Bibliography on the measurement of bulk resistivity of ... Library,N.W.Bldg NOV51964 Referencebooknottobe i~i.or > fromthfilibrary. ^ecknic&lv2©te 232 BIBLIOGRAPHYONTHEMEASUREMENTOFBULK

National Bur

Library, N.W. Bldg

NOV 5 1964

Reference book not to bei~i. or

> from thfi library.

êcknic&l v2©te 232

BIBLIOGRAPHY ON THE MEASUREMENT OF BULK

RESISTIVITY OF SEMICONDUCTOR MATERIALS

FOR ELECTRON DEVICES

JUDSON C. FRENCH

U. S. DEPARTMENT OF COMMERCENATIONAL BUREAU OF STANDARDS

THE NATIONAL BUREAU OF STANDARDS

The National Bureau of Standards is a principal focal point in the Federal Government for assuring

maximum application of the physical and engineering sciences to the advancement of technology in

industry and commerce. Its responsibilities include development and maintenance of the national stand-

ards of measurement, and the provisions of means for making measurements consistent with those

standards; determination of physical constants and properties of materials; development of methodsfor testing materials, mechanisms, and structures, and making such tests as may be necessary, particu-

larly for government agencies; cooperation in the establishment of standard practices for incorpora-

tion in codes and specifications; advisory service to government agencies on scientific and technical

problems; invention and development of devices to serve special needs of the Government; assistance

to industry, business, and consumers in the development and acceptance of commercial standards andsimplified trade practice recommendations; administration of programs in cooperation with United

States business groups and standards organizations for the development of international standards of

practice; and maintenance of a clearinghouse for the collection and dissemination of scientific, tech-

nical, and engineering information. The scope of the Bureau's activities is suggested in the following

listing of its four Institutes and their organizational units.

Institute for Basic Standards. Electricity. Metrology. Heat. Radiation Physics. Mechanics. Ap-

plied Mathematics. Atomic Physics. Physical Chemistry. Laboratory Astrophysics.* Radio Stand-

ards Laboratory: Radio Standards Physics; Radio Standards Engineering.** Office of Standard Ref-

erence Data.

Institute for Materials Research. Analytical Chemistry. Polymers. Metallurgy. Inorganic Mate-

rials. Reactor Radiations. Cryogenics.** Office of Standard Reference Materials.

Central Radio Propagation Laboratory.** Ionosphere Research and Propagation. Troposphere

and Space Telecommunications. Radio Systems. Upper Atmosphere and Space Physics.

Institute for Applied Technology. Textiles and Apparel Technology Center. Building Research.

Industrial Equipment. Information Technology. Performance Test Development. Instrumentation.

Transport Systems. Office of Technical Services. Office of Weights and Measures. Office of Engineer-

ing Standards. Office of Industrial Services.

* NBS Group, Joint Institute for Laboratory Astrophysics at the University of Colorado.* * Located at Boulder, Colorado.

NATIONAL BUREAU OF STANDARDSTechnical Note 232

ISSUED OCTOBER 21, 1964

BIBLIOGRAPHY ON THE MEASUREMENT OF BULK RESISTIVITY

OF SEMICONDUCTOR MATERIALS FOR ELECTRON DEVICES

Judson C. French

NBS Technical Notes are designed to supplement the Bu-reau's regular publications program. They provide a

means for making available scientific data that are of

transient or limited interest. Technical Notes may belisted or referred to in the open literature.

For sale by the Superintendent of Documents, U.S. Government Printing Office

Washington, D.C., 20402 - Price 60 cents

Contents

Page

1. Introduction .1

2. Index to Subject Matter 2

2a. Index Categories ....................32b. Index Tabulation t

3. Index to Authors ....7

4. Bibliography. 13

li

Bibliography on the Measurement of iiulk Resistivityof Semiconductor Materials for Electron Devices

Judson C. French

In support of a study of accuratemeasurements of the bulk resistivity ofsemiconductor materials such as germaniumand silicon which are used in electron de-vices, a literature search has led to thedevelopment of a rather large collectionof references. The file cards making upthe bibliography are reproduced in thisTechnical iJote for the assistance of otherswho are concerned with the improvement andstandardization of these measurements.

