Copyright · Jamil, Mohammad, Qatar University, Qatar ... Iman Shahosseini, ... et al. developed a valveless micropump [3], in which

Copyright 2013 IFSA Publishing All rights reserved This journal and the individual contributions in it are protected under copyright by IFSA Publishing and the following terms and conditions apply to their use Photocopying Single photocopies of single articles may be made for personal use as allowed by national copyright laws Permission of the Publisher and payment of a fee is required for all other photocopying including multiple or systematic copyright copyright for advertising or promotional purposes resale and all forms of document delivery Derivative Works Subscribers may reproduce tables of contents or prepare list of articles including abstract for internal circulation within their institutions Permission of the Publisher is required for resale or distribution outside the institution Permission of the Publisher is required for all other derivative works including compilations and translations Authors copies of Sensors amp Transducers journal and articles published in it are for personal use only Address permissions requests to IFSA Publisher by e-mail editorsensorsportalcom Notice No responsibility is assumed by the Publisher for any injury andor damage to persons or property as a matter of products liability negligence or otherwise or from any use or operation of any methods products instructions or ideas contained in the material herein Printed in the USA

SSeennssoorrss ampamp TTrraannssdduucceerrss

Volume 151 Issue 4 April 2013

wwwsensorsportalcom ISSN 2306-8515 e-ISSN 1726-5479

Editors-in-Chief professor Sergey Y Yurish Tel +34 696067716 e-mail editorsensorsportalcom

Editors for Western Europe Meijer Gerard CM Delft Univ of Technology The Netherlands Ferrari Vittorio Universitaacute di Brescia Italy Editor for Eastern Europe Sachenko Anatoly Ternopil National Economic University Ukraine Editors for North America Katz Evgeny Clarkson University USA Datskos Panos G Oak Ridge National Laboratory USA Fabien J Josse Marquette University USA

Editor South America Costa-Felix Rodrigo Inmetro Brazil Editors for Asia Ohyama Shinji Tokyo Institute of Technology Japan Zhengbing Hu Huazhong Univ of Science and Technol China Editor for Asia-Pacific Mukhopadhyay Subhas Massey University New Zealand Editor for Africa Maki KHabib American University in Cairo Egypt

Editorial Board

Abdul Rahim Ruzairi Universiti Teknologi Malaysia Abramchuk George Measur Tech amp Advanced Applications Canada Ascoli Giorgio George Mason University USA Atalay Selcuk Inonu University Turkey Atghiaee Ahmad University of Tehran Iran Augutis Vygantas Kaunas University of Technology Lithuania Ayesh Aladdin De Montfort University UK Baliga Shankar B General Monitors USA Basu Sukumar Jadavpur University India Bousbia-Salah Mounir University of Annaba Algeria Bouvet Marcel University of Burgundy France Campanella Luigi University La Sapienza Italy Carvalho Vitor Minho University Portugal Changhai Ru Harbin Engineering University China Chen Wei Hefei University of Technology China Cheng-Ta Chiang National Chia-Yi University Taiwan Chung Wen-Yaw Chung Yuan Christian University Taiwan Cortes Camilo A Universidad Nacional de Colombia Colombia DAmico Arnaldo Universitagrave di Tor Vergata Italy De Stefano Luca Institute for Microelectronics and Microsystem Italy Ding Jianning Changzhou University China Djordjevich Alexandar City University of Hong Kong Hong Kong Donato Nicola University of Messina Italy Dong Feng Tianjin University China Erkmen Aydan M Middle East Technical University Turkey Gaura Elena Coventry University UK Gole James Georgia Institute of Technology USA Gong Hao National University of Singapore Singapore Gonzalez de la Rosa Juan Jose University of Cadiz Spain Guillet Bruno University of Caen France Hadjiloucas Sillas The University of Reading UK Hao Shiying Michigan State University USA Hui David University of New Orleans USA Jaffrezic-Renault Nicole Claude Bernard University Lyon 1 France Jamil Mohammad Qatar University Qatar Kaniusas Eugenijus Vienna University of Technology Austria Kim Min Young Kyungpook National University Korea Kumar Arun University of Delaware USA Lay-Ekuakille Aime University of Lecce Italy Li Si GE Global Research Center USA Lin Paul Cleveland State University USA Liu Aihua Chinese Academy of Sciences China

