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2016 Microchip Technology Inc. DS00002104A-page 1 Overview In medical devices for precision controlled drug delivery, such as infusion pumps, insulin pumps or nebulizers, piezoelectric micropumps offer an attractive alternative to standard pumps. Piezoelectric micropumps are small, lightweight, low power, low cost, and accurate. This application note describes the implementation of a basic driver circuit for driving a piezoelectric micropump with flow control in an example of fluid delivery. The described system includes a control board, a high voltage driver board, and an mp6 Piezoelectric Diaphragm Micropump. Microfluidics Technology Introduction Microfluidics deals with miniature devices which can pump, process and control small volumes of fluids. It is an essential part of precision control systems for biomedical analysis and drug delivery. In the drug delivery system, a flow-controlled piezoelectric micropump can provide the actuation source to transfer the drug (liquid or gas) from the drug reservoir to the body with accuracy and reliability. Basics of Piezoelectric Micropumps A Piezoelectric micropump is a miniaturized mechanical pumping device employing a piezoelectric actuator in combination with passive check valves. When voltage is applied, a piezoelectric actuator expands or contracts, which causes the liquid or gas to be sucked into or expelled from the pump chamber. The check valves on both sides of the pump chamber govern the flow in one direction. FIGURE 1: BLOCK DIAGRAM FOR THE PIEZOELECTRIC MICROPUMP DRIVER DEMO Author: Zhang Feng Fu-Ho Lee Microchip Technology Incorporated Microcontroller PIC16F1719 OLED Display Push Buttons LiPo Battery Charge Controller MCP73834 I/Os LiPo Rechargeable Battery 3.7V Step Up DC/DC Controller HV9150 Low Voltage Serial to High Voltage Parallel Converter HV513 Charge Pump MCP1252 High Voltage Driver Board Piezoƚƌ Micropump I/Os DAC Boost Converter I2C Liquid Flow Meter ADC I/O LDO MCP1711 OPA1 NCO HV_EN HV_VREF HV_LE HV_DIN HV_CLK P1+ P2+ Thermistor IC MCP9700 UNI/O® Serial EEPROM 11AA010 5V 3.3V 3.7V Control Board 5V 3.7V Clamping Circuit HVOUT2 USB HVOUT1 P2- P1- GND GND AN2104 Piezoelectric Micropump Driver Reference Design

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Page 1: Piezo Micropump Driver Reference Design Application …ww1.microchip.com/downloads/en/AppNotes/00002104A.pdf · PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN DS00002104A-page 2

AN2104Piezoelectric Micropump Driver Reference Design

Overview

In medical devices for precision controlled drugdelivery, such as infusion pumps, insulin pumps ornebulizers, piezoelectric micropumps offer anattractive alternative to standard pumps. Piezoelectricmicropumps are small, lightweight, low power, lowcost, and accurate.

This application note describes the implementation of abasic driver circuit for driving a piezoelectricmicropump with flow control in an example of fluiddelivery. The described system includes a controlboard, a high voltage driver board, and an mp6Piezoelectric Diaphragm Micropump.

Microfluidics Technology Introduction

Microfluidics deals with miniature devices which canpump, process and control small volumes of fluids. It isan essential part of precision control systems forbiomedical analysis and drug delivery. In the drugdelivery system, a flow-controlled piezoelectricmicropump can provide the actuation source to transferthe drug (liquid or gas) from the drug reservoir to thebody with accuracy and reliability.

Basics of Piezoelectric Micropumps

A Piezoelectric micropump is a miniaturizedmechanical pumping device employing a piezoelectricactuator in combination with passive check valves.When voltage is applied, a piezoelectric actuatorexpands or contracts, which causes the liquid or gas tobe sucked into or expelled from the pump chamber.The check valves on both sides of the pump chambergovern the flow in one direction.

FIGURE 1: BLOCK DIAGRAM FOR THE PIEZOELECTRIC MICROPUMP DRIVER DEMO

Author: Zhang FengFu-Ho LeeMicrochip Technology Incorporated

Microcontroller PIC16F1719

OLED Display

Push Buttons

LiPo Battery Charge Controller

MCP73834

I/Os

LiPo Rechargeable Battery 3.7V

Step Up DC/DC Controller HV9150

Low Voltage Serial to High Voltage Parallel

Converter HV513

Charge Pump MCP1252

High Voltage Driver Board

Piezo Micropump

I/Os

DAC Boost Converter

I2C Liquid Flow Meter

ADC

I/O

LDO MCP1711

OPA1

NCO

HV_EN

HV_VREF

HV_LE

HV_DIN

HV_CLK

P1+ P2+

Thermistor IC MCP9700

UNI/O® Serial EEPROM 11AA010

5V

3.3V

3.7V

Control Board

5V

3.7V

Clamping Circuit

HVOU

T2

USB

HVOU

T1

P2-

P1-

GND

GND

2016 Microchip Technology Inc. DS00002104A-page 1

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

One of the challenges in designing a piezoelectricmicropump driver is the requirement for high supplyvoltage to be applied to the piezoelectric actuator. Thefollowing sections demonstrate how to use the CoreIndependent Peripherals (CIPs) and the intelligentanalog peripherals featured in Microchip's 8-bitmicrocontrollers, along with Microchip's high voltagedevice family to generate reliable high voltage signalsat a specific frequency for driving a piezoelectricdiaphragm micropump.

PIEZOELECTRIC MICROPUMP DRIVER DEMO SYSTEM

Microchip's piezoelectric micropump demo (seeFigure 12) is comprised of the following components:

• Piezoelectric Micropump

• Control Board

• High Voltage Driver Board

The control board provides the power, the adjustablevoltage and frequency control signals to the highvoltage driver board. The high voltage driver boarddelivers the boosted signals in specific waveform onmultiple output channels with adjustable peak-to-peakvoltage (VPP) and frequency to the piezoelectricmicropump. The demo can supply a maximum of 250V of VPP and a maximum frequency of 300 Hz. Thisadjustability allows the basic driver to drive differenttypes of piezoelectric micropumps on the market. TheBartels mp6 Piezoelectric Diaphragm Micropump wasselected for use in this particular demo.

mp6 Piezoelectric Micropump

The mp6 Piezoelectric Diaphragm Micropump isdesigned and manufactured by Bartels MikrotechnikGmbH (www.bartels-mikrotechnik.de), and is suppliedby Servoflo Corporation (www.servoflo.com) in NorthAmerica.