1. Introduction

In the course of a study of accurate measurements of the bulkresistivity of semiconductor materials for use in electron devices forexample, germanium and silicon, a search of the literature has been con-ducted. 1 The result has been the accumulation of quite a number ofreferences which appear to offer promise of being helpful to the study.The subject matter includes topics which are obviously pertinent, such asmeasurement procedures and correction factors, as well as topics of amore indirectly applicable nature, such as sample preparation techniquesand dimensional measurements, surface and pressure effects, uniformity,and so on. In regard to the former category, the collection is believedto be quite complete through 1963; a number of entries in the period toabout mid-1964 are also included. The entries in the latter categoryare only those which have been selected as being of present or antici-pated application to some of the specific problems of this study.

This work has been supported in part by the Advanced Research ProjectsAgency under Order No. 373-62 and the Air Force Cambridge ResearchLaboratories under PRO 61-560 and 62-200.

Nevertheless, others who are concerned with semiconductor resis-tivity measurements have expressed interest in having the collectionmade available for their use. For this reason, the file cards whichform the working bibliography have been reproduced in this TechnicalNote with the hope that they will indeed be helpful in this field.

Because of the overlapping nature of the topics in many of thearticles, no attempt has been made to group the cards by subject matter.Instead, they are arranged alphabetically on the basis of the author'sname. An abstract is included as a guide to the article's content.This is frequently the author's abstract. To provide a brief index to

the material covered by the references, a breakdown of the bibliographyinto thirteen categories of especial interest to the present study hasbeen made. This has been based in many instances only on the statementin the abstract. It is recommended that this index be considered onlyto be a means of quickly finding the major references in these categories.It provides a starting point in seeking a complete set of references ona given topic. The identification numbers of the cards, which are usedin the index, are to be found typed near the upper right hand cornersof the cards.

Although the cards have been reproduced on both sides of a page,

they may be cut out and attached to suitable file cards using two copiesof the Technical Note if this should be desirable to provide a workingfile.

2. Index to Subject Matter

The subject matter of the collected references has been dividedinto the thirteen categories listed on page 3 in Section 2a. In Section2b on pages 4 to 6 , the identification numbers of appropriate cards arelisted below the numbers corresponding to these categories.

2a. Index Categories

1. Bulk resistivity measurement: dc methods requiring probes or othercontacts.

2. Bulk resistivity measurement: ac methods requiring probes or othercontacts. (See also Category 1 for applicable techniques.)

3. Bulk resistivity measurement: ac contactless methods, excludingmicrowave frequencies, but including measurements of related pro-perties such as dielectric constant and carrier lifetimes.

4. Bulk resistivity measurement: microwave methods, including micro-wave measurements of related properties such as dielectric constantand carrier lifetimes.

5. Bulk resistivity measurement: other methods than in Categories 1

to 4.

6. Layer resistivity measurement, including epitaxial and diffusedlayers. (See also Categories 1 to 5 for bulk measurement methodsapplicable to thin samples.)

7. Resistivity measurements at resistivities of 100 ohm-cm or greater.

8. Material properties, excluding inhomogeneities and anisotropics,but including surface and contact phenomena (see also Category 10),probe wear effects, mobility and lifetime measurements not includedelsewhere, the dependence of resistivity on pressure, temperatureand nuclear radiation, etc.

9. Sample inhomogeneities and anisotropics, including growth methodsand defect determination.

10. Sample preparation and associated techniques, including crystalorientation, sawing, lapping, polishing, dimensional measurement,plating, application of leads, surface evaluation, etc. (See alsoCategory 8, especially for contact phenomena.)

11. Miscellaneous equipment and techniques.

12. Correction factors, mathematical principles, and error analysis.(See also references on the specific method of measurement of in-

terest. This category generally excludes papers with a theoreticalintroduction to a described method of measurement unless extensivecorrection factors are tabulated also.