Mahadi Muhammad University Tun Hussein Onn Malaysia Malaysia Mansor Muhammad Naufal University Malaysia Perlis Malaysia Marquez Alfredo Centro de Investigacion en Materiales Avanzados Mexico Mishra Vivekanand National Institute of Technology India Moghavvemi Mahmoud University of Malaya Malaysia Morello Rosario University Mediterranea of Reggio Calabria Italy Mulla Imtiaz Sirajuddin National Chemical Laboratory Pune India Nabok Aleksey Sheffield Hallam University UK Neshkova Milka Bulgarian Academy of Sciences Bulgaria Passaro Vittorio M N Politecnico di Bari Italy Penza Michele ENEA Italy Pereira Jose Miguel Instituto Politecnico de Setebal Portugal Pogacnik Lea University of Ljubljana Slovenia Pullini Daniele Centro Ricerche FIAT Italy Reig Candid University of Valencia Spain Restivo Maria Teresa University of Porto Portugal Rodriacuteguez Martiacutenez Angel Universidad Politeacutecnica de Cataluntildea Spain Sadana Ajit University of Mississippi USA Sadeghian Marnani Hamed TU Delft The Netherlands Sapozhnikova Ksenia D I Mendeleyev Institute for Metrology Russia Singhal Subodh Kumar National Physical Laboratory India Shah Kriyang La Trobe University Australia Shi Wendian California Institute of Technology USA Shmaliy Yuriy Guanajuato University Mexico Song Xu An Yang Normal University China Srivastava Arvind K LightField Corp USA Stefanescu Dan Mihai Romanian Measurement Society Romania Sumriddetchkajorn Sarun Nat Electr amp Comp Tech Center Thailand Sun Zhiqiang Central South University China Sysoev Victor Saratov State Technical University Russia Thirunavukkarasu I Manipal University Karnataka India Tianxing Chu Research Center for Surveying amp Mapping Beijing China Vazquez Carmen Universidad Carlos III Madrid Spain Wang Jiangping Xian Shiyou University China Xue Ning Agiltron Inc USA Yang Dongfang National Research Council Canada Yang Shuang-Hua Loughborough University UK Yaping Dan Harvard University USA Zakaria Zulkarnay University Malaysia Perlis Malaysia Zhang Weiping Shanghai Jiao Tong University China Zhang Wenming Shanghai Jiao Tong University China

Sensors amp Transducers Journal (ISSN 2306-8515) is a peer review international journal published monthly online by International Frequency Sensor Association (IFSA) Available in both print and electronic (printable pdf) formats Copyright copy 2013 by International Frequency Sensor Association

All rights reserved

SSeennssoorrss ampamp TTrraannssdduucceerrss JJoouurrnnaall

CCoonntteennttss


wwwsensorsportalcom ISSN 1726-5479

Research Articles

10 Top Reasons to Publish your Article in Sensors amp Transducers (Editorial) S Y Yurish I Fast Field Calibration of MEMS-based IMU for Quadrotors Applications J F Zhang J P Bai J B Wu Y Zeng and X S Lai 1 Analysis of Pulse-Echo Response Based on Linear MEMS Ultrasonic Transducer Array Wang Hongliang Wang Xiangjun He Changde Xue Chen Yang 10 Performance Enhancement of Silicon MEMS Microspeaker Alexandre Houdouin Iman Shahosseini Herveacute Bertin Nourdin Yaakoubi Elie Lefeuvre Emile Martincic Yves Auregan Steacutephane Durand 18 Fluid Structure Coupling Analysis of Boundary Layer Streaming Driving Micropump Changzhi Wei Shoushui Wei Feifei Liu 24 Numerical Simulation of Mixing Process in Tortuous Microchannel Reza Hadjiaghaie Vafaie Mahnaz Mahdipour Hadi Mirzajani Habib Badri Ghavifekr 30 A Molecular Imprinting TNT Sensitive Detection Sensor Based on Film Bulk Acoustic Resonator Qimeng Lv Guangmin Wu Jianming Chen He Qun Chu Mai John D 36 Design and Simulation of a MEMS-based Large Traveling Linear Motor for Near Infrared Fourier Transform Spectrometer Ehsan Atashzaban Mahdi Nasiri Hadi Mirzajani Hamed Demaghsi Habib Badri Ghavifekr 41 A Large Stroke MEMS-based Linear Motor for Fourier Transform Spectrometer Applications Ehsan Atashzaban Hadi Mirzajani Mahdi Nasiri Milad Sangsefidi 47 Design and Experiment of a Parallel Six-axis Heavy Force Sensor Based on Stewart Structure Wei Liu Qi Li Zhenyuan Jia Erdong Jiang 54 Development of System for Alumina Clinker Quality Real-time Monitoring based on Sound Sensor Qing Tian En-Cheng Wang Chang-Nian Zhang and Jin-Hong Li 63 Characterization of Defects in Non-ferromagnetic Material Using an Electromagnetic Acoustic Transducer Sadiq Thomas Evans Ashigwuike Wamadeva Balachandran Salah Obayya 70

Photodiode Array for Detecting Laser Pointer Applied in Shooting Simulator Aryuanto Soetedjo Eko Nurcahyo Fiqih Prawida 78 Study on Sensing Properties and Mechanism of Pd-doped SnO2 Sensor for Hydrogen and Carbon Monoxide Qu Zhou Weigen Chen Lingna Xu Shudi Peng 84 Three-dimensional Node Localization Algorithm for Wireless Sensor Networks Zhang Ye Zhang Feng 90 A New Time Synchronization Algorithm for Wireless Sensor Networks Based on Internet of Things Zhang Yong-Heng Zhang Feng 95 Wireless Sensor Traceability Algorithm Based on Internet of Things in the Area of Agriculture JI Yan Zhang Feng DONG Jian-Gang You Fei 101 Development of Noise Measurements Part 2 Random Error Zenoviy Kolodiy Bohdan Stadnyk Svyatoslav Yatsyshyn 107 An Optimised Electronic System for in-vivo Stability Evaluation of Prostheses in Total Hip and Knee Arthroplasty Shiying Hao and John Taylor 113

Authors are encouraged to submit article in MS Word (doc) and Acrobat (pdf) formats by e-mail editorsensorsportalcom Please visit journalrsquos webpage with preparation instructions httpwwwsensorsportalcomHTMLDIGESTSubmitionhtm

International Frequency Sensor Association (IFSA)

