1._10301100_Real-Time Monitoring of Hazardous Air Pollutants_Semicon Taiwan 2011

8/3/2019 1._10301100_Real-Time Monitoring of Hazardous Air Pollutants_Semicon Taiwan 2011

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Dr Vaughan Langford

Real-Time Monitoring of Hazardous Air

Pollutants in the Semic onduc torManufac turing Environment Using SIFT-MS


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Semic onduc tor IndustryApplications of SIFT-MS

Princ ip les of SIFT-MS

Ana lysis c apab ilities

Air qua lity monito ring

using SIFT-MS

Key benefits of theVoice200 instrument

Conc lud ing remarks


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Princ iples of theSIFT-MS Tec hnique


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What is SIFT-MS?

Selec ted Ion Flow Tube MassSpec trometry (SIFT-MS) is a form of d irec tmass spec trometry tha t utilizes precisely

c ontrolled c hemic a l ioniza tion reac tions. SIFT-MS detec ts and qua ntifies trac e

amounts of d iverse vo la tile organic

c ompounds (VOCs) and c erta ininorganic gases

from whole a ir

in real time

with typ ic a l detec tion limits atparts-per-trillion level (by volume)

in a single, convenient analysis

The Syft Tec hnolog iesVoice200


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SIFT-MS princ ip les

SI FT MS


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SIFT-MS CI compared withGC-MS CI and EI ionization

SIFT-MS uses muc h softer CI agents than GC-MS(c a lled reagent ions in SIFT-MS)

This results in significantly less fragmenta tion

than EI ioniza tion and CI, makingc hromatography unnec essary and rea l-timeana lysis possib le

As a c onseq uence, the c ompound fingerp rint for SIFT-MS will genera lly be lessspec ific than in GC-MS


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Ethylbenzene using EI and CI (O2+)

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Relative

intensity/%

m/z

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Relative

in

m/z

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tensity/%

Elec tron impac tioniza tion (70 eV)

Chemic a l ioniza tion:O2

+ reagent (12.1 eV)


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Resolving acetone and propanal

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Branchingratio/%

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Bran

chingratio/%

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Bran

chingratio/%

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Branchingratio/%

m/z0

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Branchingratio/%

m/z

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Branchingratio/%

NO+

O2+

H3O+

SIFT-MS is ab le to resolve c erta inisobaric and isomeric c ompounds.


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Analysis Capabilities ofthe SIFT-MS Tec hnique


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What types of samples c an

SIFT-MS analyze?

SIFT-MS is a ded ic a ted ana lyzer fortrac e reac tive c ompounds in a ir

Dry or humid whole a ir samp les:

Outdoor/ indoor a ir Breath

Headspac e above aq ueous

solutions or solids


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Sample presentation to SIFT-MS

A range o f sampling methods

are c ompatib le with SIFT-MSwhole a ir ana lysis:

Direc t live sampling ofwhole a ir

Gas sampling bags (e.g.Ted la r, Teflon)

SUMMA c anisters


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What compounds c an SIFT-MS ana lyze?

General c lass Example c lasses / c ompounds

hyd roc arbons a lkanes, a lkenes, a romatic s

oxygena tes a lc ohols, a ldehydes, ketones, esters

nitrogen compounds amines, amides, nitriles

sulfur c ompounds merc ap tans, thioethers, c a rbonyl sulfide

halog ena ted c ompounds freons, perfluoroc arbons, a liphatic and

aromatic fluorides and c hlorides, etc .organosilic on c mpds siloxanes, silanes

organophosphoruscompounds

organophosphates, organophosphites

inorganic c ompounds ammonia , c hlorine, hydrogen sulfide,phosphine, selec ted inorganic ac idsand b oron c omp ounds


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The Voice200as a Tool forAir Quality Monitoring


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Why SIFT-MS? The c apab ilities of SIFT-MS make it

an idea l solution for p rotec ting:

Worker hea lth

Produc t qua lity

The environment

Relevant ind ustries inc lud e:

Semic onduc tor fab ric a tion

LED panel manufac ture Sola r c ell fab ric a tion


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Real-Time AirMonitoring

The graphs show results for

butadiene for two p rod uc tions:

linearity (above)

ambient a ir ana lysis a t theSyft hea d offic e(Christc hurc h, NewZealand).