)

13. Survey articles.

2b. Index Tabulation

Categories 1-6

2 3 4

A4 L7 V3 A6 B25 A8 K27 A3 A6

A5 LI 3 V4 A7 C2 A9 LI A6 A12A7 M2 V5 Bll CIO A10 L8 B9 BlA9 M6 V6 C6 D9 All L10 B14 B18A10 M9 V8 D9 Dll A15 Lll B30 B30All Mil V10 D16 D16 B5 L12 D14 B34A12 N7 Wl F9 G7 B9 M21 D16 C13A13 03 W3 L13 G13 BIO 111 E2 D7

B2 05 W7 P3 H12 B13 N2 F3 D16

B6 P3 W9 P16 13 B17 N3 F6 FllB15 P6 wia P17 K28 B28 N4 G3 Gl

B22 P12 wm R19 K29 B29 N5 G7 G6

B26 P13 W16 R20 M6 C5 Nil Gil Gil330 P16 V12 M20 C7 Rl H3 H9

C4 R7 N10 C8 R2 K8 H23Cll R9 N13 C9 R4 K9 14

C16 R12 01 CIO R16 K15 Kl

C20 R18 04 C13 S2 K26 K7

D6 R19 P15 D9 S21 LI 4 K19

D7 R20 P16 D16 S29 Ml 2 K23

Dll S9 P17 Fl S30 01 K25D13 S10 P19 Fll S39 06 K26

D14 Sll R19 F15 Tl 07 K28

D16 S20 S26 G13 T2 08 L3

E7 S22 Tl G17 T24 P2 M6

F2 S24 T24 G18 Z3 P8 M12

F6 S27 W6 Hll R5 N5

F8 S28 Yl H20 R6 N7

G3 S33 Z2 1121 R20 PI

Gil S35 H22 S22 P15

m S40 H25 S40 P21

H5 S42 H27 S41 R6

H6 S46 H28 S50 R18

H7 S47 13 T8 S9

H15 S48 Jl W16 S10

H19 S49 J2 Sll

H23 S50 J3 S16

H26 T5 J4 S33

13 T6 J5 S35

K5 T19 K2 S42

K6 T20 K17 S47

K7 Ul K18 S49

K14 VI K19 T8

K25 V2 K24 T18T19


Categories 7-9

8

A7 Al . F12 N8 V9 Al H8 S19B22 A2 F13 N10 Vll A4 H10 S23C5 All F14 02 V12 A5 HI 3 S24F9 A16 F16 PI W2 A12 H14 S25H19 B2 G2 P4 W5 A15 H17 S2713 B5 G4 P5 W7 A16 H24 S28J3 B7 G7 P7 W8 B6 H26 S31J5 B8 G9 P10 W10 B7 J9 S32K8 BIO G13 P14 W15 38 Kl S49K29 B15 G15 P16 W17 B12 K3 S50N10 B19 G16 P18 Yl B14 Kll T3

P12 B20 H2 P20 Zl B15 K20 T4R16 B21 H6 P21 Z3 B16 K21 T7R19 B24 H15 R8 B23 K26 T10T6 B27 12 R9 B26 L2 Til

B29 14 RIO B29 L4 T12B33 15 Rll B30 L5 T13C2 J6 R12 CI L6 T15C6 J7 R13 C3 L9 T16C9 J8 R14 C5 Ml T17C12 J9 R15 CIO Mil T20cm Kl R18 C14 M14 T22C15 K4 R21 C15 M15 T23

C17 Kll SI D2 M16 V6

C18 K13 S5 D6 M19 V13C20 K16 S6 D8 N9 W3

C22 K22 S7 D15 02 W5

Dl K24 S8 D16 06 W7

D2 L5 S18 El 07 WllD4 L14 S24 E2 08 W14D5 L15 S25 E5 P9 W16D9 L16 S28 E7 P21D15 M3 S29 F10 R3

D16 M4 S35 G3 R8

D17 M5 S40 G4 R14D18 M7 sm G5 R17D19 Ml 3 Tl G8 R19El M17 T2 G9 S4E5 M19 T3 G12 SllE6 M21 T4 G14 S14E7 M22 T7 G15 S15F4 M23 T10 HI S16