The Bartels mp6 micropump operates on the basicprinciple of piezoelectric micropump as introduced inthe previous section. According to its data sheet, themp6 combines two piezoelectric actuators, each withtwo passive check valves, inside a single housing.Hence, the mp6 has an increased priming capabilityand higher bubble tolerance, and can handle greaterback pressure. In the entire pump, thepolyphenylsulfone (PPSU) is the only material whichcontacts the medium.

Control Board

The control board provides the power, the adjustablevoltage, and frequency control signals to the highvoltage driver board. The demo system is powered bya 3.7V 700mAh Li-Polymer rechargeable battery. TheMCP73834 Li-Polymer charge controller manages thebattery charging via USB. Through the MCP1711 LDOand the MCP1252 charge pump, the battery supplies3.3V, 3.7V and 5V voltage sources to different portionsof circuitry in the demo. An MCP9700 Linear ActiveThermistor IC is used for general purpose temperaturemeasurement. A 11AA010 1K UNI/O® serial EEPROMis used for data storage. An OLED displays the demo'sinformation, such as voltage and frequency settings forthe pump. Onboard push buttons are used to changethe pump's settings.

In the heart of the control board is a PIC16F1719 8-bitmicrocontroller. The PIC16F1719 monitors the pushbuttons' status, as well as the MCP73834's status,utilizing the Interrupt-On-Change (IOC) interfaces. ThePIC16F1719 reads the temperature data sent from theMCP9700 utilizing the Analog-to-Digital Converter(ADC) module. The PIC16F1719 can store data, likethe pump's settings, to the 11AA010 using a singleGeneral Purpose I/O (GPIO) pin. The PIC16F1719 cancommunicate with a flow meter via an I2C interface forclosed-loop flow control. Figure 5 shows the flowchartof the firmware.

CONTROL SIGNALS SENT TO THE HIGH VOLTAGE BOARD

The PIC16F1719 sends five critical control signals tothe high voltage driver board:

• HV_EN

• HV_VREF

• HV_DIN

• HV_CLK

• HV_LE

These signals control the VPP and the frequency of thefinal high voltage driving signals to the mp6micropump.

DS00002104A-page 2 2016 Microchip Technology Inc.

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

HV_EN

The HV_EN signal (generated from a GPIO port) isused to enable or disable the HV9150 Step-UpController. This HV9150 is a high output voltagehysteretic mode step-up DC/DC controller that islocated on the high voltage driver board.

HV_VREF

The HV_VREF is an adjustable voltage referencesignal generated by the PIC16F1719's internal Digital-to-Analog Converter (DAC) module. Due to the limitedcurrent drive capability of the DAC, one of thePIC16F1719's internal Operational Amplifier (OPA)modules is used as a buffer on the DAC's voltagereference output. The HV_VREF signal is connected tothe HV9150's external reference voltage input(EXT_REF) port to control its boost converter outputlevel. This converter output level controls the VPP levelof the final mp6 driving signal.

When the user selects the voltage adjustment menufrom the OLED, the VPP of the mp6 driving signals canbe linearly increased or decreased by pressing thepush buttons to change the DAC voltage referenceoutput value. This allows the user to change the pump'sspeed while it is running.

HV_DIN

The HV_DIN signal, which is generated from a GPIOport carrying up to 8 bits of data, is connected to theserial data input (DIN) port of the HV513 ParallelConverter. The HV513 is an 8-channel serial-to-parallelconverter with high voltage push-pull outputs and islocated on the high voltage driver board. The HV513converts the serial data received on the HV_DIN toparallel data and then outputs them to correspondinghigh voltage push-pull output channels. Therefore, theHV_DIN defines the final output data used to turn on, oroff, up to 8 piezoelectric actuators simultaneously. Inthis demo only two high voltage output channels(HVOUT1 & HVOUT2) are needed and enabled,because there are two piezoelectric actuators in themp6 micropump.

HV_CLK

The HV_CLK signal is generated from a GPIO port thatis connected to the HV513's clock (CLK) pin. TheHV_CLK provides the input clock signal to the HV513for its 8-bit data shift register. The corresponding 8 bitsof data received on the HV_DIN will be shifted throughthe shift register on the rising edge of the input clock.

HV_LE

The HV_LE signal is connected to the HV513's latchenable (LE) pin. When the HV_LE signal goes high, thedata will transfer from the shift register to the latch andappear on the HV513's 8 high voltage output channels.The data in the latch is stored when the HV_LE is low.Therefore, the HV_LE is used to define the frequencyof the final high voltage driving signals. The HV_LEsignal is generated by the PIC16F1719's NumericallyControlled Oscillator (NCO) module. The NCO outputsa pulse as the latch enable signal at a user-definedfrequency. With a 20-bit increment function, the NCOcan generate pulses with a frequency that is linearlyadjustable with fine resolution. When the user selectsthe frequency adjustment menu from the OLED, thefrequency of the mp6 driving signals can be linearlyincreased or decreased by pressing the push buttonsto change the NCO output frequency. This allows theuser to change the pump's speed while it is running.

