume machine operation, press PAUSE / STOP again for approximately one second. All
parameters will be maintained and the time display field will continue counting.
Exchanging grinding paper and polishing cloths
To exchange grinding paper and polishing cloths, first, ensure that the Power Head is raised from the
platen, and positioned away from the base using the locking handle.
Carefully lift away the used grinding paper or polishing cloth from its plate, and replace with your next
appropriate paper/cloth.
• Used SiC grinding papers can be placed into a zip-lock bag for re-use (let dry first) or placed in the
chemical solid waste bin.
• Diamond grinding discs should be cleaned with water and placed back into zip-lock bag. Place this
back into the grey storage cabinet above the instrument.
• Reseal polishing cloths into a zip-lock bag, to ensure that it keeps wet.
17
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Using Diamond Polishing Solutions
1. Ensure that you have selected the appropriate polishing cloth for the diamond polishing media that
you require.
2. Ensure that the magnomet carrier plate is placed onto the platen if the polishing cloth is PSA
backed (i.e. sticky).
3. The solutions are colour coded and stored underneath the sink.
4. The WATER FLOW should already be turned off at this point.
• Do not use a water flow during polishing with the solutions as this will remove the
diamond fluid from the cloth. The metaDi fluid substitutes the water.
5. Grab plastic pipettes from the above cabinet.
6. Once the polishing cloth is affixed to the appropriate platen (magnetofix carrier), apply a very small
amount (5 ml approx.) of the desired diamond fluid in a spiral to the polishing cloth using a plastic
pipette.
7. Apply in a similar manner ~5 mL of the metaDi fluid solution with a second pipette.
8. Begin the polishing procedure.
9. Apply an additional 10 droplets of both the polishing solution and the metaDi fluid from the center
to the edge every 1 minute during the polishing cycle.
10. At the end of the polishing cycle, use water to rinse both the cloth and your sample.
11. Store the polishing cloth (whilst still damp) into a zip-lock bag for re-use.
12. All contaminated waste should be disposed of in the chemical solid waste.
18
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
After use
At the end of your session please complete the following checklist:
1. Make sure the WATER FLOW is turned off. Close the water tap and the valve underneath the tap.
2. Turn off the machine.
3. Put all polishing cloths in zip-lock bags so that they do not dry out if you wish to re-use them.
4. Detach the sample holder from the Power Head, clean it thoroughly with water & IPA, and store
on the table next to the polisher.
5. Clean the single force fingers:
• Gently pull down the fingers and wipe using a Kim-wipe and IPA to remove any debris.
6. Store all polishing supplies appropriately to keep the space tidy for other users.
7. Using the water hose, rinse and then wipe the base area to remove any residual solution or
material (always monitor the water level of the collection vessel).
8. Place all particulate-contaminated waste (e.g. used grinding papers, Kim-wipes, gloves etc.) into
the chemical solid waste bin in the room.
9. If the waste container is approaches 75% filled, please replace it with an empty waste container.
10. Do not store your samples or any other supplies in the sample preparation lab.
11. Fill in the user log book and remember to create your online 4D LABS usage ticket. Please make
sure to log and ticket all the consumables used including SiC grinding papers, volumes of polishing
suspensions, polishing cloths, and magnetofix carrier plates (if taken away).
References and Files
Buehler Manual for EcoMet™ 250 / 300 Grinder-Polisher & AutoMet™ 250 / 300 Power Head.
Contact Information
Questions or comments in regard to this document or Buehler Grinder-Polisher should be directed towards
the tool owner in 4D LABS at Simon Fraser University, Burnaby, BC, Canada. The current tool owner can be
found at: https://users.4dlabs.ca/tools/polisher.html.
19
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Supplementary Information
Silicon Carbide Abrasive Grinding Papers
FEPA Grit Code Grit Size (µm)
P120 127
P280 52 ± 2
P400 35.0 ± 1.5
P800 21.8 ± 1.0
P1200 15.3 ± 1.0
P2500 8.4
Diamond Polishing Solutions
Solution Colour Grit Size (µm)
RED 9
YELLOW 6
GREEN 3
BLUE 1
20
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
Available for purchase at 4D Labs:
Diamond grinding discs SiC grinding paper Polishing cloths Polishing solutions**
*APEX DGD purple 55 um (see note after table)
CarbiMet S SiC 120 (P120)
TexMet C Diamond MetaDi Supreme 1 um
*APEX DGD yellow 35 um (see note after table
CarbiMet S SiC 240 (P280)
UltraPol Diamond MetaDi Supreme 3 um
CarbiMet S SiC 320 (P400)
UltraPad Diamond MetaDi Supreme 6 um
CarbiMet S SiC 400 (P800)
TriDent Diamond MetaDi Supreme 9 um
CarbiMet S SiC 600 (P1200)
Microcloth (w/magnetic or PSA backing)
Masterprep Alumina
CarbiMet S SiC 800 (P1500)
MasterMet Colloidal Silica
CarbiMet S SiC 1200 (P2500)
Second layer
APEX S Film, metal backed Magnomet carrier plate
*since they can be re-used, they are provided free of charge given user cleans and returns them **diamond polishing solutions should be used with MetaDi Fluid
21
4D LABS, Simon Fraser University 8888 University Drive, Burnaby, B.C. V5A 1S6
E [email protected] T 778.782.8158 F 778.782.3765 W www.4dlabs.ca
f
Taken from: https://cdnbuehler-97fb.kxcdn.com/Brochures/English/Grinding-Polishing/FN01465_0216_Polishing_Application_Guide_WEB.pdf
https://cdnbuehler-97fb.kxcdn.com/Brochures/English/Grinding-Polishing/FN01465_0216_Polishing_Application_Guide_WEB.pdfhttps://cdnbuehler-97fb.kxcdn.com/Brochures/English/Grinding-Polishing/FN01465_0216_Polishing_Application_Guide_WEB.pdf