F5 Ml Til m S17

F9 N6 T14V7

Ml S18


10 11 12 13

Al S36 Alt A4 B33A6 S37 D3 A5 C17

A13 S38 D13 Bl C18B3 543 H10 B34 D16B4 S44 H18 C4 13

B15 S45 P3 Cll K14B20 T21 S3 C16 K29B24 W7 S30 C21 N10B31 W12 T9 D16 P5

B32 W17 V5 F2 P13C6 V10 H4 R9

C19 Wll H5 RIOD10 J6 R19D12 K5 S5

D16 K7 S6

Categories 10 - 13

11 12

Alt A4D3 A5

D13 Bl

H10 B34HI 8 C4P3 CllS3 C16S30 C21T9 D16

V5 F2

V10 H4

Wll H5

J6

K5

K7

L7

LI 3

L16HI 8

N12P14R7

S20

S28

S33

S34S46

S47

S48

S49

UlV2

V3

V8

W4

E3 L7 S7

Et LI

3

S8

E6 L16 StO

F2 Ml 8 W16

F7

GitG16

H6

H9

H15

H16II

K10

K12L2

L15M7

M8

M1009

P3

PllP20P22P23R19S12

S13S28

3. Index to Authors

Abe, T. , K3

Ablova, M.S., Al, A2

Acs, E. , A3Adlington, R.E. , G12Afanas'ev, V.F. , M8

Airapetyants, S.V. , A-

Albert, M.P. , A5 , C16Allen, C.C. , A6 , A7

Allerton, G.L. , A8, A'

Amer, S. , A12American Society for Testing andMaterials, A13

Anderson, J.R. , C6

Antler, M. , A14Arai, Y. , II

Armstrong- n.R. .

A4L

*A7

A8, A9, A10, All

, . . , ~ —

trong, D.B. , C7, C8, C9

Aron, C.P. , A15

Arthur, J.3. , A16

Auletta, L.V. , A14Axelrod, S.D. , W7

Backenstoss, G. , BlBailey, G.C. , B2

Baker, D. , B3, B4

Balchin, N.C. , M20Banis, T. Ya. , B5

Baranskii, P.I., B6 , 37, B£

Bardeen, J. , P7Barlow, H.E.M. , BIO, K19Barlow, H.M., B9

Barry, A.L. , BllBate, R.T. , B12, D13Baynham, A.C., B13 .

Beach, A.L. , T13Bean, C.P. , B14

Beer, A.C. , B12

,

Bell, J.C., S28Benanti, M. , Jl, J2

Benjamin, R. , Jl, J2 , J3, J5

Bennett, D.C. , B16

Benson, K.E. , C3 ..

Berkova, A.V. , M14Bhar, J.N. , 317Biard, J.R. , B18

tfean, u.r.

,

Bit

Beer, A.C.

,

B12 , 315, D14Bell, J.C., S28T3/-m-> -5-1-1-1- ? M T1 TO

Blakemore, J.S., B19

Blum, S.E. , RIO3oatright, A. , 3203oiko, I.I., B21Bolognesi, G.P. , B22Booker, G.R. , S37, S38Borneman, E.H., W173ourassa, F. , B23Bowden, F.P. , 324

A. , Jl, J2, J3

Bowden, F.P. , 324Brand, F.A. , Jl, .

Rl, k*

Bresler, M.S. , A4

Brice, J.C. , 325, B26Briggs, H.B. , B27Brock, G.E. , DG

3rodwin, M.E. , B28Broersma, S. , F15

Brooks, H. , C2 , P5

Brown, J. , 39Brown, M.A.C.S.

