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National Renewable Energy LaboratoryInnovation for Our Energy
Future
EnergizeYour
PhotovoltaicsNRELs Process Development & Integration
Laboratory
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6
NREL is creatin
the worlds large
modular system
interface so you c
add your own to
NREL uses the
worlds only
integrated, high-
vacuum tool set for
6-inch PV samples
NRELs PDIL is
unique in serving
a wide range of PV
technologies
The Process Development and Integration Laboratory(PDIL) at the
National Renewable Energy Laboratory(NREL) is a unique
collaborative facility whereindustry and universities can work
closely withNREL scientists on integrated equipment to
answerpressing questions related to photovoltaics (PV).
Theintegrated equipment includes deposition, processing,
and characterization tools. Wework with a wide range of PV
materials, from crystalline silicon tothin-lms (amorphous, nano-
andmicrocrystalline silicon, copperindium gallium diselenide,
cadmiumtelluride) to organic PV.
The PDIL integrates all the data to
Automate control via recipes
Share data easily and securely
Facilitate analysis.
The PDIL integrates all the tools to
Eliminate air exposure between steps
Sequence steps in any order Incorporate combinatorial
techniques.
The PDIL integrates all the materials to
Provide greater device exibility
Allow diverse experts to work together
Better support industry and universities.
Maximize InfrastructureIn the PDIL, we integrate the tools and
techniques usfor deposition, processing, and characterization
to
Provide a baseline of world-class cellsand materials
Eliminate contaminants in the productionprocess
Control and characterize critical surfaces Create a exible
environment for
material deposition
Generate more useful data from well-designedexperiments.
Our staff in the National Center for Photovoltaics hasmore than
2000 person-years experience in solar PVand semiconductor research
and is uniquely qualied
Improve industrial processes
Answer previously inaccessible research questions
Develop new techniques,methods, and devices
Offer the best expertise anddata library in the industry
Identify and solve solar cellefciency problems.
Take a virtual tour of our system at www.nrel.gov/pv/pdil
Vacuum Transport
Stand-AloneTool
Deposition
Measurement
Processing
YourToolHere
Central TransferRobot
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NREL is integrating
the worlds largestcollection of PV
processes and
diagnostics
SiliconPlasma-enhancedchemicalvapordeposition
(PECVD)ofamorphousSiandSiN:HHot-wirechemicalvapordeposition(HWCVD)
ofamorphousSiVeryhighfrequency(VHF)CVDofamorphousSiPlasmaetchingSputteringofTCOsHigh-resolutionopticalmetrology(n&k)Photothermaldeflectionspectroscopy
CIGSCo-evaporationofCIGSChemical-bathdepositionofCdSSputteringofCdS,Mo,andtransparent
conductingoxides(TCOs)
CdTeClose-spacedsublimationChemical-bathdeposition
CdCl2treatmentPhysicalvapordeposition(PVD)ofTCOsSputteringofmetalcontacts
Silicon Wafer
ReplacementHWCVDofn-typeandp-typeSiExperimentalCVDofSiSurfacepreparation(HF)
Atmospheric
ProcessingInk-jetprintingUltrasonicspraydepositionSputteringdepositionEvaporativedepositionRapidthermalannealingX-raydiffraction(XRD)/X-rayfluorescence(XRF)
User
CharacterizationStylusprofilingUltraviolet-visiblespectrometryOpticalprofiling
Quantumefficiency(QE)Current-voltage(I-V)Measurements and
CharacterizationSpectroscopicellipsometryResonance-coupledphotoconductivedecay(RC-PCD)PhotoluminescenceimagingAugerelectronspectroscopy(AES)Sputtering/plasmaetchingPECVDstudiesX-rayphotoelectronspectroscopy(XPS)Scanningelectronmicroscopy(SEM)
Atomicforcemicroscopy(AFM)WetchemistryReflectancespectroscopyOpticalprocessingfurnaceSemilab
PDIL ToolsNREL is working with industry to expand its tool
set.
Accelerate Time to MarketIn the PDIL, which is NRELs newest
laboratory,you will
Gain access to modular deposition, processing,and
characterization capabilities
- Common transfer interface
- Standard sample size
- Intra-tool transport supporting agiven technology
- Controlled ambient between toolsat the molecular level
- Inter-tool transport for samples up to 6 inches,which is
unique in the world
Access the latest information on worldwide trendsand investments
in solar PV R&D
Work in facilities that bringpeople together
- NREL subject-matterexperts
- Industry collaborators
- University collaborators.
Optimize ProductivityNREL is a global leader in identifying,
mitigating, andtroubleshooting solar energy production problems.
Inthe PDIL, we have pioneered innovative technologiesthat integrate
multiple disciplines to provide greateroptimization.
The PDIL allows you to
Use our combinatorial capabilities forscreening studies
Access integrated data systems fordeposition and measurement
Build materials systems that are unique to yourdevice
structure
Access our complementary support system
Access an extensive historical data collection.
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Contact
2007 Laboratory of the Year
We follow a three-step processfor work within the
ProcessDevelopment & IntegrationLaboratory.
1
2
3
Submit your short project proposal,including goals,
expectedoutcomes, scope, schedule, andrequired resources.
A panel quickly evaluates yourproposal against
establishedcriteria to determine if your projectis appropriate for
the PDIL.
When your proposal is accepted,we finalize issues such as access
toNREL facilities and protection ofintellectual property.
Partner
with NREL
For more information about working
with NREL, please contact:
Brent Nelson
National Renewable Energy
Laboratory
E-mail: [email protected]
National Renewable Energy Laboratory
1617 Cole Boulevard Golden, Colorado 80401-3393
303-275-3000 www.nrel.gov
NREL is a national laboratory of the U.S. Department of Ene
Office of Energy Efficiency and Renewable Energy
Operated by Midwest Research Institute Battelle
NREL/BR-520-42389 April 2008
Printed with a renewable-source ink on paper containing at
least 50% wastepaper, including 10% post consumer waste.
For specific technical contacts
visit www.nrel.gov/pv/pdil