In Operation

To turn on the micropump, the PIC16F1719microcontroller first initializes the DAC & OPA to setLE_VREF, and then enables the HV9150 to generatethe high output voltage. Next, the PIC16F1719 enablesthe NCO's interrupt function. After the first NCOinterrupt occurs, the first NCO pulse appearing on theHV_LE will clear the HV513 outputs with all 0s (zeros).Then the PIC16F1719 sends out a data 0x01 on theHV_DIN, along with the 4 bits of clock signal on theHV_CLK. The data 0x01 will be clocked into theHV513's shift register serially. When the next NCOinterrupt takes place, the second NCO pulse on theHV_LE will latch the data 0x01, received by theHV513's shift register, onto the HV513's parallel outputchannels. Output channel-1 (HVOUT1) will then gohigh to the preset high voltage level and the rest of theoutput channels will remain 0 (zero). The HVOUT1 isfed to a positive biased clamp circuit formed by thecomponents C17, D2, D4, and an RC filter formed bythe R15 and the mp6 micropump. The output of the RCfilter is connected to the positive terminal (P1+) of thepiezoelectric actuator P1 in the mp6. The negativeterminal (P1-) of P1 is grounded. During this cycle, P1is engaged and P1+ will stay high for the period of theNCO interrupt.

In the next cycle, the PIC16F1719 sends out a data0x02 on the HV_DIN and repeats the rest of theoperation for the HV_CLK and the HV_LE (seeFigure 2). The output channel-2 (HVOUT2) will then gohigh to the preset high voltage level and the rest of theoutput channels will remain 0. The HVOUT2 is fed to apositive biased clamp circuit formed by thecomponents C18, D3, D5 and an RC filter formed byR16 and the mp6. The output of the RC filter isconnected to the positive terminal (P2+) of thepiezoelectric actuator P2 in the mp6 micropump. Thenegative terminal (P2-) of P2 is grounded.

2016 Microchip Technology Inc. DS00002104A-page 3

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

During this cycle, P2 is engaged and P2+ will stay highfor the period of the NCO interrupt. By repeating theabove operations, the P1 and P2 piezoelectricactuators are alternatively engaged at the NCO'sfrequency and the mp6 micropump is turned on.

The high voltage driving signals presented on theHVOUT1 & HVOUT2 are square waves from 0V topreset VPP. The positive biased clamp circuit placed oneach HVOUT channel is designed to pull down the high

voltage driving signal to -50V (see Figure 3) asrequired by the mp6's specification. The RC filtersplaced at the output of the clamp circuits round theedges of the square waves (see Figure 4). With theedges rounded off, the high voltage driving signals willdrive the piezoelectric actuators more gently thansquare waves would and thus create less audiblenoise.

FIGURE 2: SIGNAL TIMING WAVEFORM FOR HV_DIN, HV_CLK, HV_LE

HV_CLK

HV_DIN(0010)

HV_LE

DS00002104A-page 4 2016 Microchip Technology Inc.

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

FIGURE 3: SQUARE WAVE OF THE DRIVING SIGNALS

FIGURE 4: ROUNDED SQUARE WAVE OF THE DRIVING SIGNALS

c_HV1

c_HV2

P2+

P1+

2016 Microchip Technology Inc. DS00002104A-page 5

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

FIGURE 5: FIRMWARE PROCESS FLOWCHART

DS00002104A-page 6 2016 Microchip Technology Inc.

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

High Voltage Driver Board

The high voltage driver board delivers the boostedsignals in specific waveforms on dual output channels,with adjustable peak-to-peak voltage and frequency, tothe piezoelectric micropump. Both pulse frequency andthe peak-to-peak voltage can be controlled by thesoftware.

The high voltage driver board (see Figure 6) consists oftwo functional blocks:

• DC/DC Boost Converter

• High Voltage Push-Pull Driver

The DC/DC boost converter converts the low supplyvoltage from the battery to 250V high supply voltage.This high supply voltage is used to power the driver ICto actuate the piezoelectric micropump. The driver ICprovides a high voltage unipolar push-pull output and aseries of pulses are generated from the controller IC todrive the piezoelectric element.

DC/DC BOOST CONVERTER

Microchip's HV9150 boost controller IC is used toconvert the 3.7 volt battery supply to a 250V output topower the driver IC (see Figure 7). The HV9150 boostcontroller is a simple hysteretic converter whichoperates in conjunction with an external powerMOSFET. It has a built-in 3X charge pump converterand its output powers the internal gate driver to drivethe external power MOSFET. The charge pumpconverter multiplies the low input supply voltage byroughly three times with a two stage charge pumpcircuit. The charge pump output voltage is high enoughto drive the gate of the external MOSFET. Thisconverter has a fixed duty cycle and a fixed switchingfrequency, which improve the system stability. Thetrade-off is larger ripple at the output voltage. Since therequired power to drive the piezoelectric micropump isrelatively small, a few microfarads of decouplingcapacitor at the high voltage output can reduce theoutput ripple to an acceptable level.

FIGURE 6: BLOCK DIAGRAM OF HIGH VOLTAGE DRIVER BOARD

2016 Microchip Technology Inc. DS00002104A-page 7

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

The gate driver sends the controlled pulses to theexternal power FET in a classic boost convertertopology with an inductor, a high voltage rectifier diode,and a storage capacitor. An intermediate voltage iscreated at about half of the target 250V. There is a goodselection of high voltage MOSFETs at this voltage leveland many off-the-shelf alternatives can be easily found.Subsequently, this intermediate voltage is furtherenhanced to reach 250V with an external charge pumpdoubler circuit. This charge pump circuit is formed withtwo additional rectifier diodes and two storagecapacitors (see Figure 8). The 250V high voltageoutput is monitored by the controller via the 7.5Mfeedback resistor network. The high feedback resistorvalue minimizes the idle power consumption for lowpower application.

The HV9150 Step-Up Controller has an option to usean external reference voltage for a high-precisionoutput voltage. The user can program the outputvoltage of the DAC in the PIC® microcontroller, andconnect the DAC output to the external reference pin ofthe HV9150 so that the high voltage output can beadjusted in the software. This will allow the same circuitto accommodate a piezoelectric micropump actuatorthat might have different characteristics andrequirements.

An enable function is also available to enable/disablethe boost controller IC for power sensitive applications.The boost controller can be turned off by setting the ENpin to 0 (zero).

