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MEMS LaboratoryDepartment of Mechanical Engineering
ISPMM’2008, Aug. 25~29, 2008, Anhui, China National Taiwan University
A Wireless Flexible Temperature and Tactile Sensing Array for Robot Applications
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
Presenter: Dr. Yao-Joe Yang
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
The schematic of the proposed artificial skin
Temperature sensor
Pressuresensor
Flexible substrateSkin receptors
Inner Side of the skin
Outer Side of the skin
• Flexible substrate• Copper-PI (polyimide) film
skin receptor• The outer side of the skin
• Tactile sensor array• The inner side of the skin
• Temperature sensor array• The sensing elements
• Conductive polymer for tactile sensing
• Discrete sensor chips for temperature sensing.
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
PI-film
-20~80°C
50~500g
Specifications of the proposed artificial skin
Artificial Skin
Force range
> 4/cm2
< 3 mm Thickness
Sensor density
Temperature range
Flexible substrate
Specifications
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
The fabricated artificial skin
• In (a), the outer side of the artificial skin• Tactile sensor array
• In (b), the inner side of the artificial skin• Temperature sensor array
(a) The outer side of the skin8x8 tactile sensing array
(c) The flexibility of the artificial skin
Tactile sensor
Temperature sensor
Tactile sensor
Temperature sensor
Tactile s ens ing E lem ent
10m m
Tem peratu re sensing pad
Te m p er atu re s e ns o r 1 0 m m
(b) The inner side of the skin8x8 temperature sensing array
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
Tactilesensing
40mm
Temperature sensing pad
40mm
Temperaturesensor
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
Temperature sensor
Tactile sensor
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
The heaters of different shapes
(a)
(c) (d)
(b)
• The different shapes of heaters• (a) Bar shape• (b) Circular shape• (c) Triangular shape• (d) Square shape
• The heaters • shaped using 1mm metal
wire
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
Measured Temperature Patterns Induced by the Heaters of Different Shapes
80℃
11℃
Temperature Colorbar
Heat source
(a)
80℃
11℃
Temperature Colorbar
Heat source
(b)
80℃
11℃
Temperature Colorbar
Heat source
80℃
11℃
Temperature Colorbar
Heat source
(d)
(c)
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
The Stamps of Different Shapes
4mm 4m
m(a)
(c) (d)
(b)
• The different shapes of acrylic stamps
• (a) T shape• (b) Circular shape• (c) Bar shape• (d) Triangular shape
• The applied pressure • T-shape
1kg weight• The other shapes
500g weight
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
Pressure distributions of different solid stamps
(c)
300 kPa
(d)
300 kPa
300 kPa
(a) (b) 300 kPa
0 kPa0 kPa
0 kPa 0 kPa
Applied pressure
Applied pressure
Applied pressure
Applied pressure
3 cm
3 cm 2 cm
3 cm
3 cm
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
The interdigital electrode pairs and tactile sensing element
• Two different types of interdigital electrodes for the tactile sensing elements are fabricated.
• In (a), two different pre-defined inter-digital copper electrodes
• In (b), the sensing elements with dispensed conductive polymer
(a)
(b)
Conductive polymer
Conductive polymer
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
Analog Temperature Sensor
Analog Temperature SensorMaxim (www.maxim-ic.com)
MAX6607
Sensitivity
Transfer fnc.
Supply voltage 1.8V~3.6V
Temp. range -20~80℃
Package SC70
Size 2.4 x 2.0 x 1.0 (mm)
( ) ( )( )CmV
mVVCT OUT
°−
=°/10
500
Cmv °/10
MEMS LaboratoryDepartment of Mechanical Engineering
National Taiwan UniversityISPMM’2008, Aug. 25~29, 2008, Anhui, China
Temperature Scanning Circuit
Tactile Scanning Circuit RS-232 Switch Circuit