Sensors amp Transducers Vol 151 Issue 4 April 2013 pp 24-29

24

SSSeeennnsssooorrrsss ampampamp TTTrrraaannnsssddduuuccceeerrrsss

copy 2013 by IFSAhttpwwwsensorsportalcom

Fluid Structure Coupling Analysis of Boundary Layer Streaming Driving Micropump

1 2 Changzhi Wei 1 Shoushui Wei 1 Feifei Liu

1 School of Control Science and Engineering Shandong University No17923 Jingshi Road Jinan Shandong PRC 250061 China

2 Shandong Provincial Key Laboratory of Network based Intelligent Computing No106 Jiwei Road Jinan Shandong PRC 250022 China

Tel +86-531-88392827 fax +86-531-88392827 E-mail ssweisdueducn

Received 15 March 2013 Accepted 18 April 2013 Published 30 April 2013 Abstract An acoustic streaming micropump driven by boundary layer streaming is proposed The streaming velocity is simulated by employing the direct streaming method When the vibration displacement is 01 m with a driving frequency of 10 MHz an average outlet velocity of 487 mms can be obtained Analysis indicates that the average outlet velocity is proportional to the square of the vibration displacement and the driving frequency When the fluid viscosity is less than 10-4 Pabulls the average outlet velocity remains unchanged otherwise the average outlet velocity decreases with the fluid viscosity increasing Finally the influence of back pressure on the average outlet velocity is simulated and the maximum back pressure of the designed acoustic streaming micropump achieved is 135 Pa Copyright copy 2013 IFSA Keywords Acoustic streaming Computational fluid dynamics Valveless micropump 1 Introduction

Micropump plays an important role in microfluidic devices which has been widely used in many fields such as microfluidic cooling biochemical analysis and drug release [1] Valve micropumps use mechanical components to achieve rectification with a satisfactory unidirectional performance However their miniaturization and lifetime are limited due to moving parts [2] Stemme et al developed a valveless micropump [3] in which the check valves were replaced by diffusernozzle Diffusernozzle had different resistance in both directions so the micropump could produce unidirectional net flow From then on valveless micropump has become a research hot topic The

performance of diffusernozzle micropump depends heavily on the structural design of the inlet and outlet so the unidirectional performance is not very satisfactory Electroosmotic micropump is another valveless micropump that contains no moving parts and is relatively easy to integrate in microfluidic circuits during fabrication but it has special requirements on wall materials and fluid properties besides the high driving voltage may cause heat and security issues [4]

The piezoelectric ultrasonic micropump depends on the ultrasonic vibration that is generated by a piezoelectric vibrator and the fluid flow is driven by friction acoustic streaming and acoustic radiation force This type of micropump works with a low working voltage and will not cause heat transfer

Article number P_1170


25

Without any special requirement on the liquid or gas to be transferred the piezoelectric ultrasonic micropump can be used for transmission of liquid containing DNA or other biological samples

Previously we have shown that acoustic streaming is an important factor in ultrasonic traveling wave driving [5] In this paper a boundary layer acoustic streaming micropump based on longitudinal acoustic wave is designed High frequency AC voltage is applied on the PZT film outside the microchannel The sound wave generated by the vibration of the microchannel wall attenuates and causes pressure gradient to pump the fluid flow Without pressure chamber and valves the miniaturization and reliability of certain devices have been improved significantly A boundary layer streaming micropump model is developed which can be used for the study of the instantaneous velocity and time-averaged velocity The influence of driving voltage driving frequency fluid viscosity and back pressure on the time-averaged velocity is analyzed comprehensively

2 Analysis Method Viscous loses or rigid boundary oscillating can

result in acoustic attenuation and then Reynolds stress is created The steady fluid flow caused by the Reynolds stress is acoustic streaming

Acoustic streaming generated by solid and fluid interface vibration is called boundary layer driven streaming which includes inner and outer layer streaming Rayleigh analyzed outer layer streaming by pushing standing wave between two parallel plates and he attributed the observed phenomenon to nonlinear second order effect The Rayleigh method is still a typical analysis tool for acoustic streaming analysis today Schlichting studied the incompressible fluid on a vibration plate and calculated the two-dimensional structure of inner streaming Later Nyborg described the theory of acoustic streaming comprehensively [6] Fig 1 represents the inner and outer boundary streaming in which the diameter of the vortex is λ4

i nner st reami ng

out er st reami ng

vel oci t y node

4

4

Fig 1 Acoustic streaming

There are two fundamental methods for the study of acoustic streaming one is Nyborg force method and the other is the direct streaming method [7]

In Nyborg force method pressure density and velocity are decomposed into first and second order items through successive approximation method The

particle vibration velocity 1U can be calculated The

unit volume driving force which is called Nyborg force can be calculated using the following equation

0 1 1 1 1( ) ( )F U U U U (1)

where 0 is the density 1U is the first-order sound

field velocity and is the time-averaged

calculation Substitute equation 1 to equation 2 and the

acoustic streaming velocity 2U can be calculated

2 2 2

4

3p U U F

(2)

where 2p is the second order pressure is the bulk

viscosity and is the dynamic viscosity

Direct streaming method which is completely solving of the Navier-Stokersquos equation by using simulation software without making any assumptions Components of the instantaneous velocity at each node can be obtained and then the time-averaged velocity can be calculated in a period of time

The calculated instantaneous velocity contains the first and second order terms

1 2U U U (3)

The time-averaged first order term is zero so the

time-averaged U is equal to 2U that is acoustic

streaming velocity

1 2 2U U U U (4)