FIGURE 7: BLOCK DIAGRAM OF THE HV9150 BOOST CONTROLLER

DS00002104A-page 8 2016 Microchip Technology Inc.

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

HIGH VOLTAGE PUSH-PULL DRIVER

The HV513 is a low voltage serial to high voltageparallel converter with a push-pull high voltage outputstructure. This device has been designed to drive smallcapacitive loads such as piezoelectric actuators. TheHV513 consists of an 8-bit shift register, 8 latches, andcontrol logic to perform the polar select and blanking ofthe outputs (see Figure 9). Data is shifted through the

shift register on the low to high transition of the clock.In this piezoelectric micropump application the blank,polarity, high impedance, and short circuit pins are notused. Only one data signal and two control signals,Data In (DIN), Latch Enable (LE) and Clock (CLK), areneeded to send the data from the microcontroller to thedriver IC.

FIGURE 8: TOPOLOGY OF TWO STAGE BOOST CONVERTER (EXTERNAL CIRCUIT)

FIGURE 9: FUNCTIONAL BLOCK DIAGRAM OF HV513 HIGH VOLTAGE DRIVER

2016 Microchip Technology Inc. DS00002104A-page 9

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

This driver IC requires a 5V supply for its 5V logic inputsignal, and a high voltage supply ranging from 50V to250V for its high voltage output driver. The input serial-to-parallel shift register receives the data through theData In and Clock pins. After the last data bit has beensuccessfully transmitted to the shift register, the usermust insert a single pulse at the Latch Enable pin toload the new data to take affect at the high voltageoutput (see Figure 10). Since only two channels amongthe available eight channels are used in thisapplication, the HV513 driver can be treated andoperated as a 2-channel driver. The HV513 shiftregister accepts serial data up to 8MHz and has plentyof room for this piezoelectric micropump application(that requires only a hundred Hertz of output

switching). This driver can be seen as a simple highvoltage level translator and all output transitions arecontrolled by the microcontroller. Hence, all outputpulse timing and transitions must be maintained andtracked by the microcontroller.

With no load, the HV513's high voltage output canswing between 0V and 250V at tens of kHz. When theoutput is loaded with the piezoelectric actuator, theoutput switching frequency will be limited by the rise/fall time of the output pulses and the output power ofthe DC/DC boost converter. The current design isoptimized to work with an 8.2nF load in 100Hz ofswitching frequency.

FIGURE 10: ROUNDED SQUARE WAVE OF THE DRIVING SIGNALS

DS00002104A-page 10 2016 Microchip Technology Inc.

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

Demo Application Example

Figure 13 shows an application example for testing andevaluation of the piezoelectric micropump driver demoboard. An infusion bag and a medication syringe areconnected to the mp6 micropump via a 3-waystopcock. The mp6 micropump is able to pump theliquid out of either container in a controlled manner.The flow rate can be manually adjusted by using thepush buttons on the control board to change the

voltage or frequency setting of the driving signal. ASensirion SLS-1500 liquid flow meter and associatedsoftware GUI are used to measure the flow rate. Whilepumping the test liquid (water) out of the infusion bagthe flow rate is measured at around 7 ml/min (seeFigure 11) with the driving signal set to 250VPP and100Hz.

FIGURE 11: FLOW RATE MEASURED BY THE SENSIRION SLS-1500 LIQUID FLOW METER

2016 Microchip Technology Inc. DS00002104A-page 11

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

APPENDIX A: PIEZOELECTRIC MICROPUMP DEMO IMAGE

Figure 12 shows the piezoelectric micropump demo control board and the high voltage driver board with the micropump.

FIGURE 12: PIEZOELECTRIC MICROPUMP DEMO BOARD PICTURE

mp6 Micropump

High VoltageDriver Board

Control Board

DS00002104A-page 12 2016 Microchip Technology Inc.

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

APPENDIX B: PIEZOELECTRIC MICROPUMP DEMO APPLICATION EXAMPLE

Figure 13 shows the piezoelectric micropump demo application example with infusion bag, medication syringe, and flowsensor connected to the demo board.

FIGURE 13: PIEZOELECTRIC MICROPUMP DEMO APPLICATION EXAMPLE

2016 Microchip Technology Inc. DS00002104A-page 13

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

APPENDIX C: PIEZOELECTRIC MICROPUMP DEMO APPLICATION EXAMPLE

Figure 14 shows the schematic of the piezoelectric micropump demo high voltage driver board.

FIGURE 14: PIEZOELECTRIC MICROPUMP DEMO HIGH VOLTAGE DRIVER BOARD SCHEMATIC

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0V0V

5.0V

10uF25V0603

C112

0V

DS00002104A-page 14 2016 Microchip Technology Inc.

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

Figure 15 shows the schematic of the piezoelectric micropump demo control board.

FIGURE 15: PIEZOELECTRIC MICROPUMP DEMO CONTROL BOARD SCHEMATIC

Microcontroller

OLE

D Display

VCOMH

27

D6

24

D3

21

D0

18

D/C

#15

BS2

12

VDD

9

VBAT

6

C2N

3

D7

25

IREF

26

VCC

28

VLS

S29

D2

20

D4

22

D1

19

CS#

13

RES#

14

R/W

#16

E/R

D#

17

C2P

2

C1P

4

C1N

5

N.C

.7

VSS

8

BS0

10

D5

23

BS1

11

N.C._(G

ND)

30

N.C._(G

ND)

1

VCOMH

D6

D3

D0

D/C

#

BS2

VDD

VBAT

C2N

D7

IREF

VCC

VLS

S

D2

D4

D1

CS#

RES#

R/W

#//

E/R

D#

C2P

C1P

C1N

N.C

.VSS

BS0

D5

BS1

N.C

._(GND)

N.C

._(GND)

