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Synthesis and Light Absorption in Si or Ge Nanoclusters for Photovoltaics Applications
Salvo Mirabella
CNR-IMM Catania, ITALY
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
The Energy Problem
Average energy consumption increases with the standard of living [Source: A. Gasparella, Univ. Padova]
Average daily energy consumption [loe]
Energy for food Energy for house En. for agr.&ind. Energy for transp.
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Terawatt Dilemma
TERAWATT DILEMMA Source: L. Kazmerski, NREL
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Renewable sources
Sun is … enough Sun is … green Sun is … sustainable!
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
PV Module: Learning Curve
Every doubling of installed capacity a ~ 20% reduction in PV module price … A new Moore’s law-like lighthouse ?
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Photovoltaic conversion
Single material solar cell
[F. Dimroth and S. Kurtz MRS Bull. 2007]
[Shockley-Queisser JAP 1961]
Lucky case: Sun spectrum & Abundant Si!!!
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Multijunction solar cell
[F. Dimroth and S. Kurtz MRS Bull. 2007]
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Best efficiencies
http://www.nrel.gov/ncpv/images/efficiency_chart.jpg
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
The quantum chance
All Si tandem solar cell UNSW group Green et al., 2005
Optical bandgap tunable in QD filling all the solar spectrum!
Light absorption in QDs ?
Si QDs
Ge QDs
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
OUTLINE
Light absorption and quantum effects:
• Ge nanostructures •Quantum wells •Quantum dots (size, matrix, proximity)
• Si nanostructures •Quantum dots (synthesis and phase effects) •Si:O alloy (material and preliminary device)
• Conclusions
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
OUTLINE
Light absorption and quantum effects:
• Ge nanostructures •Quantum wells •Quantum dots (size, matrix, proximity)
• Si nanostructures •Quantum dots (synthesis and phase effects) •Si:O alloy (material and preliminary device)
• Conclusions
Ideal study case Exciton Bohr radius Lower bandgap
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Ge quantum well
Ar+
Magnetron Sputtering
deposition (@ RT)
2 ÷ 30 nm
TEM and RBS cross check: - Stoichiometric SiO2
- Ge density ̴̴ 4.3×1022 at/cm3
- QW free from holes ( 1D confinement!)
[S. Cosentino et al. NRL 8, 128 (2013)]
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Ge quantum well
• Parabolic v.b. and c.b. approximation • Eg
opt energy difference (Ef-Ei) • BTauc ̴ absorption efficiency J.Tauc, Amorphous and Liquid Semiconductors, Plenum Press, London and New York
2opt
gTauc E
B
Tauc approach to derive: - optical bandgap (Eg) - absorption efficiency (BTauc)
Light absorption from single Ge QW
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
0.8
1.0
1.2
1.4
1.6
1.8
2.0
0 5 10 15 20 25 30 1254
8
12
16
20
B [×
10
-1 (
eV
×n
m)-1
]
(b)
(a)
En
erg
y g
ap
[e
V]
EG
Fit, Eg=E
g-Bulk+A/L
2
A = 4.35 [eV×nm2]
OS [×
10
-4 nm
-2]
Quantum well thickness [nm]
OS in Ge QW (theory, Kuo PRB2009)
0.3
0.6
0.9
1.2
1.5
B (measured)
Ge quantum well
hemA
2
22
strengthzii
Tauc Oee
mB 2
02||||
2~
Ideal case: - Eg follows QC rule - BTauc trend agrees with OStrenght trend for c-Ge QW
[S. Cosentino et al. NRL 8, 128 (2013)]
herr herr herr Close to the value of Barbagiovanni et al. JAP2012
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
OUTLINE
Light absorption and quantum effects:
• Ge nanostructures •Quantum wells •Quantum dots (matrix, size, proximity)
• Si nanostructures •Quantum dots (synthesis and phase effects) •Si:O alloy (material and preliminary device)
• Conclusions
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Ge quantum dots: matrix