,

Brown, S.C. , H27Brownson, J. , B3<

Buck, T.M. , B31, B32

3urg<

, J4, J5

— * •»•" t - • » —Brown, M.A.C.S. , 329Brown, S.C. , H27

n, J. , B

.M., B31

, R.E.,n, E. , 3

K.M. , B3

r, E.G., A6

Brownson, J. , B30Buck, T.M. , B31, B32, L4

Burgess, R.E. , 1J13

Burstein, £., B33Busen, K.M. , B34Bylander, E.G. , /

Cahn, J.H. , S28Camp, P.R. , CICardona, M. , C2Carruthers, J.R. , C2

Caspari, M.E. , R4Catalano, S.3. , C4Cerny, L. , C5

Chaikin , S.W. , C6

Champlin, K.S. , C7,Ch'ang-hou, S. , CllChaplin, N.J. , P6

Chapman, P.W. , C12

Chatterji, C.K. , C13, N3,

Chizhevskaya, S.N. , G7

Chukichev, M.V. , C14

C8, C9, CIO

.13, N4

Cihelka, J. , C5

Cleland, J.W. , C15

Combs, J.F. , A5, C16

Con ley, J. , A14Conwell, E.M., C17, C18, D5 , Z3

Coughlin, B.J. , C19Crawford, J.H. , Jr., C15

Creamer, R.H. , C20

Crow, E.L. , C21Csavinszky, P. , C22

Cuevas, M. , F13

D_

Danielson, G.C., NilDas, P., Nl, N5

Dash, W.C. , Dl, D2

Dauphinee, T.M. , D3

Davies, E.A. , D4

Davis, G.L. , C19DeBlois, R.W. , B14Debye, P.P. , D5

Denene, M.V. , B5

Dew-Hughes, P., D6

Dickey, D.H. , D7,

Dickhoff, J. A.M. , D8

Donovan, 3. , D9

Donovan, T.M. , D10

Dorin, V.A. , DllDorosheski , G. , K7

Dreiner, R. , D12

Drickamer, H.G., M17, SI

D 1 Stefan, D.J. , K12

Duga, J.J. , D13, D14Dumas, G. , D15Finn 1 ;2T^ U P .Tn m

Eisner, R.L. , E6Ertel, A. , E7

:-i9

Dumas, G. , D15

Dunlap, W.C. , Jr.,

Dunsmuir, R. , H25,

Dykman, I.M., D17,Dzong, T.K. , R12Dzyubenko, G.M., B

r

Easton, W.B. , G6

Eckhardt, G. , ElEdwards, D.F. , E2Edwards, J.W., E3,Edwards, W.D., E5,Egli, P. II. , B33

D16

LllD18, D19

E4Bll

M5Fabricand, B.P., no

Falkvik, I. , FlFan, H.Y., Tl

Feucht, D.L., H20, H21, H22Finne, R.M. , S45

Fischer, E. , F2

Fischer, G. , F3

Fistul', V.I., F4, F5, R18Fivaz, R. , F6

Flores, J.M. , F7

Foster, L.M., K22, L9Foster, L.M., <

Fowler, V.J. , Z3

Frank, H. , F8, F9

Frank, R.C. , F10Frpi A.H. Fll

V13

Frank, «.w.,

Frei, A.H. , til

Frenkel' , V. Ya. , V13Freundlich, J.J., D13

Fritzsche, H. , F12 , F13

Frei,FrenkFreun _ ._

Fritzsche, H. , F12

Fuller, C.S. , F14Furdyna, J.K. , F15

Fursenko, V.D. , K28Furukawa, Y. , F16

G

Gardner, E.E, , Gl

Garnache, R. , D12

Gartner, U.W. , G2

Geballe, T.H., Pir

, D15

w^j.^-1-j , ^y. , Go

Gibbs, W.E.K., G4

Gibson, A.F.

,

G5

Gartner, U.W. , G2

Geballe, T.H., P16, P17

Georges, C. , D15

Gergely, Gy. , G3

Gibbs, W.E.K., G4

Gibson, A.F., A16, 313,Gilman, J. J. , W10

Glang, R. , G6

Glazov, V.M., G7

Glazunov, P. Ya. , V9

Goetzberger, A., G8 , HI, S23

Goldey, J.M. , H27Golovin, 3.1. , M15

Good, R.H., Jr. , L12Goorissen, J., G9

Gorid'ko, N. Ya.

Gorkun, Y", G10

u. I. , Gil

Gosling, D.S. , DH

Goss, A.J. , G12Gossenberger, H.F.,Gossick, B.R. , G13Gould, H.G. , G14

Grandjean, C. , G15

Grantham, L.F. ,. YlGranville, J.W. , A16

,

Greenwood, J. A.,

Greig, D. , F3

Gubenko, A. Ya.,

Guldbrandsen, T. , M12

Guldner, W.G. , T13Gunderson, P.D., C9

Gunn, M.W. , G17, G18

M10

B13

G16

Ft

H

,J., Hll

Hait z G8,

HJigglund,

Haitz, R.M. ,

Hall, G.L. , H2

Hallenback , J.F.

Hamer, H. , H3

Hanamura,

HI

Jr. , Gl, S9, S10

, E., T2

Hansen, E.B. , H4

Hant ay, 0. , G3Hargreaves, J.K. , H5

Harman, G.G., H6 , H15

Harman, T.C. , H7

Harrick, W.J. , H8, 119

Harris, P.T. , T16

Haupin, W.E. , H10Hedvall, P. , Hll

Heinecke, W.J., MlHeitz, A. , W12Hellinger, 0. , N10Helpert, E. , M10Henisch, H.K. , H12