OSC-2864H

SWEG

01

OLED

1

OLE

D_R

ES

OLE

D_C

S

2.2uFC6

2.2uFC5

GND

GND

GND

GND

GND

GND

GND

GND

+3.3V

+3.3V

GND

Pow

er Circuit

User I/O

OLE

D_D

C

MCLR

1uFC4

1uFC3

1uFC1

390kR1

HV_V

REF

0.1uFC11

+3.3V_M

CU

ICSPDAT

ICSPCLK

1uFC2

GND

GND

GND

HV_E

NHV_C

LKHV_LE

HV_D

IN

SS14

D1

TE7

VBAT

9VDD

1

VSS

5

THERM

8STA

T13

STA

T24

PROG

6

VBAT

10

VDD

2

MCP73834-FCI/U

N

U2

HV_V

REF

HV_E

N

HV_C

LK

HV_LE

HV_D

IN

GND+3.7V

ID4

VBUS

1

GND

5

D-

2

D+

3

ID

VBUS

GND D-

D+

V0

USB MINI-B Female

J1

CHARGE_S

TAT1

CHARGE_S

TAT2

GND

GND

VBA

T

GND

CHARGE_TE

1k06031% R4

GND

-t08055% R510k

GND

GND

GND

0.1uFC15

10kR9

470R

R13

S3

+3.3VVBA

T

4.7uF16V0805

C7

GND

4.7uF16V0805

C8

GND

2.2kR2

2.2kR3

BUTTO

N3

ICSPDAT

ICSPCLK

CHARGE_S

TAT1

CHARGE_S

TAT2

CHARGE_TE

BUTTO

N1

BUTTO

N2

BUTTO

N3

MCLR

FLOW_S

DA

FLOW_S

CL

TEMP_V

OUT

RX

GND

GND

0.1uFC13

10kR7

470R

R11

S1

BUTTO

N1

GND

GND

0.1uFC14

10kR8

470R

R12

S2

BUTTO

N2

GND

GND

0.1uFC16

10kR10

470R

R14

S4MCLR

MCLR

12345678

J5

HVboard_Interface

3.09MR6

DMG6601LVT-7U5A

DMG6601LVT-7

U5B

GND

+3.7V

GND

3VDD

1

VOUT

2

MCP9700T-E/TT

U4

0.1uFC12

GND

GND

TEMP_V

OUT

+3.3V

3.3V_E

N

3.3V_E

N

5V_E

N

+5.0V

+5.0V

5V_E

N

OLE

D_D

7OLE

D_D

6OLE

D_D

5OLE

D_D

4OLE

D_D

3OLE

D_D

2OLE

D_D

1OLE

D_D

0OLE

D_E

RD

OLE

D_R

W

+3.3V

0.1uFC21

OLE

D_R

ES

OLE

D_C

S

OLE

D_D

C

OLE

D_E

RD

OLE

D_R

WTX

OLE

D_D

7OLE

D_D

6OLE

D_D

5OLE

D_D

4OLE

D_D

3OLE

D_D

2OLE

D_D

1OLE

D_D

0

TX

+3.3VGND

FLOW_S

DA

FLOW_S

CL

RC7/P

SMC2B

/DT/R

X1

RD4/P

SMC3F

2

RD5/P

SMC3E

3

RD6/C

3OUT/P

SMC3D

4

RD7/C

4OUT/P

SMC3C

5

VSS

6

VDD

7

RB0/IN

T/AN12/C

2IN+/P

SMC1IN

/PSMC2IN

/PSMC3IN

/PSMCIN

/CCP1

8

VDD

28

RE2/A

N7/P

SMC3A

27RE1/A

N6/P

SMC3B

26RE0/A

N5/P

SMC4B

/CCP3

25

RA5/A

N4/C

2OUT/O

PA1IN

-/DAC2O

UT/S

S/

24RA4/C

1OUT/O

PA1IN

+/T0CKI

23RA3/A

N3/ V

ref+/DAC1V

ref+/DAC2V

ref+/DAC3V

ref+/DAC4V

ref+/ C1IN

1+22

RA2/A

N2/D

AC1V

ref-/Vref-/C

1IN0+/C

2IN0+/C

3IN0+/C

4IN0+/D

AC1O

UT1

21RA1/A

N1/C

1IN1-/C

2IN1-/C

3IN1-/C

4IN1-/O

PA1O

UT

20RA0/A

N0/S

S/C

1IN0-/C

2IN0-/C

3IN0-/C

4IN0-

19

RE3/V

PP/M

CLR

18

VSS

29

RA7/P

SMC1C

LK/PSMC2C

LK/PSMC3C

LK/PSMC4C

LK/O

SC1/C

LKIN

30RA6/C

2OUT/V

cap/CLK

OUT/O

SC2

31

RC0/T1O

SO/T1C

KI/P

SMC1A

32

NC

33

NC

34

RC1/T1O

SI/P

SMC1B

/CCP2

35

RC2/P

SMC1C

/CCP1

36

RC3/P

SMC1D

/SCL/S

CK

37

RD0/O

PA3IN

+38

RD1/A

21/C1IN

4-/C2IN

4-/C3IN

4-/C4IN

4-/OPA3O

UT

39

RD2/O

PA3IN

-/DAC4O

UT1

40

RB1/A

N10/C

1IN3-/C

2IN3-/C

3IN3-/C

4IN3-/O

PA2O

UT

9

RB2/A

N8/O

PA2IN

-/DAC3O

UT1/C

LKR

10

RB3/A

N9/C

1IN2-/C

2IN2-/C

3IN2-/O

PA2IN

+/CCP2

11

NC

12

RB4/A

N11/C

3IN1+/S

S14

RB5/A

N13/C

4IN2-/T1G

/CCP3/S

DO

15

RB6/C

4IN1+/TX

/CK/SDA/SDI/IC

SPCLK

16

RB7/D

AC1O

UT2/D

AC2O

UT2-/D

AC3O

UT2-/D

AC4O

UT2/R

X/D

T/SCL/S

CK/IC

SPDAT

17

NC

13

RD3/P

SMC4A

41

RC4/P

SMC1E

/SDI/S

DA

42

RC5/P

SMC1F/S

DO

43

RC6/P

SMC2A

/TX/C

K44

U1

PIC16F1719-I/PTGND

GND

123456

J3

ICSP

123456

J4

COMM

VCC

2

VSS3 SCIO

1VCC

VSSSCIO

SSSS

11AA010T-I/TT

U8

20kR17

0.1uFC22

+3.3V

GND

VIN

1

SHDN

3

GND

2NC

4

VOUT

5U3

MCP1711T-33I/O

T

GND

GND

GND

+3.3V_M

CUVBA

TVIN

1

SHDN

3

GND

2NC

4

VOUT

5U6

MCP1711T-33I/O

T

PGOOD

1

VOUT

2

VIN

3

GND

4C-

5

C+

6

SHDN

7

SELE

CT

8PGOOD

VOUT

VIN

GND

C-

C+

SHDN

SELE

CT

MCP1252-33X

50I/MS

U7

100k

R18

VBA

T