The solution thus obtained is believed to be more

accurate This method has been used before to model a micro machined flexural plate wave device for fluid pumping based on acoustic streaming in water [8] Sathaye et al also used this method to solve the acoustic streaming velocity [7] In our paper direct streaming method is used to obtain more accurate solutions 3 Analysis Model

The designed acoustic streaming micropump is an integral part of a flow cytometer The required pipe diameter is 10 m 10 m According to the acoustic streaming theory of Nyborg the direction of inner


26

streaming is from the structure to fluid at the vibration antinodes near the fluid-structure interface and the direction of outer streaming is from the fluid to structure For 1 MHz water the boundary layer thickness is about several m [9] Therefore in order to obtain the unidirectional flow the boundary layer streaming micropump model is designed as shown in Fig 2 (a) The micropump includes five parts inlet and outlet sections streaming chamber offset cavity and PZT All of them are with square cross section of 10 m 10 m The lengths of inlet and outlet section are both 10 m Thickness of the wall and the PZT are both 1 m When sinusoidal voltage with high frequency is applied on the PZT vibration will be generated on fluid-structure interface There is only z-directional streaming because of the restrictions of the pipe size The offset cavity helps to eliminate reflux and then unidirectional flow from inlet to outlet is obtained

Preliminary numerical analysis found that there are quite obvious vortexes near both corners of the streaming cavity when Fig 2 (a) is applied The presence of the vortex not only affects the transmission of the fluid but also increases the wear of the device Whatrsquos worse the cells in the solution could be damaged So the final designed model adopted a filleted corner as shown in Fig 2 (b)

z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber

of f set cavi t y channel wal l

PZT

(a) with quarter bend

z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT

(b) with filleted corner

Fig 2 Structure model of the boundary layer streaming micropump

Both ends of PZT are fixed y=0 plane is the fluid-structure interface High frequency alternating current as follows is applied on the electrodes of PZT

sin( )V A t (5)

where A is the voltage amplitude and is the angular frequency

Opening boundary conditions are used in the inlet and outlet and the pressure is set to 1 atm No-slip wall boundary conditions are used in other surfaces

In order to ensure the simulation accuracy the mesh size should be decreased as small as possible But this tends to bring the huge overhead of memory and the simulation time becomes intolerable

As we know a cycle of continuous sinusoidal signal can be discretized using at least two points so a wavelength of pressure waveform contains at least two mesh grids If the maximum driving frequency is 50 MHz for water the maximum mesh grid allowed should satisfy

6 1

1500[ ]15[ ]

2 2 2 50 10 [ ]

mc sm mf s

(6)

In this design the minimum mesh grid is 27 m

and able to ensure the simulation accuracy

4 Results and Discussions

41 Instantaneous Velocity When the driving frequency is 1 MHz and the

vibration displacement is 01 m the instantaneous velocity field of the y = 0 plane is shown in Fig 3 Fig 3 (a) and (b) represent the instantaneous velocity vector of T2 and T respectively Positive and negative alternates can be found in a single cycle The surface-averaged outlet velocity is approximately a sinusoidal shape as shown in Fig 3 (c) As its positive peak velocity is greater than the negative velocity peak unidirectional net flow is able to achieve in a cycle

42 Acoustic Streaming Velocity Acoustic streaming is calculated by direct

streaming method with 10 sub steps per cycle Data of the 10 sub steps of the first cycle are abandoned in consideration of instability and only 11-100 sub steps data are adapted to make average calculating

When the driving frequency is 1 MHz and the vibration displacement is 01 m the calculated acoustic streaming velocity vector is shown in Fig 4 There is a stable unidirectional flow from inlet to outlet under the driving force of the acoustic streaming The inlet acoustic streaming velocity near vibration surface reaches 1725 mms and the velocity far away from vibration surface is smaller The maximum outlet velocity is about 1212 mms and the flow pattern is poiseuille flow The velocity


27

in offset cavity is nearly zero but it is essential otherwise unidirectional flow is difficult to obtain Under above driving conditions the average outlet velocity is 487 mms

(a) Instantaneous velocity vector of T2

(b) Instantaneous velocity vector of T

-08

-06

-04

-02

0

02

04

06

08

11 18 25 32 39 46 53 60 67 74 81 88 95

Tim es

The surface-a

vera

ged outlet

velocitym

s

(c) The surface-averaged outlet velocity

Fig 3 The instantaneous velocity

Fig 4 The acoustic streaming velocity vector

43 Influence of Vibration Displacement When the driving frequency is 1 MHz and the

vibration displacement is 01-05 m the relationship between the average outlet velocity and the vibration displacement is shown in Fig 5 It can be found that the average outlet velocity is approximately proportional to the square of the vibration displacement According to the generation mechanism of acoustic streaming the driving force of acoustic streaming is proportional to the sound intensity The sound intensity is proportional to the square of the vibration displacement The relationship between PZT film vibration displacement and the driving voltage is approximately linear so the average outlet velocity is approximately proportional to the square of the driving voltage This conclusion is consistent with the experimental observations of Suzuki et al [10]

0

005

01

015

0 01 02 03 04 05 06

The vibration displacem entum

The ave

rage outle

t ve

locitym

s

Fig 5 Relationship between the average outlet velocity and the vibration displacement

44 Influence of Driving Frequency

When the vibration displacement is 01 m and

the driving frequency is 1-5 MHz the relationship between the average outlet velocity and the driving frequency is shown in Fig 6