Comparison between Si3N4 or SiO2 matrices
- Ge QDs size: <2 nm - Amorphous phase Si
3N
4
SiO
2 - Ge QDs size: 2-20 nm
- Crystalline phase
100 keV Ge (1-7x1016 cm-2 )
STEM HAADF (Z-contrast between Ge and Si3N4) cross section of Ge implanted matrices after annealing 850°C, 1h
Si3N4
SiO2
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
480 500 520 540 5600
500
1000
1500
2000
Si3N
4 matrix:
Ge as implanted
850 °C, 1h
RB
S Y
ield
channel
80 60 40 20
0.0
0.5
1.0
1.5
2.0
2.5(c)
Depth [nm]
Ge
co
nce
ntr
atio
n [×
10
22 /cm
3]
Ge quantum dots: matrix
Ge diffusivity (850°C) in Si3N4 lower than : 7x10-17 cm2/s Yuan PRL209: in SiO2 D(Ge)=6.5x10-10 cm2/s
2.0 MeV He+
84°
Si3 N4
Ge diffusion in Si3N4 by RBS
[S. Mirabella et al. APL 101, 011911 (2012)] In Si3N4 Ge QD ripening limited by diffusivity
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Ge quantum dots: matrix
• larger for Ge QD in Si3N4 • Eg smaller in Si3N4, because of lower potential barrier
@700°C QD size 2-3 nm for both matrices
1 2 3 4 5 6 7 8 9 10
1
2
3
4
5
6
7
8
Energ
y g
ap [eV
]
Size [nm]
Si3N
4
SiO2
[S. Mirabella et al. APL 101, 011911 (2012)]
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Ge quantum dots: size
Quartz/Si
Ar+
250 nm
UHV-Magnetron Sputtering Deposition
post thermal annealing at 600°C
SiGeO film SiO2 + Ge QDs
8 10 12 14 16 18 201
2
3
4
5
Mean Q
D s
ize [nm
]
Ge Concentration [%]
• Ge QD size variable with Ge at.%
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Ge quantum dots: size
2.0 2.5 3.0 3.5 4.0
1.4
1.6
1.8
2.0
Ge QDs in SiO2
Energy gap
Energ
y g
ap [eV
]Mean Diameter [nm]
• Large size-dependent shift of Eg
• Eg tunable in the 1.4 – 2.1 eV range • Eg in 2 nm QD larger than in 2 nm QW (1.8 eV)
Light absorption in Ge QD: size effect
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Ge quantum dots: size
2.0 2.5 3.0 3.5 4.0
3
6
9
12
BT
auc [
×1
01
8 e
V-1×
cm2]
Mean Diameter [nm]
Absorption Efficiency,
QD-QD distance <a>~2 nm
d d <a>
Absorption efficiency independent of the size: any role of QD-QD distance?
Absorption efficiency in Ge QD: size effect
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Ge quantum dots: proximity
UHV-Magnetron Sputtering Deposition:
multilayer approach (SiGeO/SiO2)
d|| in-plane distance = 1 nm
d out-of-plane distance = 3 - 20 nm
Ge QD size 2-3 nm
[S. Mirabella et al. APL 102, 193105 (2013)]
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Ge quantum dots: proximity
• Eg not affected by QD-QD distance • Absorption efficiency dependent on QD-QD distance • Long range QD-QD interaction (or between QD films)
Single layer d|| = d = 3 nm
[S. Mirabella et al. APL 102, 193105 (2013)]
d|| in-plane distance = 1 nm
d out-of-plane distance = 3 - 20 nm
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Ge nanostructures
Preliminary application in light harvesting talk on Thursday 26th at 11:40
“High-efficiency photodetectors based on Ge quantum dots”
Optical bandgap can be tuned: • Eg increases with reducing the size • Eg increases in high potential matrix • Eg increases in 3D confined systems
Absorption efficiency can be tuned: • B increases by reducing thickness of the well • B increases in closer packaging of dots
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
OUTLINE
Light absorption and quantum effects:
• Ge nanostructures •Quantum wells •Quantum dots (size, matrix, proximity)
• Si nanostructures •Quantum dots (synthesis and phase effects) •Si:O alloy (material and preliminary device)
• Conclusions
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Si quantum dots: synthesis
Quartz
SixO1-x
Deposition techniques: MS or PECVD 0.43<x<0.53 Post annealing (450-1250°C)
QD size ~ 4 nm Light emission ~ 1.3-1.5 eV Eg ~ 2.5 eV (Stokes shift) 600 700 800 900 1000 1100 1200
0.0
0.1
0.2
0.3
exc
= 488 nm
power = 10 mW
RT detection
after annealing 1100°C, 1h:
46-SL
43-S
46-C
PL
in
ten
sity
[a.
u.]