GND

GND

+3.3V_M

CU+3.3V

_MCU

+3.3V_M

CU+3.3V

_MCU

+3.3V_M

CU

3.7V_E

N

3.7V_E

N

SCIO

RX

SCIO

1uF25V0805

C25

1uF25V0805

C9

1uF25V0805

C10

1uF25V0805

C19

1uF25V0805

C20

20k

R19

20k

R20

20k

R21

132

MMBT2222

Q1

132

MMBT2222

Q2

132

MMBT2222

Q3

DIN

+3.3V_M

CU

DIN

LECLK

LECLK

+3.3V_M

CU

+3.3V_M

CU

SLIDE SPD

T

S5

10uF10V0805

C23

10uF10V0805

C24

11 2

J2Battery

+3.3V_M

CU

Components are not found in the A

ltium library:

U1 should be PIC16F1719-I/PT 44L TQ

FP.U3 &

U6 should be M

CP1711T-33I/OT SO

T-23-5.R5 should be 10K

NTC 0805, B

C2733CT-N

D.

2016 Microchip Technology Inc. DS00002104A-page 15

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

APPENDIX D: LAYOUTS

Figure 16 shows the top side and the bottom side layouts of the piezoelectric micropump demo's control board.

FIGURE 16: PIEZOELECTRIC MICROPUMP CONTROL BOARD TOP AND BOTTOM LAYOUTS

Top Sides Bottom Sides

DS00002104A-page 16 2016 Microchip Technology Inc.

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

Figure 17 shows the top & bottom side layouts of the piezoelectric micropump demo high voltage driver board.

FIGURE 17: PIEZOELECTRIC MICROPUMP HIGH VOLTAGE DRIVER BOARD BOTTOM LAYOUTS

Top Sides Bottom Side

2016 Microchip Technology Inc. DS00002104A-page 17

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

APPENDIX E: BILL OF MATERIALS

Table 1 shows the bill of materials (BOM) of the piezoelectric micropump demo's control board.

TABLE 1: PIEZOELECTRIC MICROPUMP CONTROL BOARD BOM

Designator Value Description SupplierSupplier Part

NumberQuan.

C1, C2, C3, C4 1 µF CAP CER 1UF 16V X7R 0603 Digi-Key® 587-1241-1-ND 4

C5, C6 2.2 µF CAP CER 2.2UF 16V X5R 0603 Digi-Key 445-5157-1-ND 2

C7, C8 4.7 µF CAP CER 4.7UF 16V Y5V 0805 Digi-Key PCC2232TR-ND 2

C9, C10 1 µF CAP CER 1UF 25V X7R 0805 Digi-Key 478-6357-2-ND 2

C11, C12, C13, C14, C15, C16, C21, C22

0.1 µF CAP CER 0.1UF 16V X7R 0603 Digi-Key 478-1239-1-ND 8

C19, C20, C25 1 µF CAP CER 1UF 25V X7R 0805 Digi-Key 478-6357-2-ND 3

C23, C24 10 µF CAP CER 10UF 10V X7R 0805 Digi-Key 445-6857-1-ND 2

D1 SS14 DIODE SCHOTTKY 40V 1A SMA Digi-Key SS14CT-ND 1

J1 UX60-MB-5STConnector Receptacle USB - mini B 2.0 5 Position SMD RA

Digi-Key H2959CT-ND 1

J2S2B-PH-SM4-

TB(LF)(SN)CONN HEADER PH SIDE 2POS 2MM SMD Digi-Key 455-1749-1-ND 1

J3, J4 HDR-2.54 Male 1x6 CONN HEADER 6POS .100 STR 30AU Digi-Key 609-3272-ND 2

J5 HDR-2.54 Male 1x8 CONN HEADER .100 SINGL R/A 8POS Digi-Key S1111E-08-ND 1

OLED1 OSC-2864HSWEG01 OLED Display 128x64 3VOSD Dis-plays

OSC-2864HS-WEG01

1

Q1, Q2, Q3 MMBT2222A TRANS NPN 40V 0.6A SOT23 Digi-KeyMMBT2222ATPM-SCT-ND

3

R1 390k RES SMD 390K OHM 1% 1/10W 0603 Digi-Key P390KHCT-ND 1

R2, R3 2.2k RES SMD 2.2K OHM 1% 1/10W 0603 Digi-Key P2.20KHCT-ND 2

R4 1k RES SMD 1K OHM 1% 1/10W 0603 Digi-Key P1.00KHCT-ND 1

R5 10k Thermistor NTC 10K OHM SMD 0805 Digi-Key BC2733CT-ND 1

R6 3.09M RES SMD 3.09M OHM 1% 1/10W 0603 Digi-Key 541-3.09MHCT-ND 1

R7, R8, R9, R10 10k RES SMD 10K OHM 1% 1/10W 0603 Digi-Key P10.0KHCT-ND 4

R11, R12, R13, R14

470R RES SMD 470 OHM 1% 1/10W 0603 Digi-Key 311-470HRCT-ND 4

R17, R19, R20, R21

20k RES SMD 20K OHM 1% 1/10W 0603 Digi-Key P20.0KHCT-ND 4

R18 100k RES SMD 100K OHM 1% 1/8W 0603 Digi-KeyMCT0603-100K-CFTR-ND

1

S1, S2, S3, S4 147873-1Pushbutton Switches SW TACT SMT J-LEAD 5.0MM

Mouser 506-147873-1 4

S5 EG1271 SWITCH SLIDE SPDT 300MA 30V Digi-Key EG1918-ND 1

U1 PIC16F1719Cost Effective 8-Bit Intelligent Analog Flash MCU 44L TQFP

Microchip PIC16F1719-I/PT 1

U2 MCP73834Stand-Alone Linear Li-Ion / Li-Polymer Charge Management Controller 10L MSOP