0

001

002

003

004

0 1 2 3 4 5

The drive frequencyM H z

the average outle

t velocitym

s

Fig 6 Relationship between the average outlet velocity and the driving frequency

The average outlet velocity is also approximately

proportional to the square of the driving frequency The sound pressure is proportional to the driving frequency and the sound intensity is proportional to the square of the driving frequency So the Nyborg force is proportional to the square of the driving


28

frequency When the frequency is high enough acoustic streaming can be generated easily without a strong acoustic wave At the same time as the driving frequency decreases the driving force of acoustic streaming decline clearly Wei et al have found that when the frequency drops to 2000-2500 Hz the driving force of acoustic streaming is already very small [5] Sun et al also demonstrated this conclusion [11] 45 Influence of the Fluid Viscosity

When the driving frequency is 1 MHz the

vibration displacement is 01 m and the heat transfer is ignored the relationship between the average outlet velocity and the fluid viscosity is shown in Fig 7 When the fluid viscosity is very small (0-10-4 Pas) the average outlet velocity remain 00095 ms When the fluid viscosity is larger than 10-4 Pas the average outlet velocity decreases with the fluid viscosity increasing Frampton et al have been confirmed that in a 10 m scale channel the boundary layer streaming is the major factor and the streaming caused by the viscous attenuation may be negligible [9] In this case the fluid viscosity will only generate a viscous resistance When the viscosity is very small the viscous resistance is small The acoustic streaming determined by the boundary layer is approximately constant due to no changing in other factors When the fluid viscosity increases viscous resistance increases too The average outlet velocity decreases gradually with the decreasing of the acoustic streaming force

0

0002

0004

0006

0008

001

0 002 004 006 008 01

The fluid viscosityP as

The outle

t ave

rage

velocitym

s

Fig 7 Relationship between the average outlet velocity and the fluid viscosity

46 Influence of the Back Pressure


vibration displacement is 01 m and the pressure difference between the inlet and the outlet is 0 20 40 60 80 Pa respectively the relationship between the average outlet velocity and the back pressure is shown in Fig 8 The average outlet velocity decreases with the back pressure increasing When the back pressure reaches about 130-140 Pa the average outlet velocity reduces to zero Compared to the back pressure of piezoelectric film reciprocating micropump which is hundreds of Pa the back

pressure of boundary layer streaming micropump is relatively small This kind of micropump based on longitudinal acoustic streaming has weak pressure driving ability and can only be applied to some low-pressure-driven applications

0

0001

0002

0003

0004

0005

0006

0 20 40 60 80 100

The back pressurepa

The outlet ave

rage velocitym

s

Fig 8 Relationship between the average outlet velocity and the back pressure

5 Conclusions

Based on the acoustic streaming theory of Nyborg

and direct streaming method the streaming velocity distribution in a micro channel is calculated Model of a boundary layer streaming micropump is designed and influence factors on the time averaged outlet velocity are analyzed Our results indicate that excellent pumping performance can be obtained when the fluid viscosity is less than 10-4 Pabulls The pumping velocity can be easily controlled by changing the driving frequency or the driving voltage

Compared with other microfluidic driving methods the acoustic streaming micropump has several advantages First the reliability is greatly improved due to that the micropump are with no moving parts which can also help to further simplify the structure of the micropump Second there are no nozzles valves and other mechanical components so damage of the cells suspended in solution will be reduced Third the micropump model proposed here will help for the device miniaturization Because acoustic streaming is a second order non-linear phenomenon only a small part of the sound energy is changed into the fluid kinetic energy future work will be performed on enhancing the efficiency of the acoustic streaming micropump Acknowledgements This work was financially supported by China National Natural Science Foundation (51075243) References [1] G B Lee Microfluidics for biomedical application

in Proceeding of the Micro Electro- Mechanical System 2007 MEMS Technology 25-25 April 2007 pp 1-4


29

[2] N T Nguyen X Y Huang T K Chuan MEMS-micropumps a review Journal of Fluids Engineering Vol 124 Issue 2 2002 pp 384-392

[3] E Stemme G Stemme A valveless diffusernozzle-based fluid pump Sensors and Actuators A Physical Vol 39 Issue 2 1993 pp 159-167

[4] D J Laser Design fabrication and applications of silicon electroosmotic micropumps PhD Thesis Stanford Univ 2005

[5] C Z Wei S S Wei Y T Zhang C Zhang Fluid structure coupling analysis of ultrasonic traveling wave driving Advanced Material Research Vol 562-564 2012 pp 1724-1727

[6] S Boluriaa P J Morris Acoustic streaming from Rayleigh to today International Journal of Aeroacoustics Vol 2 Issue 3 2003 pp 255-292

[7] A Sathaye A Lal Numerical simulation of acoustic streaming near embedded microstructures inside microfluidic channels In Proceedings of the IEEE Ultrasonics Symposium 8-11 October 2002 Vol 1 pp 539- 542

[8] N T Nguyen R M White Design and optimization of an ultrasonic flexural plate wave micropump using numerical simulation Sensors and Actuators A Physical Vol 77 Issue 3 1999 pp 229-236

[9] K D Frampton S E Martin K Minor The scaling of acoustic streaming for application in micro-fluidic devices Applied Acoustics Vol 64 Issue 7 2003 pp 681-692