0.5

0.4

0.3

0.2

0.1

0.0

Concentration

(pp

bv)

18:00

9/2/09

0:00

9/3/09

6:00

Measurement data and time

1,3-butadiene, NO+, C4H6+

1,3-butadiene, O2+, C4H6+


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Stac k Emission Analysis

Ab ility to monitor stac k

emissions d irec tly in stac kvia a suita b le samplingarrangement

Unique flexib ility of SIFT-MSa lso enab les the sameinstrument to makemeasurements a t siteboundary


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Fumigants

Toxic industria lchemicals

Oc cupational Safety and Health

Fast, simp le, ac c ura te and ec onomic a l


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All c onta iner fumigants a re ha rmful tohumans

Some a re letha l a t very low levels Conta iners may have a far la rger dose

of fumigant app lied than isrecommended

Residua l fumigants c rea te a hazard forworkers entering the c onta iners

Employers ha ve a lega l responsib ility to

p rotec t workers.

Example of detec tion of toxic

compounds: fumigants

Methyl bromideChloropicrin

Hydrogen cyanide

Ethylene oxide

Phosphine

Sulfuryl fluoride

Ethylene dibromide


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Robust design

Solvent-free

Cheap to run

Very fast (typ ic a lly 1 minute persample)

Simp le to opera te (touc h sc reen)

Repeatab le ana lytic a l-grade results

The Syft solution-based approac h

Results d isplayed on theVoice200 instrument

Samplecase


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Key Benefits of theVoice200 Instrument


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Syft Voice200automation and

remote acc ess

The Voic e200continually

monitors its own performanc e Fully automated va lida tion

c yc les (usua lly done once per

day) ensure tha t ana lysis isvalid

The Voic e200 is network-

ready c an be op era ted fromany loc a tion with internetaccess


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Syft Voice200durability and mobility

Syft s instruments a reinsta lled in industria lapp lic a tions (suc h as inwarehouses and vans*),as well as in labora tories

Within a fac ility, they are

easily maneuvered usingtheir built-in wheels

* The instrument c an ob ta inquantita tive da ta 15minutes a fter being movedto another loc a tion!


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Software: Voice200 instrument

Designed for use by non-tec hnic a l op era tors

The Voic e 200 instrumentssoftware has severa l p rimaryfunctions:

Controlling the instrument

Valida ting that theinstrument is opera tingwithin spec ific a tion

Running methods toana lyze samples; c omputeand p resent results


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Software: LabSyft

The Syft LabSyft softwarepac kage op era tes on a remote

c omputer and is designed foradvanced users

LabSyft a llows users to:

View data as it is genera ted

View and manipula te da ta a ftersc an c omp letion

View, searc h and expand the

c ompound lib ra ry Crea te and ed it analytic a l

methods

Set up ba tc h ana lyses


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Conc luding Remarks


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Benefits of Syft SIFT-MS technology

Sensitive , rea l-time ana lysis withoutpreconcentration

Diverse c hemic a ls c an be ana lyzedin a sing le run c ustomized to meetc ustomers needs

Mobile with rap id sta rt-up

Simp le opera tion

Low ma intenance and lowopera ting c osts


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Why c hoose SIFT-MS over GC-MS?

Read ily configured for use by non-tec hnic a lpeop le ( user friend ly )

Red uced ma intenance Get labora tory-grade ana lyses faster bec ause

Chromatography is eliminated

Minimal or no samp le p repara tion is required

Long-term c a lib ra tion stab ility b ec ause

Prec ise ioniza tion c ontrol is used

There is no chromatographic c olumn

The ion sourc e and detec tion system is very c lean


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Thank you for your a ttention.

For more information:see us a t booth 1314,visit our website www.syft.com ,

e-ma il us a t [email protected] ,or c onta c t our Ta iwanese d istributor:

Integrated Sc ientific Servic es Group

Web: www.issg.c om.twPhone: (02)8797 7272

Documents

1._10301100_Real-Time Monitoring of Hazardous Air Pollutants_Semicon Taiwan 2011