Microchip MCP73834-FCI/UN 1

U3, U6 MCP1711 LDO Regulator 3.3V SOT23-5 MicrochipMCP1711T-33I/OTCT

2

U4 MCP9700 Linear Active Thermistor IC SOT23-3 Microchip MCP9700T-E/TT 1

U5 DMG6601LVT-7 MOSFET N/P-CH 30V 26TSOT Digi-KeyDMG6601LVT-7DICT-ND

1

U7 MCP1252Inductorless, Positive-Regulated, Low-Noise Charge Pump 5.0V 8L MSOP

MicrochipMCP1252-33X50I/MS

1

U8 11AA010 1K UNI/O® Serial EEPROM SOT23-3 Microchip 11AA010T-I/TTCT 1

DS00002104A-page 18 2016 Microchip Technology Inc.

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PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

Table 2 shows the BOM of the piezoelectric micropump demo's high voltage driver board.

TABLE 2: PIEZOELECTRIC MICROPUMP HIGH VOLTAGE DRIVER BOARD BOM

Designator Value Description SupplierSupplier Part

NumberQuan.

C17, C18 0.22 µF CAP CER 0.22UF 100V X7R 0805 Digi-Key 399-6946-1-ND 2

C101, C102 0.22 µF CAP CER 0.22UF 16V X7R 0603 Digi-Key 445-1318-1-ND 2

C103, C108 0.01 µF CAP CER 10000PF 250V X7R 0805 Digi-Key 445-2280-1-ND 2

C104, C112 10 µF CAP CER 10UF 25V X5R 0603 Digi-Key 490-7202-1-ND 2

C105, C106, C109, C111

1 µF CAP CER 1UF 16V X7R 0603 Digi-Key 587-1241-1-ND 4

C107 0.47 µF CAP CER 0.47UF 250V X7R 1812 Digi-Key 490-3549-6-ND 1

C110 82 pF CAP CER 82PF 50V NP0 0603 Digi-Key 490-1425-1-ND 1

D2, D3 BAS521 DIODE GEN PURP 300V 250MA SOD523 Digi-Key 568-6009-1-ND 2

D4, D5 BZX384-B47 DIODE ZENER 47V 300MW SOD323 Digi-Key 568-3830-1-ND 2

D101, D102, D103

CMAD4448 TR DIODE GEN PURP 120V 250MA SOD923 Digi-Key CMAD4448 CT-ND 3

D104 DZ2705100L DIODE ZENER 5.1V 120MW SSSMINI2 Digi-Key DZ2705100LTR-ND 1

J7, J8HDR-2.54

Female 1x4Connector Receptacle 4 Position 0.100" (2.54mm) Gold TH RA

Digi-Key SAM1225-04-ND 2

J9HDR-2.54

Female 1x8Connector Header 8 Position 0.100" (2.54mm) Gold TH RA

Digi-Key S5483-ND 1

J101 0039532044 CONN FFC FPC TOP 4POS 1.25MM R/A Digi-Key WM2850-ND 1

L101 6.8 µHInductor-6.8uH Wurth WE LHMI SMD Low Profile High Current Molded Inductor

Digi-Key 732-3335-1-ND 1

M101 BSZ900N15NS3 G MOSFET N-CH 150V 13A TDSON-8 Digi-KeyBSZ900N15NS3 GTR-ND

1

R15, R16 100k RES SMD 100K OHM 1% 1/4W 1206 Digi-Key P100KFCT-ND 2

R101 37.4k RES SMD 37.4K OHM 1% 1/10W 0603 Digi-Key P37.4KHTR-ND 1

R102 7.5 M RES SMD 7.5M OHM 1% 1/4W 1206 Digi-Key RHM 7.5M AICT-ND 1

R103, R104, R105

100k RES SMD 100K OHM 1% 1/8W 0603 Digi-KeyMCT0603-100K-CFTR-ND

3

R106 61.9k RES SMD 61.9K OHM 1% 1/10W 0603 Digi-Key P61.9KHCT-ND 1

R107, R108, R109

2k RES SMD 2K OHM 1% 1/10W 0603 Digi-Key P2.00KHTR-ND 3

R110, R111 10k RES SMD 10K OHM 1% 1/16W 0603 Digi-Key A102203CT-ND 2

R112, R113, R114

100k RES SMD 100K OHM 1% 1/8W 0603 Digi-KeyMCT0603-100K-CFTR-ND

3

U101 HV9150High Voltage Output Hysteretic Mode Step-up DC/DC Controller 16L VQFN

Microchip HV9150K6-G 1

U102 HV513Low Voltage Serial to High Voltage Parallel Converter 32L WQFN

Microchip HV513K7-G 1

2016 Microchip Technology Inc. DS00002104A-page 19

Page 20: Piezo Micropump Driver Reference Design Application …ww1.microchip.com/downloads/en/AppNotes/00002104A.pdf · PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN DS00002104A-page 2

PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN

APPENDIX F: WARNINGS, RESTRICTIONS AND DISCLAIMER

This demo is intended solely for evaluation anddevelopment purposes. It is NOT intended for medical,diagnostic, or treatment use. Use of Microchip devicesin life support and/or safety applications is entirely atthe buyer's risk, and the buyer agrees to defend,indemnify and hold harmless Microchip from any andall damages, claims, suits, or expenses resulting fromsuch use.