Herring, C. , H13Heywang, W. , H14Higier, T. , H6 , H15Hillegas, W.J. , Jr., H16

Hirshon, J.M., H17Hitchcox, G. , H18Hoffman, A. , H19

Holmes, D.A. , H20, H21, H22 , J5

Hora, H. , H23

Horn, F.H. , H24Horner, F. , H25

Hornstra, J. , H26Ilsieh, H. , H27Husa, (Gusa) V., C5 , 1128, K27

Ida, I., IIIl'ina, M.A. , 12

Ioffe, A.F., 13

Irvin, J.C. , IHIsaacs, J. , 02

Ittner, W.B. Ill, 15

Ivko, V.M. , S3

Jackson, W. , H25

Jacobs, H. , H22, Jl, J2 , J3, J4,J5, Rl, R2

Jacobson, A.H., Jr., J6

Jaggi, R. , J7Johnson , W.E. , J8

Jones, A.H. , D6

Jorgensen, M.. J9

Kl,

K2

Kahng, D.

,

Kalvenas

,

Karstensen,Kato, H. , K3

Keller, J.B. , K4Kennedy, D.P. , K5Kennedy, J.K. , K6

Keywell

,

., T8

> , S « P . ,

stensen, F. , G9Kate

K9Khotkevich, V.I., K8,Kingsnorth, R.L., C19

Kirvalidze, I.D., K10, KllKlein, D.L. , K12, S45

Klein, M.A. , K23

Klinger, M.I. , K13Knight, G. , Jr. , KitKo, W.-H. , K15Kobayashi, M. , T2Koenig, S.H., K16

Kohane, T. , K17, K18Koike, R. , K19

Kokorev, D.T. , K20Kolb, E.D., K21

Kolb, G.A. , S45Konoplyasova, N.S.,Kovtonyuk, N.F., K2

Kozak, M.I. , ZlKozlov, M.M. , DllKramer, R.A. , K22Kressel, H. , K23Krishna, K.V.G. , BIOKroemer, H. , K24Krongard, R.R. , CIOKsoll, G. , K25

Kudman, I. , K26Kurilo, P.M. , B8Kurova, I. A. , 12

Kutsko, M. , L10Kuz'menko, P.P. , G10Kvasil, B. , H2 8, K27Kynev, St. , K28Kytttniemi, T. , K29

B7

Labuda, E.F.

LaChapelLLI

T.J., L2Lamb, J. , H25

Lamorte, M.F. , L3Lander, J.J. , L4Landwehr, G. , L5

J8

Lang, A.R. , L6LaPlume, J. , L7Lark-Horovitz, K.

,

Larrabee, R.D., L8Leboeuf , M.B. , T10LeCraw, R.C. , LILederhandler, S.R. , ElLewis , J.E. , L9

Liben, W. , P15Lindmayer, J. , L10Linhart, J.G. , LllLiu, S.H. , L12Logan, M.A. , L13Logan, R.A. , F1M-

Long, D. , C12, L14Lorinczy, A., L15Love, E.R. , L16Luchsinger, E.B., Yl

MacDonald, A.L., Ml, M2Machlup, S. , M13

Maczuk, J. , M3, M4Magill, P.J. , 15

Maita, J.P. , M22Maker, P.D. , E2Many, A. , 06, 07Manz, R.C. , Kl,March, N.H. , D9Martinuzzi, S. , M6Maruyama, S. , M7Maslova, L.V. , M"

Matare, H.F. , R8Mathews , J.R. , L4Matveev, O.A. , M8Mazur, R.G. , M9McDonald, 3. , G8McKean, W.J. , P18

, B32

, M5

, M23

, 03T8

m

2 an

,

McKim, F.S.

McNMcNamara , J . E . , V712

Mehl, W. , M10Mpinrll . ,T. ,T1 ,T9

T23

, .. . , ,.,_*„

Meindl, J., Jl, J2 , J3, J4, J5Meltzer, G. , MilMerkl, W.A. , B20Mette, II. , B20Meyer, N.I. , J9, M12Michels, A. , M13Millard, D. , H5

Mills, A.D. , T4Mil'vidskii, M.G., M14, M15

,

Minden, H.T. , M16Minomura, S. , Ml

7

Mircea, A. , M18Miselyuk, E.G. , VllMizuguchi, K. , S4Mlavsky, A.I., W7Montgomery, H.C., M19Moore, P. , B25Mooser, E. , F3