[10] T Suzuki H Hata H Shintaku I Kanno S Kawano H Kotera Visualization and optimization for fluid flow of traveling wave micropump in Proceeding of the Micro Total Analysis System Boston USA 9-13 October 2005 pp 1108-1110

[11] H M Sun H Guo Investigation of ultrasound streaming in microfluidic device Chinese Journal of Sensors and Actuators Vol 21 Issue 3 2008 pp 517-520

___________________

2013 Copyright copy International Frequency Sensor Association (IFSA) All rights reserved (httpwwwsensorsportalcom)

Aims and Scope Sensors amp Transducers is a peer reviewed international interdisciplinary journal that provides an advanced forum for the science and technology of physical chemical sensors and biosensors It publishes original research articles timely state-of-the-art reviews and application specific articles with the following devices areas Physical chemical and biosensors Digital frequency period duty-cycle time interval PWM pulse number output sensors and transducers Theory principles effects design standardization and modeling Smart sensors and systems Sensor instrumentation Virtual instruments Sensors interfaces buses and networks Signal processing and interfacing Frequency (period duty-cycle)-to-code converters ADC Technologies and materials Nanosensors Microsystems Applications Further information on this journal is available from the Publishers web site httpwwwsensorsportalcomHTMLDIGESTSubmissionhtm Subscriptions An annual subscription includes 12 regular issues and some special issues Annual subscription rates for 2013 are the following Electronic version (in printable pdf format) 40000 EUR Printed with bw illustrations 64000 EUR Printed full color version 76000 EUR 40 discount is available for IFSA Members Prices include shipping costs by mail Further information about subscription is available through IFSA Publishings web site httpwwwsensorsportalcomHTMLDIGESTJournal_Subscriptionhtm Advertising Information If you are interested in advertising or other commercial opportunities please e-mail salessensorsportalcom and your enquiry will be passed to the correct person who will respond to you within 24 hours Please download also our Media Planner 2013 httpwwwsensorsportalcomDOWNLOADSMedia_Planner_2013pdf Books for Review Publications should be sent to the IFSA Publishing Office Ronda de Ramon Otero Pedrayo 42C 1-5 08860 Castelldefels Barcelona Spain Abstracting Services This journal is cited indexed and abstracted by Chemical Abstracts EBSCO Publishing IndexCopernicus Journals Master List ProQuest Science Journals CAS Source Index (CASSI) Ulrichs Periodicals Directory Scirus Google Scholar etc Since 2011 Sensors amp Transducers journal is covered and indexed by EI Compendex index (including a Scopus Embase Engineering Village and Reaxys) in Elsevier products Instructions for Authors Please visit the journal web page httpwwwsensorsportalcomHTMLDIGESTSubmissionhtm Authors must follow the instructions very carefully when submitting their manuscripts Manuscript must be send electronically in both MS Word 2003 for Windows (doc) and Acrobat (pdf) formats by e-mail editorsensorsportalcom

SSeennssoorrss ampamp TTrraannssdduucceerrss


wwwsensorsportalcom ISSN 2306-8515 e-ISSN 1726-5479

Editors-in-Chief professor Sergey Y Yurish Tel +34 696067716 e-mail editorsensorsportalcom

Editors for Western Europe Meijer Gerard CM Delft Univ of Technology The Netherlands Ferrari Vittorio Universitaacute di Brescia Italy Editor for Eastern Europe Sachenko Anatoly Ternopil National Economic University Ukraine Editors for North America Katz Evgeny Clarkson University USA Datskos Panos G Oak Ridge National Laboratory USA Fabien J Josse Marquette University USA

Editor South America Costa-Felix Rodrigo Inmetro Brazil Editors for Asia Ohyama Shinji Tokyo Institute of Technology Japan Zhengbing Hu Huazhong Univ of Science and Technol China Editor for Asia-Pacific Mukhopadhyay Subhas Massey University New Zealand Editor for Africa Maki KHabib American University in Cairo Egypt

Editorial Board

Abdul Rahim Ruzairi Universiti Teknologi Malaysia Abramchuk George Measur Tech amp Advanced Applications Canada Ascoli Giorgio George Mason University USA Atalay Selcuk Inonu University Turkey Atghiaee Ahmad University of Tehran Iran Augutis Vygantas Kaunas University of Technology Lithuania Ayesh Aladdin De Montfort University UK Baliga Shankar B General Monitors USA Basu Sukumar Jadavpur University India Bousbia-Salah Mounir University of Annaba Algeria Bouvet Marcel University of Burgundy France Campanella Luigi University La Sapienza Italy Carvalho Vitor Minho University Portugal Changhai Ru Harbin Engineering University China Chen Wei Hefei University of Technology China Cheng-Ta Chiang National Chia-Yi University Taiwan Chung Wen-Yaw Chung Yuan Christian University Taiwan Cortes Camilo A Universidad Nacional de Colombia Colombia DAmico Arnaldo Universitagrave di Tor Vergata Italy De Stefano Luca Institute for Microelectronics and Microsystem Italy Ding Jianning Changzhou University China Djordjevich Alexandar City University of Hong Kong Hong Kong Donato Nicola University of Messina Italy Dong Feng Tianjin University China Erkmen Aydan M Middle East Technical University Turkey Gaura Elena Coventry University UK Gole James Georgia Institute of Technology USA Gong Hao National University of Singapore Singapore Gonzalez de la Rosa Juan Jose University of Cadiz Spain Guillet Bruno University of Caen France Hadjiloucas Sillas The University of Reading UK Hao Shiying Michigan State University USA Hui David University of New Orleans USA Jaffrezic-Renault Nicole Claude Bernard University Lyon 1 France Jamil Mohammad Qatar University Qatar Kaniusas Eugenijus Vienna University of Technology Austria Kim Min Young Kyungpook National University Korea Kumar Arun University of Delaware USA Lay-Ekuakille Aime University of Lecce Italy Li Si GE Global Research Center USA Lin Paul Cleveland State University USA Liu Aihua Chinese Academy of Sciences China