Wavelength [nm]
[S. Mirabella et al. JAP 106, 103505 (2009)]
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
0 200 400 600 800 1000 1200
2,1
2,4
2,7
3,0
MS samples: 43-S 46-S
PECVD samples: 43-C 46-C 46-SL
EO
PT
g [e
V]
Temperature [°C]
Si QDs Eg: synthesis technique
Si-N, Si-H bonding (PECVD) Full Si-SiO2 separation (MS)
Increases with T (growing QD size!!!)
• Eg affected by deposition technique up to 900°C • unexpected Eg increase for T > 900°C
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
• Eg affected by synthesis (phase separation kinetics) • Eg affected by phase more than by size
[S. Mirabella et al. JAP 106, 103505 (2009)]
[R. Guerra et al. PRB 79, 155320 (2009)]
Si QDs Eg: phase effect
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
OUTLINE
Light absorption and quantum effects:
• Ge nanostructures •Quantum wells •Quantum dots (size, matrix,proximity)
• Si nanostructures •Quantum dots (synthesis and phase effects) •Si:O alloy (material and preliminary device)
• Conclusions
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Si:O alloys: synopsys
1.8
2.1
2.4
2.7
3.0
40 50 60 70 80 90 100
EO
PT
G
[eV
]
MS grown
PECVD grown
40 50 60 70 80 90 10010
-1
100
101
102
103
104
(b)
(a)
[
×
cm
]
Si concentration [%]
Optical Absorption
600°C annealing
Electrical transport
900°C annealing
[B]peak
= 3×1020
B/cm3
MS grown
CVD grown
+ Forming gas
[S. Mirabella et al. JAP 108, 093507 (2010)]
•EG of Si:O alloys matches the solar rainbow
•Charge transport affected by doping, Si content, defect saturation (forming gas)
First application in PV: preliminary solar cell
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Si:O alloys: device
Device structure: Top TCO dep by sputter
p-i-n (20-200-20 nm) SiO alloy (70 Si at.%) by PECVD
Bottom TCO by sputter
PV effect measured (¼ sun illumination) -Good VOC
-Poor JSC (due to lower and carrier traps)
[G. Scapellato et al. JAP 114, 053507 (2013)]
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
Si:O alloys: spectral efficiency
I
L
P
I
e
hcQE
1
EG ≈ 2.2 eV EG ≈ 1.7 eV
Possible use in tandem cell
-Si Lower QE in Si:O (reduced ISC) QE peak shifted at higher photon energy (larger gap)
[G. Scapellato et al. JAP 114, 053507 (2013)]
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
CONCLUSIONS
Ge QDs
Ge QWs
Based on: -S. Cosentino et al. NRL 8, 128 (2013) -S. Mirabella et al. APL 101, 011911 (2012) -S. Mirabella et al. APL 102, 193105 (2013) -S. Mirabella et al. JAP 106, 103505 (2009) -S. Mirabella et al. JAP 108, 093507 (2010) -G. Scapellato et al. JAP 114, 053507 (2013)
Si QDs Si:O
Light absorption affected by: • Synthesis technique • Embedding matrix • 1D or 3D Confinement • NS density • Ns size
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
CONTRIBUTORS
S. Cosentino Ge NS
G. G. Scapellato Si:O PV cell
M. Miritello Sputter
I. Crupi Electr. meas.
A. Terrasi Si & Ge NS
F. Priolo Si QDs
F. Simone Opt. Meas.
G. Nicotra TEM Ge NS.
THANKS FOR YOUR ATTENTION!
www.matis.imm.cnr.it Salvo Mirabella - [email protected] GADEST 2013, 23/09/2013
chaired by H. Richter and W. Tumas
Organizers:
S. Mirabella (CNR, Catania) I. Gordon (IMEC, Leuven) J. Valenta (Ch. Univ., Prague) R. Turan (METU, Ankara)
E-MRS 2014 SPRING MEETING Technical sessions: May 26-30 Congress Center - Lille, France