Mordike, B.L., M20Morgan, T.N. , M21Morin, F.J. , M22, ,

Morozov, G.P. , P8Motchenbacher, CD.,Muraoka, H. , K3Myers, J. , L14

M23

L14

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Nag, B.R. , C13, III, N2 , N3, N4, N5Nakamura, M. , N6Nakhodkin, N.G. , N7Nemeth, T. , L15

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Nibler, F. , N10Nishina, Y. , L12,Nomura, Y. , N12Novikov, N.N. , G10Nyberg, D.W. , N13

Ogawa, T. , 01

Okada, 0. , M7

Okkerse , B, , G9

Oldfield, W.W., Jr., S29

Oliver, C.R. , 02

Olshefski, P.J., 03, 04Omel'yanovskii, E.M. , F5

Oroshnik, J., 05, 06, 07, 08

Ostapkovich, P.L., 09

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Pagnia, H. , PIPaige, E.G.S., A16

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Pany, F.G. , P3Patskevich, V.M., V9

Paul, W. , C2, Pt, P5

Paulnack, C.L. , P6, £

Pearson, G.L. , P7

Peat, A.J. , WllPetrusevich, V.A.

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Pfann, W.G., P9 , PI

Pharo, W.B. , PllPierno, A. , B22

P'i-huang, C. , P12

Pistoulet, B., P13Plakida, N.M. , PitPoehler, T.O. , P15Pollak, M., P16, P17Poltinnikov, S.A. , St2

Pompliano, L.A. , St5

Potter, R.F. , P18Powell, R.C. , P19Pozhela, Yu.K. , B5,Presnov, V.A. , P20Price, P.J. , P21Pugh, E.N., P22, P2:

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Ransom, P. , R3

Rashba, E.I. , B21Rasmussen, A.L. , P19

Rau, R.R. , RtRavich, Yu.I., R5

Rawlins, T.G.R-" » ---» *•»

Lns, T.G.R.,

Reber, J.M. , R7

Redaelli, G. , B2

Reed, B. , R8

Regel, A.R. , A2

Reid, F.J.,Regel, A.R. , A2Reid, F.J., R9 , RIOReuschel, K. , H19

Reynolds, J.E. , RllRienter, G. , R12

Rindner, W. , R13Roberts, D.H. , RltRobin, J. , R15

Rose, K. , R16Rothberg, M. , W6

Rouse, R.L. , R17

Roy, S.K. , C13, N2, N3, Nt, N5Rubinshtein, R.N. , R18Rudenberg, H.G., R19

Runyan, W.R. , A7Runnrecht. H. . H19Runyan, W.R. , A7Rupprecht , H. , H.

Ryan, F.M. , R20

Ryuzan, 0., R21

Samara, G. A. , SI

Samuels, L.E. , P22, P23Sandus, 0. , S2

Santos, G.J., Jr., C6

Sapogin, L.G. , S3

Sasaki, W. , N6 , St

Sawyer, B. , B16

Scarlett, R.M. , G8, HIScheibner, E.J. , S5, S6, S7, S8

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Seifert, J.R. , A8, A9 , A10, AllSelikson, B. , S20

Seraphin, B.O., D10

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Sheiner, L.S., SllSheinkman, M.K. , K28Shelykh, A.I. , S22

Shlbuya, M. , S4Shim, G.A. , 334Shockley, W. , HI, S23Shou-wu, W. , S24Shul'ga, I.B. , K28

Shuvalov, Yu. N. , S25Sidyakin, V.G. , S26

Silverman, S.J., S27Simon, R. , S28Sirvetz, M.H. , K18, S29

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Smits, F.M. , S33Smythe, W.R. , S3

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Soffa, A. , WlSoled, J. , M2

Spitzer, W.G. , S36

Statz, H. , S19Stearns, C.A. , M2

Stickler, R. , S37, S38Strause, 3.M. , T10

Stride, A. A. , B26

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Subashiev, V.K. , P8, S41Subashchiev, V.K. , S42

Sullivan, M.V., S43, S44, S45

Sunde, E.D. , S46Swartzendruber, L.J. , S47, S48,

S49Swiderski, J., S50Synorov, V.F. , P20Szebeni, P. , L15

Tanaka, S. , Tl, T2

Tanenbaum, M. , K21,Tar.m' nV H Tîdiienuaum, ri.