Mahadi Muhammad University Tun Hussein Onn Malaysia Malaysia Mansor Muhammad Naufal University Malaysia Perlis Malaysia Marquez Alfredo Centro de Investigacion en Materiales Avanzados Mexico Mishra Vivekanand National Institute of Technology India Moghavvemi Mahmoud University of Malaya Malaysia Morello Rosario University Mediterranea of Reggio Calabria Italy Mulla Imtiaz Sirajuddin National Chemical Laboratory Pune India Nabok Aleksey Sheffield Hallam University UK Neshkova Milka Bulgarian Academy of Sciences Bulgaria Passaro Vittorio M N Politecnico di Bari Italy Penza Michele ENEA Italy Pereira Jose Miguel Instituto Politecnico de Setebal Portugal Pogacnik Lea University of Ljubljana Slovenia Pullini Daniele Centro Ricerche FIAT Italy Reig Candid University of Valencia Spain Restivo Maria Teresa University of Porto Portugal Rodriacuteguez Martiacutenez Angel Universidad Politeacutecnica de Cataluntildea Spain Sadana Ajit University of Mississippi USA Sadeghian Marnani Hamed TU Delft The Netherlands Sapozhnikova Ksenia D I Mendeleyev Institute for Metrology Russia Singhal Subodh Kumar National Physical Laboratory India Shah Kriyang La Trobe University Australia Shi Wendian California Institute of Technology USA Shmaliy Yuriy Guanajuato University Mexico Song Xu An Yang Normal University China Srivastava Arvind K LightField Corp USA Stefanescu Dan Mihai Romanian Measurement Society Romania Sumriddetchkajorn Sarun Nat Electr amp Comp Tech Center Thailand Sun Zhiqiang Central South University China Sysoev Victor Saratov State Technical University Russia Thirunavukkarasu I Manipal University Karnataka India Tianxing Chu Research Center for Surveying amp Mapping Beijing China Vazquez Carmen Universidad Carlos III Madrid Spain Wang Jiangping Xian Shiyou University China Xue Ning Agiltron Inc USA Yang Dongfang National Research Council Canada Yang Shuang-Hua Loughborough University UK Yaping Dan Harvard University USA Zakaria Zulkarnay University Malaysia Perlis Malaysia Zhang Weiping Shanghai Jiao Tong University China Zhang Wenming Shanghai Jiao Tong University China

Sensors amp Transducers Journal (ISSN 2306-8515) is a peer review international journal published monthly online by International Frequency Sensor Association (IFSA) Available in both print and electronic (printable pdf) formats Copyright copy 2013 by International Frequency Sensor Association

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CCoonntteennttss



Research Articles






24














25






i nner st reami ng

out er st reami ng

vel oci t y node

4

4






0 1 1 1 1( ) ( )F U U U U (1)





2 2 2

4

3p U U F

(2)





1 2U U U (3)



streaming velocity

1 2 2U U U U (4)





26



z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT


z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT




sin( )V A t (5)





6 1

1500[ ]15[ ]

2 2 2 50 10 [ ]

mc sm mf s

(6)










27




-08

-06

-04

-02

0

02

04

06

08

11 18 25 32 39 46 53 60 67 74 81 88 95

Tim es

The surface-a

vera

ged outlet

velocitym

s






0

005

01

015

0 01 02 03 04 05 06


The ave

rage outle

t ve

locitym

s





0

001

002

003

004

0 1 2 3 4 5


the average outle

t velocitym

s





28




0

0002

0004

0006

0008

001

0 002 004 006 008 01


The outle

t ave

rage

velocitym

s






0

0001

0002

0003

0004

0005

0006

0 20 40 60 80 100

The back pressurepa

The outlet ave

rage velocitym

s


5 Conclusions






29











___________________




CCoonntteennttss



Research Articles






24














25






i nner st reami ng

out er st reami ng

vel oci t y node

4

4






0 1 1 1 1( ) ( )F U U U U (1)





2 2 2

4

3p U U F

(2)





1 2U U U (3)



streaming velocity

1 2 2U U U U (4)





26



z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT


z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT




sin( )V A t (5)





6 1

1500[ ]15[ ]

2 2 2 50 10 [ ]

mc sm mf s

(6)










27




-08

-06

-04

-02

0

02

04

06

08

11 18 25 32 39 46 53 60 67 74 81 88 95

Tim es

The surface-a

vera

ged outlet

velocitym

s






0

005

01

015

0 01 02 03 04 05 06


The ave

rage outle

t ve

locitym

s





0

001

002

003

004

0 1 2 3 4 5


the average outle

t velocitym

s





28




0

0002

0004

0006

0008

001

0 002 004 006 008 01


The outle

t ave

rage

velocitym

s






0

0001

0002

0003

0004

0005

0006

0 20 40 60 80 100

The back pressurepa

The outlet ave

rage velocitym

s


5 Conclusions






29











___________________







24














25






i nner st reami ng

out er st reami ng

vel oci t y node

4

4






0 1 1 1 1( ) ( )F U U U U (1)