APPENDIX G: REFERENCES

Microchip, PIC16(L)F1717/8/9 Cost Effective 8-Bit Intelligent Analog Flash Microcontrollers data sheet (DS40001740)

Microchip, HV9150 HV Output Hysteretic Mode Step-Up DC/DC Controller data sheet

Microchip, HV513 Low Voltage Serial to High Voltage Parallel Converter with 8 High Voltage Push-pull Outputs data sheet

Servoflo, mp6 Micropump Datasheet

Sensirion, SLS-1500 Liquid Flow Meter Datasheet

DS00002104A-page 20 2016 Microchip Technology Inc.

Page 21: Piezo Micropump Driver Reference Design Application …ww1.microchip.com/downloads/en/AppNotes/00002104A.pdf · PIEZOELECTRIC MICROPUMP DRIVER REFERENCE DESIGN DS00002104A-page 2

Note the following details of the code protection feature on Microchip devices:

• Microchip products meet the specification contained in their particular Microchip Data Sheet.

• Microchip believes that its family of products is one of the most secure families of its kind on the market today, when used in the intended manner and under normal conditions.

• There are dishonest and possibly illegal methods used to breach the code protection feature. All of these methods, to our knowledge, require using the Microchip products in a manner outside the operating specifications contained in Microchip’s Data Sheets. Most likely, the person doing so is engaged in theft of intellectual property.

• Microchip is willing to work with the customer who is concerned about the integrity of their code.

• Neither Microchip nor any other semiconductor manufacturer can guarantee the security of their code. Code protection does not mean that we are guaranteeing the product as “unbreakable.”

Code protection is constantly evolving. We at Microchip are committed to continuously improving the code protection features of ourproducts. Attempts to break Microchip’s code protection feature may be a violation of the Digital Millennium Copyright Act. If such actsallow unauthorized access to your software or other copyrighted work, you may have a right to sue for relief under that Act.

Information contained in this publication regarding deviceapplications and the like is provided only for your convenienceand may be superseded by updates. It is your responsibility toensure that your application meets with your specifications.MICROCHIP MAKES NO REPRESENTATIONS ORWARRANTIES OF ANY KIND WHETHER EXPRESS ORIMPLIED, WRITTEN OR ORAL, STATUTORY OROTHERWISE, RELATED TO THE INFORMATION,INCLUDING BUT NOT LIMITED TO ITS CONDITION,QUALITY, PERFORMANCE, MERCHANTABILITY ORFITNESS FOR PURPOSE. Microchip disclaims all liabilityarising from this information and its use. Use of Microchipdevices in life support and/or safety applications is entirely atthe buyer’s risk, and the buyer agrees to defend, indemnify andhold harmless Microchip from any and all damages, claims,suits, or expenses resulting from such use. No licenses areconveyed, implicitly or otherwise, under any Microchipintellectual property rights unless otherwise stated.

2016 Microchip Technology Inc.

Microchip received ISO/TS-16949:2009 certification for its worldwide headquarters, design and wafer fabrication facilities in Chandler and Tempe, Arizona; Gresham, Oregon and design centers in California and India. The Company’s quality system processes and procedures are for its PIC® MCUs and dsPIC® DSCs, KEELOQ® code hopping devices, Serial EEPROMs, microperipherals, nonvolatile memory and analog products. In addition, Microchip’s quality system for the design and manufacture of development systems is ISO 9001:2000 certified.

QUALITYMANAGEMENTSYSTEMCERTIFIEDBYDNV

== ISO/TS16949==

Trademarks

The Microchip name and logo, the Microchip logo, AnyRate, dsPIC, FlashFlex, flexPWR, Heldo, JukeBlox, KEELOQ, KEELOQ logo, Kleer, LANCheck, LINK MD, MediaLB, MOST, MOST logo, MPLAB, OptoLyzer, PIC, PICSTART, PIC32 logo, RightTouch, SpyNIC, SST, SST Logo, SuperFlash and UNI/O are registered trademarks of Microchip Technology Incorporated in the U.S.A. and other countries.

ClockWorks, The Embedded Control Solutions Company, ETHERSYNCH, Hyper Speed Control, HyperLight Load, IntelliMOS, mTouch, Precision Edge, and QUIET-WIRE are registered trademarks of Microchip Technology Incorporated in the U.S.A.

Analog-for-the-Digital Age, Any Capacitor, AnyIn, AnyOut, BodyCom, chipKIT, chipKIT logo, CodeGuard, dsPICDEM, dsPICDEM.net, Dynamic Average Matching, DAM, ECAN, EtherGREEN, In-Circuit Serial Programming, ICSP, Inter-Chip Connectivity, JitterBlocker, KleerNet, KleerNet logo, MiWi, motorBench, MPASM, MPF, MPLAB Certified logo, MPLIB, MPLINK, MultiTRAK, NetDetach, Omniscient Code Generation, PICDEM, PICDEM.net, PICkit, PICtail, PureSilicon, RightTouch logo, REAL ICE, Ripple Blocker, Serial Quad I/O, SQI, SuperSwitcher, SuperSwitcher II, Total Endurance, TSHARC, USBCheck, VariSense, ViewSpan, WiperLock, Wireless DNA, and ZENA are trademarks of Microchip Technology Incorporated in the U.S.A. and other countries.

SQTP is a service mark of Microchip Technology Incorporated in the U.S.A.

Silicon Storage Technology is a registered trademark of Microchip Technology Inc. in other countries.

GestIC is a registered trademarks of Microchip Technology Germany II GmbH & Co. KG, a subsidiary of Microchip Technology Inc., in other countries.

All other trademarks mentioned herein are property of their respective companies.

© 2016, Microchip Technology Incorporated, Printed in the U.S.A., All Rights Reserved.

ISBN: 978-1-5224-0308-1

DS00002104A-page 21

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DS00002104A-page 22 2016 Microchip Technology Inc.

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