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Thomas, J.L. , T9

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Thornton, F.D., TilThornton, P.R. , T12Thurmond, CD. , T13

Tillman, J.R. , 35

Tomchuk, P.M., D17, D18, D19, T14Tomono, M. , T15

Trainor, A. , T16

Tramposch, R.F. , R13

Trofimenko, A. P. , B21Trumbore, F.A., T17Tufte, O.N., C12, T18 , T19

Tulk, A.S., T20

Turner, D.R. , T21Turovskii, 3.M., T22, T23

Tzoar, N. , T2 4

Uchinokura, K. , T2

Uhlir, A. , Jr. , Ul

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Valdes, L.B. , VI, V2 , V3

Van der Pauw, L.J. , H26, V4, V5

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Vaughan, D.E. , V8

Vavilov, V.S., C14, V9

Verbra, A.I. , 35

Verma, J. K.D. , V10

Vernon, R.J. , B28Vinetskii, R.M. , Vll

Vodop'yanov, L.K. , V12

Volchock, B.A. , V13

12

Wagrez, P. , 171

Ward, A.L. , W2

Wasscher, J.D., W3Watelski, S.B. , B18Weaver, F.W. , W4Webb, J.K. , W5

Weingarten, I.R. , W6

Weinreich, O.A., R8

Weinstein, M. , W7Weisberg, L.R. , W8

Weitz, S., J4, J5

Wenner, F. , W9

Wernick, J. II. , 119

Westbrook, J.H. , W10, WllWhitten, W.N. , Jr., W12Wike, R. , YlWillardson, R.K. , D1U, RIOWilliams, CM. , 32

Williamson, J.B.P. , B24, G16Wilson, B.L.H. , R14Wintenberger, M. , W13, W14-

Wolfe, G.H. , W15Woods, J.F. , W16Wurst, E.C. , Jr. , W17

Yosim, S.J. , YlYurkov, B. Ya. , V9

Zabara, M. Ya. , K8, K9

Zerbst, M. , HI 4Zhukov, V.F. , K10, KllZhuravlev, V.A. , ZlZimmerman, J.E., Z2

Zook, J.D. , C12Zucker, J. , H12 , Z3

4. Bibliography

The bibliography is presented on the following pages.

The assistance provided by members of the Electron Devices Section,especially Barbara Averitt, Frank H. Brewer and Eydon J. Swart zendruber,in the preparation of the material for this Technical Note is gratefullyacknowledged.

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ADDENDUMto accompany

NBS TECHNICAL NOTE 232

Bibliography on the Measurement of Bulk Resistivityof Semiconductor Materials for Electron Devices

Judson C. French

The following references, not included in the Bibliography,should be noted. Reference (1) should be assigned the identificationnumber K4.1, added to the Index to Subject Matter under categories 3

and 7, and added to the Author Index following Keller, J.B. Reference(2) should be assigned the identification number D16.1, added to theIndex to Subject Matter under category 2, and added to the Author Indexfollowing Dunsmuir, R.

Reference 1:

W. Keller

Measurement of the Specific Resistance of Semiconductor Crystals UsingHigh Frequencies (In German)

Zeitschrift fllr angewandte Physik, vol. 11, p. 346, September, 1959

Several methods for the measurement of resistivity of semiconductormaterials using high frequency techniques are briefly reviewed. Theseinclude an induced current method, a two-point (currentless voltageprobe) method, an oscillator method and a bridge method. A method is

then described in detail for measurements of rod-shaped samples inwhich no contact is made to the silicon crystal. The crystal may bewrapped in a protective material. Resistance is indicated by the degreeof damping of a tuned circuit which is capacitively coupled to thesample. It is necessary to calibrate the measurement using crystals ofknown resistivity.

Reference 2:

J. Dusek

Measurement of the Hall Coefficient and Electrical Conductivity in

Semiconductors by the Method of an Alternating Magnetic Field andAlternating Current

Czechoslovak Journal of Physics, vol. 9, p. 250, 1959

A description is given of electronic equipment which enables the

simultaneous measurement of the Hall coefficient and the electrical con-

ductivity by using a low frequency alternating magnetic field and alt-

ernating current. The instrument is adapted for measuring a minimum

Hall coefficient of 3 x 10"11 Vcm/AG and electrical resistance 10~ 5ft

to 10 3 ft; the smallest measurable Hall voltage is lyV. Deviations from

the results obtained by the classical dc method do not exceed 5%.

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