2 2 2

4

3p U U F

(2)





1 2U U U (3)



streaming velocity

1 2 2U U U U (4)





26



z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT


z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT




sin( )V A t (5)





6 1

1500[ ]15[ ]

2 2 2 50 10 [ ]

mc sm mf s

(6)










27




-08

-06

-04

-02

0

02

04

06

08

11 18 25 32 39 46 53 60 67 74 81 88 95

Tim es

The surface-a

vera

ged outlet

velocitym

s






0

005

01

015

0 01 02 03 04 05 06


The ave

rage outle

t ve

locitym

s





0

001

002

003

004

0 1 2 3 4 5


the average outle

t velocitym

s





28




0

0002

0004

0006

0008

001

0 002 004 006 008 01


The outle

t ave

rage

velocitym

s






0

0001

0002

0003

0004

0005

0006

0 20 40 60 80 100

The back pressurepa

The outlet ave

rage velocitym

s


5 Conclusions






29











___________________




24














25






i nner st reami ng

out er st reami ng

vel oci t y node

4

4






0 1 1 1 1( ) ( )F U U U U (1)





2 2 2

4

3p U U F

(2)





1 2U U U (3)



streaming velocity

1 2 2U U U U (4)





26



z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT


z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT




sin( )V A t (5)





6 1

1500[ ]15[ ]

2 2 2 50 10 [ ]

mc sm mf s

(6)










27




-08

-06

-04

-02

0

02

04

06

08

11 18 25 32 39 46 53 60 67 74 81 88 95

Tim es

The surface-a

vera

ged outlet

velocitym

s






0

005

01

015

0 01 02 03 04 05 06


The ave

rage outle

t ve

locitym

s





0

001

002

003

004

0 1 2 3 4 5


the average outle

t velocitym

s





28




0

0002

0004

0006

0008

001

0 002 004 006 008 01


The outle

t ave

rage

velocitym

s






0

0001

0002

0003

0004

0005

0006

0 20 40 60 80 100

The back pressurepa

The outlet ave

rage velocitym

s


5 Conclusions






29











___________________




25






i nner st reami ng

out er st reami ng

vel oci t y node

4

4






0 1 1 1 1( ) ( )F U U U U (1)





2 2 2

4

3p U U F

(2)





1 2U U U (3)



streaming velocity

1 2 2U U U U (4)





26



z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT


z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT




sin( )V A t (5)





6 1

1500[ ]15[ ]

2 2 2 50 10 [ ]

mc sm mf s

(6)










27




-08

-06

-04

-02

0

02

04

06

08

11 18 25 32 39 46 53 60 67 74 81 88 95

Tim es

The surface-a

vera

ged outlet

velocitym

s






0

005

01

015

0 01 02 03 04 05 06


The ave

rage outle

t ve

locitym

s





0

001

002

003

004

0 1 2 3 4 5


the average outle

t velocitym

s





28




0

0002

0004

0006

0008

001

0 002 004 006 008 01


The outle

t ave

rage

velocitym

s






0

0001

0002

0003

0004

0005

0006

0 20 40 60 80 100

The back pressurepa

The outlet ave

rage velocitym

s


5 Conclusions






29











___________________




26



z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT


z

xi nl et

out l et

i nl et sect i on

out l et sect i on

st reami ng chamber


PZT




sin( )V A t (5)





6 1

1500[ ]15[ ]

2 2 2 50 10 [ ]

mc sm mf s

(6)










27




-08

-06

-04

-02

0

02

04

06

08

11 18 25 32 39 46 53 60 67 74 81 88 95

Tim es

The surface-a

vera

ged outlet

velocitym

s






0

005

01

015

0 01 02 03 04 05 06


The ave

rage outle

t ve

locitym

s





0

001

002

003

004

0 1 2 3 4 5


the average outle

t velocitym

s





28




0

0002

0004

0006

0008

001

0 002 004 006 008 01


The outle

t ave

rage

velocitym

s






0

0001

0002

0003

0004

0005

0006

0 20 40 60 80 100

The back pressurepa

The outlet ave

rage velocitym

s


5 Conclusions






29











___________________




27




-08

-06

-04

-02

0

02

04

06

08

11 18 25 32 39 46 53 60 67 74 81 88 95

Tim es

The surface-a

vera

ged outlet

velocitym

s






0

005

01

015

0 01 02 03 04 05 06


The ave

rage outle

t ve

locitym

s





0

001

002

003

004

0 1 2 3 4 5


the average outle

t velocitym

s





28




0

0002

0004

0006

0008

001

0 002 004 006 008 01


The outle

t ave

rage

velocitym

s






0

0001

0002

0003

0004

0005

0006

0 20 40 60 80 100

The back pressurepa

The outlet ave

rage velocitym

s


5 Conclusions






29











___________________




28




0

0002

0004

0006

0008

001

0 002 004 006 008 01


The outle

t ave

rage

velocitym

s






0

0001

0002

0003

0004

0005

0006

0 20 40 60 80 100

The back pressurepa

The outlet ave

rage velocitym

s


5 Conclusions






29











___________________




29











___________________




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Copyright · Jamil, Mohammad, Qatar University, Qatar ... Iman Shahosseini, ... et al. developed a valveless micropump [3], in which